CN207216271U - A kind of localization tool - Google Patents

A kind of localization tool Download PDF

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Publication number
CN207216271U
CN207216271U CN201721183071.5U CN201721183071U CN207216271U CN 207216271 U CN207216271 U CN 207216271U CN 201721183071 U CN201721183071 U CN 201721183071U CN 207216271 U CN207216271 U CN 207216271U
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CN
China
Prior art keywords
keeper
locating slot
plate
boss
objective table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201721183071.5U
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Chinese (zh)
Inventor
黄红伍
逯正旺
赵学军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KAIMAO TECHNOLOGY (SHENZHEN) Co Ltd
Original Assignee
KAIMAO TECHNOLOGY (SHENZHEN) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to CN201721183071.5U priority Critical patent/CN207216271U/en
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Publication of CN207216271U publication Critical patent/CN207216271U/en
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Abstract

The utility model provides a kind of localization tool, including objective table and the first positioning component;The objective table is used to place glass cover-plate to be positioned;First positioning component includes the first keeper, the second keeper and the first actuator;The first locating slot is provided with first keeper, the second locating slot is provided with second keeper, first locating slot and second locating slot are equal with the distance of the objective table, and are oppositely arranged in a first direction;The mask plate is held on first locating slot or second locating slot;First actuator connects first keeper and second keeper, and drives first keeper and second keeper synchronously opposite displacement, realizes the relative positioning of glass cover-plate and mask plate.

Description

A kind of localization tool
【Technical field】
It the utility model is related to glass processing field, more particularly to a kind of localization tool.
【Background technology】
As the mobile terminal such as rapid development, mobile phone, ip ad of electronic product in recent years turns into the popular electricity paid close attention to the most Sub- product.Mobile terminal display screen is the window of consumer's touch-control mobile terminal, and for mobile terminal, display window is set Meter is particularly important.Glass cover-plate is the important component of mobile terminal display screen.Usual glass cover-plate is divided into viewing area Domain and non-display area, viewing area are used for display picture, and non-display area encloses to be used to block positioned at cover plate located at edge of display area Electronic component or circuit at marginal position.
Glass cover-plate non-display area manufacturing process includes the techniques such as spraying, exposure imaging in the prior art.Wherein, spray Refer to spray to form coating cloud by photosensitive-ink using nozzle, coating cloud is ejected into uniform paint is formed on cover-plate glass surface Film;Photosensitive-ink refers to single wavelength light sensitive, and a kind of ink solidified by photopolymerization reaction, and exposure refers to pair The photosensitive-ink part to be retained carries out illumination curing.Development is that photopolymerization does not occur is anti-by unexposed by alkali lye effect The photosensitive-ink partial flushing answered is fallen.
Typically the photosensitive-ink part that will be solidified is exposed under light by mask plate, to being not required to the photosensitive of solidification Ink is covered.Then exposed portion is able to solidification and is retained on cover-plate glass surface.At present, in whole exposure imaging technique most Difficult be cover-plate glass and mask plate between the two be accurately positioned problem, and the repetition of re-expose is accurately positioned and asked Topic, solves the problem without good technique in the prior art.
【Utility model content】
The problem of to overcome prior art to exist, the utility model provide a kind of localization tool.
The utility model solve technical problem technical scheme be to provide a kind of localization tool, for position glass cover-plate and Mask plate is with to glass cover-plate relative positioning, it is characterised in that:Including objective table and the first positioning component;The objective table is used In the glass cover-plate that placement is to be positioned;First positioning component includes the first keeper, the second keeper and the first driving Part, first keeper and second keeper are arranged at the opposite sides of the objective table first direction;Described first The first locating slot is provided with keeper, the second locating slot, first locating slot and institute are provided with second keeper It is equal with the distance of the objective table to state the second locating slot, and is oppositely arranged in a first direction;The mask plate is held on institute State the first locating slot or second locating slot;First actuator connects first keeper and second positioning Part, and drive first keeper and second keeper synchronously opposite displacement, with the mask plate and glass cover-plate EDGE CONTACT realizes positioning in a first direction.
Preferably, the localization tool also includes the second positioning component;Second positioning component include the 3rd keeper, 4th keeper and the second actuator, the 3rd keeper and the 4th keeper are arranged at the objective table second party To opposite sides;Second actuator connects the 3rd keeper and the 4th keeper, and drives the described 3rd Keeper and the 4th keeper synchronously opposite displacement, to be realized with the mask plate and glass cover-plate EDGE CONTACT second Positioning on direction;The first direction and the second direction are mutually perpendicular to.
Preferably, the 3rd locating slot is provided with the 3rd keeper, it is fixed that the 4th is provided with the 4th keeper Position groove, the 3rd locating slot and the 4th locating slot are equal with the distance of the objective table and opposite in a second direction Set.
Preferably, the 3rd boss is extended at the 3rd locating slot and the cell wall of close objective table side;Described 4th Locating slot extends the 4th boss at the cell wall of objective table side;It is described when the mask plate positions in a second direction 3rd boss and the 4th boss contact with the mask plate face.
Preferably, first boss is extended at first locating slot and the cell wall of close objective table side;Described second Locating slot extends second boss at the cell wall of objective table side;It is described when the mask plate positions in a first direction First boss and the second boss contact with the mask plate face.
Preferably, it is provided with antiskid glue cushion on the face of the first boss and the second boss away from objective table.
Preferably, the first boss can rotate in the horizontal plane relative to first locating dowel.
Preferably, spacing of first locating slot between the end face of the objective table and objective table is 6-8mm.
Preferably, first actuator is cylinder.
Preferably, first positioning component also includes the first driving member;
First keeper includes the first locating piece and the first fixed column;Second keeper include the second locating piece and Second fixed column;
First locating piece and second locating piece are connected with first driving member, first actuator first Locating piece or the second locating piece synchronous shift;
First locating dowel and second locating dowel are obliquely installed.
Compared with existing design, localization tool provided by the utility model has advantages below:
1st, by setting objective table to be used to place glass cover-plate to be positioned;Determined by setting first on the first keeper Set on position groove and/or the second keeper with the second contour locating slot of the first locating slot to clamp mask plate to be positioned;And By setting the first actuator to drive the first keeper and the synchronously opposite displacement of the second keeper, so that the first keeper and second Keeper realizes positioning in a first direction with mask plate and glass cover-plate EDGE CONTACT in a first direction, to ensure glass cover Plate Correct exposure.
2nd, by setting boss, increase and the contact area of mask plate, so as to which the locating effect to mask plate is more excellent.
【Brief description of the drawings】
Fig. 1 is a kind of dimensional structure diagram of localization tool of the utility model.
Fig. 2 is a kind of another visual angle schematic diagram of localization tool of the utility model.
Fig. 3 is a kind of configuration schematic diagram of localization tool of the utility model.
Fig. 4 A are a kind of partial structural diagrams of the keeper of localization tool second of the utility model.
Fig. 4 B are a kind of partial structural diagrams of the keeper of localization tool first of the utility model.
Fig. 5 is a kind of schematic diagram of the variant embodiment of localization tool of the utility model.
Fig. 6 is a kind of the first positioning component of localization tool of the utility model and the cooperation schematic diagram of the second positioning component.
Fig. 7 A are a kind of partial structural diagrams of the keeper of localization tool the 3rd of the utility model.
Fig. 7 B are a kind of partial structural diagrams of the keeper of localization tool the 4th of the utility model.
Fig. 8 is a kind of schematic diagram of another variant embodiment of localization tool of the utility model.
【Embodiment】
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only solving The utility model is released, is not used to limit the utility model.
Also referring to Fig. 1-2, the utility model provides a kind of localization tool 100, and its one side is used to carry and position Glass cover-plate 200 to be exposed, mask plate 300 is on the other hand positioned at the top position of glass cover-plate 200, light is through mask plate 300 get on glass cover-plate 200 to be exposed, so as to need exposure area to carry out Correct exposure to glass cover-plate 200, prevent glass Cover plate 200, because of position deviation, causes the exposure accuracy deficiency of position to be exposed or deviateed, so as to improve glass in exposure process The production yield of glass cover plate 200.The utility model by glass cover-plate 200 and mask plate 300 be it is square exemplified by illustrate, should Square glass cover plate 200 and mask plate 300 include four sides.
As shown in figure 1, in certain embodiments, it is fixed that the localization tool 100 includes support component 10, objective table 11, first The positioning component 13 of hyte part 12 and second.Support component 10, which forms one, has the support frame structure of accommodation space, for load Thing platform 11 provides support, while can house the first positioning component 12 and the second positioning component 13.Objective table 11 is used to place Glass cover-plate 200, glass cover-plate 200 can move relative to objective table 11, determine the positioning component 13 of component 12 and second by first Contact adjusting and objective table 11 relative position, so as to which relative objective table 11 positions, while first determine component 12 and second and determines Hyte part 13 clamps mask plate 300 so that mask plate 300 is relatively fixed to the top of glass cover-plate 200, in the first positioning component 12 and the displacement process of the second positioning component 13 in, it is synchronous to position glass cover-plate 200 and mask plate 300 so that glass cover-plate 200 and Mask plate 300 is relatively fixed, and is easy to the accurate exposure of glass cover-plate 200.
First positioning component 12 is used to realize the positioning of glass cover-plate 200 and mask plate 300 in a first direction, and second is fixed Hyte part 13 is used to realize the positioning of glass cover-plate 200 and mask plate 300 in a second direction, and first direction and second direction are equal For horizontal direction and it is mutually orthogonal to one another.First positioning component 12 and the second positioning component 13 coordinate realize glass cover-plate 200 and Being accurately positioned in the horizontal direction of mask plate 300, it is ensured that glass cover-plate 200 is under the covering of mask plate 300 by Correct exposure.Can To understand, if need to only be positioned in a first direction to glass cover-plate 200 and mask plate 300, the second positioning component 13 can be with Omit.
Specifically, support component 10 includes bottom plate 101, support member 102 and top plate 103.Bottom plate 101 and top plate 103 are Flat sheet, it is preferably rectangular.Support member 102 is arranged between bottom plate 101 and top plate 103 to be cylindric, by welding or Screw thread coordinates realization to be fastenedly connected with bottom plate 101 and top plate 103, makes to form an accommodation space between bottom plate 101 and top plate 103. Objective table 11 is rectangular panel, and its area is less than top plate 103, and objective table 11 is connected with top plate 103, is realized by top plate 103 solid It is fixed, it is preferable that the central point of objective table 11 and top plate 103 is on the same line.Glass cover-plate 200 to be exposed is positioned over loading On platform 11, the shape of glass cover-plate 200 is close with objective table 11, and area is slightly larger than the surface that objective table 11 is in contact with it, glass cover The edge of plate 200 can expose objective table 11.Mask plate 300 is held on the first positioning component 12 or the second positioning component 13, and One positioning component 12 and the second positioning component 13 are connected with bottom plate 101, and expose to top plate 103.The He of first positioning component 12 The exposed end face of second positioning component 13 is higher than the surface of the bearing glass cover plate 200 of objective table 11, to the He of glass cover-plate 200 When mask plate 300 is positioned, the first positioning component 12 and the second positioning component 13 in the first direction and a second direction with glass Glass cover plate 200 and the EDGE CONTACT of mask plate 300, are positioned to glass cover-plate 200 and mask 300.
Also referring to Fig. 1-3, the first positioning component 12 includes the first keeper 121, and the second keeper 122, first drives Moving part 123, the first drive 124 and the first driving member 125.First drive 124 is two, in a row-shaped to be fixedly installed on bottom To provide transmission support to the first drive 124 on the first direction namely X-direction of plate 101, drive 124 coordinates first to pass Moving part 125 forms transmission and coordinated, and making first under the driving of the first actuator 123, to determine the keeper 122 of part 121 and second same Walk relative displacement clamping position glass cover-plate 200 and mask plate 300 in a first direction.
First driving member 125 can be driving-chain or transmission belt, to coordinate drive 124 to form Chain conveyer or V belt translation. When the first driving member 125 and two the first drives 124 are V belt translation, preferably the first driving member 125 and two first biographies Dentalation is provided with the face that driving wheel 124 is in contact, is also set on the face that the first drive 124 contacts with the first driving member 125 Be equipped with dentalation, the first driving member 125 and the first drive 124 coordinates V belt translation more stable by tooth, it is ensured that first Positioning component 12 is in a first direction to glass cover-plate 200 and the positioning accuracy of mask plate 300.
First keeper 121 and the second keeper 122 are respectively arranged on the width of objective table 11 namely first direction Opposite sides, and be connected with the first driving member 125, and can opposed bottom 101 slide.It is fixed to correspond to first in top plate 103 First direction through hole 1031 is offered on the position of the position keeper 122 of part 121 and second.First keeper 121 and the second positioning Part 122 is exposed by the part of first direction through hole 1031, and is driven by the first actuator 123, with being placed on objective table 11 Glass cover-plate 200 and mask plate 300 in a first direction two relative sides contact, realize in a first direction to glass Cover plate 200 and mask plate 300 are positioned, and the first actuator 123 is preferably cylinder.First keeper 121 and the second keeper 122, in a first direction with glass cover-plate 200 and the Multi-contact of mask plate 300, ensure glass cover-plate 200 and mask plate 300 Locating effect in a first direction.
It is appreciated that the first actuator 123 can also connect with the second keeper 122, the second keeper 122 of driving is first Direction top offset, so as to drive the opposite or displacement of supporting or opposing in a first direction of the first keeper.
Fig. 3 and Fig. 4 A are referred to, the second keeper 122 includes the second locating piece 1221 and is arranged on locating piece 1221 Locating dowel 1222, locating dowel 1222 is at least one, preferably 2, to be positioned to glass cover-plate 200 and mask plate 300 When contact point as much as possible is provided, ensure the locating effect to glass cover-plate 200 and mask plate 300.
Second locating piece 1221 is connected with the first driving member 125 (see Fig. 3), and the second locating dowel 1222 is strip and passed through The first direction through hole 1031 that top plate 103 opens up exposes to the upper surface of top plate 103.Second locating dowel 1222 leaks outside in top plate 103 Upper surface portion offers the second locating slot 1223 for placing mask plate 300, and the height of the second locating slot 1223 is higher than glass cover The upper surface of plate 200, it is preferable that the lower surface of the second locating slot 1223, i.e., the end face distance objective table 11 of close objective table 11 Highly it is 6-8mm, so that mask plate 300 is clamped after being positioned at second locating slot 1223,2- is kept with glass cover-plate 200 4mm distance, the photosensitive-ink on glass cover-plate 200 is prevented to be infected with mask plate 300.
Further, second boss 1224 is extended from the lower section cell wall opening position of the second locating slot 1223, i.e., close to loading Extend second boss 1224 at the cell wall of the side of platform 11, the upper surface of second boss 1224 is put down with the lower section cell wall of locating slot 1223 Together, the second boss 1224 is placed on it for mask plate 300, is contacted with the face of mask plate 300, and the second keeper 122 of increase is with covering Contact area between template 300 so that locating effect more preferably, prevents mask plate 300 from dropping on glass cover-plate 200.It is preferred that Ground, antiskid glue cushion (not shown) is provided with face of the second boss 1224 away from objective table 11 so that mask plate 300 and second The Elastic Contact of boss 1224, avoids mask plate 300 from damaging.
As a kind of malformation, second boss 1224 can be with respect to the rotary setting of the second locating dowel 1222, with level Rotation, so that second boss 1224 selective can contact with the mask plate 300 of positioning to be held.Such as, in mask plate Before 300 are clamped in the second locating slot 1223, second boss 1224 is exposed, and exposed second boss 1224, which has to be oriented to, to be made With, mask plate 300 can the guide effect through second boss 1224 enter in the second locating slot 1223 with clamped, in mask plate After 300 are clamped by the second locating slot 1223, second boss 1224 is rotated by 90 ° in the horizontal plane with respect to the second locating dowel 1222, from And cause more light through the vertical irradiation of mask plate 300 to glass cover-plate 200, to be exposed to glass cover-plate.Preferably, Second boss 1224 is transparent boss.
Fig. 3 and Fig. 4 B are referred to, the first keeper 121 and the second keeper 122 have identical structure.First keeper 121 include the first locating piece 1211 and the first locating dowel 1212, and the first locating piece 1211 is connected with the first driving member 125, and first Locating dowel 1212 is connected with the first locating piece 1211, and the first locating slot 1213, the first positioning are offered in the first locating dowel 1212 The locating slot 1223 of groove 1213 and second opens up in opposite directions, and the high setting such as relative top plate 103, so as to location mask in a first direction Plate.Cell wall opening position extends first boss 1214 below the first locating slot 1213, it is preferable that remote in first boss 1214 Antiskid glue cushion (not shown) is provided with the face of objective table 11.
First boss 1214 can be with respect to the rotary setting of the first locating dowel 1212, to be rotated in level.Preferably, first is convex Platform 1214 is transparent boss.
Referring to Fig. 5, as a malformation, the first locating dowel 1212, the second locating dowel 1222 are obliquely installed, and shape Up big and down small inverted trapezoidal opening from Cheng Yicong top plates 103 to the direction of bottom plate 101 so that in the first locating dowel 1212 and Two locating dowels 1222 coordinate, and different size of mask plate 300 is positioned on the first direction at the different height of objective table 11, To cause same exposure localization tool 100 that there is stronger practicality.
Fig. 1,3 and Fig. 6 are referred to, the second positioning component 13 includes the 3rd keeper 131, and the 4th keeper 132, second drives Moving part 133, the second drive 134 and the second driving member 135.Second drive 134 is two, in a row-shaped to be fixedly installed on bottom In the second direction namely Y direction of plate 101, support, the second drive 134 and the second transmission are provided to the second drive 134 Part 125 forms transmission and coordinated, so that the second actuator 133 drives the 3rd displacement in a second direction of keeper 131, so as to drive The opposite displacement in a second direction of 4th keeper 132, clamping position glass cover-plate 200 and mask plate 300.
It is appreciated that the second actuator 133 can also connect with the 4th keeper 132, the 4th keeper 132 of driving is second Direction top offset, so as to drive the opposite or displacement of supporting or opposing in a second direction of the 3rd keeper.
Second driving member 135 can be driving-chain or transmission belt, to coordinate drive 134 to form Chain conveyer or V belt translation. When the second driving member 135 and two the second drives 134 are V belt translation, the second driving member 135 and two the second drives 134 Dentalation is provided with the face being in contact, dentation is also equipped with the face that the second drive 134 contacts with the second driving member 135 Structure, the second driving member 135 and the second drive 134 coordinate V belt translation more stable by tooth, it is ensured that the second positioning component 13 in second direction to glass cover-plate 200 and the positioning accuracy of mask plate 300.
3rd keeper 131 and the 4th keeper 132 are respectively arranged in the length direction of objective table 11 namely second direction Opposite sides, and be connected with the second driving member 135, can opposed bottom 101 slide.Correspond to the 3rd positioning in top plate 103 Second direction through hole 1033 is offered on the position of the keeper 132 of part 131 and the 4th.3rd keeper 131 and the 4th keeper 132 is exposed by the part of second direction through hole 1033, and is driven by the second actuator 133, with being placed on objective table 11 The two relative sides contact of glass cover-plate 200 and mask plate 300 in a second direction, is realized in a second direction to glass cover Plate 200 and mask plate 300 are positioned, and the second actuator 133 is preferably cylinder.3rd keeper 131 and the 4th keeper 132 Ensure glass cover-plate 200 and mask plate 300 the with glass cover-plate 200 and the Multi-contact of mask plate 300 in a second direction Locating effect on two directions.
Fig. 6 and Fig. 7 A-7B are referred to, the 3rd keeper 131, the 4th keeper 132 and the first keeper 121 and second are fixed Position part 122 has identical structure.
Specifically, as shown in Figure 7 A, the 3rd keeper 131 includes the 3rd locating piece 1311 and the 3rd locating dowel 1312, the Three locating pieces 1311 are connected with the second driving member 135, and the 3rd locating dowel 1312 is connected with the 3rd locating piece 1311, the 3rd locating dowel The high setting such as the 3rd locating slot 1313,1223 relative top plate 103 of the 3rd locating slot 1313 and the second locating slot is offered on 1312, To coordinate the 4th keeper 132 location mask plate in a second direction.Cell wall opening position is prolonged below the 3rd locating slot 1313 Stretch out the 3rd boss 1314, it is preferable that antiskid glue cushion is provided with the 3rd face of the boss 1314 away from objective table 11, and (figure is not Show).
3rd boss 1314 can be with respect to the rotary setting of the 3rd locating dowel 1312, to be rotated in level.Preferably, the 3rd is convex Platform 1314 is transparent boss.
As shown in Figure 7 B, the 4th keeper 132 includes the 4th locating piece 1321 and the 4th locating dowel 1322, the 4th locating piece 1321 are connected with the second driving member 135, and the 4th locating dowel 1322 is connected with the 4th locating piece 1321, is opened in the 3rd locating dowel 1322 Provided with the 4th locating slot 1323, the 4th locating slot 1323 and the 3rd locating slot are relative and wait high setting, to coordinate in second party Upward location mask plate 300.Cell wall opening position extends the 4th boss 1324 below the 4th locating slot 1323, it is preferable that Antiskid glue cushion (not shown) is provided with 4th face of the boss 1324 away from objective table 11.4th boss 1322 can be fixed with respect to the 4th The position rotary setting of post 1322, to be rotated in level.Preferably, the 4th boss 1324 is transparent boss.
Referring to Fig. 8, as a malformation, the 3rd locating dowel 1312, the 4th locating dowel 1322 are obliquely installed, and shape Up big and down small inverted trapezoidal opening from Cheng Yicong top plates 103 to the direction of bottom plate 101 so that in the 3rd locating dowel 1312 and Four locating dowels 1322 coordinate, and different size of mask plate 300 is positioned in the second direction at the different height of objective table 11, To cause same exposure localization tool 100 that there is stronger practicality.
It is appreciated that the positioning to mask plate 300 can only be positioned or only existed in a first direction as needed Positioned in second direction, i.e., only need the positioning in a first direction of the first positioning component 12 or the second positioning component 13 in second party Upward positioning.
Compared with existing design, localization tool provided by the utility model has advantages below:
1st, by setting objective table to be used to place glass cover-plate to be positioned;Determined by setting first on the first keeper Set on position groove and/or the second keeper with the second contour locating slot of the first locating slot to clamp mask plate to be positioned;And By setting the first actuator to drive the first keeper and the synchronously opposite displacement of the second keeper, so that the first keeper and second Keeper realizes positioning in a first direction with mask plate and glass cover-plate EDGE CONTACT in a first direction, to ensure glass cover Plate Correct exposure.
2nd, by setting boss, increase and the contact area of mask plate, so as to which the locating effect to mask plate is more excellent.
The utility model preferred embodiment is the foregoing is only, it is all in this reality not to limit the utility model With any modification made within new principle, equivalent substitution and improve etc. all should include the scope of protection of the utility model it It is interior.

Claims (10)

  1. A kind of 1. localization tool, for positioning glass cover-plate and mask plate with to glass cover-plate relative positioning, it is characterised in that:Bag Include objective table and the first positioning component;
    The objective table is used to place glass cover-plate to be positioned;
    First positioning component includes the first keeper, the second keeper and the first actuator, first keeper and Second keeper is arranged at the opposite sides of the objective table first direction;
    The first locating slot is provided with first keeper, is provided with the second locating slot on second keeper, described One locating slot and second locating slot are equal with the distance of the objective table, and are oppositely arranged in a first direction;
    The mask plate is held on first locating slot or second locating slot;
    First actuator connects first keeper and second keeper, and drives first keeper and institute The synchronously opposite displacement of the second keeper is stated, to realize determining in a first direction with the mask plate and glass cover-plate EDGE CONTACT Position.
  2. 2. localization tool as claimed in claim 1, it is characterised in that:The localization tool also includes the second positioning component;Institute Stating the second positioning component includes the 3rd keeper, the 4th keeper and the second actuator, the 3rd keeper and described Four keepers are arranged at the opposite sides of the objective table second direction;
    Second actuator connects the 3rd keeper and the 4th keeper, and drives the 3rd keeper and institute The synchronously opposite displacement of the 4th keeper is stated, to realize determining in a second direction with the mask plate and glass cover-plate EDGE CONTACT Position;The first direction and the second direction are mutually perpendicular to.
  3. 3. localization tool as claimed in claim 2, it is characterised in that:The 3rd locating slot is provided with 3rd keeper, The 4th locating slot, the 3rd locating slot and the 4th locating slot and the objective table are provided with 4th keeper Apart from equal, and it is oppositely arranged in a second direction.
  4. 4. localization tool as claimed in claim 3, it is characterised in that:3rd locating slot and the groove close to objective table side Extend the 3rd boss at wall;
    4th locating slot extends the 4th boss at the cell wall of objective table side;
    When the mask plate positions in a second direction, the 3rd boss and the 4th boss connect with the mask plate face Touch.
  5. 5. localization tool as claimed in claim 1, it is characterised in that:First locating slot and the groove close to objective table side Extend first boss at wall;
    Second locating slot extends second boss at the cell wall of objective table side;
    When the mask plate positions in a first direction, the first boss and the second boss connect with the mask plate face Touch.
  6. 6. localization tool as claimed in claim 5, it is characterised in that:The first boss and the second boss are away from loading Antiskid glue cushion is provided with the face of platform.
  7. 7. localization tool as claimed in claim 6, it is characterised in that:The first boss can relatively described first locating dowel exist Rotated on horizontal plane.
  8. 8. the localization tool as described in claim 1-7 any one, it is characterised in that:First locating slot is close to the load Spacing between the end face of thing platform and objective table is 6-8mm.
  9. 9. the localization tool as described in claim 1-7 any one, it is characterised in that:First actuator is cylinder.
  10. 10. localization tool as claimed in claim 1, it is characterised in that:First positioning component also includes the first driving member;
    First keeper includes the first locating piece and the first fixed column;Second keeper includes the second locating piece and second Fixed column;
    First locating piece and second locating piece are connected with first driving member, and first actuator first positions Block or the second locating piece synchronous shift;
    First locating dowel and second locating dowel are obliquely installed.
CN201721183071.5U 2017-09-14 2017-09-14 A kind of localization tool Active CN207216271U (en)

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Application Number Priority Date Filing Date Title
CN201721183071.5U CN207216271U (en) 2017-09-14 2017-09-14 A kind of localization tool

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Application Number Priority Date Filing Date Title
CN201721183071.5U CN207216271U (en) 2017-09-14 2017-09-14 A kind of localization tool

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Publication Number Publication Date
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CN201721183071.5U Active CN207216271U (en) 2017-09-14 2017-09-14 A kind of localization tool

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109507848A (en) * 2017-09-14 2019-03-22 凯茂科技(深圳)有限公司 A kind of localization tool and localization method
WO2020019702A1 (en) * 2018-07-24 2020-01-30 武汉华星光电技术有限公司 Mask buffer positioning device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109507848A (en) * 2017-09-14 2019-03-22 凯茂科技(深圳)有限公司 A kind of localization tool and localization method
WO2020019702A1 (en) * 2018-07-24 2020-01-30 武汉华星光电技术有限公司 Mask buffer positioning device

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