JP2006245486A - Rack frame structure of stocker - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide the rack frame structure of a stocker for easily changing a loader/unloader cassette port even if the layout of each manufacturing device is changed and arrayed by making it always optimally correspond to this array and arrangement. <P>SOLUTION: A cassette storage rack frame 4 is supported so as to be vertically suspended by a building beam 5, and a loader/unloader cassette port P arranged at the lower position of the cassette storage rack frame 4 is configured as a free space where any pole or support member for supporting the cassette storage rack frame 4 is not arranged. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a shelf frame structure of a stocker, and in particular, in a stocker in which a cassette is selectively supplied to a storage shelf or a loader / unloader cassette port by a stacker crane that runs in the stocker. When each manufacturing apparatus is arranged correspondingly, the present invention relates to a shelf frame structure of a stocker that can easily change the arrangement of cassette ports corresponding to the arrangement of the changed manufacturing apparatus.

Conventionally, in a manufacturing factory for electronic components such as liquid crystal, organic EL, and semiconductor, for example, as shown in FIGS. 1 and 4 to 7, in the stocker S having a large number of cassette storage shelves, the central longitudinal direction thereof. A stacker crane C that can travel along the transport line R disposed in the transport line R and that transports the cassette K and is transported by a transfer machine is disposed on one or both sides of the transport line R. Cassette storage shelves S1 and S2 for temporarily storing cassettes in which a plurality of substrates for electronic parts such as liquid crystal, organic EL, and semiconductor (hereinafter referred to as “substrates”) are stacked and stored. It is arranged. And manufacture of each process for making a board | substrate process through a several process from a raw material through several processes, and making it a product, such as a liquid crystal, so that the opposite side to the side opposite to the traveling stacker crane of this cassette storage shelf row S1, S2 may be carried out. Apparatus EQ1, EQ2,. . . EQn is arranged.
Further, at the lower position of the storage shelf row, the manufacturing apparatuses EQ1, EQ2,. . . A cassette port for loader / unloader is arranged corresponding to EQn, and an actual cassette storing a plurality of substrates is supplied to the cassette port P for loader / unloader directly from a stacker crane or from a storage shelf. , Manufacturing apparatuses EQ1, EQ2,... From the actual cassette of the cassette port P for loader / unloader one by one. . . A loader / unloader robot 7 is arranged so as to be supplied to EQn.

By the way, in the conventional stocker S, as shown in FIGS. 4 to 7, a plurality of columns H are established on the inner bottom surface of the stocker S, and the cassette port frame F is configured so that the beams are supported by the columns H. A plurality of real cassettes are arranged in the cassette port frame F, and a plurality of pillars H2 and H2 are established on the cassette port frame F, and the cassettes are installed by the pillars H2 and H2. The storage shelf Sa that is temporarily stored is arranged so as to support it.
At least one loader / unloader robot is arranged for each of the manufacturing apparatuses EQ1, EQ2,..., EQn arranged along the outside of the cassette storage shelf rows S1, S2. A predetermined number of actual cassettes corresponding to the cassette port for loader / unloader are arranged.

However, the arrangement of the manufacturing apparatuses EQ1, EQ2,..., EQn is often changed and arranged in accordance with the type of substrate to be manufactured, the number of processes, and the like. In such a modified arrangement, the size of the loader / unloader cassette port arranged for each manufacturing apparatus EQ1, EQ2,..., EQn, that is, the number of actual cassettes arranged in the cassette port, In the conventional loader / unloader cassette port P, as shown in FIG. 4 to FIG. 7, the cassette port frame is established by setting up the pillars H from the floor surface at regular intervals or at arbitrary intervals. Since F is configured, a column sometimes exists in the cassette port P corresponding to the changed manufacturing apparatus. Even in such a case, the pillars constituting the cassette port frame cannot be removed. For this reason, the arrangement within the cassette port is determined so as to include the pillars in the cassette port, so that the manufacture is possible. The cassette ports cannot be freely arranged adjacent to each other, and there is a problem that the number of manufacturing apparatuses arranged in one stocker S and the arrangement form thereof are limited.
In addition, as shown in FIG. 5, when a part of the pillars constituting the cassette port frame is removed in order to secure a cassette port of a necessary size, the distance L between the pillars becomes longer, and in the cassette as in recent years. When the size of the board to be stored increases and the number of stored sheets increases, the total weight of the cassette also increases, and the frame between the pillars cannot withstand the weight of the storage shelf above it and the frame bends. In addition, there is a problem that the cassette port frame becomes unnecessarily large when the frame is made rugged in order to prevent the frame from being bent.

  In view of the problems of the above-described conventional stocker shelf frame structure, the present invention is designed to always optimally correspond to the arrangement of the manufacturing apparatuses even when the arrangement of the manufacturing apparatuses is changed. It is an object of the present invention to provide a stocker shelf frame structure in which a port can be easily changed.

  In order to achieve the above object, the shelf frame structure of the stocker according to the present invention has a cassette port for loading / unloading the cassette storage shelf frame suspended from the building beams and arranged at a position below the cassette storage shelf frame. It is characterized in that it is configured as a free space in which no columns or supporting members for supporting the cassette storage shelf frame are provided.

  According to the shelf frame structure of the stocker of the present invention, the cassette storage shelf frame is suspended and supported from the building beam, and the cassette port for the loader / unloader disposed below the cassette storage shelf frame is provided as the cassette storage shelf frame. Since it is configured as a free space in which no supporting pillars or supporting members are arranged, for example, the actual cassette arrangement in the cassette port can be freely set in response to the change in the arrangement of the manufacturing apparatus. Even if the arrangement of each manufacturing apparatus is changed according to the substrate to be used, the cassette port for the loader / unloader can be easily changed, and the loader / unloader cassette port can be easily changed to always optimally correspond to this arrangement. Waste of space in the cassette port and the manufacturing area in the stocker can be eliminated.

  Embodiments of a shelf frame structure of a stocker according to the present invention will be described below with reference to the drawings.

1 to 3 show an embodiment of a shelf frame structure of a stocker according to the present invention.
In a manufacturing factory for electronic components such as liquid crystal, organic EL, and semiconductor, for example, as shown in FIGS. 1 and 7, a plurality of substrates having a required size are stacked and stacked in a cassette. Then, the cassette is transported by the stacker crane C, and at least one end of the cassette is placed in a predetermined cassette storage shelf provided with a cassette loading / unloading port IO, or directly to a loader / unloader cassette port P. Transfer is performed by a transfer machine mounted on the stacker crane C.

  The stacker crane C is not particularly limited. For example, as shown in FIG. 7, the main mast established on the upper portion of the transport carriage 1 having a plurality of traveling wheels W and guide wheels W1, W2 at the lower portion. 2 is provided with a transfer device 3 that can be moved up and down, and a telescopic arm A that can be expanded and contracted to transfer a cassette K to the transfer device 3, thereby providing a predetermined storage shelf position. Then, the transfer machine 3 is moved up and down, and the telescopic arm A is expanded and contracted to load and unload the cassette K so as to be transferred to the cassette storage shelf Sa or directly to the loader / unloader cassette port P.

  In addition, the stacker crane C can run along a transport line R disposed in the central longitudinal direction in the stocker S, and a plurality of substrates are stacked and stored on both sides (or one side) of the transport line R. Cassette storage shelf rows S1 and S2 having a plurality of cassette storage shelves Sa for temporarily storing cassettes K are arranged. On the opposite side of the cassette storage shelf rows S1 and S2 from the stacker crane traveling side, the manufacturing apparatus EQ1, EQ2, and the like in each process for making the glass substrate processed from a raw material through a plurality of processes into a product as a liquid crystal. ..., EQn are arranged freely or can be changed in arrangement.

The cassette storage shelves S1 and S2 facing left and right across the transport line R are configured in the same way on the left and right, but this means that the cassette K in which a plurality of substrates are stacked and stored is at least one level. Both cassette storage shelf rows S1 and S2 are composed of cassette storage shelf frames 4 and 4, and are suspended and supported by building beams 5 of a building such as stocker S. To do.
Although this cassette storage shelf frame 4 is not particularly limited, for example, as shown in FIGS. 2 and 3, a plurality of vertical frames 41, 41 suspended substantially vertically from the building beam 5, A horizontal frame 42 that is horizontally disposed and is connected to and integrated with the vertical frame 41, and spans between the vertical frame 41 and the horizontal frame 42 so that the cassette K is adjacent in the horizontal direction and overlapped in the vertical direction. And a cassette transfer frame 43 that can transfer a plurality of actual cassettes, whereby the entire cassette storage shelf frame 4 on which a plurality of actual cassettes K are transferred and stored is suspended and supported from the building beam 5 To do.

Moreover, although it does not specifically limit to the downward position of the cassette storage shelf frame 4 suspended from the building beam 5, for example, as shown in FIG. 2 and FIG. Loader / unloader cassette port P for mounting at least one or more actual cassettes Ka in which a plurality of substrates are stacked and stored via the base 6 and NG cassettes Kb for storing defective products and the like. Form.
In this loader / unloader cassette port P, the actual cassette Ka and the cassette cassette 6 are provided via the cassette stand 6 and the like without providing a column or a support for supporting the cassette storage shelf frame 4 on the inner bottom surface of the stocker S. The NG cassette Kb can be placed at a predetermined height position.
In this case, the actual cassette Ka and the NG cassette Kb are mounted via the cassette stand 6 or the like at an arbitrary position on the inner bottom surface of the stocker S so that the position can be freely and easily changed.

Further, the loader / unloader cassette port P is arranged corresponding to each of the manufacturing apparatuses EQ1, EQ2,..., EQn arranged on the outer side of the transport line R. Two cassettes can be placed on the loader / unloader cassette port P corresponding to a certain manufacturing equipment EQ1, and three or four or more cassettes can be placed on the other manufacturing equipment EQ2. This can be changed freely.
The manufacturing apparatuses EQ1, EQ2,..., EQn are appropriately arranged so as to correspond to the processing and processing sequence of the substrate.

  At least one loader / unloader robot 7 is disposed between the loader / unloader cassette port P and the manufacturing area where the manufacturing apparatuses EQ1, EQ2,. The loader / unloader robot 7 takes out the substrates one by one from the actual cassette Ka installed in the loader / unloader cassette port P and supplies them to any one of the manufacturing apparatuses EQ1, EQ2,. The processed substrates are received from the manufacturing apparatuses EQ1, EQ2,..., EQn and stored again in the actual cassette Ka, and further, defective substrates are stored in the NG cassette Kb.

Next, the operation of the shelf frame structure of the stocker of the present invention will be described.
When the stacker crane C carrying the actual cassette Ka is stopped at the predetermined storage shelf Sa position of the stocker S, the transfer machine 3 is moved up and down to the height of the predetermined storage shelf Sa, and is opposed to the storage shelf Sa. Stop at a predetermined position. Thereafter, the telescopic arm that has been in a contracted state is extended and projected toward a predetermined storage shelf row side. This is done by driving a telescopic arm drive.
The actual cassette is transferred from the stacker crane C side to the storage shelf Sa by a combination of the extension of the telescopic arm and the lifting operation. This operation is repeated to store the actual cassette in each storage shelf Sa in the storage shelf row.

  Further, the loader / unloader robot 7 takes out the substrates one by one from the actual cassette of the loader / unloader cassette port corresponding to each of the manufacturing apparatuses EQ1, EQ2,. After that, the substrates are supplied to the respective manufacturing apparatuses EQ1, EQ2,..., EQn, and after predetermined processing, they are again stored in the cassette by the loader / unloader robot 7. When all the substrates in the actual cassette have been processed in this way, the processed cassette is transported to the loading / unloading port IO of the cassette of the stocker S by the stacker crane C and carried out of the stocker. The next actual cassette is supplied from the cassette storage shelf to the loader / unloader cassette port P where the cassette is empty or one cassette is exhausted.

  Further, when changing the processing process of the substrate, etc., it is necessary to rearrange the manufacturing apparatuses EQ1, EQ2,..., EQn according to the processing process or the like, or to partially replace with other manufacturing apparatuses. In such a case, the loader / unloader cassette port is changed according to the arrangement of the new manufacturing apparatus. In this case, since there is no support or the like in the loader / unloader cassette port, the loader / unloader cassette port can be rearranged freely and easily without creating a useless space.

  The shelf frame structure of the stocker according to the present invention has been described above based on the embodiments thereof. However, the present invention is not limited to the configurations described in the above embodiments, and the configurations thereof are appropriately made without departing from the spirit of the present invention. Can be changed.

  In the shelf frame structure of the stocker of the present invention, the cassette storage shelf frame is suspended and supported from the building beams, and the column for the loader / unloader arranged at the lower position of the cassette storage shelf frame is not provided with any columns. Therefore, since the actual cassette arrangement in the cassette port can be freely set corresponding to the change in the arrangement of the manufacturing apparatus, it can be suitably used for the application of the shelf frame structure of the stocker, for example, the manufacturing apparatus provided with a delivery mechanism. It can also be used for other applications.

It is a top view which shows one Example of the shelf frame structure of the stocker of this invention. It is a front longitudinal cross-sectional view. It is a side surface longitudinal cross-sectional view. It is a front longitudinal cross-sectional view which shows the shelf frame structure in the conventional stocker. It is a front longitudinal cross-sectional view of the Example which widened between the support | pillars of the cassette port for the loader / unloader in the conventional stocker. It is a conventional side surface longitudinal cross-sectional view. It is explanatory drawing of the stacker crane in a stocker.

Explanation of symbols

A Telescopic Arm C Stacker Crane K Cassette Ka Real Cassette Kb NG Cassette P Loader / Unloader Cassette Port R Transport Line S Stocker Sa Storage Shelf EQ1, EQ2, ..., EQn Manufacturing Equipment 1 Transport Cart 2 Main Mast 3 Transfer Machine 4 cassette storage shelf frame 41 vertical frame 42 horizontal frame 43 cassette transfer frame 5 building beam 6 cassette stand 7 loader / unloader robot

Claims (1)

  The cassette storage shelf frame is suspended and supported from the building beam, and the loader / unloader cassette port arranged below the cassette storage shelf frame is not provided with a column or a support for supporting the cassette storage shelf frame. Stocker shelf frame structure characterized by being configured as a free space.

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