CN105110006B - A kind of conveyer method of mechanical arm and substrate - Google Patents
A kind of conveyer method of mechanical arm and substrate Download PDFInfo
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- CN105110006B CN105110006B CN201510574226.7A CN201510574226A CN105110006B CN 105110006 B CN105110006 B CN 105110006B CN 201510574226 A CN201510574226 A CN 201510574226A CN 105110006 B CN105110006 B CN 105110006B
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- auxiliary support
- support arm
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- substrate
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Abstract
The present invention provides the conveyer method of a kind of mechanical arm and substrate, belongs to field of mechanical technique, and it can solve existing in substrate transport process, due to substrate deformation caused by mechanical arm supporting substrate, sagging or warpage problem occur.Mechanical arm of the invention, including master arm and at least one auxiliary support arm, the master arm is used for supporting substrate, the auxiliary support arm is connected with the master arm, and the auxiliary support arm is arranged on the both sides of the master arm, multiple stomatas are provided with the auxiliary support arm, the stomata is used to spray gas to the substrate, to avoid the substrate sagging or warpage.
Description
Technical field
The invention belongs to field of mechanical technique, and in particular to the conveyer method of a kind of mechanical arm and substrate.
Background technology
With the development of display field technology, people to the pursuit more and more higher of large-sized monitor, oversize into
It is the development trend of display so that it is also deep all the more that substrate prepares manufacturer's research and development.
Substrate needs repeatedly to be transported in preparation process, the structure of the mechanical arm for substrate transhipment for using at present
As shown in figure 1, mechanical arm includes mechanical arm 10, as shown in Fig. 2 when mechanical arm works, with the supporting substrate of mechanical arm 10
20, but due to the size super large of substrate 20, being affected by gravity in the transport process of substrate 20 can cause the gross distortion of substrate 20, hair
Give birth to and hang down or warpage, so as to cause cannot to be discharged because substrate 20 deforms caused stress before carrying out to box technique, to aobvious
Show that device brings many defects.
To solve this problem, those skilled in the art propose following two schemes：The first, increases mechanical arm
Number, but this scheme needs to carry out large-scale redevelopment to shop equipment, it is neither convenient and cause that cost is increased considerably；Second
Kind, increase the contact area between mechanical arm and substrate, but this scheme is due to increased between mechanical arm and substrate
Contact area, can cause the substrate for preparing the phenomenon of loose contact occur, influence product yield.
The content of the invention
The present invention for existing in substrate transport process, due to substrate deformation caused by mechanical arm supporting substrate,
There is sagging or warpage problem, there is provided a kind of additionally to increase contact area and substrate can be avoided sagging or warpage
Mechanical arm.
It is a kind of mechanical arm to solve the technical scheme that is used of present invention problem, including master arm and at least one
Individual auxiliary support arm, the master arm is used for supporting substrate, and the auxiliary support arm is connected with the master arm, and described
Auxiliary support arm is arranged on the both sides of the master arm, and multiple stomatas are provided with the auxiliary support arm, and the stomata is used
In gas is sprayed to the substrate, to avoid the substrate sagging or warpage.
Preferably, upper surface of the upper surface of the auxiliary support arm less than the master arm.
Preferably, the auxiliary support arm is telescopic auxiliary support arm.
It is further preferred that the auxiliary support arm includes many sub- auxiliary support arms, the multiple sub- auxiliary support arm
It is connected with each other.
It is further preferred that the multiple sub- auxiliary support arm is connected using socket mode.
Preferably, multiple stomatas are uniformly arranged on the upper surface of the auxiliary support arm.
Used as another embodiment, the present invention also provides a kind of conveyer method of substrate, and methods described is using above-mentioned any
Mechanical arm described in one, methods described includes：
The master arm supports the substrate；
The stomata in the auxiliary support arm sprays gas to the substrate, to avoid the substrate sagging or stick up
It is bent.
Preferably, upper surface of the upper surface of the auxiliary support arm less than the master arm.
Preferably, the auxiliary support arm is telescopic auxiliary support arm.
It is further preferred that the auxiliary support arm includes many sub- auxiliary support arms, the multiple sub- auxiliary support arm
It is connected with each other.
It is further preferred that the multiple sub- auxiliary support arm is connected using socket mode.
Preferably, multiple stomatas are uniformly arranged on the upper surface of the auxiliary support arm.
In mechanical arm of the invention, including master arm and at least one auxiliary support arm, master arm is for supporting
Substrate, auxiliary support arm is connected with master arm, and auxiliary support arm is arranged on the both sides of master arm, in auxiliary support arm
Multiple stomatas are provided with, these stomatas can be used to spray gas to the substrate of carried, to avoid substrate sagging or warpage, so that
Improve product yield.
Brief description of the drawings
Fig. 1 is the structural representation of existing mechanical arm；
Fig. 2 is the structural representation of existing mechanical arm supporting substrate；
Fig. 3 is the structural representation of the mechanical arm of embodiments of the invention 1；
Fig. 4 is the structural representation of the mechanical arm supporting substrate of embodiments of the invention 1；
Fig. 5 is the structural representation of the mechanical arm of embodiments of the invention 2；
Fig. 6 is the structural representation of the mechanical arm supporting substrate of embodiments of the invention 2；
Wherein, reference is：1st, main mechanical arm；2nd, auxiliary mechanical arm；21st, the first sub- auxiliary mechanical arm；22nd, the second son
Auxiliary support arm；3rd, stomata；10th, mechanical arm；20th, substrate.
Specific embodiment
To make those skilled in the art more fully understand technical scheme, below in conjunction with the accompanying drawings and specific embodiment party
Formula is described in further detail to the present invention.
Embodiment 1：
Fig. 3 and Fig. 4 is refer to, the present embodiment provides a kind of mechanical arm, including the auxiliary branch of master arm 1 and at least one
Brace 2, master arm 1 is used for supporting substrate 20, and auxiliary support arm 2 is connected with master arm 1, and auxiliary support arm 2 is arranged on
The both sides of master arm 1, are provided with multiple stomatas 3 in auxiliary support arm 2, stomata 3 is used to spray gas to substrate 20, to avoid
Substrate 20 is sagging or warpage.
In the mechanical arm of the present embodiment, including the auxiliary support arm 2 of master arm 1 and at least one, master arm 1 is used for
Supporting substrate 20, auxiliary support arm 2 is connected with master arm 1, and auxiliary support arm 2 is arranged on the both sides of master arm 1, auxiliary
Help and multiple stomatas 3 are provided with support arm 2, these stomatas 3 can be used to spray gas to the substrate 20 of carried, to avoid substrate
20 sagging or warpages, so as to improve product yield.
Embodiment 2：
Fig. 5 and Fig. 6 is refer to, the present embodiment provides a kind of mechanical arm, including the auxiliary branch of master arm 1 and at least one
Brace 2, master arm 1 is used for supporting substrate 20, and auxiliary support arm 2 is connected with master arm 1, and auxiliary support arm 2 is arranged on
The both sides of master arm 1, are provided with multiple stomatas 3 in auxiliary support arm 2, stomata 3 is used to spray gas to substrate 20, to avoid
Substrate 20 is sagging or warpage.
Preferably, upper surface of the upper surface of auxiliary support arm 2 less than master arm 1.
Why be arranged such, be due to when auxiliary support arm 2 upper surface less than master arm 1 upper surface when, it is auxiliary
Helping the upper surface of support arm 2 will not contact with the lower surface of substrate 20, therefore, the contact of mechanical arm and substrate 20 will not be increased
Area, enters and the phenomenon of loose contact occurs without the substrate 20 for causing to prepare, and influences product yield.
Preferably, auxiliary support arm 2 is telescopic auxiliary support arm 2.
It is further preferred that auxiliary support arm 2 includes many sub- auxiliary support arms, many sub- auxiliary support arms are mutually interconnected
Connect, such as the first sub- auxiliary support arm 21 and the second sub- auxiliary support arm 22.
Certainly, the quantity of sub- auxiliary support arm is not limited to two, and the quantity of sub- auxiliary support arm can be according to reality
Situation is increased, and the present embodiment is only illustrated with the quantity of sub- auxiliary support arm as two.
It is further preferred that many sub- auxiliary support arms are connected using socket mode, i.e., the first sub- auxiliary support arm 21
Connected by the way of socket with the second sub- auxiliary support arm 22.Specifically, could be arranged to the first sub- auxiliary support arm 21 with
Master arm 1 is connected, and the second sub- auxiliary support arm 22 is connected with the first sub- auxiliary support arm 21, the second sub- auxiliary support arm 22
Diameter of the diameter less than the first sub- auxiliary support arm 21, it is not necessary to during using the second sub- auxiliary support arm 22, the second son auxiliary branch
Brace 22 can be contracted in the first sub- auxiliary support arm 21, and when the second sub- auxiliary support arm 22 is needed to use, the second son is auxiliary
Help support arm 22 to be stretched out from the first sub- auxiliary support arm 21, substrate 20 is supported.
Why be arranged such, be because the size of substrate 20 is not defined, when the size of substrate 20 is larger,
The length of auxiliary support arm 2 is better closer to the edge of substrate 20, and the gas that can be more sprayed by stomata 3 is carried out to substrate 20
Support；When the size of substrate 20 is smaller, the length of auxiliary support arm 2 is excessive beyond the edge of nearly substrate 20, beyond part
The stomata 3 of auxiliary support arm 2 is still in jet state.Therefore, auxiliary support arm 2 is set to telescopic auxiliary support arm
2, when the size of substrate 20 is smaller, the second sub- auxiliary support arm 22 of auxiliary support arm 2 is collapsible to the first sub- Auxiliary support
In arm 21；When the size of substrate 20 is larger, the second sub- auxiliary support arm 22 can stretch out from the first sub- auxiliary support arm 21, this
Sample can just meet the transhipment of various sizes of substrate 20.
Certainly, the connected mode of the first sub- auxiliary support arm 21 and the second sub- auxiliary support arm 22 is not limited thereto, only
Can be connected with each other the first sub- auxiliary support arm 21 and the second sub- auxiliary support arm 22, and reaching makes auxiliary support arm 2 to stretch
Contracting, will not be repeated here.
Preferably, the uniform upper surface for being arranged on auxiliary support arm 2 of multiple stomatas 3.
Why it is arranged such, is the quilt due to when multiple stomatas 3 are uniformly arranged on the upper surface of auxiliary support arm 2
The substrate 20 of support stress everywhere is in the same size, and the support force for being subject to substrate 20 is more uniform, and then avoids substrate 20 from sending out
Raw deformation.
The mechanical arm of the present embodiment, including the auxiliary support arm 2 of master arm 1 and at least one, master arm 1 are used for branch
Support group plate 20, auxiliary support arm 2 is connected with master arm 1, and auxiliary support arm 2 is arranged on the both sides of master arm 1, in auxiliary
Multiple stomatas 3 are provided with support arm 2, these stomatas 3 can be used to spray gas to the substrate 20 of carried, to avoid substrate 20
Sagging or warpage, so as to improve product yield；Due to the upper surface of the upper surface less than master arm 1 of auxiliary support arm 2, will not
Increase the contact area of mechanical arm and substrate 20, enter and the phenomenon of loose contact, shadow occur without the substrate 20 for causing to prepare
Ring product yield；Auxiliary support arm 2 is scalable auxiliary support arm 2, including many sub- auxiliary support arm (the first sub- Auxiliary supports
The sub- auxiliary support arm 22 of arm 21 and second), when the size of substrate 20 is smaller, the second sub- auxiliary support arm 22 can of retraction first
In auxiliary support arm 21；When the size of substrate 20 is larger, outside the sub- auxiliary support arm 21 of sub- auxiliary support arm 22 extended first,
The transhipment of various sizes of substrate 20 can thus be met；Multiple stomatas 3 are uniformly arranged on the upper table of auxiliary support arm 2
Face, can make that the substrate 20 that is supported stress everywhere is in the same size, and the support force for being subject to substrate 20 is more uniform, and then keeps away
Exempt from substrate 20 to deform upon.
Embodiment 3：
The present embodiment provides a kind of conveyer method of substrate, wherein, the mechanical arm that the method is used is in embodiment 1
Mechanical arm, the conveyer method of the substrate includes：
The supporting substrate 20 of master arm 1；
Stomata 3 in auxiliary support arm 2 sprays gas to substrate 20, to avoid substrate 20 sagging or warpage.
Spraying gas to substrate 20 by the stomata of auxiliary support arm 2 in the present embodiment can be produced by the air pump in equipment
Gas is achieved, and can be connected with stomata by pipeline, is blown, the operation such as air-breathing.
The conveyer method of the substrate of the present embodiment, because mechanical arm includes the auxiliary branch of master arm 1 and at least one
Brace 2, master arm 1 is used for supporting substrate 20, and auxiliary support arm 2 is connected with master arm 1, and auxiliary support arm 2 is arranged on
The both sides of master arm 1, are provided with multiple stomatas 3 in auxiliary support arm 2, and these stomatas 3 can be used for the substrate to carried
20 spray gases, to avoid substrate 20 sagging or warpage, so as to improve product yield.
Embodiment 4：
The present embodiment provides a kind of conveyer method of substrate, wherein, the mechanical arm that the method is used is in embodiment 2
Mechanical arm, the conveyer method of the substrate includes：
The supporting substrate 20 of master arm 1；
Stomata 3 in auxiliary support arm 2 sprays gas to substrate 20, to avoid substrate 20 sagging or warpage.
Spraying gas to substrate 20 by the stomata of auxiliary support arm 2 in the present embodiment can be produced by the air pump in equipment
Gas is achieved, and can be connected with stomata by pipeline, is blown, the operation such as air-breathing.
Preferably, upper surface of the upper surface of auxiliary support arm 2 less than master arm 1.
Why be arranged such, be due to when auxiliary support arm 2 upper surface less than master arm 1 upper surface when, it is auxiliary
Helping the upper surface of support arm 2 will not contact with the lower surface of substrate 20, therefore, the contact of mechanical arm and substrate 20 will not be increased
Area, enters and the phenomenon of loose contact occurs without the substrate 20 for causing to prepare, and influences product yield.
Preferably, auxiliary support arm 2 is telescopic auxiliary support arm 2.
It is further preferred that auxiliary support arm 2 includes many sub- auxiliary support arms, many sub- auxiliary support arms are mutually interconnected
Connect, such as the first sub- auxiliary support arm 21 and the second sub- auxiliary support arm 22.
Certainly, the quantity of sub- auxiliary support arm is not limited to two, and the quantity of sub- auxiliary support arm can be according to reality
Situation is increased, and the present embodiment is only illustrated with the quantity of sub- auxiliary support arm as two.
It is further preferred that many sub- auxiliary support arms are connected using socket mode, i.e., the first sub- auxiliary support arm 21
Connected by the way of socket with the second sub- auxiliary support arm 22.Specifically, could be arranged to the first sub- auxiliary support arm 21 with
Master arm 1 is connected, and the second sub- auxiliary support arm 22 is connected with the first sub- auxiliary support arm 21, the second sub- auxiliary support arm 22
Diameter of the diameter less than the first sub- auxiliary support arm 21, it is not necessary to during using the second sub- auxiliary support arm 22, the second son auxiliary branch
Brace 22 can be contracted in the first sub- auxiliary support arm 21, and when the second sub- auxiliary support arm 22 is needed to use, the second son is auxiliary
Help support arm 22 to be stretched out from the first sub- auxiliary support arm 21, substrate 20 is supported.Why it is arranged such, is due to base
The size of plate 20 is not defined, and when the size of substrate 20 is larger, the length of auxiliary support arm 2 is closer to substrate 20
Edge is better, and the gas that can be more sprayed by stomata 3 is supported to substrate 20；When the size of substrate 20 is smaller, auxiliary
The length of support arm 2 is excessive beyond the edge of nearly substrate 20, and the stomata 3 beyond the auxiliary support arm 2 of part is still in jet
State.Therefore, auxiliary support arm 2 is set to telescopic auxiliary support arm 2, when the size of substrate 20 is smaller, auxiliary branch
Second sub- auxiliary support arm 22 of brace 2 is collapsible in the first sub- auxiliary support arm 21；When the size of substrate 20 is larger, the
Two sub- auxiliary support arms 22 can stretch out from the first sub- auxiliary support arm 21, can thus meet various sizes of substrate 20
Transhipment.
Certainly, the connected mode of the first sub- auxiliary support arm 21 and the second sub- auxiliary support arm 22 is not limited thereto, only
Can be connected with each other the first sub- auxiliary support arm 21 and the second sub- auxiliary support arm 22, and reaching makes auxiliary support arm 2 to stretch
Contracting, will not be repeated here.
Preferably, the uniform upper surface for being arranged on auxiliary support arm 2 of multiple stomatas 3.
Why it is arranged such, is the quilt due to when multiple stomatas 3 are uniformly arranged on the upper surface of auxiliary support arm 2
The substrate 20 of support stress everywhere is in the same size, and the support force for being subject to substrate 20 is more uniform, and then avoids substrate 20 from sending out
Raw deformation.
The conveyer method of the substrate of the present embodiment, because mechanical arm includes the auxiliary branch of master arm 1 and at least one
Brace 2, master arm 1 is used for supporting substrate 20, and auxiliary support arm 2 is connected with master arm 1, and auxiliary support arm 2 is arranged on
The both sides of master arm 1, are provided with multiple stomatas 3 in auxiliary support arm 2, and these stomatas 3 can be used for the substrate to carried
20 spray gases, to avoid substrate 20 sagging or warpage, so as to improve product yield；Because the upper surface of auxiliary support arm 2 is low
In the upper surface of master arm 1, the contact area of mechanical arm and substrate 20 will not be increased, the substrate entered without causing to prepare
20 there is the phenomenon of loose contact, influence product yield；Auxiliary support arm 2 is scalable auxiliary support arm 2, including many height are auxiliary
Support arm (the first sub- auxiliary support arm 21 and the second sub- auxiliary support arm 22) is helped, when the size of substrate 20 is smaller, the second son
Auxiliary support arm 22 can be in the sub- auxiliary support arm 21 of retraction first；When the size of substrate 20 is larger, sub- auxiliary support arm 22 can
Stretch out outside the first sub- auxiliary support arm 21, can thus meet the transhipment of various sizes of substrate 20；Multiple stomatas 3 are uniform
The upper surface of auxiliary support arm 2 is arranged on, the substrate 20 that is supported stress everywhere can be made in the same size, be subject to substrate 20
Support force it is more uniform, and then avoid substrate 20 from deforming upon.
It is understood that the embodiment of above principle being intended to be merely illustrative of the present and the exemplary implementation for using
Mode, but the invention is not limited in this.For those skilled in the art, essence of the invention is not being departed from
In the case of god and essence, various changes and modifications can be made therein, and these variations and modifications are also considered as protection scope of the present invention.
Claims (12)
1. a kind of mechanical arm, it is characterised in that including master arm and at least two auxiliary support arms, the master arm is used
In supporting substrate, the auxiliary support arm is connected with the master arm, and the auxiliary support arm is arranged on the main support
The both sides of arm, are provided with multiple stomatas in the auxiliary support arm, the stomata is used to spray gas to the substrate, to avoid
The substrate is sagging or warpage.
2. mechanical arm according to claim 1, it is characterised in that the upper surface of the auxiliary support arm is less than the master
The upper surface of support arm.
3. mechanical arm according to claim 1, it is characterised in that the auxiliary support arm is telescopic Auxiliary support
Arm.
4. mechanical arm according to claim 3, it is characterised in that the auxiliary support arm includes many sub- Auxiliary supports
Arm, the multiple sub- auxiliary support arm is connected with each other.
5. mechanical arm according to claim 4, it is characterised in that the multiple sub- auxiliary support arm uses socket mode
Connection.
6. mechanical arm according to claim 1, it is characterised in that multiple stomatas are uniformly arranged on the auxiliary
The upper surface of support arm.
7. a kind of conveyer method of substrate, it is characterised in that methods described is using the machine described in any one in claim 1-6
Tool arm, methods described includes：
The master arm supports the substrate；
The stomata in the auxiliary support arm sprays gas to the substrate, to avoid the substrate sagging or warpage.
8. the conveyer method of substrate according to claim 7, it is characterised in that the upper surface of the auxiliary support arm is less than
The upper surface of the master arm.
9. the conveyer method of substrate according to claim 7, it is characterised in that the auxiliary support arm is telescopic auxiliary
Help support arm.
10. the conveyer method of substrate according to claim 9, it is characterised in that the auxiliary support arm includes many height
Auxiliary support arm.
The conveyer method of 11. substrates according to claim 10, it is characterised in that the multiple sub- auxiliary support arm is used
Socket mode is connected.
The conveyer method of 12. substrates according to claim 7, it is characterised in that multiple stomatas are uniformly arranged on
The upper surface of the auxiliary support arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510574226.7A CN105110006B (en) | 2015-09-10 | 2015-09-10 | A kind of conveyer method of mechanical arm and substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510574226.7A CN105110006B (en) | 2015-09-10 | 2015-09-10 | A kind of conveyer method of mechanical arm and substrate |
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| Publication Number | Publication Date |
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| CN105110006A CN105110006A (en) | 2015-12-02 |
| CN105110006B true CN105110006B (en) | 2017-06-09 |
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| CN201510574226.7A Active CN105110006B (en) | 2015-09-10 | 2015-09-10 | A kind of conveyer method of mechanical arm and substrate |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106044232B (en) * | 2016-07-26 | 2018-09-04 | 京东方科技集团股份有限公司 | Slice getting device |
| CN106348016A (en) * | 2016-10-14 | 2017-01-25 | 武汉华星光电技术有限公司 | Tablet pick-and-place robot |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11180554A (en) * | 1997-12-22 | 1999-07-06 | Canon Inc | Substrate transportation hand and substrate transportation device |
| CN1576201A (en) * | 2003-07-08 | 2005-02-09 | 株式会社大福 | Plate-shaped work piece transporting apparatus |
| CN1648015A (en) * | 2005-03-04 | 2005-08-03 | 友达光电股份有限公司 | Base plate transport frame |
| CN101329995A (en) * | 2007-06-22 | 2008-12-24 | 东京毅力科创株式会社 | Substrate processing device and substrate conveying device |
| CN101599449A (en) * | 2008-06-04 | 2009-12-09 | 东京毅力科创株式会社 | Carrying device and processing unit |
| CN101656220A (en) * | 2008-08-22 | 2010-02-24 | Sfa工程股份有限公司 | Box and robot for conveying the glass substrate and a box system having the box and robot |
| CN102774652A (en) * | 2012-07-31 | 2012-11-14 | 深圳市华星光电技术有限公司 | Supporting arm of LCD (liquid crystal display) panel handling device |
| CN202781190U (en) * | 2012-08-31 | 2013-03-13 | 京东方科技集团股份有限公司 | Mechanical arm and machine device |
| CN203712702U (en) * | 2014-02-12 | 2014-07-16 | 昆山龙腾光电有限公司 | Manipulator arm for carrying glass substrate |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202072285U (en) * | 2011-05-24 | 2011-12-14 | 深圳市华星光电技术有限公司 | Panel conveying device and panel supporting mechanism thereof |
-
2015
- 2015-09-10 CN CN201510574226.7A patent/CN105110006B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11180554A (en) * | 1997-12-22 | 1999-07-06 | Canon Inc | Substrate transportation hand and substrate transportation device |
| CN1576201A (en) * | 2003-07-08 | 2005-02-09 | 株式会社大福 | Plate-shaped work piece transporting apparatus |
| CN1648015A (en) * | 2005-03-04 | 2005-08-03 | 友达光电股份有限公司 | Base plate transport frame |
| CN101329995A (en) * | 2007-06-22 | 2008-12-24 | 东京毅力科创株式会社 | Substrate processing device and substrate conveying device |
| CN101599449A (en) * | 2008-06-04 | 2009-12-09 | 东京毅力科创株式会社 | Carrying device and processing unit |
| CN101656220A (en) * | 2008-08-22 | 2010-02-24 | Sfa工程股份有限公司 | Box and robot for conveying the glass substrate and a box system having the box and robot |
| CN102774652A (en) * | 2012-07-31 | 2012-11-14 | 深圳市华星光电技术有限公司 | Supporting arm of LCD (liquid crystal display) panel handling device |
| CN202781190U (en) * | 2012-08-31 | 2013-03-13 | 京东方科技集团股份有限公司 | Mechanical arm and machine device |
| CN203712702U (en) * | 2014-02-12 | 2014-07-16 | 昆山龙腾光电有限公司 | Manipulator arm for carrying glass substrate |
Also Published As
| Publication number | Publication date |
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| CN105110006A (en) | 2015-12-02 |
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