JP2010064068A - Gas-liquid separator and substrate processing apparatus including the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a gas-liquid separator and a substrate processing apparatus including the same. <P>SOLUTION: The gas-liquid separator includes a separation box, a filter part, a gas discharge pipe and a drain pipe. The separation box has an inflow port for receiving gas/liquid mixture formed at an upper part. The filter part is disposed under the inflow part inside the separation box and filters a liquid component from the flowing gas/liquid mixture. The exhaust pipe is connected to a lower part of the separation box with the closed upper part facing the filter part, and at least one gas discharge port for discharging a gas component of the gas/liquid mixture having passed through the filter part is formed on the side face. The drain pipe is connected to a lower part of the separation box adjacent to the gas discharge port, and discharges the liquid component of the gas/liquid mixture filtered in the filter part. This configuration minimizes the setting space, allowing simple separation of the liquid component and gas component from the gas/liquid mixture. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a gas-liquid separation device and a substrate processing apparatus including the same, and more specifically, when discharging a gas-liquid mixed with a processing liquid and a gas for processing a substrate, the processing is performed from the gas-liquid. The present invention relates to a separation apparatus that can separate a liquid and the gas and a processing apparatus that includes the separation apparatus and processes the substrate.

  In general, examples of the flat panel display include a liquid crystal display (LCD) using liquid crystal, a plasma display (PDP) using plasma, and an organic light emitting display (OLED) using an organic light emitting element.

The flat panel display device includes a display panel that substantially displays an image. The display panel is manufactured based on a glass substrate.
Specifically, the display panel is manufactured by performing a deposition process, an etching process, a photolithography process, a cleaning process, an inspection process, and the like for the substrate.

  Among the processes described above, the etching process and the cleaning process include arranging the substrate in a process chamber, and then supplying a processing liquid for the etching process or the cleaning process to the process chamber through a processing liquid injection unit. It proceeds by spraying onto the substrate.

  At this time, a gas injection unit for injecting a gas to the substrate is arranged above the processing liquid injection unit in order to guide the processing liquid to the substrate. In this case, a gas-liquid in a spray form in which the processing liquid and the gas are mixed exists in the process chamber.

  As a result, the gas-liquid in a spray form may float in the process chamber and contaminate other substrates. Therefore, an inflow pipe to which a vacuum pressure is transmitted from an external vacuum pump is connected to the process chamber. The gas-liquid is sucked to the outside through the vacuum pressure.

  However, when the gas / liquid flows into the vacuum pump as it is, the vacuum pump may be damaged by the processing liquid out of the gas / liquid.

  Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide a new and improved gas that can easily separate a processing liquid and a gas from a gas and liquid. The object is to provide a liquid separation device.

  In order to achieve the above-described object of the present invention, a gas-liquid separator according to one aspect includes a separation box, a filter unit, an exhaust pipe, and a drain pipe. The separation box is formed with an inflow port through which gas and liquid are introduced. The filter unit is disposed in the lower part of the inflow port inside the separation box, and filters a liquid component from the inflowed gas / liquid. The exhaust pipe is connected to the lower part of the separation box with the closed upper part facing the filter part, and at least one exhaust port for exhausting the gas component of the gas-liquid that has passed through the filter part on the side surface Is formed. The drain pipe is connected to a lower part of the separation box adjacent to the exhaust pipe, and drains the liquid component of the gas-liquid filtered by the filter unit.

Here, the exhaust port may be positioned higher than the bottom surface of the lower part of the separation box.
The filter unit is disposed in a partition structure inside the separation box and has a first porous plate having a first hole formed therein, and is disposed in the partition structure in the separation box and below the first porous plate. A second perforated plate having a second hole having a smaller diameter than the first hole.

  Accordingly, the first hole and the second hole respectively have a ratio of 1: 1.1 to 1: 1.5 and 1: 1 to 1: 1.2 with respect to the area of the inlet. It can be formed to have.

  The first hole may have a diameter of 1: 0.1 to 1: 0.3 with respect to the diameter of the inlet, and the second hole may have a diameter of 1: 0.1 with respect to the diameter of the first hole. It can have a diameter of 0.7-1: 0.9.

The filter unit may further include at least one filter sheet made of fiber yarn between the first and second perforated plates.
Meanwhile, the separation box may have an opening at a first side so that the first and second perforated plates and the filter sheet can be inserted and separated.

In addition, the gas-liquid separator may further include a cover portion that covers the opening, and a sealing portion that seals between the cover portion and the separation box.
In addition, the separation box is formed long inside the opening in the insertion direction of the first and second perforated plates, and the first and second guides guide the insertion of the first and second perforated plates. Can have grooves.

Here, the width of each of the first and second guide grooves may be 1 to 3 mm wider than the thickness of each of the first and second perforated plates to be inserted.
On the other hand, the separation box has a step portion formed at a lower bottom surface lower than the surroundings, and the drain pipe can be connected to the step portion.

In contrast, the separation box may be formed such that a bottom surface of the lower portion is inclined toward the second side portion, and the drain pipe may be connected to a portion of the bottom surface that contacts the second side portion. It is.
The exhaust pipe includes exhaust ports in a circumferential direction, and a plurality of intervals between the exhaust ports have a range of 1: 0.07 to 1: 0.1 with respect to the circumference of the exhaust pipe. Can be formed.

  In order to achieve another object of the present invention, a substrate processing apparatus according to one aspect includes a process chamber, a processing liquid injection unit, a gas injection unit, and a gas-liquid separation unit. The process chamber provides a space for processing a substrate. The treatment liquid ejecting unit is disposed on the substrate inside the process chamber, and ejects a treatment liquid supplied from the outside onto the substrate. The gas injection unit is disposed on the processing liquid injection unit and injects gas into the process chamber as a whole. The gas-liquid separation unit is disposed adjacent to the process chamber, and is connected to the upper part of the process chamber through an inflow pipe, and a gas-liquid mixture of the processing liquid and the gas from the inside of the process chamber. Inflowing, the processing liquid and the gas are separated from the inflowing gas-liquid.

  The gas-liquid separator is connected to the inflow pipe at an upper portion thereof, a separation box into which the gas-liquid is introduced, and the gas-liquid that is disposed in the lower portion of the inflow pipe inside the separation box. A filter part for filtering the treatment liquid from the closed part, the closed upper part faces the filter part and is connected to the lower part of the separation box, and the side of the gas liquid that has passed through the filter part is exhausted on the side surface And a first drain pipe connected to a lower part of the separation box adjacent to the exhaust pipe and draining the processing liquid filtered by the filter unit.

Meanwhile, the substrate processing apparatus may further include a vacuum pump connected to the exhaust pipe opposite to the separation box and providing a vacuum pressure to the inflow pipe through the separation box.
The substrate processing apparatus may further include a second drain pipe connected to a lower portion of the process chamber and processing the substrate to drain a processing liquid guided to the lower portion of the process chamber. In this case, the first drain pipe can be connected to the second drain pipe to drain the filtered processing liquid to the second drain pipe.

  According to such a gas-liquid separator and a substrate processing apparatus including the gas-liquid separator, the gas-liquid separator that can separate the liquid processing liquid from the gas-liquid is disposed between the process chamber and the vacuum pump. Among the liquids, the vacuum pump can be prevented from being damaged by the processing liquid.

  In addition, the processing liquid is separated from the gas-liquid while maintaining the flow of the gas-liquid substantially in the lower direction through the upper and lower arrangements of the first and second perforated plates and the filter sheet of the filter portion of the gas-liquid separator. After that, the gas of the gas component of the gas-liquid is exhausted through the exhaust port formed on the side surface of the exhaust pipe, thereby preventing the separation box from increasing in size. That is, by minimizing the installation space for the gas-liquid separation device, it is possible to facilitate the installation of other peripheral devices.

  In addition, when the gas-liquid separator is used for a long time, the filter sheet of the filter unit that requires replacement can be easily inserted and separated through the opening of the separation box, thereby easily replacing the filter sheet. It can be carried out. That is, the maintenance work of the filter sheet can be easily performed.

1 is a schematic exploded view of a gas-liquid separator according to an embodiment of the present invention. It is the figure which showed the cross section which couple | bonded the gas-liquid separator shown in FIG. 1, and was cut | disconnected in the up-down direction. It is the figure which showed the filter part of the gas-liquid separator shown in FIG. It is the figure which showed the state by which the filter part shown in FIG. 3 is inserted in a separation box. It is the figure which looked at the state where the filter part shown in Drawing 4 was inserted in the separation box from the direction of an opening. FIG. 3 is a diagram specifically showing an exhaust pipe of the gas-liquid separation device shown in FIG. 2. It is the figure which showed the structure where the drain pipe shown in FIG. 2 was connected with the separation box by one Example. It is the figure which showed the structure where the drain pipe shown in FIG. 2 was connected with the separation box by another Example. 1 is a configuration diagram schematically illustrating a substrate processing apparatus according to an embodiment of the present invention.

  Hereinafter, a gas-liquid separator and a substrate processing apparatus including the same according to embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention can be variously modified and can have various forms, and specific embodiments will be described in detail with reference to the drawings. However, this should not be construed as limiting the invention to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals have been given to like components while describing the figures. In the drawings, the size of the structure is shown enlarged from the actual size for the sake of clarity of the present invention.

  The terminology used in the present application is merely used to describe particular embodiments, and does not limit the present invention. The singular form includes the plural form unless the context clearly indicates otherwise. In this application, terms such as “comprising” or “having” are intended to mean that a feature, number, step, operation, component, part, or combination thereof described in the specification is present. It should be understood that it does not exclude the possibility of the presence or addition of one or more other features or numbers, steps, actions, components, parts, combinations thereof, etc. .

  Unless defined differently, all terms used herein, including technical or scientific terms, are generally understood by those with ordinary knowledge in the technical field to which this invention belongs. Have the same meaning. Terms such as those defined in commonly used dictionaries should be construed as having a meaning consistent with the meaning possessed in the context of the related art and, unless explicitly defined in this application, are unusual. Or is not overly interpreted in a formal sense.

  FIG. 1 is a schematic exploded view of a gas-liquid separator according to an embodiment of the present invention, and FIG. 2 is a vertical sectional view of the gas-liquid separator shown in FIG. FIG.

Referring to FIGS. 1 and 2, the gas-liquid separator 100 according to an embodiment of the present invention includes a separation box 110, a filter unit 120, an exhaust pipe 130, and a drain pipe 140.
The separation box 110 is formed with an inlet 111 into which a gas-liquid (GL) mixed with the liquid component (L) and the airframe component (G) flows. An inflow pipe 150 into which the gas liquid (GL) is substantially introduced from the outside is connected to the inflow port 111. The inflow pipe 150 is supplied with a vacuum pressure from the outside through the separation box 110.

  The filter unit 120 is disposed in the lower part of the separation box 110 so as to be adjacent to the inflow port 111. The gas / liquid (GL) flows into the filter unit 120 in the direction in which the gas / liquid (GL) flows from the inflow port 111, and filters the liquid component (L) out of the gas / liquid (GL).

  Specifically, the gas component (G) passes through the filter unit 120 and floats in a lower part adjacent to the filter unit 120 while the gas liquid (GL) passes through the filter unit 120. Accordingly, the liquid component (L) is filtered and falls to the bottom surface 115 of the lower part of the separation box 110. This is because the liquid component (L) has a relatively much higher density than the airframe component (G).

  The filter unit 120 includes a first perforated plate 122 and a second perforated plate 124. The first porous plate 122 is disposed in a partition structure inside the separation box 110. The second porous plate 124 is disposed in a partition structure below the first porous plate 122 inside the separation box 110. That is, the gas / liquid (GL) flowing in from the inlet 111 always passes through the first porous plate 122 and the second porous plate 124.

  A first hole 123 and a second hole 125 are formed in each of the first perforated plate 122 and the second perforated plate 124 in order to filter the gas-liquid (GL) flowing from the inlet 111. Accordingly, the gas-liquid (GL) hits a portion of the first perforated plate 122 and the second perforated plate 124 where the first hole 123 and the second hole 125 are not formed. The liquid component (L) is collected from each of the first porous plate 122 and the second porous plate 124 and falls to the bottom surface 115 of the lower part of the separation box 110 through the first hole 123 and the second hole 125. .

Hereinafter, the filter unit 120 will be described in more detail with reference to FIG.
FIG. 3 is a view showing a filter portion of the gas-liquid separator shown in FIG.

  Referring to FIG. 3, the first hole 123 may be configured to drastically reduce the vacuum pressure when the entire area is less than about 1: 1.1 with respect to the area of the inlet 111. Since the gas-liquid (GL) does not flow smoothly from the inflow pipe 150, it is undesirable. When the ratio exceeds about 1: 1.5, the liquid component (L) is smoothly collected from the gas-liquid (GL). It is not desirable because it is not performed.

  Accordingly, the first hole 123 may be formed to have a ratio of about 1: 1.1 to 1: 1.5 with respect to the area of the inlet 111. It is more preferable that the first hole 123 is formed so that the total area of the first hole 123 is about 1: 1.1 to 1: 1.3 with respect to the area of the inlet 111.

  The first hole 123 prevents the gas-liquid (GL) from flowing more than expected when the diameter (D1) is less than about 1: 0.1 with respect to the diameter of the inlet 111. Therefore, it is not desirable because the vacuum pressure is drastically decreased, and when it exceeds about 1: 0.3, it is not desirable because the assembly of the liquid component (L) is not smooth.

  Accordingly, the diameter (D1) of the first hole 123 may have a ratio of about 1: 0.1 to 1: 0.3 with respect to the diameter of the inlet 111. For example, when the diameter of the inlet 111 is about 200 mm, the diameter (D2) of the first hole 123 may be about 30 mm.

  On the other hand, the second hole 125 has a smaller diameter (D2) than the first hole 123. This prevents the gas-liquid (GL) that has passed through the first hole 123 from passing through the second hole 125 as it is, and the liquid component (L) is also collected in the second porous plate 124. This is to ensure that

  Specifically, the diameter (D2) of the second hole 125 may have a ratio of about 1: 0.7 to 1: 0.9 with respect to the diameter (D1) of the first hole 123. In an example, the diameter (D2) of the second hole 125 may be about 25 mm when the diameter (D1) of the first hole 123 is about 30 mm.

  In contrast, the first hole 123 and the second hole 125 are alternately configured so that the gas-liquid (GL) passing through the first hole 123 is related to the diameter (D2) of the second hole 125. Instead, the liquid component (L) may be collected in the second porous plate 124.

  In addition, since the second perforated plate 124 has the same area as the first perforated plate 122 and has a partition wall structure inside the separation box 110, the second hole 125 has an entire area. It is preferable to form the inlet 111 so as to have a ratio of about 1: 1 to 1: 1.2 that is narrower than the first hole 123. In addition, it is more preferable that the second hole 125 is formed to have the same overall area as the area of the inlet 111.

  Meanwhile, the filter unit 120 further includes at least one filter sheet 126 made of fiber yarn between the first porous plate 122 and the second porous plate 124. The filter sheet 126 is generally similar in structure to a non-woven fabric, and a plurality of fine pores are formed inside by crossing fiber yarns. Here, the filter sheet 126 may be made of PP (polypropylene) yarn, for example.

  A plurality of the filter sheets 126 are generally used because it is difficult to obtain the effect of one sheet. For example, about 8 to 12 filter sheets 126 may be stacked and used. Such filter sheets 126 have a predetermined elasticity due to the characteristics of the respective materials. That is, the filter sheet 126 is disposed between the first porous plate 122 and the second porous plate 124 in a pressurized state.

  Accordingly, the filter sheet 126 collects the liquid component (L) having a relatively high density from the gas-liquid (GL) through fine pores and drops the liquid component (L) on the bottom surface 115 of the lower portion of the separation box 110, Alternatively, the liquid component (L) is collected as it is so that it cannot pass through.

  When such a filter sheet 126 is used for a long time, the liquid component (L) is saturated in fine pores and cannot perform its function completely, and thus needs to be replaced. .

  For this reason, the separation box 110 has an opening 112 in the first side portion 117 so that the filter sheet 126 can be inserted and separated like the first porous plate 122 and the second porous plate 124. The

Hereinafter, the replacement method of the filter sheet 126 will be described in more detail with reference to FIGS. 4 and 5 additionally.
4 is a cross-sectional view taken along the line II ′ of FIG. 1 of the separation box on which the filter unit is mounted. FIG. 5 is a cross-sectional view of the separation box on which the filter unit is mounted. It is sectional drawing cut | disconnected along the line.

  4 and 5, the separation box 110 is formed in the opening 112 so as to be long in the insertion direction of the first porous plate 122 and the second porous plate 124. A first guide groove 113 and a second guide groove 114 are formed to guide the insertion of the porous plate 122 and the second porous plate 124, respectively.

  Accordingly, when the filter sheet 126 is replaced, first, the first porous plate 122 and the second porous plate 124 that pressurize the filter sheet 126 are moved together with the filter sheet 126 to the first guide groove 113 and the second porous plate 124. 2 Separated outside through the opening 112 along the guide groove 114.

  Thereafter, the new filter sheet 126 is replaced between the first perforated plate 122 and the second perforated plate 124, and then again inside the separation box 110 along the first guide groove 113 and the second guide groove 114. The replacement work is completed by inserting.

  At this time, the widths of the first guide groove 113 and the second guide groove 114 are formed to be approximately 1 to 3 mm wider than the thicknesses of the first porous plate 122 and the second porous plate 124 to be inserted, respectively.

  This is because the first porous plate 122 and the second porous plate 124 are more strongly pressurized in the vertical direction in the first guide groove 113 and the second guide groove 114 to pressurize the filter sheet 126 more strongly, This is to prevent the first perforated plate 122 and the second perforated plate 124 from falling from between the first perforated plate 122 and the second perforated plate 124 during the period in which the first perforated plate 122 and the second perforated plate 124 are separated from the separation box 110.

  As described above, when the filter sheet 126 is replaced, the first perforated plate 122 and the second perforated plate 124 that pressurize the filter sheet 126 are moved along the first guide groove 113 and the second guide groove 114 in the separation box. The replacement work can be easily performed by separating from the inside of 110 or inserting it into the inside. That is, the maintenance work of the filter sheet 126 can be easily performed.

  In this case, the gas-liquid separator 100 inserts the first porous plate 122 and the second porous plate 124 into the separation box 110 through the opening 112 like the filter sheet 126, and then opens the opening. A cover part 160 for covering the part 112, and a sealing part 170 disposed between the separation box 110 and the cover part 160 for sealing the inside of the separation box 110 from the outside may be further included. .

  Here, the cover 160 has a plate structure having a size corresponding to the opening 112 and can be bolted to the separation box 110 with the sealing part 170 interposed therebetween.

  In addition, the sealing unit 170 is an example, and may be configured with a comulin having a sealing effect superior to the price. In contrast, if the liquid component (L) of the gas-liquid (GL) includes a strongly acidic substance, the sealing part 170 may be made of silicon or viton material having excellent oxidation resistance. It can consist of rings.

  The exhaust pipe 130 extends to the outside of the separation box 110 through a lower end of the separation box 110 with a first end 132 facing the second porous plate 124 of the filter unit 120. The first end 132 may be disposed to be sealed through a separate blocking member 134. In contrast, when the exhaust pipe 130 is manufactured, it is obvious that the first end can be manufactured as a sealed end.

  The exhaust pipe 130 has at least one exhaust port 136 formed on a side surface inside the separation box 110. The gas component (G) of the gas-liquid (GL) that passes through the filter unit 120 and floats below the filter unit 120 flows into the exhaust port 136 and is exhausted to the exhaust pipe 130. .

  At this time, the exhaust port 136 is positioned higher than the bottom surface 115 of the lower part of the separation box 110. This is to prevent the liquid component (L) filtered by the filter unit 120 and falling on the bottom surface 115 from flowing into the exhaust port 136.

Hereinafter, the exhaust port will be described in more detail with reference to FIG.
6 is a diagram specifically showing an exhaust pipe of the gas-liquid separation device shown in FIG.
Referring additionally to FIG. 6, the exhaust pipe 130 includes a plurality of exhaust ports 136 along a circumferential direction. The exhaust ports 136 are arranged on a side surface of the exhaust pipe 130 at a predetermined interval (g).

  At this time, if the interval (g) between the exhaust ports 136 is less than about 1: 0.07 with respect to the circumference of the exhaust pipe 130, the exhaust gas remaining between the exhaust ports 136 is left. If the tube 130 is formed so thin that the exhaust tube 130 may be damaged when the gas component (G) is exhausted, it is not desirable. This is not desirable because it does not perform smoothly with the exhaust of (G).

Accordingly, it is preferable that the gap (g) between the exhaust ports 136 has a ratio of about 1: 0.07 to 1: 0.1 with respect to the entire circumference of the exhaust pipe 130.
Since the exhaust port is formed on the circumferential surface of the exhaust pipe, the circumferential surface between the exhaust ports can be expressed as an angular distance with respect to the center line of the exhaust port. In the present embodiment, the interval between the exhaust ports has an angular distance of about 30 degrees with respect to the center line of the exhaust pipe, and the remaining circumferential surface between the exhaust ports has a center angle of 30 degrees. It has a fan-shaped shape.

  The drain pipe 140 is connected to the lower part of the separation box 110 adjacent to the exhaust pipe 130. The drain pipe 140 drains the liquid component (L) filtered by the filter unit 120 and falling on the bottom surface 115 below the separation box 110 to the outside.

  At this time, the drain pipe 140 has a relatively high density compared to the gas component (G), so that the liquid component (L) has a relatively small discharge volume. Can have a small diameter.

Hereinafter, the connection structure of the drain pipe 140 will be described in more detail with reference to FIGS.
FIG. 7 is a view showing a structure in which the drain pipe shown in FIG. 2 is connected to the separation box according to one embodiment, and FIG. 8 is a diagram showing the drain pipe shown in FIG. It is the figure which showed the structure connected.

Referring to FIG. 7, the separation box 110 includes a stepped portion 116 formed at a lower bottom surface 115 lower than the surroundings.
The drain pipe 140 is connected to the stepped portion 116. Accordingly, the liquid component (L) filtered from the filter unit 120 and falling on the bottom surface 115 is guided to the stepped portion 116 formed lower than the surroundings and drained to the outside through the drain pipe 140.

  As an embodiment different from this, referring to FIG. 8, the bottom 115 of the lower part of the separation box 110 is disposed to be inclined from the central part of the separation box 110 toward the peripheral part 118, and the drain pipe 140 is arranged as described above. The separation box 1100 is connected so as to penetrate the peripheral portion 118 of the bottom surface 115. As a result, the liquid component (L) dropped on the bottom surface 115 gathers at the peripheral portion 118 and is discharged through the drain pipe 140 due to the inclination.

  Here, it is desirable that the peripheral portion 118 be arranged so as to be separated from the opening portion 112 by design, but it is obvious that the peripheral portion 118 can be arranged adjacent to the opening portion 112 in some cases. At this time, the inclination angle (a) of the bottom surface 115 is an example in order to smoothly guide the liquid component (L) to the second side portion 118 within a range in which the size of the separation box 110 is maintained as it is. It can have about 3-5 degrees.

  Therefore, if the flow of the gas-liquid (GL) is substantially maintained in the lower direction through the vertical arrangement of the first porous plate 122 and the second porous plate 124 of the filter unit 120 and the filter sheet 126, the gas-liquid (GL). After separating the liquid component (L) from the gas, the gas component (G) of the gas-liquid (GL) is exhausted through the exhaust port 136 formed on the side surface of the exhaust pipe 130, thereby separating the separation box 110. Can be prevented from increasing in size.

That is, by minimizing the installation space of the gas-liquid separation device 100, other devices can be easily installed.
FIG. 9 is a block diagram schematically showing a substrate processing apparatus according to an embodiment of the present invention.

  Referring to FIG. 9, the substrate processing apparatus 1000 according to an embodiment of the present invention includes a process chamber 200, a substrate transfer unit 300, a processing liquid injection unit 400, a gas injection unit 500, and a gas / liquid separation unit 100.

In the present embodiment, the gas-liquid separator has the same configuration as the gas-liquid separator shown in FIGS. 1 to 8, and therefore, the same reference numerals are given and detailed description thereof is omitted.
The process chamber 200 provides a space for processing the substrate (S) loaded therein. Here, the substrate (S) is, for example, a glass thin film transistor (TFT) substrate or a color filter used for manufacturing a liquid crystal display (LCD) that displays an image using liquid crystal. A (Color Filter; CF) substrate may be used. In contrast, the substrate (S) may be a semiconductor substrate used for manufacturing a semiconductor device.

  The substrate transfer unit 300 is disposed under the substrate (S) carried into the process chamber 200 and transfers the substrate (S). The substrate transfer unit 300 includes a shaft 310 that is long in a direction perpendicular to the transfer direction of the substrate (S), and a roller 320 that is coupled to the shaft 310 and supports the substrate (S). Including.

  The processing liquid ejection unit 400 is disposed on the substrate (S) in the process chamber 200. The processing liquid injection unit 400 processes the substrate (S) by receiving the supply of the processing liquid (L) from the outside and injecting the processing liquid (L) onto the substrate (S).

Here, when the etching process or the cleaning process is performed on the substrate (S), the processing liquid (L) is sulfuric acid (H ₂ SO ₄ ), hydrochloric acid (HCl), hydrofluoric acid (HF), excess Hydrogen oxide solution (H ₂ O ₂ ), deionization number (H ₂ O), and the like can be included.

  Meanwhile, the substrate transfer unit 300 allows the processing liquid (L) sprayed onto the substrate (S) to flow naturally to either one of the etching process or the cleaning process more efficiently. Therefore, the substrate (S) can be transferred in a slightly inclined state.

Here, the inclination angle of the substrate (S) is, for example, about 3 to 6 degrees.
The gas injection unit 500 is disposed on the processing liquid injection unit 400. The gas injection unit 500 entirely injects gas (G) into the process chamber 200. Accordingly, the gas injection unit 500 can be directly installed on the ceiling 210 above the process chamber 200.

  The gas injection unit 500 is configured to inject gas from the upper side of the processing liquid injection unit 400 toward the lower side, so that the processing liquid (L) injected from the processing liquid injection unit 400 becomes the substrate (S). ).

  As a result, the gas-liquid (GL) in which the processing liquid (L) and the gas (G) are mixed exists in the process chamber 200 in a floating state. The gas liquid (GL) may contaminate the other substrate (S) transferred through the substrate transfer unit 300.

  The gas-liquid separator 100 is connected to the process chamber 200 through an inflow pipe 150 at a position adjacent to the process chamber 200, and the processing liquid (L) is converted from the gas-liquid (GL) flowing in through the inflow pipe 150. And the gas (G) is separated.

  The inflow pipe 150 is connected to an upper portion of the process chamber 200 because the gas-liquid (GL) is in a floating state inside the process chamber 200. Specifically, the inflow pipe 150 may be connected to the ceiling 210 or the side wall 230 of the process chamber 200. Here, the inflow pipe 150 is generally connected to an upper portion of the side wall 230 in order to facilitate installation of the substrate processing apparatus 1000.

  The gas-liquid separator 100 is connected to an upper part of the inflow pipe 150 so that the gas-liquid (GL) flows into the separation box 110 and is disposed in the lower part of the separation box 110 adjacent to the inflow pipe 150. A filter part 120 for filtering the treatment liquid (L) of the liquid component from the gas liquid (GL), and a closed upper part 132 connected to the lower part of the separation box 110 so as to face the filter part 120, The liquid (GL) is connected to an exhaust pipe 130 for exhausting the gas (G) that is a gas component that has passed through the filter unit 120, and a lower part of the separation box 110 adjacent to the exhaust pipe 130, and the filter A first drain pipe 140 for draining the processing liquid (L) filtered by the unit 120;

  Here, the closed upper portion 132 of the exhaust pipe 130 is blocked by a separate blocking member 134, and at least one exhaust port 136 is formed on the side surface for exhausting the gas (G).

  Accordingly, the substrate processing apparatus 1000 includes a vacuum pump 600 connected to the opposite side of the separation box 110 of the exhaust pipe 130 so that the gas liquid (GL) flows smoothly from the inflow pipe 150. In addition.

  That is, the vacuum pump 600 generates a vacuum pressure and supplies it to the inflow pipe 150 through the exhaust pipe 130 and the separation box 110. At this time, the filter unit 120 disposed in the separation box 110 may be configured as shown in FIGS. 1 to 8 so that the vacuum pressure does not drop below a reference value.

  As described above, the gas-liquid separation unit 100 capable of separating the processing liquid (L) as a liquid component from the gas-liquid (GL) is disposed between the process chamber 200 and the vacuum pump 600, thereby providing the gas-liquid separation unit 100. Of the liquid (GL), the vacuum pump 600 can be prevented from being damaged by the processing liquid (L).

  Meanwhile, the substrate processing apparatus 1000 further includes a second drain pipe 700 connected to the lower bottom surface 220 of the process chamber 200. The second drain pipe 700 processes the substrate (S) and drains the processing liquid (L) guided to the lower part of the process chamber 200 to the outside.

  Accordingly, the first drain pipe 140 is connected to the second drain pipe 700, and the treatment liquid (L) separated from the gas-liquid separator 100 can be drained to the second drain pipe 700. Thus, in the second drain pipe 700, all of the processing liquid (L) sprayed for processing the substrate (S) inside the process chamber 200 can be drained.

  Thus, the processing liquid (L) drained through the second drain pipe 700 is collected in a separate recovery device (not shown) in some cases, and then supplied again to the processing liquid injection unit 400. It can also be recycled.

Therefore, by separating the processing liquid (L) from the gas-liquid (GL) through the gas-liquid separation unit 100, the processing liquid (L) can be used more efficiently.
The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to such examples. It is obvious that a person having ordinary knowledge in the technical field to which the present invention pertains can make various changes or modifications within the scope of the technical idea described in the claims. Of course, it is understood that these also belong to the technical scope of the present invention.

  The present invention described above is used for an apparatus capable of preventing breakage of the vacuum pump by filtering the liquid component treatment liquid from the gas liquid when the gas liquid is discharged from the process chamber using a vacuum pump. Can do.

  G ... Gas component, gas, L ... Liquid component, treatment liquid, GL ... Gas / liquid, S ... Substrate, 100 ... Gas-liquid separator, 110 ... Separation box, 111 ... Inlet, 112 ... Opening, 113 ... First Guide groove, 114 ... second guide groove, 120 ... filter part, 122 ... first porous plate, 124 ... second porous plate, 126 ... filter sheet, 130 ... exhaust pipe, 132 ... closed upper part, 134 ... blocking member DESCRIPTION OF SYMBOLS 136 ... Exhaust port, 140 ... Drain pipe, 150 ... Inflow pipe, 200 ... Process chamber, 300 ... Substrate transfer part, 400 ... Process liquid injection part, 500 ... Gas injection part, 600 ... Vacuum pump, 1000 ... Substrate processing apparatus .

Claims (16)

A separation box formed with an inflow port through which gas and liquid are introduced;
A filter unit that is disposed in the lower part of the inlet in the separation box and filters liquid components from the inflowed gas-liquid;
An exhaust in which at least one exhaust port for exhausting a gas component of the gas-liquid that has passed through the filter part is formed on a side surface, the closed upper part facing the filter part and connected to the lower part of the separation box Tube,
A gas-liquid separation device, comprising: a drain pipe connected to a lower portion of the separation box and draining a liquid component of the gas-liquid filtered by the filter unit. The gas-liquid separator according to claim 1, wherein the exhaust port is positioned higher than a bottom surface of the lower part of the separation box. The filter section is
A first perforated plate disposed in a partition structure inside the separation box and having a first hole;
And a second perforated plate disposed in a partition structure below the first perforated plate inside the separation box and having a second hole having a smaller diameter than the first hole. Item 2. The gas-liquid separator according to Item 1. The first hole and the second hole have a ratio of 1: 1.1 to 1: 1.5 and 1: 1 to 1: 1.2, respectively, with respect to the area of the inlet. The gas-liquid separation device according to claim 3, wherein the gas-liquid separation device is formed. The first hole has a diameter of 1: 0.1 to 1: 0.3 with respect to the diameter of the inlet, and the second hole has a diameter of 1: 0. The gas-liquid separator according to claim 3, wherein the gas-liquid separator has a diameter of 7 to 1: 0.9. The gas-liquid separator according to claim 3, wherein the filter unit further includes at least one filter sheet made of fiber yarn between the first and second perforated plates. The separation box is formed with an opening on one side so that the first and second perforated plates and the filter sheet can be inserted and separated.
A cover portion covering the opening;
The gas-liquid separation device according to claim 6, further comprising a sealing portion that seals between the cover portion and the separation box. The separation box is formed long in the insertion direction of the first and second perforated plates inside the opening, and first and second guide grooves for guiding the insertion of the first and second perforated plates. The gas-liquid separator according to claim 7, comprising: The gas-liquid separation according to claim 8, wherein the width of each of the first and second guide grooves is 1 to 3 mm wider than the thickness of each of the first and second perforated plates to be inserted. apparatus. The gas-liquid separator according to claim 1, wherein the separation box has a stepped portion formed at a lower bottom surface lower than the surroundings, and the drain pipe is connected to the stepped portion. 2. The air according to claim 1, wherein the separation box is formed such that a bottom surface of the lower portion is inclined to one side, and the drain pipe is connected to a portion of the bottom surface that is in contact with the one side. Liquid separation device. The exhaust pipe has a plurality of exhaust ports arranged in a circumferential direction, and an interval between the exhaust ports is 1: 0.07 to 1: 0.1 with respect to a circumference of the exhaust pipe. The gas-liquid separator according to claim 1, wherein the gas-liquid separator has a ratio. A process chamber providing a space for processing a substrate;
A processing liquid ejecting unit disposed on the substrate inside the process chamber and ejecting a processing liquid supplied from the outside onto the substrate;
A gas injection unit that is disposed above the processing liquid injection unit and injects gas entirely into the process chamber;
The process liquid is connected to the process chamber through an inflow pipe, and a gas / liquid mixture of the process liquid and the gas is introduced from the inside of the process chamber, and the process liquid and the gas are separated from the gas / liquid introduced. A gas-liquid separator, and
The gas-liquid separator is
A separation box into which the inflow pipe is connected, and the gas-liquid is introduced;
A filter unit that is disposed in the lower part of the inflow pipe inside the separation box and filters the processing liquid from the inflowed gas and liquid;
The closed upper part faces the filter part and is connected to the lower part of the separation box, and at least one exhaust port for exhausting the gas that has passed through the filter part is formed on the side surface. Exhaust pipe,
A substrate processing apparatus, comprising: a first drain pipe connected to a lower portion of the separation box adjacent to the exhaust pipe and draining a liquid component of the gas-liquid filtered by the filter unit. The substrate processing apparatus of claim 13, further comprising a vacuum pump connected to the exhaust pipe opposite to the separation box and providing a vacuum pressure to the inflow pipe through the separation box. The substrate processing according to claim 13, further comprising: a second drain pipe connected to a lower part of the process chamber and draining a residual processing liquid guided to the lower part of the process chamber by processing the substrate. apparatus. The substrate processing apparatus of claim 15, wherein the first drain pipe is connected to the second drain pipe and drains the filtered processing liquid to the second drain pipe.

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