CN109031893B - Mask plate storage area positioning device - Google Patents
Mask plate storage area positioning device Download PDFInfo
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- CN109031893B CN109031893B CN201810819020.XA CN201810819020A CN109031893B CN 109031893 B CN109031893 B CN 109031893B CN 201810819020 A CN201810819020 A CN 201810819020A CN 109031893 B CN109031893 B CN 109031893B
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- storage area
- mask plate
- mask
- sides
- push
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The invention provides a positioning device for a mask plate storage area, which comprises a plurality of position detectors and a plurality of limiting columns, wherein the position detectors are respectively arranged at two sides of a storage platform of the mask plate storage area and used for detecting the position of a mask plate placed on the storage platform, and the limiting columns are respectively arranged at two sides of the storage platform of the storage area and used for limiting the position of the mask plate placed in the mask plate storage area. The mask plate storage area is provided with a limiting column, and the limiting column is arranged in the mask plate storage area and can limit the mask plate placed in the mask plate storage area, so that the mask plate can only move within a set range.
Description
Technical Field
The invention relates to a structure of an exposure machine, in particular to a positioning device for a storage area of a mask plate.
Background
In recent years, the development of small and medium-sized liquid crystal displays has been rapid, and in the manufacturing process of liquid crystal displays, an exposure machine is generally required, for example, in the low temperature poly-silicon (LTPS) process. A mask transfer system of an exposure machine relates to the handling and storage of mask plates (masks).
At present, a 6.5-generation line exposure machine for producing a liquid crystal display needs to manually carry a mask plate and place the mask plate in a mask plate storage area (mask buffer) of the exposure machine, and the mask plate is taken from the mask plate storage area when the mask plate needs to be used in a process. The mask plate storage area of the exposure machine is limited in the number of mask plates that can be stored, and the frequency of transporting the mask plate units (mask cases) is high. In the process of placing the mask plate unit into the mask plate storage area of the exposure machine, the mask plate unit easily collides with a push unit (push unit) of the mask plate storage area, so that a sensor of the push unit is damaged. For the manufacturing process with complicated film and process, such as the manufacturing process of a low temperature polysilicon array substrate (LTPS array) section, the single product process may reach 12 layers or more, the frequency of manually carrying the mask plate unit (mask case) is 20-50 times per machine per day, and the carrying frequency is so high that the probability of occurrence of abnormal operation is greatly improved, and the frequency of damage to the sensor of the positioning propulsion unit is higher. For example, for exposure machines such as nikon or canon (canon), the number of masks that the board can store is limited, and the frequency that the masks switch between the boards is higher, because the current masks platform truck is limited by the board model, heavy and the field of vision is not good, in the process of placing the masks unit into the masks storage area of the exposure machine, the masks unit easily strikes the positioning propulsion unit of the masks storage area, and then damages the sensor of the positioning propulsion unit.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a positioning device for a storage area of a mask plate, which can limit the mask plate placed in the storage area of the mask plate so that the mask plate can only move within a set range.
In order to solve the problems, the invention provides a positioning device for a mask plate storage area, which comprises a plurality of position detectors and a plurality of limiting columns, wherein the position detectors are respectively arranged on two sides of a storage platform of the mask plate storage area and used for detecting the position of a mask plate placed on the storage platform, and the limiting columns are respectively arranged on two sides of the storage platform of the mask plate storage area and used for limiting the position of the mask plate placed in the mask plate storage area.
In one embodiment, at least one position limiting column is arranged on each of two sides of the position detector, and the height of the position limiting columns on two sides of the position detector is higher than that of the position detector.
In one embodiment, each of the positioning pillars on both sides of the position detector includes a base pillar and a height pillar, and the height pillar is detachably mounted on the base pillar.
In one embodiment, the heightening column is a screw screwed on the base column.
In one embodiment, all the height of the position-limiting columns is higher than that of the position detector.
In one embodiment, the limiting posts are respectively arranged corresponding to four edges of the mask plate.
In an embodiment, the mask storage area positioning device further comprises at least two push-pull units, the push-pull units are respectively arranged on two sides of the storage platform of the mask storage area, the push-pull units can move along a direction perpendicular to the placement direction of the mask, and the position detectors are arranged on the corresponding push-pull units.
In one embodiment, at least one limiting column is arranged on each of two sides of each push-pull unit, and the height of the limiting columns on the two sides of each push-pull unit is higher than that of the push-pull unit.
In one embodiment, all the limiting columns are higher than the push-pull unit.
The mask plate storage area is used for storing the mask plate, and the limiting columns are used for limiting the mask plate placed in the mask plate storage area so that the mask plate can only move within a set range.
The mask plate positioning device has the advantages that the limiting columns arranged on the two sides of the position detector are higher than the position detector, when the mask plate is carelessly placed askew, the limiting columns can support the mask plate, the mask plate can be prevented from being pressed onto the position detector, and the position detector is protected and prevented from being damaged.
Drawings
FIG. 1 is a schematic top view of a positioning device for a mask storage area according to the present invention;
fig. 2 is a schematic diagram comparing the heights of the position detector and the position limiting column.
Detailed Description
The following describes in detail a specific embodiment of the mask storage area positioning device according to the present invention with reference to the accompanying drawings.
The invention provides a positioning device for a storage area of a mask plate. Fig. 1 is a schematic top view of the positioning device for a mask storage area according to the present invention. Referring to fig. 1, the mask storage area positioning device of the present invention includes a plurality of position detectors 1 and a plurality of position-limiting pillars 2. Wherein, the X direction shown by the arrow is the direction of putting in and taking out the mask plate 20.
The position detectors 1 are respectively arranged on two sides of a storage platform 10 of the mask storage area. The position detector 1 is used for detecting the position of a mask plate 20 placed on the storage platform 10 to position the mask plate 20. The position detector 1 includes, but is not limited to, a position sensor. The number of the position detectors 1 can be limited according to actual needs.
The limiting columns 2 are respectively arranged on two sides of the storage platform 10 of the storage area. The limiting columns 2 are used for limiting the position of the mask plate 20 placed in the mask plate storage area, so that the mask plate 20 only moves within a set range. In this embodiment, the limiting columns 2 are respectively disposed corresponding to four sides of the mask plate 20, that is, the limiting columns 2 are disposed at corresponding positions on the upper, lower, left, and right sides of the mask plate 20, so as to limit the moving range of the mask plate 20 in the upper, lower, left, and right directions. In addition, a part of the limiting column 2 is also positioned on two sides of the position detector 1 at the same time. In this embodiment, at least one position-limiting column 2 is disposed on each of two sides of the position detector 1.
Note that both sides of the storage platform 10 of the storage area are not in the same direction as both sides of the position detector 1. Specifically, both sides of the storage platform 10 of the storage area refer to both sides in the X direction, i.e., upper and lower sides in fig. 1; and both sides of the position detector 1 mean both sides in the Y direction, i.e., the left and right sides in fig. 1.
Further, fig. 2 is a schematic diagram comparing the heights of the position detector 1 and the position-limiting column 2. Referring to fig. 2, the relationship between the height H1 of the position-limiting pillars 2 disposed at both sides of the position detector 1 and the height H2 of the position detector 1 is H1 > H2. The position detector has the advantages that when the mask plate 20 is placed askew carelessly, the limiting column 2 is higher than the position detector 1, so that the limiting column 2 can support the mask plate 20, the mask plate 20 is prevented from being pressed to the position detector 1, and the position detector 1 is protected and prevented from being damaged. In other embodiments, besides the height of the position detector 1 is higher than the height of the position detector 2 on both sides of the position detector 1, the height of the other position-limiting columns 2 can also be higher than the height of the position detector 1, and those skilled in the art can select them according to the practical requirements.
With reference to fig. 2, each of the position-limiting pillars 2 disposed on both sides of the position detector 1 includes a base pillar 3 and a height-increasing pillar 4, and the height-increasing pillar 4 is detachably mounted on the base pillar 3. When the height of the limiting column 2 needs to be reduced, the heightening column 4 can be taken down, and only the base column 3 is reserved, so that the height of the limiting column 2 can be reduced. Further, the height-increasing column 4 is a screw screwed on the base column 3, so that when the height of the position-limiting column 2 needs to be reduced, the height-increasing column 4 can be screwed on the base column 3, the height of the part of the height-increasing column 4 exposed outside the base column 3 is reduced, and the height of the position-limiting column 2 can be reduced.
Referring to fig. 1, the mask storage area positioning device further includes at least two push-pull units 5, and the push-pull units 5 are respectively disposed on two sides of the storage platform 10 of the storage area. In fig. 1, only two push-pull units 5 are schematically shown, and the two push-pull units 5 are respectively located at two sides of the storage platform 10, in other embodiments, the number of the push-pull units 5 may be set according to practical requirements. The push-pull unit 5 can move in a direction perpendicular to the direction in which the mask 20 is placed, for example, if the direction in which the mask 20 is placed is the X direction, the direction in which the push-pull unit 5 moves is the Y direction. The position detector 1 is provided on the same side of the push-pull unit 5. In the mask plate storage area, when the position detector 1 is not needed to work, the push-pull unit 5 moves into the side wall of the mask plate storage area to drive the position detector 1 to also enter the side wall of the mask plate storage area, so that the position detector 1 is protected; when the position detector 1 needs to work, the push-pull unit 5 moves out of the side wall of the mask storage area to drive the position detector 1 to move out of the side wall of the mask storage area, so that the position detector 1 can work effectively.
Furthermore, at least one limiting column 2 is respectively arranged on two sides of each push-pull unit 5, and the height of the limiting columns 2 arranged on two sides of each push-pull unit 5 is higher than that of the push-pull units 5. The positioning device has the advantages that when a mask plate 20 is carelessly placed askew, the limiting column 2 can support the mask plate 20 due to the fact that the height of the limiting column 2 is higher than that of the push-pull unit 5, the mask plate 20 is prevented from being pressed to the push-pull unit 5, the push-pull unit 5 and the position detector 1 are protected, and the push-pull unit 5 and the position detector 1 are prevented from being damaged. In other embodiments, besides that the height of the limiting columns 2 at both sides of the push-pull unit 5 is higher than that of the push-pull unit 5, the height of other limiting columns 2 can also be higher than that of the push-pull unit 5, and those skilled in the art can select them according to the practical requirements.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (8)
1. A mask plate storage area positioning device is characterized by comprising a plurality of position detectors and a plurality of limiting columns, wherein the position detectors are respectively arranged on two sides of a storage platform of a mask plate storage area and used for detecting the position of a mask plate placed on the storage platform; wherein the content of the first and second substances,
at least one limiting column is arranged on each of two sides of the position detector, and the height of the limiting columns on the two sides of the position detector is higher than that of the position detector.
2. A mask storage area positioning device according to claim 1, wherein each of the position-limiting pillars located at both sides of the position detector includes a base pillar and a height-increasing pillar, and the height-increasing pillar is detachably mounted on the base pillar.
3. A mask storage area positioning device according to claim 2, wherein the height-increasing posts are screws screwed on the base posts.
4. A mask plate storage area positioning device according to claim 1, wherein all the stopper posts are higher than the position detector.
5. A mask storage area positioning device according to claim 1, wherein the position-limiting posts are respectively disposed corresponding to four sides of the mask.
6. The mask storage area positioning device according to claim 1, further comprising at least two push-pull units, wherein the push-pull units are respectively disposed at both sides of a storage platform of the mask storage area, and the push-pull units can move in a direction perpendicular to a direction in which a mask is placed, and the position detector is disposed on the corresponding push-pull unit.
7. A mask storage area positioning device according to claim 6, wherein at least one limiting column is arranged on each of both sides of each push-pull unit, and the height of the limiting column on both sides of the push-pull unit is higher than that of the push-pull unit.
8. A mask storage area positioning device according to claim 6, wherein the height of all the limiting posts is higher than that of the push-pull unit.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810819020.XA CN109031893B (en) | 2018-07-24 | 2018-07-24 | Mask plate storage area positioning device |
| PCT/CN2019/074810 WO2020019702A1 (en) | 2018-07-24 | 2019-02-12 | Mask buffer positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810819020.XA CN109031893B (en) | 2018-07-24 | 2018-07-24 | Mask plate storage area positioning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109031893A CN109031893A (en) | 2018-12-18 |
| CN109031893B true CN109031893B (en) | 2020-02-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810819020.XA Active CN109031893B (en) | 2018-07-24 | 2018-07-24 | Mask plate storage area positioning device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109031893B (en) |
| WO (1) | WO2020019702A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109031893B (en) * | 2018-07-24 | 2020-02-14 | 武汉华星光电技术有限公司 | Mask plate storage area positioning device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7236233B2 (en) * | 2003-10-27 | 2007-06-26 | Asml Netherlands B.V. | Assembly of a reticle holder and a reticle |
| CN101321674B (en) * | 2005-09-27 | 2010-10-13 | 诚实公司 | Reticle pod |
| CN201242659Y (en) * | 2008-06-19 | 2009-05-20 | 亿尚精密工业股份有限公司 | Acceptance cabinet body structure |
| TWI485796B (en) * | 2008-11-21 | 2015-05-21 | Gudeng Prec Industral Co Ltd | A thin-plate container |
| US10658212B2 (en) * | 2014-11-27 | 2020-05-19 | Achilles Corporation | Ring spacer |
| CN107464770B (en) * | 2017-08-28 | 2020-10-13 | 武汉华星光电半导体显示技术有限公司 | Mask plate storage device |
| CN207216271U (en) * | 2017-09-14 | 2018-04-10 | 凯茂科技(深圳)有限公司 | A kind of localization tool |
| CN207159337U (en) * | 2017-09-18 | 2018-03-30 | 京东方科技集团股份有限公司 | Mask plate clip and mask plate |
| CN109031893B (en) * | 2018-07-24 | 2020-02-14 | 武汉华星光电技术有限公司 | Mask plate storage area positioning device |
-
2018
- 2018-07-24 CN CN201810819020.XA patent/CN109031893B/en active Active
-
2019
- 2019-02-12 WO PCT/CN2019/074810 patent/WO2020019702A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| CN109031893A (en) | 2018-12-18 |
| WO2020019702A1 (en) | 2020-01-30 |
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