CN213401138U

CN213401138U - Flexible substrate bearing device

Info

Publication number: CN213401138U
Application number: CN202021730233.4U
Authority: CN
Inventors: 葛沈浩
Original assignee: Institute of Flexible Electronics Technology of THU Zhejiang
Current assignee: Institute of Flexible Electronics Technology of THU Zhejiang
Priority date: 2020-08-18
Filing date: 2020-08-18
Publication date: 2021-06-08
Anticipated expiration: 2030-08-18

Abstract

The utility model discloses a flexible substrate bears device, flexible substrate bears device includes the plummer, the plummer has first passageway, air vent and connector, the air vent is followed the upper surface downwardly extending of plummer and with first passageway intercommunication, the connector with first passageway intercommunication. The utility model discloses a flexible substrate bears device prevents that flexible substrate from producing the phenomenon of unevenness at the paster in-process.

Description

Flexible substrate bearing device

Technical Field

The utility model relates to a semiconductor package technical field specifically, relates to a flexible substrate bears device.

Background

In the chip mounting process, the flexible substrate is placed on the bearing table, and then chip mounting is carried out.

In the related art, a flexible substrate is placed on a carrier, and some positioning pins or frames are used to meet the requirements of the patch. However, the flexible substrate is prone to surface bending and unevenness during the mounting process, and in the related art, the carrier stage is sized and only suitable for a flexible substrate with a certain size. However, in the in-service use process, the flexible substrate comes the material size and differs, if the size of flexible substrate is obviously greater than the size of plummer, and partial flexible substrate is located the plummer outside, influences the paster, and to the flexible substrate of different sizes, need customize the plummer of different sizes, and is with high costs.

SUMMERY OF THE UTILITY MODEL

The present invention aims at solving at least one of the technical problems in the related art to a certain extent.

Therefore, the embodiment of the present invention provides a flexible substrate carrying device, which can prevent the flexible substrate from generating unevenness during the mounting process.

According to the utility model discloses flexible substrate bears device includes: the plummer, the plummer has first passageway, air vent and connector, the air vent is followed the upper surface downwardly extending of plummer and with first passageway intercommunication, connector and first passageway intercommunication.

According to the utility model discloses flexible substrate bears device, through set up first passageway in the plummer, and first passageway respectively with the air vent and the connector intercommunication of plummer upper surface, in the in-service use process, place flexible substrate on the plummer upper surface, take out first passageway and the air in the hole of synchronizing through air exhauster or vacuum pump through the connector, produce the negative pressure, make the flexible substrate of arranging the plummer upper surface in through the air vent by firmly adsorbing on the upper surface of plummer, can effectively avoid flexible plummer to take place to buckle.

In some embodiments, the carrier table also has a second channel that intersects and communicates with the first channel.

In some embodiments, the number of the bearing tables is multiple, in the multiple bearing tables, adjacent bearing tables are connected, the second channels of the adjacent bearing tables are communicated, and the connecting port is arranged on at least one bearing table.

In some embodiments, the flexible substrate carrier further includes a sealing member disposed between an outer circumferential surface of the positioning member and an inner wall surface of the second channel.

In some embodiments, each of the carriers further comprises a groove surrounding the second channel, the carrier comprises a first side and a second side, the groove is recessed inward from at least one of the first side and the second side of the carrier, and the seal fits in the groove and surrounds the positioning member.

In some embodiments, each of the susceptors has a through hole penetrating through the susceptor in a transverse direction thereof, and the flexible substrate supporting apparatus further includes a connector sequentially penetrating through the through holes of the susceptors to connect the susceptors.

In some embodiments, in each of the bearing tables, the first channel is a plurality of channels, the plurality of channels are arranged at intervals, the second channel is communicated with the plurality of channels, and at least one of the plurality of channels is communicated with the connection port.

In some embodiments, each of the carrier tables further includes a plurality of second channels and a plurality of third channels, the plurality of third channels and the second channels are alternately arranged, the plurality of third channels are communicated with the first channels, and an included angle is formed between the length direction of the third channels and the length direction of the first channels.

In some embodiments, the vent hole is a plurality of vent holes, and the vent holes are arranged at intervals along the length direction of the first channel.

Drawings

Fig. 1 is a schematic structural diagram of a flexible substrate carrier according to an embodiment of the present invention.

Fig. 2 is a schematic view of an internal structure of the flexible substrate carrier of fig. 1.

Fig. 3 is a schematic structural diagram of a positioning member of a flexible substrate supporting apparatus according to the present invention.

Fig. 4 is a schematic structural diagram of a connecting member of a flexible substrate carrier device according to the present invention.

Fig. 5 is a schematic structural diagram of a carrier table of the flexible substrate carrier device according to the present invention.

Reference numerals:

the bearing platform comprises a bearing platform 1, a first channel 11, a second channel 12, a third channel 13, a vent hole 14, a connecting port 15, a through hole 16, a groove 2, a positioning piece 3, a through hole 31, a sealing piece 4, a connecting piece 5, a bolt 51 and a nut 52.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

As shown in fig. 1 to 5, a flexible substrate carrier device according to an embodiment of the present invention includes a carrier 1, and the carrier 1 has a first channel 11, an air vent 14 and a connection port 15.

The vent 14 extends downward from the upper surface of the carrier 1, and the vent 14 communicates with the first passage 11. The connection port 15 communicates with the first passage 11.

According to the utility model discloses flexible substrate bears device, through set up first passageway 11 in plummer 1, and first passageway 11 communicates with air vent 14 and connector 15 of plummer 1 upper surface respectively, in the in-service use process, place flexible substrate on plummer 1 upper surface, air in first passageway 11 and air vent 14 is taken out through air exhauster or vacuum pump through connector 15, produce the negative pressure, make the flexible substrate of arranging plummer 1 upper surface in through air vent 14 by firmly adsorbing on plummer 1's upper surface, can effectively avoid flexible substrate to take place to buckle.

In some embodiments, the carrier table 1 further has a second channel 12, the second channel 12 intersecting and communicating with the first channel 11.

Specifically, a second channel 12 intersecting with the first channel 11 is further disposed inside the bearing platform 1, in some embodiments, the vent hole 14 can also be communicated with the second channel, and through the first channel 11 and the second channel 12 which are communicated with each other, when an exhaust fan or a vacuum pump is used to exhaust air in the bearing platform 1 from the connection port 15, because the first channel 11 and the second channel 12 are communicated with each other, negative pressure can also be generated at the vent hole 15 communicated with the second channel 12 to firmly adsorb the flexible substrate on the upper surface of the bearing platform 1. In some other embodiments, the connection port 15 can communicate with the second passage 12.

In some embodiments, there are a plurality of the carrier tables 1, in the plurality of the carrier tables 1, adjacent carrier tables 1 are connected, the second channels 12 of adjacent carrier tables 1 are communicated, and the connection port 15 is provided on at least one carrier table 1.

According to the utility model discloses flexible substrate bears device, through adjacent plummer 1 in a plurality of plummers 1 continuous, and the second passageway 12 of two adjacent plummers 1 communicates each other and passes through air exhauster or vacuum pump through connector 15 with the air in the first passageway 11 of every plummer 1 and the second passageway 12 and take out, and through air vent 14 will place the firm absorption on plummer 1 of flexible substrate at plummer 1 upper surface, according to the size of flexible substrate, set up the quantity of plummer 1, make flexible substrate establish completely on plummer 1, according to the size combination of flexible substrate can with flexible substrate matched with flexible substrate bear device.

In some embodiments, the upper surface of the carrier 1 for adsorbing the flexible substrate may be triangular, quadrangular or hexagonal, etc. Preferably, the carrier table 1 is a rectangular parallelepiped (as shown in fig. 1), the plurality of carrier tables 1 are sequentially connected in the width direction of the carrier table 1, and the flexible substrate carrier device composed of the plurality of carrier tables 1 is simple to mount, wide in application range and low in manufacturing cost. This application can form required size or shape through two liang of concatenation combinations of different forms with a plurality of plummer to the size or the shape of adaptation flexible substrate.

It is understood that the carrier table 1 may have other shapes, that is, the shape of the carrier table 1 is not limited thereto, as long as a plurality of carrier tables 1 can be formed into a size or a shape corresponding to the flexible substrate by splicing.

In other embodiments, the arrangement of the carrier tables 1 may be combined in pairs to form a matrix arrangement, so as to meet the requirements of adsorbing flexible substrates of different sizes.

The first passages 11 of two adjacent bearing tables 1 are communicated with each other.

In some embodiments, the flexible substrate supporting apparatus further includes a positioning member 3, the positioning member 3 is provided with a through hole 31, one end of the positioning member 3 fits into the second channel 12 of one of the adjacent supporting platforms 1, the other end of the positioning member 3 fits into the second channel 12 of the other of the adjacent supporting platforms 1, and the second channels 12 of the adjacent supporting platforms 1 are communicated through the through hole. As shown in fig. 1 and 2, the positioning member 3 extends in the left-right direction, and the through hole 31 penetrates the positioning member 3 in the left-right direction. In two adjacent plummer 1, one plummer 1 is located another plummer 1 left side, and this plummer 1 of definition is the left side plummer, and this another plummer 1 of definition is the right side plummer, and the left end cooperation of setting element 3 is in the second passageway 12 of left side plummer, and the right-hand member cooperation of setting element 3 is at the second passageway 12 of right side plummer, and the through-hole 31 of setting element 3 intercommunication left side plummer second passageway 12 and the second passageway 12 of right side plummer.

According to the utility model discloses flexible substrate bearing device, second passageway 12 through setting element 3 with two adjacent plummer 1 is connected, can make two adjacent plummer 1 connect stably, through-hole on the setting element 3 can make two adjacent plummer 1's second passageway 12 be linked together, in the in-service use process, owing to just communicate two adjacent plummer 1's second passageway 12 with setting element 3, can adjust the distance between two adjacent plummer 1 in the certain limit through adjusting setting element 3, according to the size of flexible substrate, can make the flexible substrate bearing device maximum that constitutes through a plurality of plummers 1 and the flexible substrate phase-match of required laminating through adjusting the distance between the quantity of plummer 1 and two adjacent plummer 1, simple structure and resource utilization are abundant.

In some embodiments, the flexible substrate carrier further includes a sealing member 4, and the sealing member 4 is provided between an outer circumferential surface of the positioning member 3 and an inner wall surface of the second passage 12.

According to the utility model discloses flexible substrate bears device establishes sealing member 4 between the outer peripheral face of setting element 3 and the internal face of second passageway 12 can be when the stability of being connected between two adjacent plummer 1 of further enhancement, has strengthened the gas tightness between two adjacent plummer 1.

In some embodiments, each carrier table 1 of the flexible substrate carrier device is further provided with a recess 2 surrounding the second channel 12, the carrier table 1 comprising a first side (e.g. the left side of the carrier table 1 in fig. 1) and a second side (e.g. the right side of the carrier table 1 in fig. 1) arranged opposite each other in a lateral direction thereof, the recess 2 being inwardly recessed from at least one of the first side and the second side of the carrier table 1, and the seal 4 being fitted in the recess 2 and surrounding the positioning member 3.

As shown in fig. 1 and fig. 2, in three adjacent bearing platforms 1, the middle bearing platform 1 is located between the left bearing platform 1 and the right bearing platform 1, the left side and the right side of the middle bearing platform 1 are both provided with grooves 2, the right side of the left bearing platform 1 is provided with grooves 2, the left side of the right bearing platform 1 is provided with grooves 2, the grooves 2 of the left side of the middle bearing platform 1 and the grooves 2 of the right side of the left bearing platform 1 are arranged oppositely, and the grooves 2 of the right side of the middle bearing platform 1 and the grooves 2 of the left side of the right bearing platform 1 are arranged oppositely.

According to the utility model discloses flexible substrate bears device, sealing member 4 can be injectd 4 positions of sealing member in locating recess 2, further strengthens the stability that two adjacent plummer 1 are connected, can increase sealing member 4's life simultaneously, and the reinforcing bears device's whole life, reduce cost.

In some embodiments, the flexible substrate carrier device has a through hole 16 penetrating the carrier table 1 per carrier table 1. As shown in fig. 1 and 2, the through-holes 16 penetrate the stage 1 in the left-right direction, and the through-holes 16 of the plurality of stages 1 are arranged opposite to each other in the left-right direction.

The flexible substrate bearing device also comprises a connecting piece 5, and the connecting piece 5 sequentially passes through the through holes 16 of the bearing tables 1 to connect the bearing tables 1. Preferably, the connecting member 5 includes a bolt 51 and a nut 52. As shown in fig. 1, 2 and 4, the bolts 51 sequentially pass through the through holes 16 of the plurality of the bearing tables 1 and extend out of the through holes 16 of the bearing tables 1 farthest from the bolts 51, and the bolts 15 are engaged with nuts to connect the plurality of the bearing tables 1.

According to the utility model discloses flexible substrate bears device, through the cooperation of perforating hole 16 with connecting piece 5, can further be in the same place a plurality of plummer 1 fixed connection, and the reinforcing flexible substrate bears the holistic stability of device.

In some embodiments, in each carrier table 1, the first channel 11 is plural, the plural first channels 11 are arranged at intervals along the lateral direction of the carrier table 1, the second channel 12 is communicated with the plural first channels 11, and at least one first channel 11 of the plural first channels 11 is communicated with the connection port 15.

According to the utility model discloses flexible substrate bears device sets up a plurality of first passageways 11 and second passageway 12 and a plurality of first passageways 11 intercommunication, and in the in-service use process, when adopting updraft ventilator or vacuum pump to take out the air in plummer 1, owing to set up a plurality of first passageways 11 and make the inside space increase of plummer 1, and air vent 14 and first passageway 11 intercommunication, can keep the gaseous vacuum in plummer 1, and then guarantee the adsorption strength to flexible substrate.

In some embodiments, each carrier table 1 further comprises a plurality of second channels 12 and a plurality of third channels 13, the plurality of third channels 13 extending in a transverse direction of the carrier table 1, the plurality of third channels 13 alternating with the plurality of second channels 12, the plurality of third channels 13 communicating with the plurality of first channels 11.

According to the utility model discloses flexible substrate bears device, through setting up a plurality of second passageways 12 and a plurality of third passageway 13, in the in-service use process, when adopting air exhauster or vacuum pump to take out the air in plummer 1 from connector 15, can accelerate the vacuum in the air extraction speed plummer and keep unanimous, improves the adsorption effect to flexible substrate.

In some embodiments, in each carrier table 1, the second channel 12 is plural, and the plural second channels 12 are arranged at intervals.

According to the utility model discloses flexible substrate bears device sets up a plurality of second passageways 12 in plummer 1 and can strengthen flexible substrate and bear the holistic stability of device.

In some embodiments, in each carrier 1, there are a plurality of vent holes 14, and the plurality of vent holes 14 are arranged at intervals along the length direction of the first channel 11.

According to the utility model discloses flexible substrate bears device sets up a plurality of air vents 14 on the first passageway 11 and can further increase the adsorption effect to flexible substrate.

Specific exemplary flexible substrate carrier devices according to the present invention are described below with reference to the accompanying drawings.

As shown in fig. 1 to 5, the flexible substrate supporting apparatus according to the embodiment of the present invention includes three supporting tables 1 arranged side by side in the left-right direction, and each supporting table 1 has three first passages 11, two second passages 12, two third passages 13, one through hole 16, and a plurality of vent holes 14.

In each bearing table 1, three first channels 11 extend in the front-back direction and are arranged inside the bearing table 1 at intervals in the left-right direction, two second channels 12 and two third channels 13 extend in the left-right direction inside the bearing table 1, the two second channels 12 are arranged at intervals in the front-back direction, the two third channels 13 are arranged at intervals in the front-back direction, and the two third channels 13 are located between the two second channels 12 in the front-back direction. The second passages 12 of the three stages 1 are arranged oppositely in the left-right direction.

The through hole 16 penetrates the entire carrier table 1 in the left-right direction and is located between the two third passages 13 in the front-rear direction. The vent 14 extends downwardly from the upper surface of the carrier 1 and into communication with the first passage 11.

The leftmost bearing table 1 of the three bearing tables 1 further has a connection port 15, the connection port 15 extends backward from the front end surface of the leftmost bearing table 1 and is communicated with the front end of the middle first channel of the three first channels 11, the connection port 15 is used for being connected with an exhaust fan or a vacuum pump, air in the three bearing tables 1 can be pumped out through the exhaust fan or the vacuum pump, and the flexible substrate is adsorbed by the suction force generated at the vent holes 14 of the three bearing tables 1.

The carrier 1 also has a recess 2 surrounding the second channel 12. Wherein, the left surface and the right surface of middle plummer 1 all are equipped with recess 2, and the right flank of leftmost plummer 1 is equipped with recess 2, and the left surface of rightmost plummer 1 is equipped with recess 2, and the recess 2 of the left surface of middle plummer 1 and the recess 2 of the right flank of leftmost plummer 1 arrange relatively in the left-right direction, and the recess 2 of the right surface of middle plummer 1 and the recess 2 of the left surface of the right plummer 1 arrange relatively in the left-right direction.

The two ends of the positioning member 3 are respectively partially located in the second channels 12 of two adjacent bearing platforms 1, and the sealing member 4 is disposed at the groove 2 and surrounds the positioning member 3. The connecting piece 5 comprises a bolt 51 and a nut 52, the bolt 51 sequentially penetrates through the through holes 16 of the three bearing tables 1, the right end of the bolt 51 extends out of the right side face of the rightmost bearing table 1, the periphery of the right end of the bolt 51 is provided with threads, and the nut 51 is in threaded fit with the right end of the bolt 51 to complete connection of the three bearing tables 1.

In some other embodiments, the flexible substrate carrier can be composed of a plurality of identically shaped carrier tables 1 by being assembled to each other. In the left-right direction as shown in fig. 1, the second passages of the adjacent stages communicate with each other, and in the up-down direction, the first passages of the plurality of stages communicate with each other. In other words, when the flexible substrate bearing device is composed of a plurality of bearing tables 1, each adjacent bearing table is communicated with each other through the first channel or the second channel, when two adjacent bearing tables 1 in the vertical direction are communicated with each other through the first channel, the sealing groove is formed in the joint, and the positioning piece and the sealing piece are arranged in the first channel which is communicated with each other.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship indicated based on the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means a plurality, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; may be mechanically coupled, may be electrically coupled or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In the present disclosure, the terms "one embodiment," "some embodiments," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

Although embodiments of the present invention have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.

Claims

1. The utility model provides a flexible substrate bears device, its characterized in that, includes the plummer, the plummer has first passageway, air vent and connector, the air vent is followed the upper surface downwardly extending of plummer and with first passageway intercommunication, the connector with first passageway intercommunication, the plummer still has the second passageway, the second passageway with first passageway is crossing and intercommunication, the plummer is a plurality of, and is a plurality of in the plummer, it is adjacent the plummer is connected, and adjacent the second passageway intercommunication of plummer, the connector is established at least one on the plummer.

2. The apparatus as claimed in claim 1, further comprising a positioning member, wherein the positioning member has a through hole, one end of the positioning member fits into the second channel of one of the adjacent susceptors, the other end of the positioning member fits into the second channel of the other of the adjacent susceptors, and the second channels of the adjacent susceptors are communicated with each other through the through hole.

3. The flexible substrate carrier device of claim 2, further comprising a seal disposed between an outer peripheral surface of the positioning member and an inner wall surface of the second channel.

4. The flexible substrate carrier device of claim 3, wherein each of the plurality of stages further comprises a groove surrounding the second channel, the plurality of stages including first and second oppositely disposed sides, the groove being recessed inwardly from at least one of the first and second sides of the plurality of stages, the seal fitting within the groove and surrounding the positioning member.

5. The apparatus of claim 1, wherein each of the plurality of stages has a through hole passing through the stage, and further comprising a connecting member passing through the through holes of the plurality of stages in sequence to connect the plurality of stages.

6. The flexible substrate carrier device according to claim 1, wherein the first channel is a plurality of channels, the plurality of channels are spaced apart from each other, the second channel is in communication with the plurality of channels, and at least one of the plurality of channels is in communication with the connection port.

7. The apparatus according to claim 6, wherein each of the stages further comprises a plurality of second channels and a plurality of third channels, the plurality of third channels and the plurality of second channels are alternately arranged, the plurality of third channels are communicated with the first channels, and an included angle is formed between a length direction of the third channels and a length direction of the first channels.

8. The flexible substrate carrier device of any of claims 1-7, wherein the vent hole is a plurality of vent holes spaced along a length of the first channel.