KR102571644B1 - Apparatus for manufacturing diplay device - Google Patents

Abstract

A display manufacturing apparatus is provided. A display manufacturing apparatus according to an embodiment of the present invention includes a stage separated along a separation line to form a separation space, a head unit disposed on the stage, and a maintenance unit disposed below the separation space or stage and facing the head unit. do.

Description

Display manufacturing device {APPARATUS FOR MANUFACTURING DIPLAY DEVICE}

The present invention relates to a display manufacturing apparatus.

The importance of display devices is increasing along with the development of multimedia. In response to this, various types of display devices such as a liquid crystal display (LCD) and an organic light emitting display (OLED) are being used.

As one of the methods for manufacturing such display devices, a method of displaying an image by laminating a plurality of thin films having specific functions on a substrate is widely used.

Methods for forming such a specific thin film include deposition processes, sputtering, and inkjet printing methods.

Each method has advantages and disadvantages, but recently, a manufacturing apparatus using an inkjet printing method has been in the limelight in various aspects. However, in the case of the inkjet printing method, disadvantages are revealed in terms of the physical characteristics of the ink, the influence of the surrounding atmosphere, or the efficiency of the facility, and various technical attempts are being made to solve these problems.

Publication No. 10-2010-0115708 (2010.10.28.)

The problem to be solved by the present invention is to provide a display manufacturing apparatus that improves space utilization efficiency of equipment.

Another problem to be solved by the present invention is to provide a display manufacturing apparatus that shortens the process time.

The tasks of the present invention are not limited to the technical tasks mentioned above, and other technical tasks not mentioned will be clearly understood by those skilled in the art from the following description.

A display manufacturing apparatus according to an embodiment of the present invention includes a stage separated along a separation line to form a separation space, a head portion disposed on the stage, and a stage disposed below the separation space or the stage and facing the head portion. Includes a maintenance unit.

Also, the stage may move along the x-axis, and the head part may move along the y-axis.

In addition, a substrate disposed on the stage may be further included.

In addition, a linear guide disposed on one side of the stage to guide the movement of the substrate may be further included.

In addition, a substrate holder having one side connected to the linear guide and the other side fastened to the substrate may be further included.

In addition, the stage may further include an air hole through which air is sprayed toward the substrate.

In addition, the head part may include at least one nozzle.

In addition, a chamber accommodating the stage, the head unit, and the maintenance unit may be further included.

In addition, a support for separating the lower surface of the chamber and the stage may be further included.

In addition, the stage includes a normal mode and a separation mode that is separated along the separation line to form a separation space. In the normal mode, the maintenance unit is disposed below the stage, and in the separation mode, the maintenance unit It can be placed in an isolated space.

Also, a width of the separation space may be greater than or equal to a width of the maintenance unit.

Also, the maintenance unit may include a purge part and a suction part.

Also, the separation line may extend in an oblique direction.

Other embodiment specifics are included in the detailed description and drawings.

According to embodiments of the present invention, at least the following effects are provided.

That is, space utilization efficiency of the display manufacturing apparatus may be improved by optimizing the space occupied by the display manufacturing apparatus.

In addition, the overall process time can be shortened.

Effects according to the embodiments of the present invention are not limited by the contents exemplified above, and more diverse effects are included in the present specification.

1 is a block diagram of a display manufacturing apparatus according to an embodiment of the present invention.
2 is a partial perspective view of a display manufacturing apparatus according to an embodiment of the present invention.
3 is a partial perspective view of a display manufacturing apparatus according to an embodiment of the present invention.
4 is a partial cross-sectional view of a display manufacturing apparatus according to an embodiment of the present invention.
5 is a partial cross-sectional view for explaining the operation of the display manufacturing apparatus according to an embodiment of the present invention.
6 is a partial cross-sectional view for explaining the operation of the display manufacturing apparatus according to an embodiment of the present invention.
7 is a plan view of a display manufacturing apparatus according to another embodiment of the present invention.
8 is a plan view of a display manufacturing apparatus according to another embodiment of the present invention.

Advantages and features of the present invention, and methods of achieving them, will become clear with reference to the detailed description of the following embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and can be implemented in various different forms, only the present embodiments make the disclosure of the present invention complete, and common knowledge in the art to which the present invention belongs. It is provided to completely inform the person who has the scope of the invention, and the present invention is only defined by the scope of the claims.

Although first, second, etc. are used to describe various components, these components are not limited by these terms, and are used only to distinguish one component from other components. Accordingly, it goes without saying that the first component mentioned below may be the second component within the technical spirit of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

1 is a block diagram of a display manufacturing apparatus according to an embodiment of the present invention. 2 is a partial perspective view of a display manufacturing apparatus according to an embodiment of the present invention. 3 is a partial perspective view of a display manufacturing apparatus according to an embodiment of the present invention. 4 is a partial cross-sectional view of a display manufacturing apparatus according to an embodiment of the present invention.

1 to 4, a display manufacturing apparatus according to an embodiment of the present invention is disposed on a stage ST and a stage ST that are separated along a separation line SL to form a separation space SS. It includes a head part H and a maintenance unit M disposed in the separation space SS and facing the head part H.

A display manufacturing apparatus according to an embodiment of the present invention may further include a chamber CH. The chamber CH may provide a space in which various components described below are disposed. In one embodiment, the chamber CH has a rectangular parallelepiped shape, but the shape of the chamber CH is not limited thereto. That is, a configuration capable of providing a constant internal space may be used as the chamber CH in one embodiment.

In one embodiment, the space inside the chamber CH may be blocked from outside air. In other words, the space inside the chamber CH may be an enclosed space.

In another embodiment, the space inside the chamber CH may be in a vacuum state. In this case, the display manufacturing apparatus may further include a vacuum pump (not shown) to vacuum the space disposed inside the chamber CH.

A stage ST may be disposed in the chamber CH. The stage ST may support a substrate S to be described later. The stage ST may have a flat plate shape. That is, the top surface of the stage ST may be a polygon or a flat surface at least partially curved.

In one embodiment, the stage ST may move in a horizontal direction or a vertical direction.

The stage ST may include a separation line SL. The separation line SL may extend in one direction across the stage ST. The stages ST may be separated based on the separation line SL. In one embodiment, the stage ST may be bisected along the separation line SL. When the stage ST is separated along the separation line SL, a separation space SS may be disposed between the separated part and the other part. A detailed description of the separation space SS formed in the stage ST will be described in detail later.

A substrate S may be disposed on the stage ST. The substrate S may be a substrate used in a display device. In other words, the substrate S may be a substrate used for a liquid crystal display or an organic light emitting display. However, this is illustrative, and the type of substrate S is not limited thereto, and any substrate used in a display device that is currently existing or newly emerging with the development of technology in the future is a manufacturing apparatus for a display device according to an embodiment of the present invention. can be used as a subject to be processed.

The substrate S may directly contact the stage ST or may be separated from the stage ST by a predetermined distance. As one of means for separating the substrate S from the stage ST, an air hole AH may be used. A detailed description of the air hole AH will be given later with reference to FIG. 2 .

The substrate S may move horizontally on the stage ST. As one of means for leveling the substrate S, a linear guide LG, which will be described later, or the like can be moved. A detailed description of this will be given later with reference to FIG. 2 .

A head part H may be disposed on the stage ST. The head portion H may be disposed on the substrate S to provide a material for forming a specific layer on the substrate S to the substrate S. In one embodiment, the head part H may be a head part H used in an inkjet printing device for forming a specific thin film. The head part H may be connected to a storage part (not shown) for storing a material for forming a thin film, for example, ink. In one embodiment, the storage unit may be disposed inside the head unit (H). However, it is not limited thereto, and in another embodiment, the storage unit may be disposed outside the head unit H and connected to the head unit H.

The head part H may include at least one nozzle NO to discharge ink for thin film formation. That is, ink or the like stored in the storage unit may be jetted or ejected through the nozzle NO.

In one embodiment, the head part H may move horizontally on the stage ST. That is, in order to form a specific thin film on the substrate S, it may move in the x-axis direction or the y-axis direction according to the needs of the process. In addition, the substrate (S) and the head portion (H) can move in conjunction with each other. For example, the substrate S may move in the y-axis direction and the head part H may move in the x-axis direction. Contrary to the above, in another embodiment, the substrate S may move in the x-axis direction and the head portion H may move in the y-axis direction.

In this way, a specific material layer may be formed over the entire area of the substrate (S) by moving in conjunction with each other or independently of each other.

A maintenance unit M may be disposed in the chamber CH. The maintenance unit M may maintain and manage the head part H. Specifically, foreign substances such as residual ink from the previous process may remain in the nozzle NO of the head part H, and the existence of such foreign substances causes defects in subsequent processes. The maintenance unit M serves to remove the foreign substances disposed in the nozzle NO, thereby preventing defects caused by the foreign substances in a subsequent process.

In addition, when the maintenance unit (M) is disposed in the same chamber (CH) as the head part (H) in this way, there is no need to secure a separate space for the maintenance of the head part (H), so the space arrangement efficiency of the facility It is advantageous in terms of improvement, and the time used for maintenance of the head part H can be saved by performing the maintenance work directly within the same chamber CH.

Subsequently, referring to FIG. 2 , the stage ST having a flat plate shape may be supported by a support stand SP. In one embodiment, the support (SP) has a column shape and may separate the lower surface of the chamber (CH) and the stage (ST) by a predetermined interval. 2 illustrates a case in which the supporters SP supports the four corners of the stage ST, this is exemplary, and the number of supports SPs is not limited thereto.

A linear guide LG, a linear motor LM, and a substrate holder SH may be disposed on one side of the stage ST.

The linear guide LG may be spaced apart from one side of the stage ST by a predetermined interval. The linear guide LG may extend parallel to one side of the stage ST. That is, one side of the linear guide LG and the stage ST may extend parallel to each other. The linear guide LG may guide the horizontal movement of the substrate S. That is, the linear guide LG may guide the movement of the substrate S in the y-axis direction. Figure 2 illustrates a case where the linear guide (LG) extends in the y-axis direction, but is not limited thereto, and in another embodiment, the linear guide (LG) may extend in the x-axis direction. Also, in another embodiment, a linear guide in the x-axis direction and a linear guide in the y-axis direction may coexist.

A linear motor LM may be connected to the linear guide LG. The linear motor LM may move along the linear guide LG. Specifically, the linear motor LM may serve to provide a driving force for moving the substrate holder SH, which will be described later, in the y-axis direction.

The linear motor LM may be connected to the substrate holder SH. The substrate holder SH may support the substrate SH by contacting one side of the substrate SH. For example, the substrate holder SH may be shaped like a pair of tongs and fastened to one side of the substrate S. However, it is not limited thereto, and in another embodiment, the substrate holder SH may fix the substrate S using vacuum or static electricity.

The substrate S fastened to the substrate holder SH may move integrally with the substrate holder SH. That is, when the linear motor LM moves in the y-axis direction along the linear guide LG, the substrate S integrally formed therewith may move in the y-axis direction.

A plurality of air holes AH may be disposed in the stage ST. As described above, when the stage ST includes a plurality of air holes AH, the stage ST and the substrate S may be separated by a predetermined distance by air supplied from the air holes AH. there is. That is, the substrate S may be supported by air coming out of the air hole AH.

When the substrate (S) and the stage (ST) are in direct contact, there is a possibility of causing contamination or physical damage to the substrate (S). When floating on the ST, it is possible to prevent the substrate S from being damaged by the stage ST during the process.

In order for the air hole H to provide air, the air hole H may be connected to a compressor that supplies compressed air.

Referring to FIG. 3 , the separation line SL may extend in the x-axis direction. When the separation line SL extends in the x-axis direction, the stages SL may be separated based on the separation line SL. That is, the stage SL may be separated into two parts. Specifically, the stage ST may be divided by moving one part in a positive y-axis direction and the other part in a negative y-axis direction. When the stages ST are separated along the separation line SL, a separation space SS may be formed in the stages ST.

Referring to FIG. 4 , a maintenance unit M may be disposed below the stage ST.

The maintenance unit M may serve to maintain and/or repair the head part H. As an example, the maintenance unit M may include a purge part P and a suction part V to clean the nozzle NO of the head part H.

The purge part (P) may inject air toward the head part (H). That is, foreign substances disposed in the nozzle NO may be removed by spraying high-pressure air.

To this end, the purge unit P may be connected to an air providing means for providing high pressure air. For example, the air providing means may include a compressor or the like.

The suction unit V may create a vacuum state to suck in and remove foreign substances disposed in the nozzle NO. To this end, the inlet (V) may be attached to be sealed with the nozzle (NO). That is, the suction part V is sealed with the nozzle NO to remove foreign substances disposed in the nozzle NO. To this end, the inlet (V) may further include a sealing auxiliary means (not shown).

Hereinafter, the operation of the display manufacturing apparatus according to an embodiment of the present invention will be described with reference to FIGS. 4 to 6 . 4 is a partial cross-sectional view of the display manufacturing apparatus according to an embodiment of the present invention as described above, and FIGS. 5 and 6 are partial cross-sectional views for explaining the operation of the display manufacturing apparatus according to an embodiment of the present invention.

4 to 6 , the display manufacturing apparatus according to an embodiment of the present invention may have a separate mode and a normal mode.

The normal mode may mean a state before the stage ST is separated, that is, integrally formed. A process of forming a thin film on the substrate S may proceed in a normal mode.

Subsequently, a rest period in which the operation of the head part H is stopped may proceed. In the rest period, the substrate S may be disposed on the rest of the transition area TA, that is, on the stage ST, so as not to overlap with the transition area TA.

Referring to FIG. 5 , a rest period in which the operation of the head part H is stopped may proceed. In the rest period, the stage ST may be bifurcated. That is, in some embodiments of the present invention, the separation mode means a state in which the stage ST is completely divided into two halves.

As described above, the separation space SS may be formed in the stage ST in the separation mode state. The width w1 of the separation space SS, that is, the distance between the parts of the separated stage ST may be greater than or equal to the width w2 of the maintenance unit M. When the width w1 of the separation space SS is greater than or equal to the width w2 of the maintenance unit M, the maintenance unit M may be accommodated in the separation space SS.

Subsequently, referring to FIG. 6 , the maintenance unit M may rise in the separation mode state. In one embodiment, the maintenance unit (M) may be disposed to face the head portion (H). When the maintenance unit M rises in the separation mode, the separation distance between the maintenance unit M and the head part H may decrease. In other words, as the maintenance unit M rises, the maintenance unit M may be disposed in the separation space SS.

In one embodiment, the maintenance unit (M) may be in contact with the head portion (H) or separated from the head portion (H) by a predetermined interval to perform maintenance of the head portion (H). Since the method of managing the head unit H by the maintenance unit MU is the same as described above, a detailed description thereof will be omitted.

As described above, the normal mode and the separation mode may be sequentially performed. Also, two or more normal modes and two or more separate modes may be repeated one or more times.

Next, a display manufacturing apparatus according to another embodiment of the present invention will be described.

7 is a plan view of a display manufacturing apparatus according to another embodiment of the present invention. 8 is a plan view of a display manufacturing apparatus according to another embodiment of the present invention.

Referring to FIGS. 7 and 8 , the display manufacturing apparatus according to another embodiment of the present invention is different from the embodiment of FIG. 3 in that the separation line SL1 of the stage ST1 extends in an oblique direction.

In another embodiment, the stage ST1 of the display manufacturing apparatus may include a separation line SL1 extending in an oblique direction.

Specifically, the first angle θ formed by the extension line of one side of the stage ST1 and the extension line of the separation line SL1 may be an acute angle. (See Fig. 7)

Referring to FIG. 8 , the stage ST1 may be divided along a separation line SL1 extending in an oblique direction. In this case, a cross section of the separation space SS formed on the stage ST may have a parallelogram shape.

When the cross section of the separation space SS has a parallelogram shape, the outer circumference of the maintenance unit M may also have a parallelogram shape to correspond thereto.

In this way, when the stage ST is separated in an oblique direction, it is possible to prevent the substrate S from falling or being damaged by impact by mitigating the degree of reduction of the air holes AH per unit area due to the separation. there is.

Although the embodiments of the present invention have been described with reference to the accompanying drawings, those skilled in the art to which the present invention pertains can be implemented in other specific forms without changing the technical spirit or essential features of the present invention. you will be able to understand Therefore, the embodiments described above should be understood as illustrative in all respects and not limiting.

CH: chamber
H: Head
S: substrate
ST: stage
M: maintenance unit
AH: air hole
LG: linear guide
LM: linear motor
SH: substrate holder
P: purge part
V: inlet
SP: support
SL: separation line

Claims (13)

a stage comprising a separation line;
a head part disposed on the stage; and
A maintenance unit facing the head unit;
the separation line extends in one direction across the stage;
In the normal mode, the maintenance unit is disposed below the stage,
In the separation mode, the stage is separated into two parts along the separation line to form a separation space;
In the separation mode, the maintenance unit is disposed in the separation space. delete According to claim 1,
Display manufacturing apparatus further comprising a substrate disposed on the stage. According to claim 3,
Display manufacturing apparatus further comprising a linear guide disposed on one side of the stage to guide the movement of the substrate. According to claim 4,
Display manufacturing apparatus further comprising a substrate holder having one side connected to the linear guide and the other side fastened to the substrate. According to claim 3,
The stage display manufacturing apparatus further comprises an air hole for injecting air toward the substrate. According to claim 1,
The head unit display manufacturing apparatus including at least one nozzle. According to claim 1,
The display manufacturing apparatus further comprising a chamber accommodating the stage, the head portion, and the maintenance unit. According to claim 8,
Display manufacturing apparatus further comprising a support spaced apart from the lower surface of the chamber and the stage. delete According to claim 1,
The width of the separation space is greater than or equal to the width of the maintenance unit. According to claim 1,
The maintenance unit is a display manufacturing apparatus including a purge part and a suction part. According to claim 1,
The separation line is a display manufacturing apparatus extending in an oblique direction.