CN207326983U

CN207326983U - A kind of semiconductor manufacturing mechanical arm

Info

Publication number: CN207326983U
Application number: CN201721411663.8U
Authority: CN
Inventors: 张乔栋; 陈业; 刘少丽; 杨雅婷; 王倩
Original assignee: Jiangsu Nepes Semiconductor Co Ltd
Current assignee: Jiangsu Nepes Semiconductor Co Ltd
Priority date: 2017-10-29
Filing date: 2017-10-29
Publication date: 2018-05-08
Anticipated expiration: 2027-10-29

Abstract

The utility model discloses a kind of semiconductor manufacturing mechanical arm, including mechanical arm main support rod, mechanical arm master link and mechanical arm connecting groove, the bottom of the mechanical arm main support rod is provided with mechanical arm contiguous block, the end set of the mechanical arm connection rotation axis has mechanical arm master link, the end set of the mechanical arm master link has mechanical arm operation lever, and the surface of the mechanical arm main support rod is provided with mechanical arm master link and places groove；The mechanical arm designed in the utility model, which is fixedly connected with base telescopic mast, to be stretched in processing according to the needs of operation, so as to lengthen the length of mechanical arm, mechanical arm can be directly fixedly connected by the mechanical arm connecting groove designed in the utility model in connection, simultaneous buffering packing ring when in use can depressurize the connection between mechanical arm into row buffering, operate more smoothly.

Description

A kind of semiconductor manufacturing mechanical arm

Technical field

The utility model belongs to mechanical arm technical field, and in particular to a kind of semiconductor manufacturing mechanical arm.

Background technology

Mechanical arm is the automated machine device that most broad practice is obtained in robot technical field, is made in industry Make, therapeutic treatment, entertainment service, military affairs, the field such as semiconductor manufacturing and space probation can see its figure, although it Form have nothing in common with each other, but they have one it is common the characteristics of, be to receive instruction, be precisely positioned to it is three-dimensional or Certain point between two dimension carries out operation.

Existing mechanical arm still has some shortcomings when in use;

1. the scope that existing mechanical arm stretches when in use is relatively fixed, when running into off-limits operation, nothing Method is operated, and limitation is larger, and use scope is relatively fixed.

2. existing mechanical arm when being attached with machine, due to being that plane is attached, holds in long-time service It is relatively fixed locked when being also easy to produce loosening, and connecting, can not be into the device of row buffering, it is more inconvenient when operating to work.

3. existing mechanical arm can not be folded after work terminates, since the length of mechanical arm is longer in work Work is damaged larger after terminating, and take larger space, hampers movement and the later stage of personnel to a certain extent Operation.

Utility model content

The purpose of this utility model is to provide a kind of semiconductor manufacturing mechanical arm, to solve in above-mentioned background technology The scope that the mechanical arm of proposition stretches when in use is relatively fixed, when running into off-limits operation, can not be operated, Limitation is larger, and use scope is relatively fixed, when being attached with machine, due to being that plane is attached, in long-time service Shi Rongyi generation loosenings, and it is relatively fixed locked during connection, can not be into the device of row buffering, it is more inconvenient when operating to work With terminate in work after can not be folded, due to the length of mechanical arm it is longer work terminate after be damaged compared with Greatly, the problem of and taking larger space, hamper the movement and the operation in later stage of personnel to a certain extent.

To achieve the above object, the utility model provides following technical solution：A kind of semiconductor manufacturing mechanical arm, bag Mechanical arm main support rod, mechanical arm master link and mechanical arm connecting groove are included, the mechanical arm main support rod Bottom is provided with mechanical arm contiguous block, and the bottom of the mechanical arm contiguous block is provided with mechanical arm and is fixedly connected with base, The mechanical arm, which is fixedly connected on the inside of base, to be provided with mechanical arm and is fixedly connected with base telescopic mast, and mechanical arm connection is recessed Mechanical arm is provided with the inside of groove and is fixedly connected with buffer gasket, the mechanical arm is fixedly connected with floor installation in mechanical arm The inner side of connecting groove is fixedly connected with the top of buffer gasket, the end of the mechanical arm main support rod relative to mechanical arm Mechanical arm connection rotation axis is provided with, the end set of the mechanical arm connection rotation axis has mechanical arm master link, The end set of the mechanical arm master link has mechanical arm operation lever, and the surface of the mechanical arm main support rod is set There is mechanical arm master link to place groove.

Preferably, the main connection of mechanical arm that the mechanical arm master link is set with mechanical arm main support rod surface Bar places groove and connects rotation axis rotatable connection by mechanical arm.

Preferably, the mechanical arm is fixedly connected with base and by card slot card and is connected with mechanical arm connecting groove.

Preferably, it is cylindrical structure that the mechanical arm, which is fixedly connected with base,.

Preferably, it is circular ring structure that the mechanical arm, which is fixedly connected with buffer gasket,.

Preferably, the mechanical arm contiguous block is rectangular parallelepiped structure.

Compared with prior art, the beneficial effects of the utility model are：

（1）The mechanical arm designed in the utility model is fixedly connected with base telescopic mast can be in processing according to operation Need to stretch, so as to lengthen the length of mechanical arm so that it is wider that the limitation of operation reduces use scope.

（2）The mechanical arm connecting groove designed in the utility model directly can be consolidated mechanical arm in connection Fixed connection so that connection is more firm, and simultaneous buffering packing ring when in use can be delayed the connection between mechanical arm Pressure is eaten up part of, is operated more smoothly.

（3）Groove is placed in the main connection of mechanical arm designed in the utility model to complete work progress in mechanical arm Fold so that the length reduction of mechanical arm, so as to reduce the utilization rate in space, staff is in movement either later stage behaviour Work is more smoothly.

Brief description of the drawings

Fig. 1 is the structure diagram of the utility model mechanical arm；

Fig. 2 is the structure diagram that the utility model mechanical arm is fixedly connected with base；

Fig. 3 is the connection diagram that the utility model mechanical arm is fixedly connected with base；

Fig. 4 is the connection diagram of the utility model mechanical arm main support rod；

In figure：1- mechanical arms operation lever, 2- mechanical arms are fixedly connected with base, 3- mechanical arms contiguous block, 4- machineries Arm connection rotation axis, 5- mechanical arms main support rod, 6- mechanical arms master link, 7- mechanical arms are fixedly connected with base and stretch Contracting column, 8- mechanical arms be fixedly connected buffer gasket, 9- mechanical arms connecting groove, 10- mechanical arms master link place it is recessed Groove.

Embodiment

The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work All other embodiments obtained, shall fall within the protection scope of the present invention.

Please refer to Fig.1, Fig. 2, Fig. 3 and Fig. 4, the utility model provides a kind of technical solution：A kind of semiconductor manufacturing machine Tool arm, including mechanical arm main support rod 5, mechanical arm master link 6 and mechanical arm connecting groove 9, mechanical arm master The bottom of supporting rod 5 is provided with mechanical arm contiguous block 3, and the bottom of mechanical arm contiguous block 3, which is provided with mechanical arm and fixes, to be connected Connect base 2, the inner side that mechanical arm is fixedly connected with base 2 is provided with mechanical arm and is fixedly connected with base telescopic mast 7, mechanical arm The inner side of connecting groove 9 is provided with mechanical arm and is fixedly connected with buffer gasket 8, and mechanical arm is fixedly connected with base 2 and is installed on machine The inner side of tool arm connecting groove 9 is fixedly connected with the top of buffer gasket 8, mechanical arm main support rod 5 relative to mechanical arm End set have mechanical arm connect rotation axis 4, mechanical arm connection rotation axis 4 end set have the main connection of mechanical arm Bar 6, the end set of mechanical arm master link 6 have mechanical arm operation lever 1, and the surface of mechanical arm main support rod 5 is set There is mechanical arm master link to place groove 10.

For the ease of saving space, in the present embodiment, it is preferred that mechanical arm master link 6 and the main support of mechanical arm The mechanical arm master link that 5 surface of bar is set places groove 10 and is rotatably connected by mechanical arm connection rotation axis 4.

For the ease of fixation, in the present embodiment, it is preferred that mechanical arm be fixedly connected base 2 be connected with mechanical arm it is recessed Groove 9 passes through card slot card and connection.

For the ease of connecting, in the present embodiment, it is preferred that it is cylindrical structure that mechanical arm, which is fixedly connected with base 2,.

For the ease of installing and buffering, in the present embodiment, it is preferred that it is annulus that mechanical arm, which is fixedly connected with buffer gasket 8, Structure.

For the ease of installing, in this implementation column, it is preferred that mechanical arm contiguous block 3 is rectangular parallelepiped structure.

The operation principle and process for using of the utility model：Mechanical arm is fixedly connected slow by the utility model when in use Rush packing ring 8 and be installed on the inside of mechanical arm connecting groove 9, then mechanical arm is fixedly connected with base 2 and is installed on mechanical arm In connecting groove 9, work after installing, at work, adjust mechanical arm according to requirements of one's work and be fixedly connected with bottom Seat telescopic mast 7 length, when the work has been finished, by rotating machinery arm connect rotation axis 4 by mechanical arm master link 6 with The mechanical arm master link that 5 surface of mechanical arm main support rod is set is placed groove 10 and is connected.

While there has been shown and described that the embodiment of the utility model, for the ordinary skill in the art, It is appreciated that these embodiments can be carried out with a variety of changes in the case where not departing from the principle of the utility model and spirit, repaiied Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.

Claims

1. a kind of semiconductor manufacturing mechanical arm, including mechanical arm main support rod（5）, mechanical arm master link（6）With Mechanical arm connecting groove（9）, it is characterised in that：The mechanical arm main support rod（5）Bottom be provided with mechanical arm company Connect block（3）, the mechanical arm contiguous block（3）Bottom be provided with mechanical arm and be fixedly connected with base（2）, the mechanical arm It is fixedly connected with base（2）Inner side be provided with mechanical arm and be fixedly connected with base telescopic mast（7）, mechanical arm connecting groove（9） Inner side be provided with mechanical arm and be fixedly connected with buffer gasket（8）, the mechanical arm is fixedly connected with base（2）Installed in machinery Arm connecting groove（9）Inner side be fixedly connected with buffer gasket relative to mechanical arm（8）Top, the main branch of mechanical arm Strut（5）End set have mechanical arm connect rotation axis（4）, the mechanical arm connection rotation axis（4）End set There is mechanical arm master link（6）, the mechanical arm master link（6）End set have mechanical arm operation lever（1）, institute State mechanical arm main support rod（5）Surface be provided with mechanical arm master link place groove（10）.

A kind of 2. semiconductor manufacturing mechanical arm according to claim 1, it is characterised in that：The main company of mechanical arm Extension bar（6）With mechanical arm main support rod（5）The mechanical arm master link that surface is set places groove（10）Pass through manipulator Arm connects rotation axis（4）Rotatable connection.

A kind of 3. semiconductor manufacturing mechanical arm according to claim 1, it is characterised in that：The mechanical arm is fixed Connect base（2）With mechanical arm connecting groove（9）Pass through card slot card and connection.

A kind of 4. semiconductor manufacturing mechanical arm according to claim 1, it is characterised in that：The mechanical arm is fixed Connect base（2）For cylindrical structure.

A kind of 5. semiconductor manufacturing mechanical arm according to claim 1, it is characterised in that：The mechanical arm is fixed Connect buffer gasket（8）For circular ring structure.

A kind of 6. semiconductor manufacturing mechanical arm according to claim 1, it is characterised in that：The mechanical arm connection Block（3）For rectangular parallelepiped structure.