CN220710285U - Vacuum platform jig and vacuum adsorption device - Google Patents
Vacuum platform jig and vacuum adsorption device Download PDFInfo
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- CN220710285U CN220710285U CN202322170925.8U CN202322170925U CN220710285U CN 220710285 U CN220710285 U CN 220710285U CN 202322170925 U CN202322170925 U CN 202322170925U CN 220710285 U CN220710285 U CN 220710285U
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- 238000001179 sorption measurement Methods 0.000 title claims abstract description 90
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 238000000926 separation method Methods 0.000 claims description 9
- 238000005096 rolling process Methods 0.000 claims description 2
- 238000004806 packaging method and process Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 230000000670 limiting effect Effects 0.000 description 4
- 238000012937 correction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
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- 238000012423 maintenance Methods 0.000 description 1
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Abstract
The utility model provides a vacuum platform jig and a vacuum adsorption device, and relates to the technical field of semiconductor packaging. Compared with the prior art, the utility model can realize the feeding adsorption of substrates with different sizes by arranging the first track groove and the second track groove, does not need to replace a platform, does not need to correct and adjust, has higher vacuum adsorption efficiency, and realizes the adsorption of substrates with multiple sizes.
Description
Technical Field
The utility model relates to the technical field of semiconductor packaging, in particular to a vacuum platform jig and a vacuum adsorption device.
Background
Along with the rapid development of the semiconductor industry, the miniaturization of electronic products is thinner and thinner to meet the demands of users and the performance and memory of the products are higher and higher, so that the thickness of the substrate of the products is thinner and the warping is bigger, and the vacuum adsorption substrate is carried out by adopting special vacuum when the machine is used for mounting chips under the normal condition, so that the mounting precision of the machine is improved. Because the substrate packaging size is various, therefore need frequently change the vacuum platform to different substrates, need correct the adjustment simultaneously, bring inefficiency's problem.
Disclosure of Invention
The utility model aims to provide a vacuum platform jig and a vacuum adsorption device, which are suitable for vacuum adsorption of substrates with different sizes, avoid frequent replacement of a vacuum platform, do not need correction and adjustment, and have high adsorption efficiency.
Embodiments of the present utility model are implemented as follows:
in a first aspect, the utility model provides a vacuum platform jig, which comprises a platform base and a track base, wherein a first track groove is formed in the platform base, the first track groove penetrates through to side walls on two sides of the platform base, a first vacuum adsorption hole is formed in the bottom side of the first track groove and used for adsorbing a first substrate stretching into the first track groove, a second vacuum adsorption hole is further formed in the platform base and penetrates through to the bottom side surface of the platform base, the track base is detachably mounted on the platform base and provided with a second track groove, the second track groove penetrates out of the platform base, a third vacuum adsorption hole is formed in the bottom side of the track base and is correspondingly connected with the second vacuum adsorption hole and used for adsorbing and attaching a second substrate stretching into the second track groove.
In an alternative embodiment, the platform base is provided with a mounting groove, the track base is accommodated in the mounting groove, the second vacuum adsorption Kong Kaishe is arranged on the bottom wall of the mounting groove, and the side wall of the platform base is further provided with a substrate inlet, and the substrate inlet is correspondingly jointed with the second track groove.
In an alternative embodiment, the number of the track bases is two, the two track bases are arranged in the mounting groove at intervals, the second track grooves are formed in each track base, and the two second track grooves extend in the same direction.
In an alternative embodiment, the track base is provided with a mounting hole, and a connecting piece is assembled in the mounting hole and detachably connected with the platform base.
In an alternative embodiment, the platform base is provided with a separation groove, the separation groove penetrates through to the side walls of two sides of the platform base, the first track grooves are separated into two parts, the two track bases are respectively arranged on two sides of the separation groove, the two first track grooves are respectively used for accommodating two side edges of the first substrate, and the bottom sides of the two first track grooves are respectively provided with the first vacuum adsorption holes.
In an alternative embodiment, the first vacuum suction holes and the second vacuum suction holes each penetrate to the bottom side surface of the platform base.
In an alternative embodiment, the edges of each of the first rail grooves are provided with a chamfer structure.
In an optional embodiment, the bottom wall of the mounting groove is further provided with a plurality of ball holes distributed along a straight line, the ball holes penetrate through the first track groove, press balls are movably assembled in the ball holes, and the press balls are used for partially extending into the first track groove and roll-pressing on the first substrate so that the first substrate is attached to the first vacuum adsorption hole.
In an alternative embodiment, the bottom side of the track base is provided with a ball groove, the ball groove is correspondingly assembled with the pressing ball, and part of the ball groove is communicated with the second track groove, so that the corresponding pressing ball part stretches into the second track groove.
In a second aspect, the utility model provides a vacuum adsorption device, which comprises a vacuum machine table and the vacuum platform jig, wherein the platform base is arranged on the vacuum machine table.
The beneficial effects of the embodiment of the utility model include:
according to the vacuum platform jig and the vacuum adsorption device, the first track groove is formed in the platform base, feeding of the first substrate is achieved, the first vacuum adsorption hole is formed in the bottom side of the first track groove, adsorption of the first substrate can be achieved through the first vacuum adsorption hole, meanwhile, the second vacuum adsorption hole is formed in the platform base, the track base is detachably mounted on the platform base and provided with the second track groove, the second track groove penetrates through the platform base, feeding of the second substrate can be achieved, the third vacuum adsorption hole is formed in the bottom side of the track base, penetrates through the second track groove and is correspondingly connected with the second vacuum adsorption hole, and the second substrate extending into the second track groove can be adsorbed. Compared with the prior art, the utility model can realize the feeding adsorption of substrates with different sizes by arranging the first track groove and the second track groove, does not need to replace a platform, does not need to correct and adjust, has higher vacuum adsorption efficiency, and realizes the adsorption of substrates with multiple sizes.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of an assembly structure of a vacuum platform fixture according to a first embodiment of the present utility model under a first view angle;
fig. 2 is an exploded view of a vacuum platform fixture according to a first embodiment of the present utility model;
fig. 3 is a schematic diagram of an assembly structure of the vacuum platform fixture according to the first embodiment of the present utility model under a second view angle;
fig. 4 is an exploded view of the vacuum platform tool according to the first embodiment of the present utility model under a second view angle.
Icon:
100-vacuum platform jig; 110-a platform base; 111-a first vacuum adsorption hole; 113-a second vacuum adsorption hole; 115-mounting groove; 117-ball holes; 118-dividing grooves; 119-substrate inlet; 130-track base; 131-a third vacuum adsorption hole; 133-pressing the balls; 135-ball grooves; 150-a first track groove; 170-a second track groove; 190-connectors.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal," "vertical," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
First embodiment
Referring to fig. 1 to 4, the present embodiment provides a vacuum platform fixture 100, which is suitable for vacuum adsorption of substrates with different sizes, avoids frequent replacement of the vacuum platform, does not need correction and adjustment, and has high adsorption efficiency.
The vacuum platform jig 100 provided in this embodiment includes a platform base 110 and a track base 130, the platform base 110 is provided with a first track groove 150, the first track groove 150 penetrates through to side walls of two sides of the platform base 110, a first vacuum adsorption hole 111 is provided at a bottom side of the first track groove 150, the first vacuum adsorption hole 111 is used for adsorbing a first substrate extending into the first track groove 150, the platform base 110 is further provided with a second vacuum adsorption hole 113, the second vacuum adsorption hole 113 penetrates through to a bottom side surface of the platform base 110, the track base 130 is detachably mounted on the platform base 110 and is provided with a second track groove 170, the second track groove 170 penetrates out of the platform base 110, and a third vacuum adsorption hole 131 is provided at a bottom side of the track base 130 and is correspondingly engaged with the second vacuum adsorption hole 113 for adsorbing a second substrate extending into the second track groove 170.
In this embodiment, the width of the first track groove 150 and the width of the second track groove 170 may be different, for example, the width of the first track groove 150 is greater than the width of the second track groove 170, the first track groove 150 is disposed on the platform base 110 to realize feeding of the first substrate, the bottom side of the first track groove 150 is provided with the first vacuum adsorption hole 111, the first vacuum adsorption hole 111 can realize adsorption of the first substrate, meanwhile, the platform base 110 is further provided with the second vacuum adsorption hole 113, the track base 130 is detachably mounted on the platform base 110 and is provided with the second track groove 170, the second track groove 170 penetrates out of the platform base 110 to realize feeding of the second substrate, and the bottom side of the track base 130 is provided with the third vacuum adsorption hole 131, which penetrates into the second track groove 170 and is correspondingly engaged with the second vacuum adsorption hole 113 to adsorb the second substrate stretching into the second track groove 170. In actual substrate suction, if the substrate size is large, the substrate may be fed into the first rail groove 150 and vacuum suction and fixation may be performed by the first vacuum suction hole 111, and if the substrate size is small, the substrate may be fed into the second rail groove 170 and vacuum suction and fixation may be performed by the third vacuum suction hole 131.
It should be noted that, the vacuum platform jig 100 in this embodiment is used for being placed on a vacuum machine, and a plurality of vacuum adsorption holes are provided on the vacuum machine, and the vacuum adsorption holes are communicated with the first vacuum adsorption hole 111 and the second vacuum adsorption hole 113 in a bonding manner, and the second vacuum adsorption hole 113 is correspondingly bonded with the third vacuum adsorption hole 131, so that vacuum adsorption of the first vacuum adsorption hole 111 and the third vacuum adsorption hole 131 can be realized. In addition, the vacuum adsorption mentioned in this embodiment refers to negative pressure adsorption, which does not reach a vacuum state, but refers to a state where the pressure is reduced enough for adsorption.
It should be noted that, in the present embodiment, the extending direction of the first track groove 150 and the extending direction of the second track groove 170 may be perpendicular to each other, for example, two ends of the first track groove 150 respectively extend to the left and right sides of the platform base 110, and two ends of the second track groove 170 respectively extend through to the front and rear sides of the platform base 110.
In this embodiment, the platform base 110 is provided with a mounting groove 115, the track base 130 is accommodated in the mounting groove 115, the second vacuum adsorption hole 113 is formed in the bottom wall of the mounting groove 115, and the side wall of the platform base 110 is further provided with a substrate inlet 119, and the substrate inlet 119 is correspondingly engaged with the second track groove 170. Specifically, the platform base 110 is recessed downwards and is formed with a mounting groove 115, and by arranging the mounting groove 115, a certain limiting and fixing effect can be realized on the track base 130, so that the track base 130 can be conveniently assembled. The substrate inlet 119 is disposed on the sidewall of the platform base 110, so as to avoid interference of the platform base 110 to the second substrate, and facilitate the substrate entering the second track groove 170.
In this embodiment, the number of the track bases 130 is two, the two track bases 130 are disposed in the mounting groove 115 at intervals, the second track grooves 170 are disposed on each track base 130, and the two second track grooves 170 extend along the same direction. Specifically, by providing two track bases 130 with the two track bases 130 being disposed at a spacing, raw materials can be saved and the overall weight can be reduced.
In this embodiment, the track base 130 is provided with a mounting hole, in which the connector 190 is mounted, and the connector 190 is detachably connected to the platform base 110. Specifically, the connecting member 190 may be a screw, and the platform base 110 is provided with a screw hole, so that the track base 130 may be fixed on the platform base 110 by the screw, so as to facilitate disassembly, assembly and maintenance.
In this embodiment, the platform base 110 is provided with a separation groove 118, the separation groove 118 penetrates through the side walls of the two sides of the platform base 110, and separates the first track groove 150 into two parts, the two track bases are respectively disposed on the two sides of the separation groove 118, the two first track grooves 150 are respectively used for accommodating the two side edges of the first substrate, and the bottom sides of the two first track grooves 150 are respectively provided with a first vacuum adsorption hole 111.
In the present embodiment, the first vacuum adsorption hole 111 and the second vacuum adsorption hole 113 are all penetrated to the bottom side surface of the stage base 110. Specifically, the first vacuum suction hole 111 and the second vacuum suction hole 113 are all penetrated downward, and the first vacuum suction hole 111 and the second vacuum suction hole 113 are separated from each other, and when the platform base 110 is mounted on a vacuum platform, the corresponding vacuum holes on the vacuum platform can be respectively docked with the first vacuum suction hole 111 and the second vacuum suction hole 113, thereby providing vacuum suction.
In this embodiment, the edge of each first rail groove 150 is provided with a chamfer structure. Specifically, the lower side edge of the first rail groove 150 has a rounded corner structure, which can facilitate the insertion and removal of the substrate.
In this embodiment, the bottom wall of the mounting groove 115 is further provided with a plurality of ball holes 117 distributed along a straight line, the ball holes 117 penetrate through the first track groove 150, and press balls 133 are movably mounted in the ball holes 117, and the press balls 133 are used for partially extending into the first track groove 150 and rolling and pressing on the first substrate, so that the first substrate is attached to the first vacuum adsorption hole 111. Specifically, the ball hole 117 is disposed on the upper side of the first track groove 150, and the pressing ball 133 can be limited on the ball hole 117 and roll-pressed on the first substrate, so that the first substrate can be flattened and transported, and the first substrate has a downward pressing force, so as to ensure the adsorption between the bottom first vacuum adsorption hole 111 and the first substrate.
In the present embodiment, the bottom side of the track base 130 is provided with a ball groove 135, the ball groove 135 is correspondingly assembled to the pressing ball 133, and a part of the ball groove 135 is communicated with the second track groove 170, so that the corresponding pressing ball 133 partially extends into the second track groove 170. Specifically, the pressing balls 133 can be convexly arranged on the bottom wall of the mounting groove 115, and the bottom side of the track base 130 is correspondingly provided with the ball groove 135, so that part of the pressing balls 133 can be just contained, and the limiting effect of the pressing balls 133 is further ensured.
In summary, in the vacuum platform jig 100 provided by the embodiment of the utility model, the first track groove 150 is provided on the platform base 110 to realize feeding of the first substrate, the first vacuum adsorption hole 111 is provided at the bottom side of the first track groove 150, the first vacuum adsorption hole 111 can realize adsorption of the first substrate, meanwhile, the second vacuum adsorption hole 113 is further provided on the platform base 110, the track base 130 is detachably mounted on the platform base 110, and is provided with the second track groove 170, the second track groove 170 penetrates out of the platform base 110 to realize feeding of the second substrate, and the third vacuum adsorption hole 131 penetrates into the second track groove 170 and is correspondingly jointed with the second vacuum adsorption hole 113 to adsorb the second substrate extending into the second track groove 170. Compared with the prior art, the feeding adsorption of substrates with different sizes can be realized by arranging the first track groove 150 and the second track groove 170, a platform is not required to be replaced, correction and adjustment are not required, the vacuum adsorption efficiency is higher, and the adsorption of substrates with multiple sizes is realized.
Second embodiment
The present embodiment provides a vacuum adsorption apparatus, which includes a vacuum machine and a vacuum platform jig 100, wherein the basic structure and principle of the vacuum platform jig 100 and the technical effects thereof are the same as those of the first embodiment, and for brevity, reference may be made to the corresponding contents in the first embodiment.
In this embodiment, the vacuum platform fixture 100 includes a platform base 110 and a track base 130, the platform base 110 is provided with a first track groove 150, the first track groove 150 penetrates through to side walls of two sides of the platform base 110, a first vacuum adsorption hole 111 is provided at a bottom side of the first track groove 150, the first vacuum adsorption hole 111 is used for adsorbing a first substrate extending into the first track groove 150, the platform base 110 is further provided with a second vacuum adsorption hole 113, the second vacuum adsorption hole 113 penetrates through to a bottom side surface of the platform base 110, the track base 130 is detachably mounted on the platform base 110, and is provided with a second track groove 170, the second track groove 170 penetrates out of the platform base 110, and a third vacuum adsorption hole 131 is provided at a bottom side of the track base 130, and is correspondingly engaged with the second vacuum adsorption hole 113 for adsorbing and attaching a second substrate extending into the second track groove 170. The platform base 110 is mounted on a vacuum table.
In the present embodiment, a plurality of vacuum holes are provided on the table top of the vacuum table, and the plurality of vacuum holes can be correspondingly coupled to the first vacuum suction holes 111 and the second vacuum suction holes 113, thereby providing suction force.
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (10)
1. The utility model provides a vacuum platform tool, its characterized in that, includes platform base and track base, be provided with first track groove on the platform base, first track groove link up to the lateral wall of the both sides of platform base, the bottom side of first track groove is provided with first vacuum adsorption hole, first vacuum adsorption hole is used for adsorbing and stretches into first base plate in the first track groove, still be provided with the second vacuum adsorption hole on the platform base, track base detachably installs on the platform base to be provided with the second track groove, the second track groove runs through outside the platform base, just the bottom side of track base is provided with the third vacuum adsorption hole, the third vacuum adsorption hole link up to the second track groove, and with the second vacuum adsorption hole corresponds the joint for adsorb the attached second base plate that stretches into in the second track groove.
2. The vacuum platform jig according to claim 1, wherein the platform base is provided with a mounting groove, the rail base is accommodated in the mounting groove, the second vacuum suction Kong Kaishe is provided at a bottom wall of the mounting groove, and a substrate inlet is further provided at a side wall of the platform base, and the substrate inlet is correspondingly engaged with the second rail groove.
3. The vacuum platform jig according to claim 2, wherein the number of the track bases is two, the two track bases are arranged in the mounting groove at intervals, the second track grooves are formed in each track base, and the two second track grooves extend in the same direction.
4. A vacuum platform jig according to claim 3, wherein the track base is provided with mounting holes, wherein the mounting holes are provided with connecting pieces, and wherein the connecting pieces are detachably connected with the platform base.
5. The vacuum platform jig according to claim 2, wherein a separation groove is formed in the platform base, the separation groove penetrates through the side walls of the two sides of the platform base, the first rail grooves are separated into two parts, the two rail bases are respectively arranged on the two sides of the separation groove, the two first rail grooves are respectively used for accommodating the two side edges of the first substrate, and the bottom sides of the two first rail grooves are respectively provided with the first vacuum adsorption holes.
6. The vacuum table fixture of claim 4, wherein the first vacuum suction holes and the second vacuum suction holes are all through to a bottom surface of the table base.
7. The vacuum table jig of claim 4, wherein an edge of each of the first rail grooves is provided with a chamfer structure.
8. The vacuum platform jig according to claim 2, wherein a plurality of ball holes distributed along a straight line are further formed in the bottom wall of the mounting groove, the ball holes penetrate through the first track groove, press balls are movably mounted in the ball holes, and the press balls are used for partially extending into the first track groove and rolling and pressing on the first substrate, so that the first substrate is attached to the first vacuum adsorption hole.
9. The vacuum platform jig according to claim 8, wherein the bottom side of the rail base is provided with a ball groove, the ball groove is correspondingly assembled to the press-fit ball, and a part of the ball groove is communicated to the second rail groove, so that the corresponding press-fit ball part extends into the second rail groove.
10. A vacuum adsorption apparatus comprising a vacuum table and a vacuum platform jig according to any one of claims 1 to 9, wherein the platform base is mounted on the vacuum table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322170925.8U CN220710285U (en) | 2023-08-11 | 2023-08-11 | Vacuum platform jig and vacuum adsorption device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322170925.8U CN220710285U (en) | 2023-08-11 | 2023-08-11 | Vacuum platform jig and vacuum adsorption device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220710285U true CN220710285U (en) | 2024-04-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322170925.8U Active CN220710285U (en) | 2023-08-11 | 2023-08-11 | Vacuum platform jig and vacuum adsorption device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220710285U (en) |
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2023
- 2023-08-11 CN CN202322170925.8U patent/CN220710285U/en active Active
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