CN107464770B - Mask plate storage device - Google Patents
Mask plate storage device Download PDFInfo
- Publication number
- CN107464770B CN107464770B CN201710752227.5A CN201710752227A CN107464770B CN 107464770 B CN107464770 B CN 107464770B CN 201710752227 A CN201710752227 A CN 201710752227A CN 107464770 B CN107464770 B CN 107464770B
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- storage
- storage device
- mask plate
- clip
- reticle
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
Abstract
The invention discloses a mask plate storage device, which comprises a clamp outer frame, a storage cavity and a mask plate storage device, wherein the clamp outer frame comprises a storage cavity which is provided with two vertically opposite and parallel cavity walls; the fixed groove groups are distributed in a layered manner from top to bottom, and two fixed grooves in the fixed groove groups are correspondingly arranged on two cavity walls; the storage card clamp comprises a card clamp frame; the clamping blocks are distributed on two sides of the clamping frame; the electrostatic film is arranged at the bottom layer of the clamping frame; the storage layer is arranged on the upper layer surface of the clamping frame; when the storage clamp is stored in the clamp outer frame, the clamping blocks are correspondingly clamped in the fixing grooves; and a mask plate and/or a substrate are/is placed on the storage layer.
Description
Technical Field
The invention relates to the field of manufacturing processes of light-emitting diode displays, in particular to a mask plate storage device.
Background
Compared with the conventional display technologies such as liquid crystal display and plasma display, the organic light-emitting diode (OLED) display has the outstanding advantages of self-luminescence, smaller visual character, flexibility and the like, so the OLED display is considered to be the new generation of the most market-worthy flat panel display technology. In the process of manufacturing an organic light emitting diode display, a hole injection layer, a hole transport layer, an electron blocking layer, a light emitting layer, an electron transport layer, an electron injection layer, and a semitransparent metal cathode layer are generally formed on a glass substrate by sequentially depositing a plurality of organic materials and metal materials on an anode of the substrate by vacuum evaporation. The light-emitting layer generally has three colors of red light, green light and blue light, and the three light-emitting layers are respectively evaporated in different areas. Therefore, according to the process, the mask plate defining the evaporation area of each layer is an important part in the evaporation process of the organic light emitting diode display.
Generally, after long-time evaporation, more evaporation materials are accumulated on the lower layer of the mask plate, especially materials which are easy to generate particles, such as magnesium-silver alloy and the like as a cathode, and when the mask plates are placed in the mask plate storage cavity, when the mask plates are taken by a manipulator, the materials are difficult to peel off from the mask plates. Generally, the clamp for placing the mask plate is designed to be hollow, and dropped materials can be stained on the surface of the mask plate below the clamp. These particles can be brought into the substrate during the evaporation process, which affects the yield of the product and also causes the deformation of the mask plate. In addition, when the thickness of a material newly added to the evaporation machine is corrected and the mask plate is aligned and debugged, a plurality of substrates are required to be frequently introduced into and discharged from the evaporation machine, and if the machine is not provided with a substrate storage cavity, the time for introducing and discharging the substrates is long. Therefore, in view of the above situation in the evaporation process, it is necessary to design a mask storage device for OLEDs that is convenient to assemble and prevents contamination.
Disclosure of Invention
The purpose of the invention is: a mask plate storage device is provided to solve one or more technical defects in the prior art.
The technical scheme for realizing the purpose is as follows: a mask plate storage device comprises a clamp outer frame, a storage cavity and a mask plate storage device, wherein the clamp outer frame comprises the storage cavity which is provided with two vertically opposite and parallel cavity walls; the fixed groove groups are distributed in a layered manner from top to bottom, and two fixed grooves in the fixed groove groups are correspondingly arranged on two cavity walls; the storage card clamp comprises a card clamp frame; the clamping blocks are distributed on two sides of the clamping frame; the electrostatic film is arranged at the bottom layer of the clamping frame; the storage layer is arranged on the upper layer surface of the clamping frame; when the storage clamp is stored in the clamp outer frame, the clamping blocks are correspondingly clamped in the fixing grooves; and a mask plate and/or a substrate are/is placed on the storage layer.
In a preferred embodiment of the present invention, a protruding positioning block is disposed on a bottom surface of each of the fixing grooves, a positioning groove matched with the positioning block is disposed on a lower bottom surface of the engaging block, and when the storage clip is stored in the clip outer frame, the positioning block is located in the positioning groove.
In a preferred embodiment of the present invention, the number of the positioning blocks in each of the fixing grooves is 2 to 4.
In a preferred embodiment of the present invention, a sum of heights of the positioning block and the positioning groove is equal to or less than a height of the fixing groove.
In a preferred embodiment of the present invention, the positioning block is shaped like a truncated cone.
In a preferred embodiment of the present invention, the fixed slot groups are arranged equidistantly from top to bottom.
In a preferred embodiment of the present invention, the distance between two adjacent fixing groove sets is identical to the height of the storage clip.
In a preferred embodiment of the invention, the fixed slot groups are provided with 8-10 groups.
In a preferred embodiment of the present invention, the storage layer includes a pair of wedge structures disposed opposite to each other, and the mask plate or the substrate is stored in the wedge structures.
In a preferred embodiment of the present invention, a placing plane formed by the wedge-shaped structure is a substrate placing plane or a mask placing plane, and a size of the substrate placing plane is smaller than a size of the mask placing plane.
The invention has the advantages that: the mask plate storage device effectively prevents a plurality of mask plates from being placed in the storage cavity, and mask plates from being cross-polluted due to the fact that evaporation material particles accumulated on the upper mask plate fall onto the lower mask plate, so that particles are brought into a substrate after the substrate is contacted with the mask plates in the evaporation process. The fixing groove with the falling material can be conveniently cleaned, and the cleanness of the storage cavity is kept. When the evaporation plating machine platform is carrying out special circumstances such as thick correction of membrane or counterpoint parameter debugging to the material, when needing many glass substrate of business turn over fast, can be timely provide one and wash the cavity of saving many glass substrate before removing from, can make up into the cavity of depositing of this glass substrate temporarily.
Drawings
The invention is further explained below with reference to the figures and examples.
FIG. 1 is a schematic view of a clip outer frame structure according to an embodiment of the present invention.
Fig. 2 is a schematic structural view of a mask plate storage clip according to embodiment 1 of the present invention.
Fig. 3 is a schematic structural view of a substrate storage clip according to embodiment 2 of the present invention.
Fig. 4 is a schematic structural diagram of a mask blank storage device according to embodiment 1 of the present invention.
Fig. 5 is a schematic structural diagram of a mask blank storage device in embodiment 2 of the present invention.
Wherein the content of the first and second substances,
1, clamping an outer frame; 11 a storage cavity;
12, fixing a groove; 13 positioning blocks;
21 clamping a clamping frame; 22 a clamping block;
23 an electrostatic film; 24 a storage layer;
25 a mask plate; 26 a substrate;
27 positioning grooves;
201 a mask plate storage clamp; 202 substrate storage clip.
Detailed Description
The following description of the embodiments refers to the accompanying drawings for illustrating the specific embodiments in which the invention may be practiced. The directional terms used in the present invention, such as "up", "down", "front", "back", "left", "right", "top", "bottom", etc., refer to the directions of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention.
Example 1
A mask plate storage device comprises a clamp outer frame 1 and a storage clamp. The storage clip is used for storing the mask plate 25.
In this embodiment, the clip outer frame 1 includes a storage cavity 2 and a set of fixing grooves. The clamp outer frame 1 is enclosed into a cuboid frame, and the middle of the frame is a cuboid storage cavity 2.
Wherein, two fixed slots 12 in the fixed slot group are correspondingly arranged on two vertically opposite and parallel cavity walls. The fixing grooves 12 are distributed along the width direction of the cavity wall, and the width of the fixing grooves 12 is matched with the width of the cavity wall.
Wherein, the fixed groove groups are distributed in an equidistant way in an upper layer and a lower layer. The distance between two adjacent fixing groove groups is matched with the height of the storage clip. I.e. the distance between two adjacent sets of fixing grooves is equal to or slightly greater than the height of the storage clip. The number of the fixing slot sets in the clip outer frame 1 depends on the number of the evaporation chambers and the requirement of the normal evaporation process, and is preferably 8-10.
A plurality of positioning blocks 13 are arranged on the bottom surface of each fixing groove 12, and the positioning blocks 13 are in a circular truncated cone shape. The positioning blocks 13 are distributed along the width direction of the fixing grooves 12, and in this embodiment, the number of the positioning blocks 13 in each fixing groove 12 is 2-4.
In this embodiment, the storage card holder includes a card holder frame 21, a card block 22, an electrostatic film 23, and a storage layer 24.
The clamping blocks 22 are distributed on two sides of the clamping frame; the lower bottom surface of the clamping block 22 is provided with a positioning groove 27 matched with the positioning block 13, and the size of the positioning groove 27 is matched with that of the positioning block 13.
The electrostatic film 23 is disposed on the bottom layer of the clamping frame 21. The electrostatic thin film 23 is used for adsorbing particles of the evaporation material falling from the mask plate 25, and the generation and release of static electricity are controlled by the electrostatic thin film through an external power supply (not shown in the figure).
Wherein, the storage layer 24 is arranged on the upper layer surface of the clamping frame 21; the storage layer 24 includes a pair of wedge structures arranged opposite to each other, and the mask plates 25 are stored in the wedge structures. The placing plane formed by the wedge-shaped structure is a mask plate 25 placing plane, and the size of the mask plate placing plane is matched with that of the mask plate 25.
When the storage clip is stored in the clip outer frame 1, the clamping blocks 22 are correspondingly clamped in the fixing grooves 12; the mask plate 25 is placed on the mask plate placement plane. All the storage clips of the mask plates are placed in the clip outer frame 1 to meet the requirement of the evaporator for completing normal evaporation process. In order to distinguish a storage clip for placing a substrate described later, the storage clip described in the present embodiment is referred to as a mask plate storage clip 201.
Example 2
The difference between this embodiment and embodiment 1 is that the size of the wedge-shaped structure in this embodiment is different from that of embodiment 1, and the placing plane formed by the wedge-shaped structure is the substrate placing plane, so the size requirement of the wedge-shaped structure needs to meet the substrate 26 storage requirement. Therefore, the storage clip is referred to as a substrate storage clip 202 in the present embodiment. Generally, the size of the substrate placement plane is smaller than the size of the mask placement plane.
When the storage clip is stored in the clip outer frame 1, the corresponding clamping blocks 22 are correspondingly clamped in the fixing grooves 12. Wherein, several layers of lower mask plate storage clips 201 and several layers of upper substrate storage clips 202 are arranged on the lower surface of the clip outer frame 1. The combined storage mode is used for dealing with the situation that when the evaporation machine processes newly added materials or adjusts alignment compensation, a cleaning process is needed to be omitted, and a plurality of substrates 26 are conveniently and quickly led into or out of the evaporation machine.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A mask plate storage device is characterized by comprising
A clip outer frame comprising
The storage cavity is provided with two vertically opposite and parallel cavity walls;
the fixed groove groups are distributed in a layered manner from top to bottom, and two fixed grooves in the fixed groove groups are correspondingly arranged on two cavity walls;
storage clip, comprising
A clamping frame;
the clamping blocks are distributed on two sides of the clamping frame;
the electrostatic film is arranged at the bottom layer of the clamping frame; the static thin layer controls the generation and the release of static electricity through an external power supply;
the storage layer is arranged on the upper layer surface of the clamping frame; the storage layer comprises a pair of wedge-shaped structures which are arranged oppositely, and the mask plate or the substrate is stored in the wedge-shaped structures;
when the storage clamp is stored in the clamp outer frame, the clamping blocks are correspondingly clamped in the fixing grooves; and a mask plate and/or a substrate are/is placed on the storage layer.
2. The mask blank storage device according to claim 1, wherein a protruding positioning block is provided on the bottom surface of each fixing groove, a positioning groove matching with the positioning block is provided on the bottom surface of the clip block, and when the storage clip is stored in the clip housing, the positioning block is located in the positioning groove.
3. The reticle storage device of claim 2, wherein the number of the positioning blocks of each fixing groove is 2-4.
4. The reticle storage device according to claim 2, wherein a sum of heights of the positioning block and the positioning groove is equal to or less than a height of the fixing groove.
5. The reticle storage device of claim 2, wherein the positioning block is shaped as a truncated cone.
6. The reticle storage device of claim 1, wherein the set of fixed slots are arranged equidistantly above and below.
7. The reticle storage device of claim 6 wherein the distance between adjacent sets of the retaining slots corresponds to the height of the storage clip.
8. A reticle storage device according to claim 1 or 6, wherein the set of fixed slots is provided in 8-10 sets.
9. The reticle storage device of claim 1, wherein the placement plane formed by the wedge structure is a substrate placement plane or a reticle placement plane, and the size of the substrate placement plane is smaller than that of the reticle placement plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710752227.5A CN107464770B (en) | 2017-08-28 | 2017-08-28 | Mask plate storage device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710752227.5A CN107464770B (en) | 2017-08-28 | 2017-08-28 | Mask plate storage device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107464770A CN107464770A (en) | 2017-12-12 |
| CN107464770B true CN107464770B (en) | 2020-10-13 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710752227.5A Active CN107464770B (en) | 2017-08-28 | 2017-08-28 | Mask plate storage device |
Country Status (1)
| Country | Link |
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| CN (1) | CN107464770B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107447192A (en) * | 2017-09-18 | 2017-12-08 | 京东方科技集团股份有限公司 | Mask plate clip and mask plate |
| CN108251793B (en) * | 2018-01-16 | 2020-04-21 | 京东方科技集团股份有限公司 | Mask plate bearing equipment, vacuumizing method and vacuumizing system |
| CN109031893B (en) * | 2018-07-24 | 2020-02-14 | 武汉华星光电技术有限公司 | Mask plate storage area positioning device |
| CN111349888A (en) * | 2020-04-28 | 2020-06-30 | 京东方科技集团股份有限公司 | Metal mask plate |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US5314068A (en) * | 1991-07-12 | 1994-05-24 | Canon Kabushiki Kaisha | Container for a plate-like article |
| US20070002516A1 (en) * | 2005-06-30 | 2007-01-04 | Canon Kabushiki Kaisha | Container and method of transporting substrate using the same |
| CN104438226A (en) * | 2014-12-02 | 2015-03-25 | 京东方科技集团股份有限公司 | Mask plate cleaning system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7236233B2 (en) * | 2003-10-27 | 2007-06-26 | Asml Netherlands B.V. | Assembly of a reticle holder and a reticle |
| CN201032516Y (en) * | 2007-02-13 | 2008-03-05 | 中芯国际集成电路制造(上海)有限公司 | Mask box |
| US8215510B2 (en) * | 2008-03-24 | 2012-07-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photomask storage apparatus |
| JP2010072624A (en) * | 2008-08-18 | 2010-04-02 | Nec Electronics Corp | Reticle storage device and reticle storage method |
| JP5790096B2 (en) * | 2011-04-04 | 2015-10-07 | 凸版印刷株式会社 | Reflective photomask dust adhesion prevention jig, mounting method thereof, mounting apparatus thereof, and reflective photomask storage apparatus |
| JP5684743B2 (en) * | 2012-01-16 | 2015-03-18 | 信越化学工業株式会社 | Pellicle storage container and pellicle storage method |
| US20150131071A1 (en) * | 2013-11-08 | 2015-05-14 | Samsung Electronics Co., Ltd. | Semiconductor device manufacturing apparatus |
| CN104007609B (en) * | 2014-05-15 | 2017-07-04 | 京东方科技集团股份有限公司 | A kind of mask plate box |
| CN103995434A (en) * | 2014-06-12 | 2014-08-20 | 上海华力微电子有限公司 | Mask dust collection device |
| JP6508653B2 (en) * | 2015-11-26 | 2019-05-08 | 信越ファインテック株式会社 | Package of pellicle frame storage container |
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2017
- 2017-08-28 CN CN201710752227.5A patent/CN107464770B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5314068A (en) * | 1991-07-12 | 1994-05-24 | Canon Kabushiki Kaisha | Container for a plate-like article |
| US20070002516A1 (en) * | 2005-06-30 | 2007-01-04 | Canon Kabushiki Kaisha | Container and method of transporting substrate using the same |
| CN104438226A (en) * | 2014-12-02 | 2015-03-25 | 京东方科技集团股份有限公司 | Mask plate cleaning system |
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| Publication number | Publication date |
|---|---|
| CN107464770A (en) | 2017-12-12 |
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