KR101187882B1 - Apparatus to dry glass substrate - Google Patents

Apparatus to dry glass substrate Download PDF

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Publication number
KR101187882B1
KR101187882B1 KR20100095046A KR20100095046A KR101187882B1 KR 101187882 B1 KR101187882 B1 KR 101187882B1 KR 20100095046 A KR20100095046 A KR 20100095046A KR 20100095046 A KR20100095046 A KR 20100095046A KR 101187882 B1 KR101187882 B1 KR 101187882B1
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KR
South Korea
Prior art keywords
substrate
air
pipe
drying
suction
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KR20100095046A
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Korean (ko)
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KR20120033498A (en
Inventor
박호윤
이돈형
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주식회사 디엠에스
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Priority to KR20100095046A priority Critical patent/KR101187882B1/en
Publication of KR20120033498A publication Critical patent/KR20120033498A/en
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Publication of KR101187882B1 publication Critical patent/KR101187882B1/en

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Abstract

The present invention discloses a substrate drying apparatus capable of quickly removing washing water or chemical liquid on a large area substrate.
The present invention provides a substrate drying apparatus of a slit bar type, comprising: an air supply unit for supplying compressed air, a cleaning liquid suction unit for sucking the cleaning liquid of the substrate using air supplied from the air supply unit, and air supplied from the air supply unit to the substrate And an air jetting part to inject.

Description

Apparatus to dry glass substrate
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate drying apparatus, and more particularly, to a substrate drying apparatus capable of quickly removing washing water or a chemical liquid on a large area substrate.
In general, the substrate drying apparatus may be used to remove the cleaning liquid remaining on the substrate by spraying compressed air onto the glass substrate after cleaning the substrate, and at the same time, it may be used to perform a liquid-closing function to block the cleaning liquid from passing to the next process. Such a substrate drying apparatus has a structure in which two layers of plates are arranged to overlap each other to form a flow path in the middle portion and spray compressed air (CDA) through the flow path. Such a substrate drying apparatus is disposed on top of the substrate to remove the cleaning liquid and the like deposited on the surface of the substrate by spraying compressed air onto the surface of the substrate as the substrate moves.
Conventional substrate drying apparatus has a problem that it is difficult to efficiently dry the substrate only by blowing compressed air when there is an excessive amount of chemical liquid or washing water on the large-area substrate, resulting in a process defect due to poor drying.
Therefore, the present invention has been proposed to solve the above problems, and an object of the present invention is to suck the cleaning liquid or the chemical liquid (hereinafter referred to as 'cleaning liquid') on the substrate by using the compressed air supplied from the compressed air supply unit. The present invention provides a drying apparatus of a substrate which removes (suction, suction) and, at the same time, the remaining cleaning liquid which may still remain, is blown out using compressed air supplied from the air supply unit described above to prevent drying failure of the substrate.
In order to achieve the object of the present invention as described above, the present invention in the substrate drying apparatus of the slit bar type, the air supply unit for supplying the compressed air, the suction of the cleaning liquid of the substrate using the air supplied from the air supply unit It provides a cleaning apparatus for a substrate comprising a cleaning liquid suction unit, an air injection unit for injecting the air supplied from the air supply unit to the substrate.
The cleaning liquid suction unit is a main chamber connected to receive compressed air from the air supply unit, a venturi pipe line connected to the main chamber, and a suction pipe connected to the venturi pipe line to suck the cleaning liquid on the substrate and slit-shaped. It may include a discharge pipe connected to the venturi pipe to discharge the cleaning liquid.
The main chamber and the discharge conduit may be arranged long along the longitudinal direction of the drying apparatus of the substrate.
The discharge pipe may be provided with a discharge port on the side of the drying apparatus of the substrate.
The air injection unit may include a connection pipe connected to the main chamber, an auxiliary chamber connected to the connection pipe path, and an air injection pipe path connected to the auxiliary chamber to inject air to the substrate and having a slit shape.
The suction liquid suction part is provided with a suction pipe path for sucking the cleaning liquid of the substrate in a slit shape, and the air injection part includes an air injection pipe path having a slit shape for injecting air to the substrate, and the tip portion of the suction pipe path. The height may be lower than the height of the tip of the air injection pipe.
The drying apparatus of the substrate may be provided with a spray air induction portion formed in a curved form between the front end portion of the suction pipe passage and the front end portion of the air injection pipe passage.
The auxiliary chamber may be provided long along the longitudinal direction of the drying apparatus of the substrate.
The suction pipe line may have a wider space at the tip end side than the space at the inlet portion of the suction pipe line.
Preferably, the cleaning liquid suction unit is disposed at the rear of the air injection unit based on the moving direction of the substrate.
As described above, the present invention can suck the cleaning liquid on the substrate by using the air supplied from the compressed air supply unit, and at the same time, spray the air to remove the cleaning liquid of the substrate. It works.
Figure 1 is a perspective view schematically showing the appearance of the drying apparatus of the substrate in order to explain the embodiment of the present invention.
2 is a cross-sectional view taken along line II-II of FIG.
3 is a detailed view of a part of FIG. 2 according to an embodiment of the present invention.
4 is a view showing in detail the example of the structure of the suction port for sucking the cleaning liquid in the embodiment of the present invention.
5 is a view showing in detail another example of the structure of the suction port for sucking the cleaning liquid in the embodiment of the present invention.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.
FIG. 1 is a perspective view for explaining an embodiment of the present invention, and FIG. 2 is a cross-sectional view of the II-II part of FIG. 1, illustrating a drying apparatus of a substrate. In the substrate drying apparatus of the embodiment of the present invention, the air supply unit 1 for supplying the compressed air, the compressed air is supplied from the air supply unit 1 to suck and discharge the cleaning liquid in the substrate (G) and at the same time the substrate And a nozzle assembly 3 capable of injecting air to (G).
The nozzle assembly 3 includes a cleaning liquid suction part 5 and an air jet part 7. The nozzle assembly 3 preferably has a bar shape and has a length larger than the width of the substrate G. That is, the nozzle assembly 3 may be dried by blowing in the cleaning liquid on the substrate G and the like as the substrate G moves, and may be dried in the form of a slit bar type. .
The cleaning liquid suction unit 5 may suck the cleaning liquid on the substrate by using the air supplied from the air supply unit 1, and the main chamber 9, the venturi pipe 11, the suction pipe 13, and the discharge pipe ( 15).
The main chamber 9 may be provided along the longitudinal direction of the nozzle assembly 3. The main chamber 9 is connected to the venturi conduit 11. Therefore, the compressed air supplied through the air supply unit 1 may pass through the venturi conduit 15 through the main chamber 9. In addition, the venturi conduit 11 may be horizontally disposed based on FIG. 2, and a suction pipe 13 may be connected to the middle portion in a direction toward the substrate G. In addition, the venturi conduit 11 may be connected to the discharge conduit 15.
The suction line 13 and the discharge line 15 may be provided in the longitudinal direction of the nozzle assembly 3. Discharge pipe 15 may be provided with a discharge port (15a) on both sides of the nozzle assembly (3).
Therefore, when compressed air is supplied from the air supply unit 1, a negative pressure is formed in the suction pipe path 13 while passing through the venturi pipe path 11, and the cleaning liquid on the substrate G is sucked up into the suction pipe path 13, and the cleaning liquid is discharged into the discharge pipe. It may be discharged to the outside through the outlet (15a) of the furnace (15).
The air injection unit 5 includes a plurality of connecting pipe paths 17 connected to the main chamber 9, an auxiliary chamber 19 connected to the connecting pipe path 17, and an air injection pipe connected to the auxiliary chamber 19. (21).
The connection pipe 17 may be connected to the auxiliary chamber 19 at a constant diameter and at a predetermined interval. The auxiliary chamber 19 serves to temporarily collect the compressed air so that the air injected into the air injection pipe line 21 can be injected at a uniform pressure in all the injection zones.
The air injection pipe passage 21 is preferably provided in a direction in which air can be injected toward the substrate G.
On the other hand, the position of the tip portion 21a of the air injection pipe passage 21 with respect to the tip portion 13a of the suction pipe passage 13 described above is located at a position farther from the substrate G when the substrate G is referred to. It is preferable to arrange. That is, as shown in FIG. 2, the tip portion 13a of the suction pipe line 13 and the tip portion 21a of the air injection pipe line 21 have a height H, and the tip portion of the air injection pipe line 21 ( 21a) may be placed at a higher position.
The suction pipe passage 13 and the air injection pipe passage 21 may be formed in a slit form and may be disposed side by side toward the substrate G. However, in order to efficiently remove the cleaning liquid in the substrate G, the suction pipe 13 and the air injection pipe 21 may be disposed at an angle to each other, and may be disposed at an angle inclined toward the substrate G. have.
In addition, a jet air induction part 23 having a curved shape may be provided between the front end portion 13a of the suction pipe passage 13 and the front end portion 21a of the air injection pipe passage 21. In other words, when the nozzle assembly 3 is cut in the direction perpendicular to the longitudinal direction, the cross section shape may form a curved portion. The injection air induction part 23 forms a curved part based on a direction in which air moves along the curved part of the injection air induction part 23 when air is injected from the air injection pipe path 21 to move the substrate G. Air is sprayed to the rear to maximize the cleaning liquid removal effect.
On the other hand, although the suction pipe path 13 has been described with reference to an example (see FIG. 4) made of only a slit form in the above-described embodiment, as another example of the embodiment of the present invention, as shown in FIG. Compared to 13a), the inlet portion 13b may be narrower. That is, the spacing of the tip portion 13a side may be wider than the spacing of the inlet portion 13b of the suction pipe line 13. Another example of this embodiment is to show that the shape of the suction pipe 13 of the present invention can be variously implemented.
Such a nozzle assembly 3 may be made by the following components as an example. As shown in FIGS. 1 and 2, the nozzle assembly 3 includes a first side member 25, a center member 27, a second side member 29, a cover member 31, and a third member. It may be made of a side member (33).
The first side member 25 has a center member 27 having a space forming the main chamber 9 on one side thereof. In addition, the second side member 29 may be disposed on the center member 27 while securing a space forming the discharge pipe 15 on the other side. The first side member 25, the center member 27, and the second side member 29 may have a cover member 31 disposed thereon, and may be coupled to each other by fastening members such as bolts.
Some surfaces of the first side member 25 and the second side member 29 face each other. At this time, a predetermined interval t is provided on a surface where the first side member 25 and the second side member 29 face each other. The suction pipe passage 13 (refer to FIG. 3 and FIG. 4) can be achieved by maintaining space. In addition, the venturi conduit 11 may be provided on a surface where the first side member 25 and the second side member 29 face the center member 27, respectively. Of course, the venturi conduit 11 connects the main chamber 9 and the discharge conduit 15 and is formed in a slit form.
Meanwhile, the third side member 33 may be coupled to one side of the second side member 29 and one side of the cover member 31 by a fastening member such as a bolt. In addition, the third side member 33 may be provided with an auxiliary chamber 19 in the longitudinal direction of the nozzle assembly 3, and the auxiliary side chamber 19 may form an opening on the side of the second side member 29.
And through the center member 27 and the second side member 29 is provided with connection pipe paths 17, which are connected to the auxiliary chamber 19.
In addition, a predetermined interval may be provided along a length direction of the nozzle assembly 3 on a surface where the second side member 29 and the third side member 33 face each other to form an air injection pipe passage 21.
In addition, the nozzle assembly 3 may be coupled to the closing member 35 provided with the discharge port 15a on the side of both ends in the longitudinal direction. The closing member 35 is coupled to the side of the first side member 25, the center member 27, the second side member 29 and the cover member 31 as a fastening member, such as a bolt, the main chamber ( 9) and the venturi pipe line 11, and the suction pipe line 13 may serve to close the side portion. In an embodiment of the present invention, the closing member may be omitted depending on the processing structure of each component.
Examples of such embodiments of the present invention is not limited to the embodiments of the present invention can also be carried out by combining the components consisting of a variety of structures.
Referring to the operation of the embodiment of the present invention made as described above are as follows.
First, when the air compressed by the air supply unit 1 is supplied to the main chamber 9, it moves simultaneously to the venturi conduit 11 and the connection conduit 17. At this time, the air passing through the venturi conduit 11 is discharged to the discharge port 15a through the discharge conduit 15. At this time, while the air passes through the venturi conduit 11, a negative pressure is generated in the suction conduit 13, and the cleaning liquid in the upper portion of the substrate G is sucked up by the negative pressure. The cleaning liquid raised along the suction pipe line 13 is discharged together with the air through the discharge pipe line 15. Thus, the cleaning liquid can be removed from the substrate G (see FIGS. 2 and 3).
Subsequently, the air passing through the connecting pipe path 17 moves to the auxiliary chamber 19 and is injected to the substrate G side through the air injection pipe path 21. At this time, the air injected through the air injection pipe path 21 is guided to the injection air induction unit 23 is to be sprayed toward the rear based on the direction in which the substrate (G) moves. Therefore, the cleaning liquid that may remain on the substrate G can be removed.
As described above, the present invention can maximize the drying effect of the substrate G by receiving compressed air from the air supply unit 1 for supplying compressed air and sucking and blowing the cleaning liquid in the substrate G.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, And it goes without saying that the invention belongs to the scope of the invention.
1. air supply, 3. nozzle assembly,
5. cleaning liquid inlet, 7. air jet,
9. Main chamber, 11. Venturi pipeline,
13. suction line, 15. discharge line,
17. connector, 19. auxiliary chamber,
21. Air injection pipe, 23. Injection air guide,
25. first side member, 27. center member,
29. second side member, 31. cover member,
33. The third side member,

Claims (10)

  1. In the drying apparatus of the substrate which consists of a slit bar type,
    An air supply unit for supplying compressed air,
    A cleaning liquid suction unit which sucks the cleaning liquid of the substrate by using the air supplied from the air supply unit;
    An air jet unit for injecting air supplied from the air supply unit to the substrate
    Drying apparatus of the substrate comprising a.
  2. The method according to claim 1,
    The cleaning liquid suction unit
    A main chamber connected to receive the compressed air from the air supply unit,
    Venturi pipe connected to the main chamber,
    A suction pipe connected to the venturi pipe and sucking the cleaning liquid on the substrate and having a slit shape;
    A discharge pipe connected to the venturi pipe to discharge the cleaning liquid
    Drying apparatus of the substrate comprising a.
  3. The method according to claim 2,
    The main chamber and the discharge pipe
    Drying apparatus of the substrate disposed long along the longitudinal direction of the drying apparatus of the substrate.
  4. The method according to claim 2,
    The discharge pipe
    Drying apparatus of the substrate provided with a discharge port on the side of the drying apparatus of the substrate.
  5. The method according to claim 1,
    The air injection unit
    A connecting pipe connected to the main chamber receiving the compressed air from the air supply,
    Auxiliary chamber connected to the connecting pipe,
    And an air injection pipe path connected to the auxiliary chamber to inject air to the substrate and having a slit shape.
  6. The method according to claim 1,
    The suction liquid suction part is provided with a suction pipe passage for sucking the cleaning liquid of the substrate in a slit shape,
    The air injection unit includes an air injection pipe path injecting air to the substrate and has a slit shape,
    The height of the tip end portion of the suction pipe passage is a substrate drying apparatus disposed in a position closer to the substrate than the height of the tip portion of the air injection pipe passage.
  7. The method of claim 6,
    Drying apparatus of the substrate
    And a spraying air induction part having a curved shape between the tip of the suction pipe line and the tip of the air injection pipe.
  8. The method according to claim 5,
    The auxiliary chamber
    Drying apparatus of the substrate provided along the longitudinal direction of the drying apparatus of the substrate.
  9. The method according to claim 2,
    The suction line
    The apparatus for drying a substrate, wherein a space at the tip end is wider than a space at an inlet of the suction pipe.
  10. The method according to claim 1,
    And the cleaning liquid suction part is disposed behind the air jetting part with respect to the moving direction of the substrate.
KR20100095046A 2010-09-30 2010-09-30 Apparatus to dry glass substrate KR101187882B1 (en)

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KR20100095046A KR101187882B1 (en) 2010-09-30 2010-09-30 Apparatus to dry glass substrate

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Application Number Priority Date Filing Date Title
KR20100095046A KR101187882B1 (en) 2010-09-30 2010-09-30 Apparatus to dry glass substrate

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KR20120033498A KR20120033498A (en) 2012-04-09
KR101187882B1 true KR101187882B1 (en) 2012-10-04

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101527064B1 (en) * 2014-01-15 2015-06-09 코리아 오토글라스 주식회사 Cooling apparatus for manufacturing laminated glass

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102177641B1 (en) * 2018-10-31 2020-11-12 주식회사 뉴파워 프라즈마 Spray apparatus and method
KR102176672B1 (en) * 2020-08-04 2020-11-09 주식회사 뉴파워 프라즈마 Spray apparatus and method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001255503A (en) 2000-03-10 2001-09-21 Matsushita Electric Ind Co Ltd Device for drying substrate for liquid crystal display device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001255503A (en) 2000-03-10 2001-09-21 Matsushita Electric Ind Co Ltd Device for drying substrate for liquid crystal display device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101527064B1 (en) * 2014-01-15 2015-06-09 코리아 오토글라스 주식회사 Cooling apparatus for manufacturing laminated glass

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