CN103824792A - Storage cabinet and control method thereof - Google Patents
Storage cabinet and control method thereof Download PDFInfo
- Publication number
- CN103824792A CN103824792A CN201410073158.1A CN201410073158A CN103824792A CN 103824792 A CN103824792 A CN 103824792A CN 201410073158 A CN201410073158 A CN 201410073158A CN 103824792 A CN103824792 A CN 103824792A
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- substrate
- carrying platform
- compressed air
- storage cabinet
- air
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
- H01L21/6779—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks the workpieces being stored in a carrier, involving loading and unloading
Abstract
The invention discloses a storage cabinet and a control method of the storage cabinet. The storage cabinet is applied to an automatic material conveying system of semiconductor processing equipment. The storage cabinet comprises a bearing platform bearing a substrate, and further comprises a compressed air source and an air jet device, wherein the compressed air source is used for forming compressed air, the air jet device is arranged on the bearing platform, connected with the compressed air source and used for jetting the compressed air from the compressed air source upwards in a controllable mode from the bearing surface of the bearing platform, so that the substrate borne by the bearing platform is lifted, and the substrate is suspended above the bearing platform. The storage cabinet has the advantages that the touch probability of the substrate is reduced; the situation that the substrate is lifted too high by the jetted compressed air, so that the airflow of the compressed air is unstable can be avoided; and static electricity on the bearing platform, a bearing part of a mechanical arm and the substrate can be eliminated through an ion generation device.
Description
Technical field
The present invention relates to field of semiconductor processing, relate in particular to a kind of storage cabinet and control method of the automatic material conveyer that is applied to semiconductor processing equipment.
Background technology
Automatic material conveyer (the AMHS that existing semiconductor processing equipment uses, Automatic Material Handling System) conventionally need to adopt storage cabinet (Stocker) to place to wait for temporarily and enter semiconductor processing equipment, or the substrate flowing out from semiconductor processing equipment.
Conventionally the storage cabinet using in AMHS generally can have a carrying platform in order to support substrate, when substrate is by supporting part (Arm) support of the mechanical arm in AMHS (Robot) during to the loading end of carrying platform, as shown in Figure 1 to Figure 3, the multiple feets (Pin) 10 that arrange on carrying platform 1 upwards rise under system control, substrate 0 is formed and supported, the now supporting part 4 of mechanical arm the moving and withdraw between substrate 0 and carrying platform 1 of level from the arrangement space of feet 10, feet 10 puts down subsequently, substrate is placed on the support face 11 of carrying platform 1.
In the time that the substrate on carrying platform need to be removed, first upwards risen by the feet on carrying platform, substrate on carrying platform is held up, subsequently, the supporting part level of mechanical arm stretch into backward upper rise between substrate and carrying platform, make the supporting part of mechanical arm form the support to substrate, mechanical arm moves takes away substrate, and the feet on carrying platform puts down.
In above-mentioned existing execution mode, no matter be that substrate is put into storage cabinet, or substrate is removed from storage cabinet, all need to be touched by the feet on carrying platform and substrate, this touching may cause substrate damage, may cause static risk (ESD, Electro-Static discharge) simultaneously.
Summary of the invention
The problems referred to above that exist for existing storage cabinet, now provide a kind of storage cabinet and control method that is intended to occur while reducing substrate turnover touching.
Concrete technical scheme is as follows:
A kind of storage cabinet, is applied to the automatic material conveyer of semiconductor processing equipment, comprises the carrying platform of support substrate, wherein, also comprises:
Compressed air source, in order to form compressed air;
Air jet system, be arranged on described carrying platform, and be connected with described compressed air source, for the controllable support face from described carrying platform, spray upward the compressed air from described compressed air source, to hold up the substrate of described carrying platform support, and make described substrate be suspended in described carrying platform top.
Preferably, the support face of described carrying platform is provided with the groove of the supporting part of the mechanical arm of the described automatic material conveyer of coupling.
Preferably, described compressed air source is mainly formed by an air compressor.
Preferably, described air jet system is mainly by being arranged at the air nozzle on the support face of described carrying platform and controlling described air nozzle and spray compressed air and do not spray compressed-air actuated control device and form, described air nozzle top flush in or lower than the support face of described carrying platform.
Preferably, described compressed air source is provided with pressure regulation device, in order to adjust described compressed-air actuated pressure.
Preferably, described air jet system is provided with pressure regulation device, in order to adjust the described compressed-air actuated pressure of ejection.
Preferably, described air jet system is connected with described compressed air source by pipeline, on described pipeline, is provided with pressure regulation device, in order to adjust described compressed-air actuated pressure.
Preferably, in the scope overlapping with described substrate when described air nozzle is distributed in substrate described in described carrying platform support.
Preferably, also comprise ion generating device, described ion generating device is connected between described compressed air source and described air jet system, for ionizing compressed air that described compressed air source forms to produce ion wind.
Preferably, the control section of described ion generating device is connected with described air jet system, works in the time that described air jet system sprays compressed air in order to control described ion generating device.
A control method for storage cabinet, is applied to the automatic material conveyer of semiconductor processing equipment, wherein, comprises the following steps,
The carrying platform of step a1, described storage cabinet sprays compressed air by an air jet system, and the substrate on the support face in described carrying platform is floated;
The supporting part of the mechanical arm of step a2, described automatic material conveyer is stretched between described substrate and described carrying platform, and upwards holds up described substrate;
Step a3, described air jet system stop spraying compressed air.
A control method for storage cabinet, is applied to the automatic material conveyer of semiconductor processing equipment, wherein, comprises the following steps,
The supporting part support substrate of the mechanical arm of step b1, described automatic material conveyer moves to the carrying platform top of described storage cabinet;
The carrying platform of step b2, described storage cabinet sprays compressed air by an air jet system, and the substrate on described supporting part is floated;
Step b3, described mechanical arm move horizontally, and described supporting part is left between described carrying platform and described substrate;
Step b4, described carrying platform adjust by a pressure regulation device the compressed-air actuated pressure that described air jet system ejects, described compressed-air actuated pressure is progressively reduced until stop spraying, so that described substrate dwindles with the distance of described carrying platform gradually until described substrate contacts with the support face of described carrying platform, and form support by described support in the face of described substrate.
A kind of automatic material conveyer, wherein, comprises above-mentioned storage cabinet.
A kind of automatic material conveyer, wherein, adopts the control method of above-mentioned storage cabinet.
The beneficial effect of technique scheme is:
1, spray compressed air by air jet system, in the time that substrate is placed and removed, substrate is formed to temporary supporting, reduced substrate the chance of touching occurs;
2, by the groove of supporting part of mechanical arm of coupling automatic material conveyer is set on the support face in carrying platform, make air jet system in the situation that will not substrate holder rising very highly, the supporting part of mechanical arm can be stretched between carrying platform and substrate, thereby avoid the injected compressed air holder of substrate to rise so high, cause compressed air unstable;
3,, by ion generating device is set, eliminate supporting part and the on-chip static of carrying platform, mechanical arm.
Accompanying drawing explanation
Fig. 1-Fig. 3 is that existing storage cabinet coordinates procedure chart when substrate is positioned on carrying platform with mechanical arm;
Fig. 4 is the cross-sectional view of the carrying platform of storage cabinet of the present invention;
Fig. 5-Fig. 7 is that storage cabinet of the present invention coordinates procedure chart when substrate is positioned on carrying platform with mechanical arm;
Fig. 8 is the steps flow chart block diagram of the control method of a kind of storage cabinet of the present invention;
Fig. 9 is the steps flow chart block diagram of the control method of another kind of storage cabinet of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skills obtain under the prerequisite of not making creative work, belongs to the scope of protection of the invention.
It should be noted that, in the situation that not conflicting, the feature in embodiment and embodiment in the present invention can combine mutually.
As shown in Figure 4, a kind of storage cabinet, is applied to the automatic material conveyer of semiconductor processing equipment, comprises the carrying platform 1 of support substrate, wherein, also comprises compressed air source 2, in order to form compressed air; Air jet system, is arranged on carrying platform 1, and is connected with compressed air source 2, for the controllable support face 11 from carrying platform 1, spray upward the compressed air from compressed air source 2, to hold up the substrate 0 of carrying platform 1 support, and make substrate 0 be suspended in carrying platform 1 top.
The most basic thought of the present invention is, spray compressed air with air jet system, replace feet of the prior art, so that substrate 0 is putting carrying platform 1 and can reduce the generation of touching in the time that carrying platform 1 is removed, thereby reduce the possibility that substrate 0 is damaged, and reduce the possibility that causes ESD risk because of touching.
The specific works process of technique scheme is:
When on the carrying platform 1 that substrate 0 need to be offloaded to storage cabinet on the supporting part 4 by the mechanical arm of automatic material conveyer, process as shown in Figure 5-Figure 7, first the supporting part 4 support substrates 0 of mechanical arm move to carrying platform 1 top of storage cabinet; Air jet system sprays compressed air, and the substrate 0 on supporting part 4 is floated; Mechanical arm moves horizontally, and supporting part 4 is left between carrying platform 1 and substrate 0; Carrying platform 1 stops air jet system and ejects compressed air, so that substrate 0 contacts with the support face 11 of carrying platform 1, and by support face 11, substrate 0 is formed to support.
When on the supporting part 4 of mechanical arm that substrate 0 need to be moved to automatic material conveyer on the support face 11 by carrying platform 1, first, carrying platform 1 sprays compressed air by air jet system, and the substrate 0 on the support face 11 in carrying platform 1 is floated; The supporting part 4 of mechanical arm is stretched between substrate 0 and carrying platform 1, and upwards holds up substrate 0; Air jet system stops spraying compressed air.
In one preferably in execution mode, compressed air source 2 can mainly be formed by an air compressor, but unique execution mode of air compressor non-formation compressed air source 2, the execution mode of formation compressed air source 2 that those skilled in the art it is contemplated that and that can use all should be included in technical scheme of the present invention.
On technique scheme basis, compressed air source 2 can be provided with pressure regulation device (not in shown in figure), and pressure regulation device is in order to adjust compressed-air actuated pressure.As in the time the substrate on carrying platform 10 need to being held up, can adjust by pressure regulation device, compressed-air actuated pressure is progressively increased, to play the object of stable picking-up substrate 0, to prevent that unexpected powerful compressed air ejection from beat substrate 0 and even overturning; And for example, in the time need to the substrate on the supporting part of the mechanical arm of automatic material conveyer 40 being placed on carrying platform 1, can first adjust by pressure regulation device, compressed-air actuated pressure is progressively increased, to realize the stable substrate on the supporting part of mechanical arm 40 is held up, after mechanical arm is withdrawn, adjust by pressure regulation device again, compressed-air actuated pressure is progressively dwindled, make on the stable support face 11 that drops to carrying platform 1 of substrate 0 to realize, cause substrate 0 to fall and then produce damage to prevent that unexpected air pressure from disappearing.It should be noted that, pressure regulation device also can be arranged on air jet system, or is arranged on the pipeline that connects compressed air source 2 and air jet system.
In one preferably in execution mode, air jet system can be mainly by being arranged at the air nozzle 3 on the support face 11 of carrying platform 1 and controlling air nozzle 3 and spray compressed air and do not spray compressed-air actuated control device (not in shown in figure) and form, air nozzle 3 tops flush in or lower than the support face 11 of carrying platform 1.The quantity that air nozzle 3 arranges the as required size of the substrate 0 of support is determined, in the time needing the substrate 0 of support larger, can lay more air nozzle 3, so that compressed air is ejected uniformly, make substrate 0 can keep attitude stabilization in the process being held up or fallen.On this basis, in the scope overlapping with substrate 0 when air nozzle 3 can be distributed in carrying platform 1 support substrate 0.
In inheriting above-mentioned execution mode, the present invention also has preferably execution mode of one, and wherein, the support face 11 of carrying platform 1 is provided with the groove 12 of the supporting part 4 of the mechanical arm of coupling automatic material conveyer.The object that groove 12 is set is, the supporting part 4 that makes mechanical arm can the embedding carrying platform 1 of part above moving to described carrying platform 1 time in, thereby make air jet system will not substrate 0 holder rise very highly in the situation that, the supporting part 4 of mechanical arm can be stretched between carrying platform 1 and substrate 0, thereby avoid the injected compressed air holder of substrate 0 to rise so high, thereby cause the unstable attitude that affects substrate 0 of compressed air.
In inheriting above-mentioned execution mode, the present invention also has preferably execution mode of one, wherein, also comprises ion generating device 5, ion generating device 5 is connected between compressed air source 2 and air jet system, for ionizing compressed air that compressed air source 2 forms to produce ion wind.By being set, ion generating device 5 produces ion wind, by compressed-air actuated pressure, ion wind is injected on the supporting part 4 and substrate 0 of carrying platform 1, mechanical arm, to eliminate the issuable static on supporting part 4 and the substrate 0 of carrying platform 1, mechanical arm.On this basis, the control section of ion generating device 5 can be connected with air jet system, works in the time that air jet system sprays compressed air in order to control ion generating device 5.
In technical scheme of the present invention, also comprise a kind of control method of storage cabinet, be applied to the automatic material conveyer of semiconductor processing equipment, as shown in Figure 8, wherein, comprise the following steps,
The carrying platform of step a1, storage cabinet sprays compressed air by an air jet system, and the substrate on the support face in carrying platform is floated;
The supporting part of the mechanical arm of step a2, automatic material conveyer is stretched between substrate and carrying platform, and upwards holds up substrate;
Step a3, air jet system stop spraying compressed air.
In technique scheme, step a1 can be by a pressure regulation device is set, and the compressed-air actuated pressure of adjusting air jet system injection progressively increases compressed-air actuated pressure, and substrate is floated stably on carrying platform.The compressed air that air jet system sprays can be from a compressed air source.
In technical scheme of the present invention, also comprise a kind of control method of storage cabinet, be applied to the automatic material conveyer of semiconductor processing equipment, as shown in Figure 9, wherein, comprise the following steps,
The supporting part support substrate of the mechanical arm of step b1, automatic material conveyer moves to the carrying platform top of storage cabinet;
The carrying platform of step b2, storage cabinet sprays compressed air by an air jet system, and the substrate on supporting part is floated;
Step b3, mechanical arm move horizontally, and supporting part is left between carrying platform and substrate;
Step b4, carrying platform adjust by a pressure regulation device the compressed-air actuated pressure that air jet system ejects, compressed-air actuated pressure is progressively reduced until stop spraying, so that substrate dwindles with the distance of carrying platform gradually until substrate contacts with the support face of carrying platform, and form support by support in the face of substrate.
In technique scheme, step b2 can pass through pressure regulation device, adjusts the compressed-air actuated pressure that air jet system sprays, and compressed-air actuated pressure is progressively increased, and substrate is floated stably on the supporting part of mechanical arm.The compressed air that air jet system sprays can be from a compressed air source.
It should be noted that, what the control method of above-mentioned two kinds of storage cabinets mentioning can be independent is applied in automatic material conveyer, also can be applied to same automatic material conveyer simultaneously.
In technical scheme of the present invention, also comprise a kind of automatic material conveyer, wherein, comprise the above-mentioned storage cabinet of mentioning.
In technical scheme of the present invention, also comprise a kind of automatic material conveyer, wherein, adopt the control method of the above-mentioned storage cabinet of mentioning.
The foregoing is only preferred embodiment of the present invention; not thereby limit embodiments of the present invention and protection range; to those skilled in the art; the scheme that being equal to of should recognizing that all utilizations specification of the present invention and diagramatic content done replaces and apparent variation obtains, all should be included in protection scope of the present invention.
Claims (14)
1. a storage cabinet, is applied to the automatic material conveyer of semiconductor processing equipment, comprises the carrying platform of support substrate, it is characterized in that, also comprises:
Compressed air source, in order to form compressed air;
Air jet system, be arranged on described carrying platform, and be connected with described compressed air source, for the controllable support face from described carrying platform, spray upward the compressed air from described compressed air source, to hold up the substrate of described carrying platform support, and make described substrate be suspended in described carrying platform top.
2. storage cabinet as claimed in claim 1, is characterized in that, the support face of described carrying platform is provided with the groove of the supporting part of the mechanical arm of the described automatic material conveyer of coupling.
3. storage cabinet as claimed in claim 1, is characterized in that, described compressed air source is mainly formed by an air compressor.
4. storage cabinet as claimed in claim 1, it is characterized in that, described air jet system is mainly by being arranged at the air nozzle on the support face of described carrying platform and controlling described air nozzle and spray compressed air and do not spray compressed-air actuated control device and form, described air nozzle top flush in or lower than the support face of described carrying platform.
5. storage cabinet as claimed in claim 1, is characterized in that, described compressed air source is provided with pressure regulation device, in order to adjust described compressed-air actuated pressure.
6. storage cabinet as claimed in claim 1, is characterized in that, described air jet system is provided with pressure regulation device, in order to adjust the described compressed-air actuated pressure of ejection.
7. storage cabinet as claimed in claim 1, is characterized in that, described air jet system is connected with described compressed air source by pipeline, on described pipeline, is provided with pressure regulation device, in order to adjust described compressed-air actuated pressure.
8. storage cabinet as claimed in claim 4, is characterized in that, in the scope that described air nozzle overlaps with described substrate while being distributed in substrate described in described carrying platform support.
9. as storage cabinet as described in arbitrary in claim 1-8, it is characterized in that, also comprise ion generating device, described ion generating device is connected between described compressed air source and described air jet system, for ionizing compressed air that described compressed air source forms to produce ion wind.
10. storage cabinet as claimed in claim 9, is characterized in that, the control section of described ion generating device is connected with described air jet system, works in the time that described air jet system sprays compressed air in order to control described ion generating device.
The control method of 11. 1 kinds of storage cabinets, is applied to the automatic material conveyer of semiconductor processing equipment, it is characterized in that, comprise the following steps,
The carrying platform of step a1, described storage cabinet sprays compressed air by an air jet system, and the substrate on the support face in described carrying platform is floated;
The supporting part of the mechanical arm of step a2, described automatic material conveyer is stretched between described substrate and described carrying platform, and upwards holds up described substrate;
Step a3, described air jet system stop spraying compressed air.
The control method of 12. 1 kinds of storage cabinets, is applied to the automatic material conveyer of semiconductor processing equipment, it is characterized in that, comprise the following steps,
The supporting part support substrate of the mechanical arm of step b1, described automatic material conveyer moves to the carrying platform top of described storage cabinet;
The carrying platform of step b2, described storage cabinet sprays compressed air by an air jet system, and the substrate on described supporting part is floated;
Step b3, described mechanical arm move horizontally, and described supporting part is left between described carrying platform and described substrate;
Step b4, described carrying platform adjust by a pressure regulation device the compressed-air actuated pressure that described air jet system ejects, described compressed-air actuated pressure is progressively reduced until stop spraying, so that described substrate dwindles with the distance of described carrying platform gradually until described substrate contacts with the support face of described carrying platform, and form support by described support in the face of described substrate.
13. 1 kinds of automatic material conveyers, is characterized in that, comprise as storage cabinet as described in arbitrary in claim 1-10.
14. 1 kinds of automatic material conveyers, is characterized in that, adopt the control method of storage cabinet as described in claim 11 or 12.
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| CN201410073158.1A CN103824792A (en) | 2014-02-28 | 2014-02-28 | Storage cabinet and control method thereof |
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| CN201410073158.1A CN103824792A (en) | 2014-02-28 | 2014-02-28 | Storage cabinet and control method thereof |
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Cited By (1)
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| CN106507572A (en) * | 2016-10-31 | 2017-03-15 | 京东方科技集团股份有限公司 | A kind of baseplate carrier and base plate processing device |
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