KR102177641B1 - Spray apparatus and method - Google Patents

Abstract

The present invention relates to an injection device for injecting a fluid to clean an object such as a substrate, comprising: a first injection unit for injecting a first fluid or a first mixed fluid in which the first fluid and the second fluid are mixed to the object; And a second injection unit for injecting a third fluid or a second mixed fluid in which the third fluid and the fourth fluid are mixed to the object, wherein the first injection unit and the second injection unit include at least one block It may be formed in a block body including.

Description

Spray apparatus and method TECHNICAL FIELD

The present invention relates to an injection device and method, and more particularly, to an injection device and method for injecting a fluid to clean an object such as a substrate.

In general, flat panel display devices using OLED (Organic Light Emitting Diodes), LCD (Lipuid Crystal Display), PDP (Plasma Display Panel), ELD (Electro luminescent Display), VFD (Vacuum Fluorescent Display), etc. However, it is widely used in that it uses relatively low power.

These flat panel display devices are manufactured by performing numerous processes on a substrate such as a glass substrate, a film substrate, or a semiconductor substrate, and in the process, various particles, by-products such as dust, substrate fragments, metal fragments, polymers, organic substances, microorganisms, etc. Foreign matter may be generated.

In order to clean these foreign substances, conventionally, there has been a physical method using a physical force such as a brush or ultrasonic vibration.

However, such a physical cleaning method has problems such as fine scratches on the surface of the substrate or damage to the substrate.

On the other hand, as described in Korean Patent Registration No. 10-0724696, a water spray unit that performs cleaning by spraying water and a steam having a set pressure on the area to be cleaned of the object to be cleaned before water is sprayed, A wet cleaning device using a steam injection unit for red cleaning has been developed.

However, such a conventional cleaning apparatus has a single spray unit, and there are cases where cleaning power is insufficient with only a single spray unit, and foreign substances that are momentarily separated from the substrate by the single injection unit float along the liquid film, and then other areas of the substrate or other substrates. Or, it may be adsorbed to other equipment and re-contaminated. Rather, the defective area may be expanded by dispersing contaminants, or other substrates or other equipment may be adversely affected.

In addition, due to the limitation of a single spraying unit, such a conventional cleaning device cannot uniformly spray the fluid over the entire width of a large substrate, resulting in poor cleaning uniformity, and it is difficult to manufacture because the nozzle is formed in an integral shape. There were problems such as increase in manufacturing cost and time.

The idea of the present invention is to solve these problems, as well as securing sufficient cleaning power by using two spraying portions, and forming a block body so that a suction portion is formed between the two spraying portions to be separated from the substrate. By rapidly inhaling foreign substances, it is possible to prevent re-contamination of the substrate or the propagation of contamination to other substrates or equipment, and it is easy to manufacture by using a block body made of several blocks. It is to provide an injection apparatus and method that can inject a fluid and clean the surface of an object sequentially or stepwise by varying the type of each fluid to be injected, thereby greatly improving cleaning performance. However, these problems are exemplary, and the scope of the present invention is not limited thereby.

An injection device according to the present invention for solving the above problem includes: a first injection unit for injecting a first fluid or a first mixed fluid in which the first fluid and the second fluid are mixed to an object; And a second injection unit for injecting a third fluid or a second mixed fluid in which the third fluid and the fourth fluid are mixed to the object, wherein the first injection unit and the second injection unit include at least one block It is formed in a block body comprising a, the block body, the suction part forming block in which the suction part is formed; A first injection unit forming block assembled on one side of the suction unit forming block and having the first injection unit formed on a surface opposite to the suction unit forming block; And a second injection unit forming block assembled on the other side of the suction unit forming block and having the second injection unit formed on a surface facing the suction unit forming block.

In addition, according to the present invention, the suction unit forming block is generally formed in a straight cross-section, and the first injection unit forming block has a lower cross-section as a whole rises along one side of the suction unit forming block, and the A first bent part is formed in a shape that is first bent in a direction away from the suction part forming block so that the first fluid dispersion receiving part is formed between the suction part forming block, and the upper part thereof is in the upper direction of the suction part forming block The second bent portion is formed in a second bent shape, and the second injection unit forming block has a lower cross section as a whole, rising along the other side of the suction unit forming block, and is then interposed between the suction unit forming block. 3 A first bent portion is formed in a shape that is first bent in a direction away from the suction unit forming block so that the fluid dispersion receiving unit is formed, and a second bent in a shape in which the upper portion is secondly bent in a direction above the suction unit forming block Additional can be formed.

In addition, according to the present invention, the block body includes the base block, the injection unit forming block, and the suction unit forming block, the base block assembled to fix the injection unit forming block and the suction unit forming block. A block fixture for pressing the block; A second fluid supply pipe formed in the first injection unit forming block to be connected to the second fluid supply unit; A fourth fluid supply pipe formed in the second injection unit forming block to be connected to a fourth fluid supply unit; A first fluid supply pipe formed in the first injection unit forming block to be connected to the first fluid dispersion receiving unit; A third fluid supply pipe formed in the second injection part forming block to be connected to a third fluid dispersion receiving part; And a suction pipe formed in the suction part forming block to be connected to the suction part.

In addition, the injection device according to the present invention may further include a suction unit configured to suck foreign substances separated from the object by the first mixed fluid or the second mixed fluid, and the suction unit may be formed in the block body. have.

In addition, according to the present invention, the first injection unit has a first fluid inlet through which the first fluid is introduced, and has a first width so that the first fluid introduced through the first fluid inlet is evenly distributed. A first fluid dispersion receiving portion; A first mixed fluid discharge unit formed to have a second width narrower than the first width so that the first fluid of the first fluid dispersion receiving unit may be discharged at high pressure; And formed between the first fluid dispersion receiving part and the first mixed fluid discharge part, and allowing the first mixed fluid of the second fluid and the first fluid to be discharged to the first mixed fluid discharge part. 1 A second fluid supply unit for supplying the second fluid to the mixed fluid discharge unit, wherein the second injection unit includes a third fluid inlet through which the third fluid is introduced, and flows through the third fluid inlet. A third fluid dispersion receiving unit having a third width so that the third fluid is distributed evenly; A second mixed fluid discharge unit formed to have a fourth width narrower than the third width so that the third fluid or the second mixed fluid of the third fluid dispersion receiving unit can be discharged at high pressure; And the second mixed fluid formed between the third fluid dispersion receiving unit and the second mixed fluid discharge unit, and allowing the second mixed fluid of the fourth fluid and the third fluid to be discharged to the second mixed fluid discharge unit. 2 A fourth fluid supply unit for supplying the fourth fluid to the mixed fluid discharge unit.

In addition, the injection device according to the present invention may further include a dispersion formed inside the first fluid dispersion receiving portion and colliding with the first fluid to evenly distribute the first fluid.

In addition, according to the present invention, the first fluid or the third fluid is at least any one of pure steam, cleaning liquid steam, and combinations thereof, and the second fluid or the fourth fluid is at least pure water, cleaning liquid and their It can be any one of combinations.

In addition, the injection device according to the present invention is installed in front of the block body or at the front and rear of the block body based on the traveling direction of the object, and the first mixed fluid on the object to form a liquid film for floating Alternatively, it may further include a fifth fluid film forming apparatus for injecting a fifth fluid onto the object so that the second mixed fluid can be collected.

In addition, according to the present invention, the fifth fluid film forming apparatus includes: an inner cylinder having a fifth fluid receiving space formed therein to receive the fifth fluid, and having a plurality of injection holes formed therein; And an outer cylinder that surrounds the inner cylinder and is formed to be spaced apart from the inner cylinder, and in which a jet slit is formed at a position displaced from the jet hole.

In addition, according to the present invention, the fifth fluid film forming apparatus may further include an angle adjusting device for adjusting a spray angle of the spray slit of the outer cylinder.

On the other hand, the injection method according to the idea of the present invention for solving the above problem, the first injection unit for injecting a first fluid or a first mixed fluid in which the first fluid and the second fluid are mixed to an object; And a second injection unit for injecting a third fluid or a second mixed fluid in which the third fluid and the fourth fluid are mixed to the object, wherein the first injection unit and the second injection unit include at least one block Is formed on a block body comprising a, the block body, the suction part forming block in which the suction part is formed; A first injection unit forming block assembled on one side of the suction unit forming block and having the first injection unit formed on a surface opposite to the suction unit forming block; And a second injection unit forming block assembled on the other side of the suction unit forming block and having the second injection unit formed on an opposite surface opposite to the suction unit forming block, the injection method comprising: the Spraying a first fluid or a first mixed fluid in which the first fluid and the second fluid are mixed to the object by using a first injection unit; Spraying a third fluid or a second mixed fluid in which the third fluid and the fourth fluid are mixed to the object by using the second injection unit; And suctioning foreign substances separated from the object by the first fluid or the mixed fluid using the suction unit.

According to some embodiments of the present invention made as described above, it is possible to improve cleaning performance by securing sufficient cleaning power by using two spraying parts, and forming a block body so that a suction part is formed between the two spraying parts It is possible to prevent re-contamination of the substrate or the propagation of contamination to other substrates or equipment by rapidly inhaling foreign substances separated from the material. It is easy to manufacture by using a block body made of several blocks, and By using a large substrate, the fluid can be sprayed evenly at a uniform pressure, and the surface of the object can be cleaned sequentially or stepwise by different types of each sprayed fluid, which has the effect of greatly improving the cleaning performance. will be. Of course, the scope of the present invention is not limited by these effects.

1 is an external perspective view showing an injection device according to some embodiments of the present invention.
2 is an exploded perspective view of parts of the injection device of FIG. 1.
3 is a cross-sectional view of the injection device of FIG. 1.
4 is a partially cut-away perspective view of the injection device of FIG. 1.
5 is a cross-sectional view showing an operating state of the injection device of FIG. 1.
6 is an enlarged cross-sectional view showing a third fluid-liquid film forming apparatus of the injection device of FIG.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more completely describe the present invention to those of ordinary skill in the art, and the following examples may be modified in various other forms, and the scope of the present invention is as follows. It is not limited to the examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete, and to completely convey the spirit of the present invention to those skilled in the art. In addition, in the drawings, the thickness or size of each layer is exaggerated for convenience and clarity of description.

The terms used in this specification are used to describe specific embodiments, and are not intended to limit the present invention. As used herein, the singular form may include the plural form unless the context clearly indicates another case. Further, as used herein, "comprise" and/or "comprising" specifies the presence of the mentioned shapes, numbers, steps, actions, members, elements and/or groups thereof. And does not exclude the presence or addition of one or more other shapes, numbers, actions, members, elements, and/or groups.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the drawings, for example, depending on manufacturing techniques and/or tolerances, variations of the illustrated shape can be expected. Accordingly, the embodiments of the inventive concept should not be construed as being limited to the specific shape of the region shown in the present specification, but should include, for example, a change in shape caused by manufacturing.

Hereinafter, an injection device 100 according to some embodiments of the present invention will be described in detail with reference to the drawings.

1 is an external perspective view showing an injection device 100 according to some embodiments of the present invention, FIG. 2 is an exploded perspective view of parts of the injection device 100 of FIG. 1, and FIG. 3 is an injection device 100 of FIG. ) Is a cross-sectional view, and FIG. 4 is a partially cut-away perspective view of the injection device 100 of FIG. 1.

First, as shown in FIGS. 1 to 4, the injection device 100 according to some embodiments of the present invention includes a large frame 110, a first injection unit 10A, and a second injection unit ( 10B) and a suction unit 20 may be included.

For example, as shown in FIGS. 1 to 4, the frame 110 is a block to be described later in which the first injection unit 10A, the second injection unit 10B, and the suction unit 20 are formed. As a structure having sufficient durability and strength to support the sieve (B) on an object (S) such as a substrate to be spaced apart by a certain distance, more specifically, assemble each other using various fixtures such as bolts and screws. It may be made of various horizontal members, vertical members and inclined members.

However, the frame 110 is not limited to the drawings, and may be configured in a wide variety according to the shape of the object S, an installation standard, or an installation environment.

In addition, for example, as shown in Figs. 1 to 4, the first injection unit 10A, the first fluid 1 or the first fluid 1 and the second fluid ( It is capable of spraying the first mixed fluid L1 in which 2) is mixed, and may be formed on a part of the block body B.

Here, for example, the first fluid 1 is at least steam, deionized water steam, compressed dry air (CDA), or cleaning liquid steam containing an alcohol component or an organic component, and combinations thereof. It can be achieved by selecting any one or more.

In addition, the second fluid 2 may be formed by selecting at least one of water, deionized water, compressed dry air, cleaning liquid, and combinations thereof.

Thus, for example, the pure steam may be mixed with the pure water by the first injection unit 10A and first injected at a high pressure onto the surface of the object S proceeding in a direction of propagation.

However, the first fluid 1 and the second fluid 2 are not necessarily limited thereto, and high-pressure nitrogen gas, argon gas, clean air, compressed dry air, or the like may be applied.

In addition, for example, as shown in Figs. 1 to 4, the second injection unit 10B is a third fluid 3 or the third fluid 3 and the fourth fluid ( It is capable of spraying the second mixed fluid L2 in which 4) is mixed, and may be formed on the other part of the block body B.

Here, for example, the third fluid 3 is at least steam, deionized water steam, compressed dry air (CDA), or cleaning liquid steam containing alcohol or organic substances, and combinations thereof. It can be achieved by selecting any one or more.

In addition, the fourth fluid 4 may be formed by selecting at least one or more of water, deionized water, compressed dry air, cleaning liquid, and combinations thereof.

Thus, for example, in addition to the primary injection by the first injection unit 10A described above, the pure steam is mixed with the pure water by the second injection unit 10B and the object ( It can be sprayed secondary at high pressure on the surface of S).

Here, the third fluid 3 and the second fluid 4 are not necessarily limited thereto, and of course, high-pressure nitrogen gas, argon gas, clean air or compressed dry air may be applied.

In addition, for example, as shown in FIGS. 1 to 4, the suction unit 20 is separated from the object (S) by the first mixed fluid (L1) or the second mixed fluid (L2). The foreign matter P is sucked and may be formed in another portion of the block body B between the first injection unit 10A and the second injection unit 10B so as to be close therefrom.

In other words, the first injection unit 10A, the second injection unit 10B, and the suction unit 20 are each formed in a block body B including at least one block B1, B2, and B3. Can be formed side by side.

Here, the first injection unit 10A, the second injection unit 10B, and the suction unit 20 are formed in a direction perpendicular to the moving direction of the object S or the surface of the object S. Can be. However, it is not necessarily limited thereto.

More specifically, for example, as shown in FIGS. 3 and 4, the first injection unit 10A has a first fluid inlet 101 through which the first fluid 1 is introduced, and the A first fluid dispersion receiving portion 10-1 having a first width W1 so that the first fluid 1 introduced through the first fluid inlet 101 is evenly distributed, and the first fluid distribution receiving portion A first mixing formed with a second width W2 narrower than the first width W1 so that the first fluid 1 or the first mixed fluid L1 of (10-1) can be discharged at high pressure It is formed between the fluid discharge part 10-2 and the first fluid dispersion receiving part 10-1 and the first mixed fluid discharge part 10-2, and the second fluid 2 and the first The second fluid (2) to the first mixed fluid discharge unit (10-2) so that the first mixed fluid (L1) of the fluid (1) can be discharged to the first mixed fluid discharge unit (10-2). It may include a second fluid supply unit (10-3) to supply.

In addition, for example, as shown in Figs. 3 and 4, the second injection unit 10B formed symmetrically with the first injection unit 10A, the third fluid 3 A third fluid dispersion receiving portion (10-) having a third width (W3) such that the third fluid inlet 102 is formed and the third fluid 3 introduced through the third fluid inlet 102 is evenly distributed. 4) And, the third fluid (3) or the second mixed fluid (L2) of the third fluid dispersion accommodating part (10-4) can be discharged at a high pressure. It is formed between the second mixed fluid discharge portion 10-5 formed in a width W4 and the third fluid dispersion receiving portion 10-4 and the second mixed fluid discharge portion 10-5, The second mixed fluid discharge part (the second mixed fluid discharge part) so that the second mixed fluid L2 of the fourth fluid 4 and the third fluid 3 may be discharged to the second mixed fluid discharge part 10-5 ( A fourth fluid supply unit 10-6 for supplying the fourth fluid 4 to 10-5) may be included.

Here, for example, the first injection unit 10A and the second injection unit 10B are formed inside the first fluid dispersion receiving unit 10-1, and collide with the first fluid 1 It may further include a dispersion (T) for evenly dispersing the first fluid (1).

The dispersion (T) may be formed long in a front-rear direction or a left-right direction perpendicular to the flow direction of the first fluid (1). However, it is not necessarily limited thereto.

Accordingly, the first fluid 1 collides with the dispersion T through the first fluid inlet 101 and is evenly dispersed, and the uniformly dispersed first fluid 1 is the second The first mixed fluid L1 is combined with the second fluid 2 through the fluid supply unit 10-3, and the combined high pressure is applied to the object S through the first mixed fluid discharge unit 10-2. ) Can be discharged first.

At this time, the third fluid (3) collides with the dispersion (T) through the third fluid inlet (102) and is evenly distributed, and the third fluid (3) uniformly dispersed is 4 The second mixed fluid L2 is combined with the fourth fluid 4 through the fluid supply unit 10-6, and the combined high pressure of the second mixed fluid L2 passes through the second mixed fluid discharge unit 10-5. It can be discharged secondary in the S) direction.

On the other hand, for example, as shown in Figs. 1 to 4, the block body (B), the suction unit forming block (B1) in which the suction unit 20 is formed, and the suction unit forming block (B1) The first injection unit forming block (B2) and the suction unit forming block (B1) are assembled on one side and the first injection unit (10A) is formed on the opposite surface (F1) facing the suction unit forming block (B1) A second injection unit forming block B3 assembled on the other side of) and having the second injection unit 10B formed on the opposite surface F2 facing the suction unit forming block B1 may be included.

More specifically, for example, as shown in FIGS. 3 and 4, the suction unit forming block B1 is easy to manufacture and the first injection unit forming block B2 and the second injection unit forming block ( The overall cross section may be formed in a straight shape so that B3) can be easily assembled.

In addition, for example, as shown in Figs. 3 and 4, the first injection unit forming block B2 has a lower cross section as a whole and rises along one side of the suction unit forming block B1, and then the suction unit The first bent portion R1 is formed in a shape that is first bent in a direction away from the suction portion forming block B1 so that the first fluid dispersion receiving portion A1 is formed between the forming block B1 and , The second bent portion R2 may be formed in a shape whose upper portion is secondly bent in the upper direction of the suction portion forming block B1.

In addition, for example, as shown in Figs. 3 and 4, the second injection unit forming block B3 has a lower cross-section as a whole, rising along the other side of the suction unit forming block B1, and then the suction unit A third bent portion R3 is formed in a first bent shape in a direction away from the suction portion forming block B1 so that the third fluid dispersion receiving portion A2 is formed between the forming block B1 and , A fourth bent portion R4 may be formed in a shape whose upper portion is secondly bent in the upper direction of the suction portion forming block B1.

In addition, for example, as shown in FIGS. 3 and 4, the suction part forming block B1 has a narrow fifth width W5 so that the suction part 20 can form a suction pressure, An enlarged suction pressure forming space D may be formed for uniform suction.

Accordingly, as shown in FIGS. 3 and 4, the first injection unit forming block B2 can be easily assembled on one surface of the suction unit forming block B1, and the suction unit forming block B1 The second injection part forming block B3 can be easily assembled on the other surface of the.

Therefore, since the block body (B) can be made of three or more blocks (B1) (B2) (B3) that can be assembled with screws or bolts, it is possible to easily form a complex flow path therein, and It can be easily assembled by cutting the shape of the square material, and when the parts are damaged or internally cleaned, each block (B1, B2, and B3) can be easily disassembled and replaced or cleaned.

In addition, for example, as shown in Figures 1 to 4, the block body (B), the suction unit forming block (B1), the first injection unit forming block (B2) and the second injection unit formed A block fixture 120 for pressing the suction unit forming block B1 assembled to fix the block B3 and the first injection unit forming block B2 and the second injection unit forming block B3 ) May be further included.

Accordingly, by assembling the block fixture 120, the suction unit forming block B1, the first injection unit forming block B2, and the second injection unit forming block B3 can be rigidly fixed. .

In addition, for example, as shown in Figures 1 to 4, the block body (B), the block body (B), the first injection portion is formed to be connected to the second fluid supply (10-3) A second fluid supply pipe P2 formed in the block B2, and a fourth fluid supply pipe P4 formed in the second injection part forming block B3 so as to be connected to the fourth fluid supply part 10-6, , A first fluid supply pipe (P1) formed in the first injection unit forming block (B2) to be connected to the first fluid dispersion receiving unit (10-1), and the third fluid distribution receiving unit (10-4) A third fluid supply pipe (P3) formed in the second injection unit forming block (B3) to be connected to and a suction pipe (P5) formed in the suction unit forming block (B1) to be connected to the suction unit 20 can do.

Accordingly, the first fluid 1 may be supplied to the first fluid dispersion receiving part 10-1 through the first fluid supply pipe P1, and the second fluid 2 may be the second fluid The third fluid may be supplied to the second fluid supply unit 10-3 through a supply pipe P2, and the third fluid 3 is supplied to the third fluid dispersion receiving unit 10- through the third fluid supply pipe P3. 4), and the fourth fluid 4 may be supplied to the fourth fluid supply unit 10-6 through the fourth fluid supply pipe P4.

In addition, foreign matters P separated from the object S by the first mixed fluid L1 sprayed first and the second mixed fluid L2 sprayed secondarily recontaminate the object S It can be quickly discharged to the outside through the suction pipe (P3) before.

Here, the second fluid 2 may be branched and supplied to a plurality of the second fluid supply pipes P2 using a branch pipe, and the fourth fluid 4 may be supplied by using a branch pipe. The fourth fluid supply pipe P4 may be branched to be supplied, and the foreign matter P may be collected and collected from the plurality of suction pipes P3 through a combination pipe P5.

In addition, for example, as shown in Figs. 1 to 4, the injection device 100 according to some embodiments of the present invention, the front of the block body (B) based on the moving direction of the object (S). Alternatively, the first mixed fluid (L1) or the second mixed fluid (L2) is collected on the object (S) to form a liquid film (W) installed at the front and rear sides and floating the foreign matter (P). A fifth fluid film forming apparatus 30 for injecting the fifth fluid 5 onto the object S may be further included.

6 is an enlarged cross-sectional view showing the fifth fluid-liquid film forming apparatus 30 of the injection device 100 of FIG. 1.

For example, as shown in FIG. 6, the fifth fluid film forming apparatus 30 is connected to the fifth fluid supply pipe P6 and contains the fifth fluid 5 therein. The receiving space (C) is formed, the inner cylinder (31) in which a plurality of injection holes (H) are formed and the inner cylinder (31) is formed to be spaced apart from the inner cylinder (31), and the injection hole (H It may include an outer cylinder 32 in which the spray slit 33 is formed in a position that is displaced from ).

In addition, as shown in Figs. 1 to 6, the fifth fluid film forming device 30 includes an angle adjusting device 34 for adjusting the spray angle of the spray slit 33 of the outer cylinder 32. It may contain more.

The angle adjustment device 34 may include an angle adjustment knob capable of adjusting the spray angle of the spray slit 33 with a scale compared to a reference scale. Accordingly, the operator can adjust the spray angle of the spray slit 33 by adjusting the angle of the angle adjustment knob. In addition, it is also possible to automatically adjust the angle by installing an angle adjusting motor.

Therefore, the fifth fluid 5 can be uniformly distributed in its pressure primarily through the plurality of injection holes H formed in the inner cylinder 32 from the fifth fluid receiving space C, and the The liquid film W may be formed on the surface of the object S by secondary pressure equalization through the spray slit 33 of the outer cylinder 32 formed at a position displaced from the spray hole H. Here, the fifth fluid 5 may be formed by selecting at least one of water, deionized water, compressed dry air, cleaning liquid, and combinations thereof. However, the present invention is not limited thereto, and high-pressure nitrogen gas, argon gas, clean air, compressed dry air, or the like may be applied.

5 is a cross-sectional view showing an operating state of the injection device 100 of FIG. 1.

As shown in FIGS. 1 to 5, when explaining the operation process of the injection device 100 according to some embodiments of the present invention, first, the block body B based on the moving direction of the object S ), when the liquid film W for floating the foreign matter P is formed using the fifth fluid film forming apparatus 30 installed at the front and the rear, respectively, the first fluid 1 and the second fluid The first mixed fluid L1 combined with (2) may be first discharged at high pressure in the direction of the object S through the first injection unit 10A, and at the same time, the foreign matter P In order to prevent re-contamination due to ), the second mixed fluid (L2) in which the third fluid (3) and the fourth fluid (4) are combined is transferred to the object (S) through the second injection unit (10B). ) Can be discharged secondary at high pressure in the direction,

Here, the first fluid 1 and the third fluid 3 may be the same as or different from each other. That is, for example, the first fluid 1 may be a cleaning liquid steam containing alcohol or organic substances to maximize cleaning power, and the second fluid 2 may be pure steam for removing such cleaning liquid steam. .

Therefore, by using the first injection unit 10A and the second injection unit 10B, which can selectively use such injection fluid, the optimum cleaning power can be implemented according to the type, standard, or cleaning condition of the object S. I can.

Subsequently, the foreign matter P may be simultaneously or sequentially separated from the object S by the pressure of the first mixed fluid L1 and the second mixed fluid L2, and the separated foreign matter (P) can be quickly sucked through the neighboring suction unit 20 so that the object S cannot be recontaminated.

Therefore, the first injection unit 10A for primary injection of the first mixed fluid L1 to the object S such as a substrate and the second injection unit for secondary injection of the second mixed fluid L2 (10B) and the suction unit 20 that sucks the foreign matter (P) separated by them, maximize the cleaning power by using the integrated block body (B) so that they are close to each other, and separate from the object (S) By rapidly inhaling the foreign matter (P), it is possible to prevent the re-contamination of the object (S) or the propagation of the contamination to other substrates or equipment, and by using the block body (B) consisting of three blocks. It is easy to manufacture, and it is easy to assemble between blocks, so that it is possible to improve the manufacturing precision of the slit-shaped first injection unit 10A and the second injection unit 10B formed between blocks. The fluid can be sprayed evenly with pressure.

In addition, since the surface of the object S can be cleaned sequentially or stepwise by different types of fluids injected from the first injection unit 10A and the second injection unit 10B, the cleaning performance is greatly improved. Can be improved.

In addition, as shown in FIG. 3, the injection device 100 according to some embodiments of the present invention separates the foreign matter P from the first fluid or the mixed fluid sucked by using a filter, etc. , The circulation system 200 for recirculating the purified first fluid or the mixed fluid to a circulation pump or a distributor may be further included.

On the other hand, the injection method using the injection device of the present invention is to inject a first fluid or a first mixed fluid in which the first fluid and the second fluid are mixed to the object using the first injection unit 10A step; Injecting a third fluid or a second mixed fluid in which the third fluid and the fourth fluid are mixed to the object using the second injection unit 10B; And suctioning foreign matter separated from the object by the first fluid or the mixed fluid using the suction unit 20.

In addition, as shown in FIG. 3, the circulation system for separating the foreign matter P from the first fluid or the mixed fluid sucked by using a filter or the like and recirculating the purified first fluid or the mixed fluid It may further include; circulating the first fluid or the mixed fluid by using (200).

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those of ordinary skill in the art will appreciate that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

S: object
P: foreign matter
1: first fluid
2: second fluid
3: third fluid
4: fourth fluid
5: fifth fluid
L1: first mixed fluid
L2: second mixed fluid
10A: first injection part
101: first fluid inlet
10-1: first fluid dispersion receiving portion
10-2: first mixed fluid discharge part
10-3: second fluid supply
10B: second injection part
103: second fluid inlet
10-4: third fluid dispersion receiving portion
10-5: second mixed fluid discharge part
10-6: fourth fluid supply
T: dispersion
20: suction unit
B: Block body
B1: suction part forming block
B2: first injection part forming block
B3: second injection part forming block
A1: first fluid dispersion receiving portion
A2: 3rd fluid dispersion receiving part
R1: first bend
R2: second bend
R3: third bend
R4: 4th bend
P1: first fluid supply pipe
P2: second fluid supply pipe
P3: 3rd fluid supply pipe
P4: 4th fluid supply pipe
P5: suction pipe
P6: 5th fluid supply pipe
W: evil
30: third fluid liquid film forming apparatus
31: inner barrel
32: external cylinder
33: spray slit
34: angle adjustment device
110: frame
120: block fixture
100: injection device
200: circulatory system

Claims (11)

A first injection unit for injecting a first fluid or a first mixed fluid in which the first fluid and the second fluid are mixed to the object; And
A second injection unit for injecting a third fluid or a second mixed fluid in which the third fluid and the fourth fluid are mixed to the object; and
The first injection unit and the second injection unit are formed in a block body including at least one block,
The block body,
A suction part forming block in which a suction part is formed;
A first injection unit forming block assembled on one side of the suction unit forming block and having the first injection unit formed on a surface opposite to the suction unit forming block; And
A second injection unit forming block assembled on the other side of the suction unit forming block and having the second injection unit formed on a surface opposite to the suction unit forming block;
Including,
A circulation system that purifies the fluid sucked in the suction unit and then recirculates the fluid to the first injection unit or the second injection unit;
Including more,
At least a portion of each of the suction unit forming block and the first injection unit forming block is assembled in surface contact with each other,
At least a portion of each of the suction unit forming block and the second injection unit forming block is assembled in surface contact with each other,
The first injection unit is formed between the suction unit forming block and the first injection unit forming block,
The second injection unit is formed between the suction unit forming block and the second injection unit forming block,
The first injection unit forming block and the second injection unit forming block are formed in a symmetrical shape with each other,
The first mixed fluid or the second mixed fluid on the object to form a liquid film installed in front of the block body or in the front and rear of the block body based on the moving direction of the object and floating foreign substances separated from the object A fifth fluid film forming apparatus for injecting a fifth fluid onto the object so as to collect the cells;
Including more,
The fifth fluid liquid film forming apparatus,
An inner cylinder having a fifth fluid receiving space formed therein to receive the fifth fluid and having a plurality of injection holes formed therein; And
An outer cylinder that surrounds the inner cylinder and is formed to be spaced apart from the inner cylinder, and in which a jet slit is formed at a position deviated from the jet hole;
Including,
The fifth fluid liquid film forming apparatus,
An angle adjusting device for adjusting a spray angle of the spray slit of the outer cylinder;
Including a further, injection device. The method of claim 1,
The suction part forming block is generally formed in a straight cross section,
The first injection unit forming block, as a whole, has a lower cross section along one side of the suction unit forming block, and the first fluid dispersion receiving unit is formed between the suction unit forming block. A first bent portion is formed in a shape that is first bent in a direction away from it, and a second bent portion is formed in a shape whose upper portion is secondly bent in the upper direction of the suction unit forming block
The second injection unit forming block, as a whole, has a lower cross-section rising along the other side of the suction unit forming block and is away from the suction unit forming block so that a third fluid dispersion receiving unit is formed between the suction unit forming block. A first bent portion is formed in a shape that is first bent in a direction, and a second bent portion is formed in a shape whose upper portion is secondly bent in an upper direction of the suction unit forming block. The method according to claim 1 or 2,
The block body,
The suction unit forming block, the suction unit forming block, the first injection unit forming block and the second injection unit are formed so as to fix the suction unit forming block, the first injection unit forming block and the second injection unit forming block A block fixture for pressing the block;
A second fluid supply pipe formed in the first injection unit forming block to be connected to the second fluid supply unit;
A fourth fluid supply pipe formed in the second injection unit forming block to be connected to a fourth fluid supply unit;
A first fluid supply pipe formed in the first injection unit forming block to be connected to the first fluid dispersion receiving unit;
A third fluid supply pipe formed in the second injection part forming block to be connected to a third fluid dispersion receiving part; And
A suction pipe formed in the suction part forming block to be connected to the suction part;
Including a further, injection device. The method of claim 1,
The suction unit,
An injection device for sucking foreign matter separated from the object by the fluid injected by the first injection unit and the second injection unit. The method of claim 1,
The first injection unit,
A first fluid dispersion receiving portion having a first fluid inlet through which the first fluid is introduced, and having a first width so that the first fluid introduced through the first fluid inlet is evenly distributed;
A first mixed fluid discharge unit formed to have a second width narrower than the first width so that the first fluid or the first mixed fluid of the first fluid dispersion receiving unit can be discharged at high pressure; And
The first fluid is formed between the first fluid dispersion receiving unit and the first mixed fluid discharge unit, so that the first mixed fluid of the second fluid and the first fluid can be discharged to the first mixed fluid discharge unit. Including; a second fluid supply unit for supplying the second fluid to the mixed fluid discharge unit,
The second injection unit,
A third fluid distribution receiving portion having a third fluid inlet through which the third fluid is introduced and having a third width so that the third fluid introduced through the third fluid inlet is evenly distributed;
A second mixed fluid discharge unit formed to have a fourth width narrower than the third width so that the third fluid or the second mixed fluid of the third fluid dispersion receiving unit can be discharged at high pressure; And
The second fluid is formed between the third fluid dispersion receiving unit and the second mixed fluid discharge unit, so that the second mixed fluid of the fourth fluid and the third fluid can be discharged to the second mixed fluid discharge unit. A fourth fluid supply unit supplying the fourth fluid to the mixed fluid discharge unit;
Containing, injection device. The method of claim 5,
A dispersion formed inside the first fluid dispersion receiving portion and colliding with the first fluid to evenly distribute the first fluid;
Including a further, injection device. The method of claim 1,
The first fluid or the third fluid is formed by selecting at least one of steam, deionized water steam, compressed dry air (CDA), cleaning liquid steam, and combinations thereof, and the first fluid The second fluid or the fourth fluid is formed by selecting at least any one or more of water, pure water, compressed dry air, cleaning liquid, and combinations thereof. A first injection unit for injecting a first fluid or a first mixed fluid in which the first fluid and the second fluid are mixed to the object; And
A second injection unit for injecting a third fluid or a second mixed fluid in which the third fluid and the fourth fluid are mixed to the object; and
The first injection unit and the second injection unit are formed in a block body including at least one block,
The block body,
A suction part forming block in which a suction part is formed;
A first injection unit forming block assembled on one side of the suction unit forming block and having the first injection unit formed on a surface opposite to the suction unit forming block; And
A second injection unit forming block assembled on the other side of the suction unit forming block and having the second injection unit formed on a surface opposite to the suction unit forming block;
Including,
A circulation system that purifies the fluid sucked in the suction unit and then recirculates the fluid to the first injection unit or the second injection unit;
Including more,
At least a portion of each of the suction unit forming block and the first injection unit forming block is assembled in surface contact with each other,
At least a portion of each of the suction unit forming block and the second injection unit forming block is assembled in surface contact with each other,
The first injection unit is formed between the suction unit forming block and the first injection unit forming block,
The second injection unit is formed between the suction unit forming block and the second injection unit forming block,
The first injection unit forming block and the second injection unit forming block are formed in a symmetrical shape with each other,
The first injection unit and the first injection unit on the object to form a liquid film that is coupled to the front or the front and rear of the block body and installed integrally based on the moving direction of the object, and floats foreign substances separated from the object. A fifth fluid film forming apparatus for injecting a fifth fluid onto the object so that the fluid injected by the second injection unit can be collected;
Including a further, injection device. delete delete A first injection unit for injecting a first fluid or a first mixed fluid in which the first fluid and the second fluid are mixed to the object; And a second injection unit for injecting a third fluid or a second mixed fluid in which the third fluid and the fourth fluid are mixed to the object, wherein the first injection unit and the second injection unit include at least one block Is formed on a block body comprising a, the block body, the suction part forming block in which the suction part is formed; A first injection unit forming block assembled on one side of the suction unit forming block and having the first injection unit formed on a surface opposite to the suction unit forming block; And a second injection unit forming block assembled on the other side of the suction unit forming block and having the second injection unit formed on a surface opposite to the suction unit forming block, and purifying the fluid sucked into the suction unit. And then a circulation system for recirculating the first injection unit or the second injection unit, wherein at least a portion of each of the suction unit forming block and the first injection unit forming block is assembled in surface contact with each other, and the At least a portion of each of the suction unit forming block and the second injection unit forming block is assembled in surface contact with each other, and the first injection unit is formed between the suction unit forming block and the first injection unit forming block, and the The second injection unit is formed between the suction unit forming block and the second injection unit forming block, and the first injection unit forming block and the second injection unit forming block are formed in a symmetrical shape to each other, and the object proceeds The first mixed fluid or the second mixed fluid may be collected on the object to form a liquid film installed in front of the block body or at the front and rear sides of the block body and floating foreign substances separated from the object. A fifth fluid liquid film forming device for injecting a fifth fluid to the object so that the fifth fluid film forming device has a fifth fluid receiving space formed therein to receive the fifth fluid, and a plurality of An inner cylinder in which four injection holes are formed; And an outer cylinder that surrounds the inner cylinder and is formed to be spaced apart from the inner cylinder, and in which a jet slit is formed at a position displaced from the jet hole; wherein the fifth fluid film forming apparatus comprises: the jet slit of the outer cylinder In the spraying method using the spraying device further comprising; an angle adjusting device for adjusting the spraying angle,
Spraying a first fluid or a first mixed fluid in which the first fluid and the second fluid are mixed to the object by using the first injection unit;
Spraying a third fluid or a second mixed fluid in which the third fluid and the fourth fluid are mixed to the object by using the second injection unit; And
Suctioning foreign substances separated from the object by the fluid injected by the first injection unit and the second injection unit using the suction unit;
Containing, spraying method.

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