KR102451491B1 - Display panel floating stage device having a foreign materia storage space - Google Patents

Abstract

The present invention relates to a display panel floating stage apparatus having a foreign matter accommodation space. To this end, the display panel floating stage apparatus having a foreign matter accommodation space comprises: a top plate having a large number of air supply holes and vacuum holes formed in an alternating pattern for a display panel to stably float; a particle accommodation plate coupled to the bottom surface of the top plate and having a large number of channels formed to communicate with each of the air supply holes and the vacuum holes; a plurality of pressure maintaining plates coupled to the bottom surface of the particle accommodation plate and having pressure maintaining holes formed to communicate with each of the channels; a first bottom plate coupled to the bottom surface of the pressure maintaining plates and branching vacuum pressure into the pressure maintaining holes communicating with each vacuum hole; a second bottom plate coupled to the bottom surface of the first bottom plate and branching an air supply pressure to the pressure maintaining holes communicating with each air supply hole; and a manifold coupled to the bottom surface of the second bottom plate and supplying vacuum pressure and air supply pressure to the first bottom plate or the second bottom plate. Each channel of the particle accommodation plate has a separate accommodation space for accommodating foreign matter such as solutions and particles introduced through the vacuum holes. The present invention enables a display panel to float in a stable manner.

Description

Display panel floating stage device having a foreign material accommodation space {DISPLAY PANEL FLOATING STAGE DEVICE HAVING A FOREIGN MATERIA STORAGE SPACE}

The present invention relates to a display panel floating stage device having a foreign material accommodating space, and more particularly, by providing an accommodating space that can accommodate particles or chemical liquid flowing into the vacuum hole by adhering to the vacuum hole, the negative pressure of the vacuum hole is prevented from being lowered, In addition, the vacuum pressure and air supply pressure do not change even in areas with and without resistance of the display panel, so that the display panel is floated stably without shaking. It relates to a display panel floating stage device having a foreign material accommodating space so as to be sprayed to stably maintain the flatness of the display panel.

In general, looking at the configuration of flat panel displays used in TVs, monitors, mobile phones, etc., a grid pattern is formed on a transparent display panel, there is a backlight behind them, there is a liquid crystal between them, and a color filter is placed in front of the display panel. do.

By the electric signal applied to the grid pattern, the liquid crystal can block or pass light at a specific position, and a display device in this way is called an 'LCD'. In some cases, organic materials are used instead of liquid crystals, and since these organic materials emit light by themselves when they receive an electric signal, there is no need for a backlight.

A lot of processes go through until the flat panel display device (FPD) as described above is made. In this process, the display panel is repeatedly moved and inspected. The method of moving the display panel differs depending on the process characteristics. For simple transfer, a roller, index, or robot arm is used. However, since precise transfer is required in the inspection process, non-contact transfer is recommended. Common, non-contact conveying devices include pneumatic and floating stages.

Looking at some characteristics that the levitation stage should have, a small amount of air as small as possible should constantly flow out under an appropriate pressure, and the flowed air should be inhaled without clogging.

In recent years, as the size of the display increases, the corresponding precision also increases, and accordingly, the panel transport precision is also required to be high.

At this time, if the display panel is shaken when it is moved, the image coming into the camera is not good and the quality of defect inspection is reduced.

That is, when vertical shaking of the display panel occurs, the display panel, which is a subject, is out of focus of the lens, and thus a satisfactory inspection image cannot be obtained, which causes deterioration of inspection ability.

Here, when the display panel moves, it is the levitation stage that is most closely related to the degree of shaking up and down. If the amount of air coming out through the floating stage is not constant or if the air flow is not smooth, the display panel will shake.

The reason can be seen as the pressure and volume change between the levitation stage and the display panel.

Therefore, it is most important to minimize the amount of air while maintaining an appropriate pressure in the flotation stage and to allow the air to escape well.

The above-mentioned appropriate pressure is a pressure having a resistive force such that the display panel does not contact the levitation stage. When the pressure is low, the conveying precision is improved, but the possibility of contact with the levitation stage is high.

Also, if the pressure is too high, depending on the design, it may cause deformation of the floating stage in the long term. Therefore, it is important to maintain an appropriate pressure by analyzing the display panel, inspection precision, and process well.

In addition, even if the appropriate pressure is reached, if the air flow rate is large, the influence of turbulence during air blowing increases and the display panel may shake. Also, as much air cannot escape quickly, partial air stagnation occurs, resulting in a change in the gap between the display panel and the levitation stage. This phenomenon also reduces the stability of the injury, so it is difficult to obtain a good examination image.

A resistor is needed to reduce the airflow. The resistor serves to create a pressure and control the amount of air at the same time. Therefore, it can be said that the resistor is the most important technical element in the levitation stage.

Furthermore, even if an appropriate pressure is formed and the air flow rate is small, it is difficult to stably transport the display panel if there is no intake air.

The part that is generally neglected in designing the levitation stage is the intake part. Intake is just as important as the resistor.

No matter how little air is released, it will accumulate on the injury stage over time. If there is no intake, the display panel moves in an umbrella shape, making it difficult to obtain a high-quality sword image. Therefore, it is essential to secure a flow path that can quickly inhale the air flowing from the bottom of the flotation stage.

Meanwhile, the display panel may apply a photosensitive coating solution to form a photoresist (PR), a black matrix (BM), a column space (CS), and the like.

In addition, when manufacturing a PDP panel, a coating solution or a photosensitive coating solution may be applied to form an upper dielectric, a lower dielectric, and a barrier rib on the PDP panel substrate.

However, there is a problem that the photosensitive coating solution adheres to the inside of the vacuum hole of the levitation stage and clogging occurs.

Due to these problems, after replacing the new flotation stage, the production line must be restarted by measuring the leveling and flotation amount, which takes about 2 days.

Republic of Korea Patent Registration No. 10-1179736

The present invention has been devised in view of the above problems, and a first object of the present invention is to provide an accommodating space that can accommodate particles or chemical liquid flowing into the vacuum hole by adhering to it, thereby preventing the negative pressure of the vacuum hole from being lowered. , It relates to a display panel floating stage device having a foreign material accommodating space so that the equipment can be maintained for a long time without a pause time due to washing of the vacuum line.

A second object of the present invention is a display panel floating stage having a foreign material accommodating space that allows the display panel to be stably floated without shaking because the vacuum pressure and the air supply pressure do not change even in a portion with resistance and a portion without resistance of the display panel. It's about the device.

A third object of the present invention is to provide a display panel floating stage device having a foreign material accommodating space that allows only supply air pressure to be sprayed without vacuum pressure on both sides of the display panel where sagging occurs to stably maintain the flatness of the display panel. is to provide

According to a feature for achieving the above object, the first invention relates to a display panel floating stage device having a foreign material accommodation space, and for this purpose, a plurality of air supply holes and vacuum holes are provided to stably float the display panel. A top plate formed in a plurality of alternating patterns; and a particle accommodating plate coupled to a bottom surface of the top plate and having a plurality of channels communicating with each air supply hole and a vacuum hole; and coupled to the bottom surface of the particle accommodating plate a plurality of pressure maintaining plates that are formed to form pressure holding holes communicating with each channel; and a first bottom plate coupled to a bottom surface of the pressure holding plate and branching vacuum pressure into pressure holding holes communicating with each vacuum hole and a second bottom plate coupled to a bottom surface of the first bottom plate and branching air supply pressure to a pressure holding hole common to each air supply hole; and a first bottom plate coupled to the bottom surface of the second bottom plate or a manifold for supplying vacuum pressure and air supply pressure to the second bottom plate; each channel of the particle accommodating plate is a separate accommodating space for accommodating foreign substances such as chemicals or particles introduced through the vacuum hole. It is characterized in that it is formed.

In the second invention, in the first invention, each channel of the particle accommodating plate has an accommodating groove connected to the air supply hole and the vacuum hole, a distribution chamber formed in parallel in close proximity to the accommodating groove, and the accommodating groove and the distribution chamber It is characterized in that it comprises a first communication path for communicating the upper portion, and a first distribution hole formed in the lower portion of the distribution chamber.

In the third invention, in the second invention, the accommodating groove has an inner diameter relatively larger than that of the distribution chamber and is configured to have an expanded inner volume, and the inner diameter of the first communication path and the first distribution hole is air It is characterized in that the inner diameter is formed to be relatively smaller than that of the receiving groove and the distribution chamber to generate resistance.

In the fourth invention, in the second invention, the inner diameter of the first communication path and the first distribution hole of the channel connected to each vacuum hole is larger than that of the first communication path and the first distribution hole of the channel connected to the air supply hole. Display panel floating stage device having a foreign material accommodation space, characterized in that the form.

In the fifth invention, in the first invention, the pressure retaining hole of the pressure retaining plate has a first pressure retaining chamber connected to the channel of the particle accommodating plate, and a second pressure retaining space formed in parallel with the first pressure retaining chamber in close proximity. a seal, a second communication path for communicating the upper portions of the first pressure holding chamber and the second pressure holding chamber, and a second distribution hole formed under the second pressure holding chamber, wherein the second communication path and the second The circulation hole is characterized in that the inner diameter is relatively smaller than that of the first and second pressure holding chambers.

In the sixth invention, in the fifth invention, the pressure maintaining hole connected to the vacuum hole has a second communication path and a second distribution hole, compared to the second communication path and the second distribution hole of the pressure maintaining hole connected to the air supply hole. It is characterized in that the inner diameter is further expanded.

In the seventh invention, in the fifth invention, any one of the pressure retaining plates is characterized in that the second pressure retaining chamber connected to the vacuum hole is extended and extended without the second distribution hole.

In the eighth invention, in the first invention, the first bottom plate includes a vacuum furnace formed in parallel at a predetermined interval to supply vacuum pressure to the respective vacuum holes, and a plurality of tree-shape on both sides in the longitudinal direction of each vacuum furnace. It is characterized in that the branched first branch passage communicating with the vacuum hole is formed.

In the ninth invention, in the first invention, the second bottom plate has a supply passage formed in parallel at a predetermined interval to supply air pressure to the air supply hole, and a plurality of branches in a tree shape on both sides of the longitudinal direction of each air supply passage. It is characterized in that a second branch passage communicating with the air supply hole is formed.

In the tenth invention, in the first invention, the top plate is characterized in that only the air supply holes are arranged at regular intervals without vacuum holes along the side lateral sides of the first row.

According to the display panel floating stage device having a foreign material accommodating space of the present invention, by providing an accommodating space that can accommodate particles or chemical liquid flowing into the vacuum hole by preventing the negative pressure of the vacuum hole from being lowered, the vacuum line can be washed. There is an effect that the equipment can be maintained for a long time without any downtime.

In addition, there is an effect that can reduce the number of installation of the pressure holding plate in half by building the pressure holding chamber formed in the pressure holding plate in parallel.

In addition, there is an effect that the display panel can be stably floated without shaking because the vacuum pressure and the air supply pressure do not change even in the portion with and without resistance of the floating display panel.

In addition, there is an effect of stably maintaining the flatness of the display panel by allowing only supply pressure to be sprayed without vacuum pressure on both sides of the display panel where sagging occurs.

1 is a perspective view of a display panel floating stage device having a foreign material receiving space according to the present invention;
Figure 2 is a bottom perspective view of Figure 1,
Figure 3 is an exploded perspective view of the display panel floating stage device having a foreign material receiving space according to the present invention,
Figure 4 is a perspective view of the particle receiving plate extracted from Figure 3,
Figure 5 is a perspective view of the pressure retention plate taken from Figure 3,
6 is a plan view showing the first bottom plate extracted from FIG. 3;
7 is a plan view showing the second bottom plate extracted from FIG. 3;
Fig. 8 is a perspective view showing the manifold taken from Fig. 3;
9 is a projection view showing the connection state of the first and second bottom plates, the manifold and the socket block according to the present invention;
Figure 10 is a cross-sectional view showing the operating state of the air supply pressure and vacuum pressure of the display panel floating stage device having a foreign material accommodation space of the present invention according to the present invention;
11 is an enlarged view showing the moving state of the vacuum pressure extracted from FIG.
12 is an enlarged view showing the movement state of the air supply pressure extracted in FIG.

The following objects, other objects, features and advantages of the present invention will be readily understood through the following preferred embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms.

Rather, the embodiments introduced herein are provided so that the disclosed subject matter may be thorough and complete, and that the spirit of the present invention may be sufficiently conveyed to those skilled in the art.

The embodiments described and illustrated herein also include complementary embodiments thereof.

In this specification, the singular also includes the plural, unless specifically stated otherwise in the phrase. As used herein, the terms 'comprise' and/or 'comprising' do not exclude the presence or addition of one or more other components.

Hereinafter, the present invention will be described in detail with reference to the drawings. In describing the specific embodiments below, various specific contents have been prepared to more specifically explain and help the understanding of the invention. However, a reader having enough knowledge in this field to understand the present invention may recognize that it can be used without these various specific details. In some cases, it is mentioned in advance that parts which are commonly known and not largely related to the invention in describing the invention are not described in order to avoid confusion in describing the invention.

Hereinafter, it will be described in detail together with the accompanying drawings with respect to the display panel floating stage device having a foreign material receiving space according to the present invention.

Figure 1 is a perspective view of a display panel floating stage device having a foreign material receiving space according to the present invention, Figure 2 is a bottom perspective view of Figure 1, Figure 3 is an exploded display panel floating stage device having a foreign material receiving space according to the present invention It is a perspective view, Figure 4 is a perspective view of the particle receiving plate extracted from Figure 3, Figure 5 is a perspective view of the pressure retention plate extracted from Figure 3, Figure 6 is a plan view showing the first bottom plate extracted from Figure 3, 7 is a plan view showing the second bottom plate extracted from FIG. 3 , FIG. 8 is a perspective view showing the manifold extracted from FIG. 3 , and FIG. 9 is the first and second bottom plates according to the present invention, the manifold and It is a projection view showing the connection state of the socket block, Figure 10 is a cross-sectional view showing the operating state of the supply air pressure and vacuum pressure of the display panel floating stage device having a foreign material accommodation space of the present invention according to the present invention, Figure 11 is in Figure 10 It is an enlarged view showing the moving state of the extracted vacuum pressure, and FIG. 12 is an enlarged view showing the moving state of the supply air pressure extracted in FIG.

As shown in FIGS. 1 to 12, the present invention provides an accommodating space that can accommodate foreign substances such as particles or chemicals introduced into the vacuum hole by adhering to it, thereby preventing the negative pressure of the vacuum hole from being lowered, and, together with the display panel The vacuum pressure and air supply pressure do not change even in areas with resistance and in areas without resistance, so that the display panel is stably floated without shaking. It relates to a display panel floating stage device 100 having a foreign material accommodating space to stably maintain the flatness of the panel.

The display panel floating stage device 100 having such a foreign material receiving space of the present invention is largely composed of six parts, which include a top plate 10, a particle accommodating plate 20, and a pressure maintaining plate 30, The first and second bottom plates 40 and 50 and the manifold 60 are sequentially stacked and coupled.

As shown in FIG. 1 , the top plate 10 has a structure in which a plurality of air supply holes 11 and vacuum holes 12 are formed in an alternating pattern in order to stably float the display panel 200 .

At this time, the air supply pressure generated in the air supply hole 11 is relatively larger than the vacuum pressure generated in the vacuum hole 12 , so that the display panel 200 can float.

The particle receiving plate 20 is coupled to the bottom surface of the top plate 10 as shown in FIGS. 4 and 10 to form a plurality of channels 21 through which the air supply hole 11 and the vacuum hole 12 communicate with each other. is a structure that becomes

In particular, each channel 21 of the particle accommodating plate 20 is formed with an accommodating groove 211, which is a separate accommodating space for accommodating the chemical or particles introduced through the vacuum hole 12, as shown in FIG. (12) is made to prevent the sound pressure from being lowered.

Each channel 21 of the particle accommodating plate 20 has an accommodating groove 211 connected to the air supply hole 11 and the vacuum hole 12, and a distribution formed in parallel in close proximity to the accommodating groove 211. A first communication path 213 for communicating the seal 212 with the receiving groove 211 and the upper portion of the distribution chamber 212 , and a first distribution hole 214 formed in the lower portion of the distribution chamber 212 . is made of

In particular, the accommodating groove 211 of the channel 21 connected to the vacuum hole 12 has a function of accommodating and adhering foreign substances, such as chemicals or particles, introduced through vacuum negative pressure, as shown in FIG. 11 .

The accommodating groove 211 and the distribution chamber 212 are processed to be elongated to the lower part of the particle accommodating plate 20 so that the volume is increased so as to secure a larger accommodating space.

In this case, the accommodating groove 211 may have a relatively larger inner diameter than that of the distribution chamber 212 and thus may be configured in a form in which an internal volume is expanded.

In addition, the distribution chamber 212 may also have a function of accommodating some particles or a chemical solution.

Therefore, the channel 21 connected to the vacuum hole 12 adheres to the inside of the receiving groove 211 when foreign substances such as particles or chemical liquid are introduced together with external air by vacuum negative pressure, and the suction air is the first It is made to be discharged to the first distribution hole 214 through the communication path 213 and the distribution chamber 212 .

Accordingly, the negative pressure of the vacuum hole 12 is lowered to prevent the floating amount of the display panel 200 from being unbalanced, and also it is possible to delay the stop of the facility due to the cleaning of the vacuum line.

In addition, the first communication path 213 and the first distribution hole 214 of the channel 21 connected to each vacuum hole 12 are the first communication paths of the channel 21 connected to the air supply hole 11 ( 213) and the first distribution hole 214 has a larger inner diameter. This is to increase the amount of air sucked in by the vacuum, since the resistance of the vacuum pressure is greater, so as to balance the intake amount compared to the supply air amount.

The pressure retaining plate 30 is coupled to the particle receiving plate 20 as shown in FIGS. 5 and 10 to 12 to form a plurality of pressure retaining holes 31 communicating with each channel 21 . is the structure

The pressure maintaining plate 30 functions to constantly maintain the air supply pressure sprayed from the air supply hole 11 of the top plate 10 and the vacuum negative pressure sucked from the vacuum hole 12 .

To this end, the pressure holding hole 31 of the pressure holding plate 30 includes a first pressure holding chamber 311a connected to the channel 21 of the particle accommodating plate 20, and the first pressure holding chamber 311a. ) and a second pressure holding chamber (311b) formed in parallel in close proximity, and a second communication path (312) for communicating the upper portion of the first pressure holding chamber (311a) and the second pressure holding chamber (311b); It is composed of a second distribution hole 313 penetrating through the lower portion of any one of the first and second pressure holding chambers 311a and 311b.

In addition, each of the pressure holding holes 31 is made so that the first and second pressure holding chambers 311a and 311b are built in parallel to reduce the number of pressure holding plates 30 installed in half (two).

In addition, the pressure holding hole 31 connected to the air supply hole 11 in the above generates a vortex in the air supplied through the first and second pressure holding chambers 311a and 311b to function as a so-called resistor to lower the pressure. do.

In addition, the second communication path 312 and the second distribution hole 313 are formed to have relatively smaller inner diameters than the first and second pressure holding chambers 311a and 311b. function to reduce it.

Here, the inner diameter sizes of the first and second pressure holding chambers 311a and 311b, the second communication path 312 and the second distribution hole 313 may vary according to the size and weight of the display panel 200 .

Meanwhile, the pressure holding hole 31 connected to the vacuum hole 12 can prevent the vacuum pressure from being increased through the first and second pressure holding chambers 311a and 311b, and the second communication path 312 . And the second distribution hole 313 allows the intake air amount to be adjusted as much as the supply air amount.

At this time, the pressure maintaining hole 31 connected to the vacuum hole 12 is the second communication path 312 and the second distribution hole 313 of the pressure maintaining hole 31 connected to the air supply hole 11 . The inner diameter is further expanded compared to the second communication path 312 and the second distribution hole 313 so that it is possible to balance the intake amount compared to the supply air amount.

In addition, in order to balance the suction amount compared to the supply air amount, any one of the two pressure maintaining plates 30 has a second pressure holding chamber 311b connected to the vacuum hole 12 extended without a second distribution hole 313 . can be configured.

As described above, the air supply amount and the air supply pressure of the air discharged through the air supply hole 11 can be constantly maintained while passing through the pressure maintaining hole 31 of the pressure maintaining plate 30 in multiple stages.

In addition, the vacuum pressure and the intake amount sucked through the vacuum hole 12 can also be kept constant while passing through the pressure maintaining hole 31 of the pressure maintaining plate 30 in multiple stages.

Therefore, the top plate 10 does not change the vacuum pressure and the air supply pressure even in the portion where there is resistance and the portion where there is no resistance of the display panel 200 through the pressure maintaining plate 30, so that the display panel 200 is stable without shaking. can be injured by

As shown in FIG. 6 , the first bottom plate 40 is coupled to the lower surface of the pressure holding plate 30 to selectively supply vacuum pressure to the pressure holding holes 31 communicating with the respective vacuum holes 12 . function to

The first bottom plate 40 includes a vacuum furnace 41 formed in parallel at a predetermined interval in order to supply vacuum pressure to each vacuum hole 12, and a tree on both sides in the longitudinal direction of each vacuum furnace 41. It has a structure in which a first branch path 411 communicating with the vacuum hole 12 is formed by branching in a plurality of shapes.

Here, each of the first branch passages 411 selectively communicates with the second distribution hole 313 of the pressure holding hole 31 communicating with the vacuum hole 12 so as to suck air by vacuum negative pressure. do.

In each vacuum path 41 of the first bottom plate 40 , a plurality of first connection paths 412 are formed separately from the first branch path 411 . A first through hole 413 for receiving air pressure is further formed.

At this time, as shown in FIG. 10 , the first through hole 413 is extended to the second bottom plate 50 to generate a vacuum negative pressure for intake without interference of the second bottom plate 50 .

In addition, the second bottom plate 50 is fixed to the lower surface of the first bottom plate 40 in order to supply air to the air supply hole 11, as shown in FIG. 51) and a second branch passage 511 that is branched in a tree shape on both sides of the supply passage 51 in the longitudinal direction.

Here, each of the second branch passages 511 is configured to selectively communicate with the second distribution hole 313 of the pressure holding hole 31 communicating with the air supply hole 11 so that air for air supply can be supplied. .

In addition, a plurality of second connection passages 512 are formed in each supply passage 51 of the second bottom plate 50 separately from the second branch passage 511 . A second through hole 513 for receiving air pressure may be further formed.

As shown in FIG. 8 , the manifold 60 is coupled to the second bottom plate 50 to supply vacuum pressure and air supply pressure to the first bottom plate 40 or the second bottom plate 50 . .

One or a plurality of such manifolds may be coupled, fixed to the lower surface of the second bottom plate 50 , and the air supply passage 51 of the first bottom plate 40 and the second bottom plate 50 . It has a structure in which the supply air supply path 61 and the vacuum supply path 62 that are individually communicated with the vacuum furnace 41 of the are formed side by side in parallel.

Here, the air supply passage 61 communicates with the second through holes 513 formed in each second connection passage 512 of the second bottom plate 50 to supply air pressure to each air supply passage 51 . function

And the vacuum supply path 62 communicates with the first through holes 413 formed in each first connection path 412 of the first bottom plate 40 so that vacuum pressure is supplied to each vacuum path 41 . function

Also, the lower surface of the manifold 60 further includes an air supply terminal hole 611 communicating with the air supply passage 61 and a vacuum terminal hole 621 communicating with the vacuum supply passage 62 .

At this time, the manifold 60 has the vacuum terminal hole 621 and the air supply terminal hole 611 has a socket block 70 for connecting the vacuum hose 71 and the air supply hose 72 to be combined. can

On the other hand, the display panel floating stage device 100 having a foreign material accommodating space of the present invention maintains the flatness of the display panel 200 by generating only supply pressure without vacuum pressure on both sides of the side of the display panel 200 where sagging occurs. configured to be able to

To this end, as shown in FIG. 1 , in the top plate 10 , only the air supply holes 11 without the vacuum holes 12 are disposed at a predetermined interval along the side lateral sides of the first row.

And in the supply passages 51 disposed on both sides of the supply passages 51 of the second bottom plate 50 , the auxiliary supply passages 52 without the second branch passages 511 are provided in the respective air supply holes 11 . is done in accordance with

A third through hole 521 for receiving air may be formed in the auxiliary air supply passage 52 of the second bottom plate 50 .

And the manifold 60 may be further formed with an auxiliary supply passage 63 for individually supplying air to the two auxiliary air supply passages (52).

In addition, the upper surface of the manifold 60 is also formed with two auxiliary terminal holes 631 that are in communication with the auxiliary supply path 63, and each of these two auxiliary terminal holes 631 can be individually supplied with air supply pressure. The auxiliary socket block 80 is coupled to each other.

Through this, the air supply holes 11 disposed in the first row on both sides of the top plate 10 can individually provide separate air supply pressure, so that in addition to the flatness of the display panel 200 , the display panel 200 . Depending on the size, the display panel 200 may serve as an air fence so that the display panel 200 is transported in a straight line.

The air supply and intake paths of the display panel floating stage device having a foreign material receiving space of the present invention described above and described above are as follows.

11 and 12 ,

Vacuum line: Vacuum tank (not shown) ← Socket block ← Manifold (vacuum conduit hole ← Vacuum supply path) ← 1st bottom plate (1st connection path ← 1st through hole ← 1st branch path ← Vacuum path) ← Pressure maintenance Plate (Pressure holding hole: 2nd distribution hole ← 1st pressure holding chamber ← 2nd communication path ← 2nd pressure holding chamber ← 2nd pressure holding chamber ← 2nd communication path ← 1st pressure holding chamber) ← Particle receiving plate ( Channel: 1st distribution hall ← Distribution room ← 1st communication path ← Receiving groove) ← Top plate (vacuum hole)

Air supply line: Compression tank (not shown) → Socket block → Manifold (air supply terminal hole → supply air supply path) → 2nd bottom plate (2nd connection path → 2nd through hole → 2nd branch path-supply path) → Pressure maintenance Plate (2nd distribution hole → 1st pressure holding chamber → 2nd communication path → 2nd pressure holding chamber → 2nd distribution hole → 2nd pressure holding room → 2nd communication path → 1st pressure holding chamber) → Particle receiving plate (Channel: 1 distribution hall → distribution room → 1 communication passage → receiving groove) → Top plate (supply air hole)

Air supply line at the outer edge of the top plate: Compression tank (not shown) → Auxiliary socket block → Manifold (Auxiliary terminal hole → Auxiliary supply path) → 2nd bottom plate (3rd hole → Auxiliary supply path) → Pressure retention plate (No. 2 distribution hole → 1st pressure holding chamber → 2nd communication path → 2nd pressure holding room → 2nd distribution hole → 2nd pressure holding room → 2nd communication path → 1st pressure holding room) → Particle receiving plate (Channel: 1st distribution hall → Distribution room → 1st communication passage → Receiving groove) → Top plate (Side outer air supply hole)

The embodiments described in this specification and the configurations shown in the drawings are only the most preferred embodiment of the present invention and do not represent all the technical spirit of the present invention, so various equivalents that can be substituted for them at the time of the present application It should be understood that there may be variations and examples.

10: top plate
11: air supply hole 12: vacuum hole
20: particle receiving plate
21: channel 211: receiving groove
212: distribution room 213: first communication passage
214: first distribution hall
30: pressure retention plate
31: pressure holding hole 311a: first pressure holding chamber
311b: second pressure holding chamber 312: second communication passage
313: second distribution hall
40: first bottom plate
41: vacuum furnace 411: first branch furnace
412: first connection road 413: first through hole
50: second bottom plate
51: supply air 511: second branch
512: second connection road 513: second through hole
52: auxiliary supply air 521: third hole
60: manifold 61: supply air supply path 611: air supply terminal hole
62: vacuum supply path 621: vacuum terminal hole
63: auxiliary supply path 631: auxiliary terminal hole
70: socket block 71: vacuum hose 72: air supply hose
80: auxiliary socket block
100: Display panel floating stage device having a foreign material accommodation space
200: display panel

Claims (10)

a top plate 10 in which a plurality of air supply holes 11 and vacuum holes 12 are formed in an alternating pattern in order to stably float the display panel 200;
a particle receiving plate 20 coupled to the bottom surface of the top plate 10 and having a plurality of channels 21 communicating with each of the air supply holes 11 and the vacuum holes 12;
a plurality of pressure holding plates 30 coupled to the bottom surface of the particle receiving plate 20 and having pressure holding holes 31 communicating with each channel 21 formed therein;
a first bottom plate 40 coupled to the bottom surface of the pressure maintaining plate 30 and branching the vacuum pressure into the pressure maintaining holes 31 communicating with each of the vacuum holes 12 ;
a second bottom plate (50) coupled to a bottom surface of the first bottom plate (40) and branching air supply pressure to a pressure holding hole (31) that is in common with each of the air supply holes (11);
A manifold 60 coupled to the lower surface of the second bottom plate 50 to supply vacuum pressure and air supply pressure to the first bottom plate 40 or the second bottom plate 50;
Each channel 21 of the particle accommodating plate 20 is formed with a separate accommodating space for accommodating foreign substances such as chemicals or particles introduced through the vacuum hole 12,
Each channel 21 of the particle accommodating plate 20 has an accommodating groove 211 connected to the air supply hole 11 and the vacuum hole 12, and a distribution chamber formed in parallel in close proximity to the accommodating groove 211. 212, a first communication path 213 for communicating the receiving groove 211 with the upper portion of the distribution chamber 212, and a first distribution hole 214 formed in the lower portion of the distribution chamber 212. Display panel floating stage device having a foreign material accommodation space, characterized in that made.
delete According to claim 1,
The accommodating groove 211 has a relatively larger inner diameter than the distribution chamber 212 and is configured to have an expanded internal volume,
The inner diameter of the first communication path 213 and the first distribution hole 214 is a foreign material receiving space, characterized in that the inner diameter is formed relatively smaller than the receiving groove 211 and the distribution chamber 212 to generate air resistance. A display panel floating stage device having a display panel.
According to claim 1,
The first communication path 213 and the first distribution hole 214 of the channel 21 connected to each vacuum hole 12 are the first communication path 213 of the channel 21 connected to the air supply hole 11 . ) and a display panel floating stage device having a foreign material accommodation space, characterized in that the inner diameter is larger than that of the first distribution hole 214 .
According to claim 1,
The pressure holding hole 31 of the pressure holding plate 30 includes a first pressure holding chamber 311a connected to the channel 21 of the particle accommodating plate 20, and the first pressure holding chamber 311a and A second pressure holding chamber (311b) formed in parallel adjacent to each other, a second communication path (312) for communicating the upper portion of the first pressure holding chamber (311a) and the second pressure holding chamber (311b), and the 2 Doedoe composed of a second distribution hole 313 formed in the lower portion of the pressure holding chamber (311b),
The second communication path 312 and the second distribution hole 313 have a relatively smaller inner diameter than the first and second pressure holding chambers 311a and 311b. Panel floating stage device.
6. The method of claim 5,
The pressure holding hole 31 connected to the vacuum hole 12 is the second communication path 312 and the second distribution hole 313 of the pressure holding hole 31 connected to the air supply hole 11 . A display panel floating stage device having a foreign material accommodation space, characterized in that the inner diameter is further expanded compared to the communication path 312 and the second distribution hole 313 .
6. The method of claim 5,
Any one of the pressure holding plate 30 is a foreign material receiving space, characterized in that the second pressure holding chamber (311b) connected to the vacuum hole (12) is extended without the second distribution hole (313) A display panel floating stage device having a display panel.
According to claim 1,
The first bottom plate 40 includes a vacuum furnace 41 formed in parallel at a predetermined interval to supply vacuum pressure to each vacuum hole 12, and a tree on both sides in the longitudinal direction of each vacuum furnace 41. A display panel floating stage device having a foreign material accommodating space, characterized in that a plurality of branches in the form of a first branch passage 411 communicating with the vacuum hole 12 is formed.
According to claim 1,
The second bottom plate 50 has an air supply passage 51 formed in parallel at a predetermined interval to supply air pressure to the air supply hole 11, and a tree shape on both sides in the longitudinal direction of each air supply passage 51. A display panel floating stage device having a foreign material accommodation space, characterized in that a plurality of branches are formed and a second branch passage (511) communicating with the air supply hole (11) is formed.
According to claim 1,
The top plate 10 is a display panel floating stage device having a foreign material accommodating space, characterized in that only the air supply holes 11 without vacuum holes are arranged at regular intervals along the side lateral sides of the first row.

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