CN109031893A - Mask plate storage area positioning device - Google Patents
Mask plate storage area positioning device Download PDFInfo
- Publication number
- CN109031893A CN109031893A CN201810819020.XA CN201810819020A CN109031893A CN 109031893 A CN109031893 A CN 109031893A CN 201810819020 A CN201810819020 A CN 201810819020A CN 109031893 A CN109031893 A CN 109031893A
- Authority
- CN
- China
- Prior art keywords
- mask plate
- storage area
- plate storage
- push
- positioning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The present invention provides a kind of mask plate storage area positioning device, including multiple position detectors and multiple limited posts, the position detector is separately positioned on the two sides of the storage platform of mask plate storage area, for detecting the position for the mask plate being placed in storage platform, the limited post is separately positioned on the two sides of the storage platform of the storage area, for limiting the position for being placed on the mask plate of the mask plate storage area.It is an advantage of the current invention that the limited post can limit the mask plate for being placed on the mask plate storage area, so that the mask plate only moves within the set range.
Description
Technical field
The present invention relates to the structure of exposure machine more particularly to a kind of mask plate storage area positioning devices.
Background technique
In recent years, the development of small-medium size liquid crystal display is swift and violent, in the processing procedure of liquid crystal display, it usually needs use
Exposure machine, such as need in low temperature polycrystalline silicon (LTPS) processing procedure using to exposure machine.The exposure mask of exposure machine transfers (mask
Transfer) system is related to the carrying and storage of mask plate (mask).
Exposure machine currently used for producing 6.5 generation lines of liquid crystal display needs manual handling mask plate and places it in
In the mask plate storage area (mask buffer) of exposure machine, in manufacturing process, when needing using mask plate, then covered from described
Diaphragm plate storage area transfers mask plate.The mask plate storage area of exposure machine can store the limited amount of mask plate, exposure mask plate unit
The frequency that (mask case) is handled upside down is higher.During exposure mask plate unit to be placed into the mask plate storage area of exposure machine,
Exposure mask plate unit easily hits the positioning propulsion unit (push unit) of mask plate storage area, so that the sensing of positioning propulsion unit
Device is damaged.For the processing procedure of film layer and complex process, such as low temperature polycrystalline silicon array substrate (LTPS array) section
Processing procedure, single Product Process are likely to be breached 12 layers or more, and the frequency of manual handling exposure mask plate unit (mask case) is daily
20-50 times/platform machine, so high carrying frequency, so that the probability for operation exception occur greatly is improved, positioning promotes single
The impaired frequency of sensor of member is higher.For example, board can be deposited for the exposure machines such as Nikon or Canon (canon)
The mask plate limited amount of storage, the frequency that mask plate switches between board is higher, since existing mask plate trolley is by board type
Limitation, the heavy and visual field is bad, during exposure mask plate unit to be placed into the mask plate storage area of exposure machine, mask plate list
First positioning propulsion unit for easily hitting mask plate storage area, and then damage the sensor of the positioning propulsion unit.
Summary of the invention
The technical problem to be solved by the invention is to provide a kind of mask plate storage area positioning devices, can limit and put
The mask plate in the mask plate storage area is set, so that the mask plate only moves within the set range.
To solve the above-mentioned problems, the present invention provides a kind of mask plate storage area positioning devices, including multiple positions to examine
It surveys device and multiple limited posts, the position detector is separately positioned on the two sides of the storage platform of the mask plate storage area, use
In the position for the mask plate that detection is placed in storage platform, the limited post is separately positioned on depositing for the mask plate storage area
The two sides of platform are laid flat, for limiting the position for being placed on the mask plate of the mask plate storage area.
In one embodiment, it is respectively placed at least one limited post in the two sides of the position detector, and is located at institute
The height for stating the limited post of position detector two sides is higher than the height of the position detector.
In one embodiment, each limited post positioned at the position detector two sides includes that a pilum and one increase column,
The column that increases is removably mounted on the pilum.
In one embodiment, the column that increases is the screw being screwed on the pilum.
In one embodiment, the height of all limited posts is above the height of the position detector.
In one embodiment, the limited post respectively corresponds the four sides setting of mask plate.
In one embodiment, the mask plate storage area positioning device further includes at least two push-and-pull units, the push-and-pull
Unit is separately positioned on the two sides of the storage platform of the mask plate storage area, and the push-and-pull unit can be along vertical mask plate
The direction being put into is mobile, and the position detector is arranged in corresponding push-and-pull unit.
In one embodiment, it is respectively placed at least one limited post in each push-and-pull unit two sides, and is located at described push away
The height of the limited post of unit two sides is drawn to be higher than the height of the push-and-pull unit.
In one embodiment, the height of all limited posts is above the height of the push-and-pull unit.
It is an advantage of the current invention that the limited post is used to limit the mask plate for being placed on the mask plate storage area, with
Move the mask plate only within the set range.
It is a further advantage of the present invention that the height that the limited post of the position detector two sides is arranged in is higher than institute's rheme
The height for setting detector, when mask plate puts askew accidentally, the limited post can support the mask plate, and then can be avoided institute
It states mask plate and is pressed onto the position detector, protect the position detector, it is avoided to be damaged.
Detailed description of the invention
Fig. 1 is the overlooking structure diagram of mask plate storage area positioning device of the present invention；
Fig. 2 is the position detector and the limited post height comparison schematic diagram.
Specific embodiment
The specific embodiment of mask plate storage area positioning device provided by the invention is done specifically with reference to the accompanying drawing
It is bright.
The present invention provides a kind of mask plate storage area positioning device.Fig. 1 is mask plate storage area positioning device of the present invention
Overlooking structure diagram.Referring to Fig. 1, mask plate storage area positioning device of the present invention includes multiple position detectors 1 and multiple
Limited post 2.Wherein, X-direction shown in arrow is the direction that mask plate 20 is put into and takes out.
The position detector 1 is separately positioned on the two sides of the storage platform 10 of mask plate storage area.The position detection
Device 1 is used to detect the position for the mask plate 20 being placed in storage platform 10, to position to the mask plate 20.Institute's rheme
Setting detector 1 includes but is not limited to position sensor.The quantity of the position detector 1 can be defined according to actual needs.
The limited post 2 is separately positioned on the two sides of the storage platform 10 of the storage area.The limited post 2 is for limiting
It is placed on the position of the mask plate 20 of the mask plate storage area, so that the mask plate 20 only moves within the set range.?
In the present embodiment, the limited post 2 respectively corresponds the four sides setting of mask plate 20, i.e. up and down four in the mask plate 20
Side corresponding position is provided with limited post 2, and then can limit the mask plate 20 in the moving range in direction up and down.This
Outside, a portion of the limited post 2 is also located at the two sides of the position detector 1 simultaneously.In the present embodiment, described
The two sides of position detector 1 are at least each provided with a limited post 2.
It should be noted that the two sides of the storage platform 10 of the storage area and the two sides of the position detector 1 are not
It is same direction.In particular, the two sides of the storage platform 10 of the storage area refer to two sides in the X direction, i.e. in Fig. 1
Upper and lower two sides；And the two sides of the position detector 1 refer to two sides in the Y direction, the i.e. left and right sides in Fig. 1.
Further, Fig. 2 is the position detector 1 and the 2 height comparison schematic diagram of limited post.Referring to Fig. 2, setting
It is H1 > in the relationship of the height H2 of the height H1 and position detector 1 of the limited post 2 of 1 two sides of position detector
H2.It the advantage is that, when mask plate 20 puts askew accidentally, since the height of the limited post 2 is higher than the position detector 1
Highly, then the limited post 2 can support the mask plate 20, and the mask plate 20 is avoided to be pressed onto the position detector 1, from
And the position detector 1 is protected, avoid it from being damaged.In other embodiments, except positioned at 1 two sides of position detector
Limited post 2 height be higher than the position detector 1 height except, the height of other limited posts 2 can also be higher than institute's rheme
The height of detector 1 is set, those skilled in the art can select according to practice demand.
Wherein, please continue to refer to Fig. 2, each limited post 2 that 1 two sides of position detector are arranged in includes a pilum 3
And one increase column 4, the column 4 that increases is removably mounted on the pilum 3.When the height for needing to reduce the limited post 2
When, then the column 4 that increases can be removed, retain pilum 3, only so as to reduce the height of the limited post 2.Further, described
Increasing column 4 is the screw being screwed on the pilum 3, then can will be described then when needing to reduce the height of the limited post 2
Increase column 4 to screw to the pilum 3, the height for increasing the part that column 4 is exposed to except the pilum 3 is reduced, so as to reduce
The height of the limited post 2.
Please continue to refer to Fig. 1, the mask plate storage area positioning device further includes at least two push-and-pull units 5, described to push away
Unit 5 is drawn to be separately positioned on the two sides of the storage platform 10 of the storage area.It is single that two push-and-pulls are only symbolically painted in Fig. 1
Member 5, two push-and-pull units 5 are located at the two sides of the storage platform 10, in other embodiments, the push-and-pull unit 5
Quantity can be configured according to practice demand.The push-and-pull unit 5 can be moved along the direction that vertical mask plate 20 is put into, example
Such as, the direction that the mask plate 20 is put into is X-direction, then the moving direction of the push-and-pull unit 5 is Y-direction.The position inspection
Device 1 is surveyed to be arranged in the ipsilateral push-and-pull unit 5.In the mask plate storage area, the position detector 1 is not being needed
When work, the push-and-pull unit 5 is moved into the side wall of the mask plate storage area, drive the position detector 1 also into
In the side wall for entering the mask plate storage area, and then protect the position detector 1；The position detector 1 is being needed to work
When, the push-and-pull unit 5 is removed from the side wall of the mask plate storage area, drives the position detector 1 also from the exposure mask
The side wall of plate storage area removes, and the position detector 1 is effectively worked.
Further, it is at least each provided with a limited post 2 in each 5 two sides of push-and-pull unit, and be arranged in the push-and-pull
The height of the limited post 2 of 5 two sides of unit is higher than the height of the push-and-pull unit 5.The advantage is that, when mask plate 20 put accidentally it is askew
When, since the height of the limited post 2 is higher than the height of the push-and-pull unit 5, then the limited post 2 can support the exposure mask
Plate 20 avoids the mask plate 20 from being pressed onto the push-and-pull unit 5, to protect the push-and-pull unit 5 and position detector 1, keeps away
Exempt from the push-and-pull unit 5 and position detector 1 is damaged.In other embodiments, except positioned at 5 two sides of push-and-pull unit
The height of limited post 2 is higher than except the height of the push-and-pull unit 5, and the height of other limited posts 2 can also be higher than the push-and-pull
The height of unit 5, those skilled in the art can select according to practice demand.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (9)
1. a kind of mask plate storage area positioning device, which is characterized in that described including multiple position detectors and multiple limited posts
Position detector is separately positioned on the two sides of the storage platform of the mask plate storage area, is placed on storage platform for detecting
Mask plate position, the limited post is separately positioned on the two sides of the storage platform of the mask plate storage area, for limiting
It is placed on the position of the mask plate of the mask plate storage area.
2. mask plate storage area positioning device according to claim 1, which is characterized in that the two of the position detector
Side is at least respectively placed with a limited post, and the height for being located at the limited post of the position detector two sides is higher than the position
The height of detector.
3. mask plate storage area positioning device according to claim 2, which is characterized in that be located at the position detector two
Each limited post of side includes that a pilum and one increase column, and the column that increases is removably mounted on the pilum.
4. mask plate storage area positioning device according to claim 3, which is characterized in that the column that increases is is screwed in
State the screw on pilum.
5. mask plate storage area positioning device according to claim 1, which is characterized in that the height of all limited posts is equal
Higher than the height of the position detector.
6. mask plate storage area positioning device according to claim 1, which is characterized in that the limited post, which respectively corresponds, to be covered
Four sides of diaphragm plate are arranged.
7. mask plate storage area positioning device according to claim 1, which is characterized in that the mask plate storage area positioning
Device further includes at least two push-and-pull units, and the push-and-pull unit is separately positioned on the storage platform of the mask plate storage area
Two sides, and the push-and-pull unit can be moved along the direction that vertical mask plate is put into, the position detector is arranged corresponding
Push-and-pull unit on.
8. mask plate storage area positioning device according to claim 7, which is characterized in that each push-and-pull unit two sides extremely
It is few to be respectively placed with a limited post, and the height for being located at the limited post of the push-and-pull unit two sides is higher than the push-and-pull unit
Highly.
9. mask plate storage area positioning device according to claim 7, which is characterized in that the height of all limited posts is equal
Higher than the height of the push-and-pull unit.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810819020.XA CN109031893B (en) | 2018-07-24 | 2018-07-24 | Mask plate storage area positioning device |
| PCT/CN2019/074810 WO2020019702A1 (en) | 2018-07-24 | 2019-02-12 | Mask buffer positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810819020.XA CN109031893B (en) | 2018-07-24 | 2018-07-24 | Mask plate storage area positioning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109031893A true CN109031893A (en) | 2018-12-18 |
| CN109031893B CN109031893B (en) | 2020-02-14 |
Family
ID=64645516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810819020.XA Active CN109031893B (en) | 2018-07-24 | 2018-07-24 | Mask plate storage area positioning device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109031893B (en) |
| WO (1) | WO2020019702A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020019702A1 (en) * | 2018-07-24 | 2020-01-30 | 武汉华星光电技术有限公司 | Mask buffer positioning device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201242659Y (en) * | 2008-06-19 | 2009-05-20 | 亿尚精密工业股份有限公司 | Acceptance cabinet body structure |
| US20100126904A1 (en) * | 2008-11-21 | 2010-05-27 | Kung-Hao Cheng | Thin-plate container |
| US20170330778A1 (en) * | 2014-11-27 | 2017-11-16 | Achilles Corporation | Ring spacer |
| CN107464770A (en) * | 2017-08-28 | 2017-12-12 | 武汉华星光电半导体显示技术有限公司 | A kind of mask plate storage device |
| CN207159337U (en) * | 2017-09-18 | 2018-03-30 | 京东方科技集团股份有限公司 | Mask plate clip and mask plate |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7236233B2 (en) * | 2003-10-27 | 2007-06-26 | Asml Netherlands B.V. | Assembly of a reticle holder and a reticle |
| WO2007038504A2 (en) * | 2005-09-27 | 2007-04-05 | Entegris, Inc. | Reticle pod |
| CN207216271U (en) * | 2017-09-14 | 2018-04-10 | 凯茂科技(深圳)有限公司 | A kind of localization tool |
| CN109031893B (en) * | 2018-07-24 | 2020-02-14 | 武汉华星光电技术有限公司 | Mask plate storage area positioning device |
-
2018
- 2018-07-24 CN CN201810819020.XA patent/CN109031893B/en active Active
-
2019
- 2019-02-12 WO PCT/CN2019/074810 patent/WO2020019702A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201242659Y (en) * | 2008-06-19 | 2009-05-20 | 亿尚精密工业股份有限公司 | Acceptance cabinet body structure |
| US20100126904A1 (en) * | 2008-11-21 | 2010-05-27 | Kung-Hao Cheng | Thin-plate container |
| US20170330778A1 (en) * | 2014-11-27 | 2017-11-16 | Achilles Corporation | Ring spacer |
| CN107464770A (en) * | 2017-08-28 | 2017-12-12 | 武汉华星光电半导体显示技术有限公司 | A kind of mask plate storage device |
| CN207159337U (en) * | 2017-09-18 | 2018-03-30 | 京东方科技集团股份有限公司 | Mask plate clip and mask plate |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020019702A1 (en) * | 2018-07-24 | 2020-01-30 | 武汉华星光电技术有限公司 | Mask buffer positioning device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020019702A1 (en) | 2020-01-30 |
| CN109031893B (en) | 2020-02-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102376612B (en) | Substrate carrying mechanism, substrate carrying method, and recording medium for recording program | |
| CN102738049B (en) | Substrate transport method, substrate transport apparatus, and coating and developing system | |
| TW309502B (en) | ||
| US7902492B2 (en) | Measuring unit for air flow | |
| US20190148201A1 (en) | Wafer positioning and loading system | |
| US20170185182A1 (en) | Common mode noise reduction in capacitive touch sensing | |
| WO2013139055A1 (en) | Glass substrate detection device and method | |
| WO2014201699A1 (en) | Glass panel stacking system and stacking method | |
| CN102768976A (en) | Prealignment device and method for substrate | |
| CN109031893A (en) | Mask plate storage area positioning device | |
| CN107533956A (en) | Exposure system | |
| CN101738870B (en) | Proximity exposure apparatus, method of delivering a mask of a proximity exposure apparatus and method of manufacturing a display panel substrate | |
| CN112596286B (en) | Polaroid detection method and device and polaroid attaching machine | |
| CN102998833A (en) | Array substrate and color film substrate box alignment method | |
| JP2015115516A (en) | Semiconductor manufacturing device | |
| TWI314660B (en) | Apparatus for stacking cassette and a method of fabricating a liquid crystal display device using the same | |
| CN102119356B (en) | Panel loading apparatus and the method of loading panel for manufacturing display panel | |
| CN216779512U (en) | Automatic detection equipment for appearance size of optical lens | |
| CN213893285U (en) | Positioning device of battery transfer equipment | |
| CN108628108A (en) | Bogey and exposure machine | |
| CN204011371U (en) | Wafer handler and reviewing board, technique board | |
| KR101016023B1 (en) | System for Sensing Substrate and Buffer Equipment having the same | |
| CN102679890A (en) | Crystal column detecting device | |
| TW201024829A (en) | Detecting apparatus and detecting method for the detecting apparatus | |
| JPH03297156A (en) | Substrate detector in cassette |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |