KR102176672B1 - Spray apparatus and method - Google Patents

Abstract

The present invention relates to an injection device for injecting a fluid to clean an object such as a substrate, comprising: an injection unit for injecting a first fluid or a mixed fluid in which the first fluid and the second fluid are mixed to the object; And a suction unit configured to suck foreign substances separated from the object by the first fluid or the mixed fluid, wherein the injection unit and the suction unit may be formed in a block body including at least one block.

Description

Spray apparatus and method TECHNICAL FIELD

The present invention relates to an injection device and method, and more particularly, to an injection device and method for injecting a fluid to clean an object such as a substrate.

In general, flat panel display devices using OLED (Organic Light Emitting Diodes), LCD (Lipuid Crystal Display), PDP (Plasma Display Panel), ELD (Electro luminescent Display), VFD (Vacuum Fluorescent Display), etc. However, it is widely used in that it uses relatively low power.

These flat panel display devices are manufactured by performing numerous processes on a substrate such as a glass substrate, a film substrate, or a semiconductor substrate, and in the process, various particles, by-products such as dust, substrate fragments, metal fragments, polymers, organic substances, microorganisms, etc. Foreign matter may be generated.

In order to clean these foreign substances, conventionally, there has been a physical method using a physical force such as a brush or ultrasonic vibration.

However, such a physical cleaning method has problems such as fine scratches on the surface of the substrate or damage to the substrate.

On the other hand, as described in Korean Patent Registration No. 10-0724696, a water spray unit that performs cleaning by spraying water and a steam having a set pressure on the area to be cleaned of the object to be cleaned before water is sprayed, A wet cleaning device using a steam injection unit for red cleaning has been developed.

However, in such a conventional cleaning apparatus, foreign substances that are momentarily separated from the substrate by the sprayed fluid may float along the liquid film and then be adsorbed to other areas of the substrate or other substrates or other equipment to re-contaminate. Rather, the contaminants are dispersed There are problems such as expansion of the defective area or adversely affecting other substrates or other equipment.

In addition, such a conventional cleaning device does not uniformly spray the fluid over the entire width of a large substrate, so that the uniformity of cleaning is lowered, and the shape of the nozzle is formed in an integral shape, making it difficult to manufacture, thereby reducing the manufacturing cost and time of the equipment. There were problems such as increasing.

The idea of the present invention is to solve these problems, by forming a block body so as to be close to the injection unit and the suction unit, and quickly suctioning foreign substances separated from the substrate, thereby recontaminating the substrate or propagating the contamination to other substrates or equipment. It is to provide a spraying device and a method that can prevent, and is easy to manufacture by using a block body made of a plurality of blocks, and can evenly spray a fluid with a uniform pressure even on a large substrate. However, these problems are exemplary, and the scope of the present invention is not limited thereby.

A reflective device according to the present invention for solving the above problem includes: an injection unit for injecting a first fluid or a mixed fluid in which the first fluid and the second fluid are mixed to an object; And a suction unit configured to suck foreign substances separated from the object by the first fluid or the mixed fluid, wherein the injection unit and the suction unit are formed in a block body including at least one block, and the block body Is, the base block; An injection unit forming block assembled on the base block and having the injection unit formed on a surface opposite to the base block; And a suction unit forming block assembled on the injection unit forming block and having the suction unit formed on a surface facing the injection unit forming block.

In addition, according to the present invention, the base block has an overall cross-section formed in a straight shape, and the spray part forming block has a lower cross-section as a whole rising along the base block, and the first part between the base block and the base block. 1 A first bent part is formed in a shape that is first bent in a direction away from the base block so that a fluid dispersion receiving part is formed, and a second bent part is formed in a shape in which the upper part is secondly bent in the upper direction of the base block, The suction unit forming block may have a third bent portion in a shape in which a cross section is first bent below the injection unit forming block as a whole.

In addition, according to the present invention, the block body includes the base block, the injection unit forming block, and the suction unit forming block, the base block assembled to fix the injection unit forming block and the suction unit forming block. A block fixture for pressing the block; A second fluid supply pipe formed in the base block to be connected to the second fluid supply unit; A first fluid supply pipe formed in the injection unit forming block to be connected to the first fluid dispersion receiving unit; And a suction pipe formed in the suction part forming block to be connected to the suction part.

In addition, according to the present invention, the injection unit includes a first fluid inlet through which the first fluid is introduced, and a first fluid having a first width so that the first fluid introduced through the first fluid inlet is evenly distributed. A fluid dispersion receiving unit; A mixed fluid discharge part formed to have a second width narrower than the first width so that the first fluid of the first fluid dispersion receiving part may be discharged at high pressure; And the second fluid discharging unit formed between the first fluid dispersion receiving unit and the mixed fluid discharging unit, and allowing the mixed fluid of the second fluid and the first fluid to be discharged to the mixed fluid discharging unit. It may include; a second fluid supply unit for supplying a fluid.

In addition, the injection device according to the present invention may further include a dispersion formed inside the first fluid dispersion receiving portion and colliding with the first fluid to evenly distribute the first fluid.

In addition, according to the present invention, the first fluid is formed by selecting at least one of steam, pure steam, compressed dry air (CDA), cleaning liquid steam, and combinations thereof, and the second fluid May be made by selecting at least one of water, pure water, compressed dry air, cleaning liquid, and combinations thereof.

In addition, the injection device according to the present invention is installed in front of the block body or at the front and rear of the block body based on the traveling direction of the object, and the first fluid or the first fluid on the object to form a liquid film floating the foreign matter It may further include a third fluid film forming apparatus for injecting a third fluid to the object so as to collect the mixed fluid.

In addition, according to the present invention, the third fluid film forming apparatus includes: an inner cylinder in which a third fluid receiving space is formed to receive the third fluid, and a plurality of injection holes are formed; And an outer cylinder that surrounds the inner cylinder and is formed to be spaced apart from the inner cylinder, and in which a jet slit is formed at a position displaced from the jet hole.

In addition, according to the present invention, the third fluid film forming apparatus may further include an angle adjusting device for adjusting a spray angle of the spray slit of the outer cylinder.

On the other hand, the injection method according to the spirit of the present invention for solving the above problem, the injection unit for injecting a first fluid or a mixed fluid in which the first fluid and the second fluid are mixed to an object; And a suction unit configured to suck foreign substances separated from the object by the first fluid or the mixed fluid, wherein the injection unit and the suction unit are formed in a block body including at least one block, and the block body Is, the base block; An injection unit forming block assembled on the base block and having the injection unit formed on a surface opposite to the base block; And a suction unit forming block assembled to the injection unit forming block and having the suction unit formed on an opposite surface opposite to the injection unit forming block, wherein the object using the injection unit Spraying the first fluid or the mixed fluid in which the first fluid and the second fluid are mixed; And suctioning foreign substances separated from the object by the first fluid or the mixed fluid using the suction unit.

According to some embodiments of the present invention made as described above, foreign matter separated from the substrate by being formed in an integrated block body such that the injection unit for injecting fluid onto the substrate and the suction unit for sucking foreign matter separated by the fluid are close to each other. It is possible to prevent re-contamination of the substrate or the propagation of contamination to other substrates or equipment by quickly inhaling the material. It is easy to manufacture by using a block body made of several blocks, and evenly the fluid evenly with a uniform pressure even on a large substrate. It has the effect of spraying. Of course, the scope of the present invention is not limited by these effects.

1 is an external perspective view showing an injection device according to some embodiments of the present invention.
2 is an exploded perspective view of parts of the injection device of FIG. 1.
3 is a cross-sectional view of the injection device of FIG. 1.
4 is a partially cut-away perspective view of the injection device of FIG. 1.
5 is a cross-sectional view showing an operating state of the injection device of FIG. 1.
6 is an enlarged cross-sectional view showing a third fluid-liquid film forming apparatus of the injection device of FIG.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more completely describe the present invention to those of ordinary skill in the art, and the following examples may be modified in various other forms, and the scope of the present invention is as follows. It is not limited to the examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete, and to completely convey the spirit of the present invention to those skilled in the art. In addition, in the drawings, the thickness or size of each layer is exaggerated for convenience and clarity of description.

The terms used in this specification are used to describe specific embodiments, and are not intended to limit the present invention. As used herein, the singular form may include the plural form unless the context clearly indicates another case. Further, as used herein, "comprise" and/or "comprising" specifies the presence of the mentioned shapes, numbers, steps, actions, members, elements and/or groups thereof. And does not exclude the presence or addition of one or more other shapes, numbers, actions, members, elements, and/or groups.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the drawings, for example, depending on manufacturing techniques and/or tolerances, variations of the illustrated shape can be expected. Accordingly, the embodiments of the inventive concept should not be construed as being limited to the specific shape of the region shown in the present specification, but should include, for example, a change in shape caused by manufacturing.

Hereinafter, an injection device 100 according to some embodiments of the present invention will be described in detail with reference to the drawings.

1 is an external perspective view showing an injection device 100 according to some embodiments of the present invention, FIG. 2 is an exploded perspective view of parts of the injection device 100 of FIG. 1, and FIG. 3 is an injection device 100 of FIG. ) Is a cross-sectional view, and FIG. 4 is a partially cut-away perspective view of the injection device 100 of FIG. 1.

First, as shown in Figs. 1 to 4, the injection device 100 according to some embodiments of the present invention largely includes a frame 110, an injection unit 10, and a suction unit 20. I can.

For example, as shown in Figs. 1 to 4, the frame 110 includes a block body B, which will be described later, on which the injection unit 10 and the suction unit 20 are formed, and an object (S) such as a substrate. ) As a structure having sufficient durability and strength to be supported so as to be spaced apart from each other at a certain distance, more specifically, various horizontal members, vertical members, and inclined members assembled together using various fasteners such as bolts and screws. Can be made of.

However, the frame 110 is not limited to the drawings, and may be configured in a wide variety according to the shape of the object S, an installation standard, or an installation environment.

In addition, for example, as shown in Figs. 1 to 4, the injection unit 10, the first fluid (1) or the first fluid (1) and the second fluid (2) to the object (S) It is capable of spraying the mixed fluid 4 mixed with, and may be formed in a part of the block body (B).

Here, for example, the first fluid 1 is at least steam, deionized water steam, compressed dry air (CDA), or cleaning liquid steam containing an alcohol component or an organic component, and combinations thereof. It can be achieved by selecting any one or more.

In addition, the second fluid 2 may be formed by selecting at least one of water, deionized water, compressed dry air, cleaning liquid, and combinations thereof.

Thus, for example, the pure steam may be mixed with the pure water by the injection unit 10 and sprayed onto the surface of the object S at high pressure.

However, the first fluid 1 and the second fluid 2 are not necessarily limited thereto, and high-pressure nitrogen gas, argon gas, clean air, compressed dry air, or the like may be applied.

In addition, for example, as shown in Figures 1 to 4, the suction unit 20, the foreign material (P) separated from the object (S) by the first fluid (1) or the mixed fluid (4) ), and may be formed in another part of the block body B adjacent to the injection unit 10.

That is, the injection unit 10 and the suction unit 20 are formed parallel to each other in a block body B including at least one (three in the drawing) blocks B1, B2, and B3. I can.

Here, the injection unit 10 and the suction unit 20 may be formed in a direction in which the object S proceeds or a direction generally perpendicular to the surface of the object S. However, it is not necessarily limited thereto.

More specifically, for example, as shown in FIGS. 3 and 4, the injection unit 10 has a first fluid inlet 10a through which the first fluid 1 is introduced, and the first A first fluid dispersion receiving unit 10-1 having a first width W1 so that the first fluid 1 introduced through the fluid inlet 10a is evenly distributed, and the first fluid distribution receiving unit 10 The mixed fluid discharge part 10-formed with a second width W2 narrower than the first width W1 so that the first fluid 1 or the mixed fluid 4 of -1) can be discharged at high pressure. 2) and the mixed fluid of the second fluid (2) and the first fluid (1), which is formed between the first fluid dispersion receiving portion (10-1) and the mixed fluid discharge portion (10-2) A second fluid supply unit (10-3) for supplying the second fluid (2) to the mixed fluid discharge unit (10-2) so that (4) can be discharged to the mixed fluid discharge unit (10-2). Can include.

In addition, for example, the injection unit 10 is formed inside the first fluid dispersion receiving unit 10-1 and collides with the first fluid 1 to evenly distribute the first fluid 1 It may further include a dispersion (T).

The dispersion (T) may be formed long in a front-rear direction or a left-right direction perpendicular to the flow direction of the first fluid (1). However, it is not necessarily limited thereto.

Accordingly, the first fluid 1 collides with the dispersion T through the first fluid inlet 10a and is evenly dispersed, and the uniformly distributed first fluid 1 is the second The mixed fluid 4 is combined with the second fluid 2 through the fluid supply unit 10-3, and the combined high-pressure mixed fluid 4 is discharged in the direction of the object S through the mixed fluid discharge unit 10-2. Can be.

On the other hand, for example, as shown in Figs. 1 to 4, the block body (B) is assembled to the base block (B1), the base block (B1), the base block (B1) and facing A face (F2) that is assembled to the injection unit forming block (B2) on which the injection unit (10) is formed on the surface (F1) and the injection unit forming block (B2) and faces the injection unit forming block (B2) It may include a suction unit forming block (B3) in which the suction unit 20 is formed.

More specifically, for example, as shown in Figs. 3 and 4, the base block (B1) is formed in a straight cross section so that it is easy to manufacture and the injection unit forming block (B2) can be easily assembled. Can be.

In addition, for example, as shown in Figs. 3 and 4, the injection unit forming block B2 has a lower cross section as a whole as the bottom rises along the base block B1 and between the base block B1. A first bent portion (R1) is formed in a shape that is first bent in a direction away from the base block (B1) so that the first fluid dispersion receiving portion (A) is formed, and the upper portion thereof is the base block (B1). The second bent portion R2 may be formed in a second bent shape in the upper direction of.

In addition, for example, as shown in FIGS. 3 and 4, the suction part forming block B3 has a narrow third width W3 so that the suction part 20 can form a suction pressure, A third bent portion R3 may be formed in a shape whose cross-section is first bent under the injection unit forming block B2 so that an enlarged suction pressure forming space D can be formed for uniform suction. have.

Accordingly, as shown in FIGS. 3 and 4, the injection unit forming block B2 can be easily assembled to the base block B1, and the suction unit forming block is attached to the injection unit forming block B2. (B3) can be easily assembled.

Therefore, since the block body (B) can be made of three or more blocks (B1) (B2) (B3) that can be assembled with screws or bolts, it is possible to easily form a complex flow path therein, and It can be easily assembled by cutting the shape of the square material, and when the parts are damaged or internally cleaned, each block (B1, B2, and B3) can be easily disassembled and replaced or cleaned.

In addition, for example, as shown in Figures 1 to 4, the block body (B), the base block (B1), the injection unit forming block (B2) and the suction unit forming block (B3) fixed It may further include a block fixture 120 for pressing the base block (B1), the injection unit forming block (B2) and the suction unit forming block (B3) assembled to be able to be.

Accordingly, by assembling the block fixture 120, the base block B1, the injection unit forming block B2, and the suction unit forming block B3 may be rigidly fixed.

In addition, the block body (B) includes a second fluid supply pipe (P2) formed in the base block (B1) to be connected to the second fluid supply unit (10-3), and the first fluid dispersion receiving portion (10). -1) A first fluid supply pipe (P1) formed in the injection unit forming block (B2) to be connected to, and a suction pipe (P3) formed in the suction unit forming block (B3) to be connected to the suction unit (20). It may contain more.

Accordingly, the first fluid 1 may be supplied to the first fluid dispersion receiving part 10-1 through the first fluid supply pipe P1, and the second fluid 2 may be the second fluid It may be supplied to the second fluid supply unit 10-3 through the supply pipe P2, and the foreign matter P separated from the object S by the mixed fluid 4 recycles the object S. Before contamination, it can be quickly discharged to the outside through the suction pipe P3.

Here, the second fluid 2 may be branched and supplied to a plurality of the second fluid supply pipes P2 using the branch pipe P4, and the foreign matter P may be supplied by a plurality of It may be collected from the suction pipes (P3).

In addition, for example, as shown in Figs. 1 to 4, the injection device 100 according to some embodiments of the present invention, the front of the block body (B) based on the moving direction of the object (S). Or installed in the front and rear, so that the first fluid (1) or the mixed fluid (4) can be collected on the object (S) to form a liquid film (W) floating the foreign matter (P). A third fluid film forming apparatus 30 for injecting a third fluid 3 onto the object S may be further included.

6 is an enlarged cross-sectional view showing the third fluid-liquid film forming apparatus 30 of the injection device 100 of FIG. 1.

For example, as shown in FIG. 6, the third fluid film forming apparatus 30 is connected to the third fluid supply pipe P6 and contains the third fluid 3 therein. The receiving space (C) is formed, the inner cylinder (31) in which a plurality of injection holes (H) are formed and the inner cylinder (31) is formed to be spaced apart from the inner cylinder (31), and the injection hole (H It may include an outer cylinder 32 in which the spray slit 33 is formed in a position that is displaced from ).

In addition, as shown in Figs. 1 to 6, the third fluid film forming apparatus 30 includes an angle adjusting device 34 for adjusting the spray angle of the spray slit 33 of the outer cylinder 32. It may contain more.

The angle adjustment device 34 may include an angle adjustment knob capable of adjusting the spray angle of the spray slit 33 with a scale compared to a reference scale. Accordingly, the operator can adjust the spray angle of the spray slit 33 by adjusting the angle of the angle adjustment knob. In addition, it is also possible to automatically adjust the angle by installing an angle adjusting motor.

Therefore, the pressure of the third fluid 3 can be uniformly distributed in the first order through the plurality of injection holes H formed in the inner cylinder 32 from the third fluid receiving space C, and the The liquid film W may be formed on the surface of the object S by secondary pressure equalization through the spray slit 33 of the outer cylinder 32 formed at a position displaced from the spray hole H. Here, the third fluid 3 may be formed by selecting at least one of water, deionized water, compressed dry air, cleaning liquid, and combinations thereof. However, the present invention is not limited thereto, and high-pressure nitrogen gas, argon gas, clean air, compressed dry air, or the like may be applied.

5 is a cross-sectional view showing an operating state of the injection device 100 of FIG. 1.

As shown in FIGS. 1 to 5, when explaining the operation process of the injection device 100 according to some embodiments of the present invention, first, the block body B based on the moving direction of the object S When the liquid film W for floating the foreign matter P is formed by using the third fluid film forming device 30 installed at the front and the rear of the), the first fluid 1 and the second fluid The mixed fluid 4 in which (2) is combined may be discharged at high pressure in the direction of the object S through the injection unit 10.

The foreign material (P) can be separated from the object (S) by the pressure of the mixed fluid (4), and the separated foreign material (P) is neighboring so that the object (S) cannot be recontaminated. It can be quickly sucked through the suction unit 20.

Therefore, the block body integrated so that the injection unit 10 for injecting a fluid onto the object S such as a substrate and the suction unit 20 for inhaling the foreign matter P separated by the fluid are close to each other. By rapidly inhaling the foreign matter (P) separated from the object (S) using (B), it is possible to prevent re-contamination of the object (S) or the propagation of contamination to other substrates or equipment. It is easy to manufacture by using the block body (B) made of blocks, and it is easy to assemble between blocks, thereby improving the manufacturing precision of the slit-shaped spray part formed between blocks. Fluid can be sprayed.

In addition, as shown in FIG. 3, the injection device 100 according to some embodiments of the present invention separates the foreign matter P from the first fluid or the mixed fluid sucked by using a filter, etc. , The circulation system 200 for recirculating the purified first fluid or the mixed fluid to a circulation pump or a distributor may be further included.

Meanwhile, in the spraying method using the spraying device of the present invention, the first fluid or the mixed fluid in which the first fluid and the second fluid are mixed into the object S using the spraying unit 10 Spraying; And sucking the foreign material P separated from the object S by the first fluid or the mixed fluid using the suction unit 20.

In addition, as shown in FIG. 3, the circulation system for separating the foreign matter P from the first fluid or the mixed fluid sucked by using a filter or the like and recirculating the purified first fluid or the mixed fluid It may further include; circulating the first fluid or the mixed fluid by using (200).

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those of ordinary skill in the art will appreciate that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

S: object
P: foreign matter
1: first fluid
2: second fluid
3: third fluid
4: mixed fluid
10: injection part
10a: first fluid inlet
10-1: first fluid dispersion receiving portion
10-2: mixed fluid discharge part
10-3: second fluid supply
T: dispersion
20: suction unit
B: Block body
B1: base block
B2: injection part forming block
B3: suction part forming block
A: first fluid dispersion receiving portion
R1: first bend
R2: second bend
R3: third bend
P1: first fluid supply pipe
P2: second fluid supply pipe
P3: suction pipe
P4: branch pipe
P5: Combination engine
P6: 3rd fluid supply pipe
W: evil
30: third fluid liquid film forming apparatus
31: inner barrel
32: external cylinder
33: spray slit
34: angle adjustment device
110: frame
120: block fixture
100: injection device
200: circulatory system

Claims (8)

An injection unit for injecting a first fluid or a mixed fluid in which the first and second fluids are mixed to the object;
A suction unit configured to suck foreign substances separated from the object by the first fluid or the mixed fluid;
Including,
The injection unit and the suction unit are formed in a block body including at least one block,
The block body,
Base block;
An injection unit forming block assembled on the base block and having the injection unit formed on a surface opposite to the base block; And
A suction part forming block assembled on the injection part forming block and having the suction part formed on a surface opposite to the injection part forming block;
Including,
At least a portion of each of the base block and the injection unit forming block is assembled in surface contact with each other,
At least a portion of each of the injection unit forming block and the suction unit forming block is assembled in surface contact with each other,
The injection unit is formed between the base block and the injection unit forming block,
The suction unit is formed between the injection unit forming block and the suction unit forming block,
The base block is generally formed in a straight cross section,
The injection part forming block,
As a whole, a first bent portion is formed in a shape whose cross section is firstly bent in a direction away from the base block so that the first fluid dispersion receiving portion is formed between the base block and the lower portion rising along the base block. A second bent portion is formed in a shape in which the upper part is secondly bent in the upper direction of the base block,
The suction part forming block,
The suction unit has a narrow third width to form suction pressure, and the overall cross section is first bent from the lower portion of the injection unit forming block so that an enlarged suction pressure forming space can be formed for uniform suction The third bent portion is formed,
The first fluid or the mixed fluid is provided on the object to form a liquid film that is integrally installed with the block body in front of the block body or at the front and rear of the block body based on the moving direction of the object. A third fluid film forming apparatus for injecting a third fluid onto the object so as to collect;
Including a further, injection device. The method of claim 1,
The block body,
A block fixture for pressing the base block, the injection unit forming block and the suction unit forming block, and the base block assembled to fix the injection unit forming block and the suction unit forming block;
A second fluid supply pipe formed in the base block to be connected to the second fluid supply unit;
A first fluid supply pipe formed in the injection unit forming block to be connected to the first fluid dispersion receiving unit; And
A suction pipe formed in the suction part forming block to be connected to the suction part;
Including a further, injection device. The method of claim 1,
The injection unit,
A first fluid dispersion receiving portion having a first fluid inlet through which the first fluid is introduced, and having a first width so that the first fluid introduced through the first fluid inlet is evenly distributed;
A mixed fluid discharge unit formed to have a second width narrower than the first width so that the first fluid or the mixed fluid of the first fluid dispersion receiving unit can be discharged at high pressure; And
The second fluid is formed between the first fluid dispersion receiving unit and the mixed fluid discharge unit, and the second fluid is transferred to the mixed fluid discharge unit so that the mixed fluid of the second fluid and the first fluid can be discharged to the mixed fluid discharge unit. A second fluid supply unit for supplying;
Containing, injection device. The method of claim 3,
A dispersion formed inside the first fluid dispersion receiving portion and colliding with the first fluid to evenly distribute the first fluid;
Including a further, injection device. The method of claim 1,
The first fluid is formed by selecting at least one of steam, deionized water steam, compressed dry air (CDA), cleaning liquid steam, and combinations thereof, and the second fluid is at least water. , Pure water, compressed dry air, cleaning liquid, and any one or more of a combination thereof. The method of claim 1,
The third fluid liquid film forming apparatus,
An inner cylinder having a third fluid receiving space formed therein to receive the third fluid, and having a plurality of injection holes formed therein; And
An outer cylinder that surrounds the inner cylinder and is formed to be spaced apart from the inner cylinder, and in which a jet slit is formed at a position deviated from the jet hole;
Containing, injection device. The method of claim 6,
The third fluid liquid film forming apparatus,
An angle adjusting device for adjusting a spray angle of the spray slit of the outer cylinder;
Including a further, injection device. An injection unit for injecting a first fluid or a mixed fluid in which the first and second fluids are mixed to the object; And a suction unit configured to suck foreign substances separated from the object by the first fluid or the mixed fluid, wherein the injection unit and the suction unit are formed in a block body including at least one block, and the block body Is, the base block; An injection unit forming block assembled on the base block and having the injection unit formed on a surface opposite to the base block; And a suction part forming block assembled on the injection part forming block and having the suction part formed on a surface opposite to the injection part forming block, wherein at least a portion of each of the base block and the injection part forming block The injection unit forming block and the suction unit forming block are assembled in surface contact with each other, and at least a portion of each of the injection unit forming block and the suction unit forming block is assembled by surface contacting each other, and the injection unit is formed between the base block and the injection unit forming block, and the The suction unit is formed between the injection unit forming block and the suction unit forming block, and is integrally installed with the block body in front of the block body or at the front and rear sides of the object based on the moving direction of the object, In order to form a floating liquid film, a third fluid film forming apparatus for injecting a third fluid onto the object so as to collect the first fluid or the mixed fluid on the object; further comprising, a spray method using an injection device In,
Spraying the first fluid or the mixed fluid in which the first fluid and the second fluid are mixed to the object using the injection unit; And
Suctioning foreign substances separated from the object by the first fluid or the mixed fluid using the suction unit;
Including,
The base block is generally formed in a straight cross section,
The injection part forming block,
As a whole, a first bent portion is formed in a shape whose cross section is firstly bent in a direction away from the base block so that the first fluid dispersion receiving portion is formed between the base block and the lower portion rising along the base block. A second bent portion is formed in a shape in which the upper part is secondly bent in the upper direction of the base block,
The suction part forming block,
The suction unit has a narrow third width to form suction pressure, and the overall cross section is first bent from the lower portion of the injection unit forming block so that an enlarged suction pressure forming space can be formed for uniform suction In which the third bent portion is formed, the injection method.

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