CN205069608U - Brilliant boat of oxidation furnace - Google Patents
Brilliant boat of oxidation furnace Download PDFInfo
- Publication number
- CN205069608U CN205069608U CN201520839960.7U CN201520839960U CN205069608U CN 205069608 U CN205069608 U CN 205069608U CN 201520839960 U CN201520839960 U CN 201520839960U CN 205069608 U CN205069608 U CN 205069608U
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- China
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- brilliant boat
- oxidation furnace
- annular slice
- feet
- support portion
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Abstract
The utility model provides a brilliant boat of oxidation furnace, include: upper cover plate, lower apron, annular slice parts, supporting legs and brace rod. The upper cover plate with pass through between the apron down the brace rod is connected, annular slice part evenly distributed in between upper cover plate and the lower apron, the diameter of the hollow circle of annular slice part is followed the brilliant boat of oxidation furnace bottom is upwards crescent, the supporting legs is installed on the annular slice part. The diameter of the hollow circle of annular slice part is followed the crescent process gas of doing benefit to that makes progress bottom the brilliant boat of oxidation furnace spreads to the top bottom brilliant boat of oxidation furnace to make the wafer and the more abundant contact reaction of process gas, the one -tenth film uniformity of wafer when improving technology at brilliant boat top.
Description
Technical field
The utility model relates to technical field of manufacturing semiconductors, particularly relates to the brilliant boat of a kind of oxidation furnace.
Background technology
Semiconductor device design develops rapidly to the direction of high density, high integration, proposes more and more higher requirement to semiconductor integrated circuit new technology, new technology, new equipment.Need at the different types of film of the deposited on substrates of wafer in semiconductor fabrication process, and in the method for various deposit film, low-pressure chemical vapor deposition (LPCVD, LowPressureChemicalVaporDeposition) be a kind of conventional method, be widely applied in the depositing operation of various film.
In LPCVD technique, the main flow equipment of current employing is vertical furnace tube, the technique of vertical furnace tube to wafer deposition film is utilized to be generally: the brilliant boat of oxidation furnace is after loading area is loaded into some wafers, brilliant for the oxidation furnace being loaded with wafer boat is put into boiler tube, simultaneously, process gas is supplied in vertical furnace tube by pipeline, then starts to carry out deposition procedures to wafer.Usually, process gas spreads to top bottom the brilliant boat of oxidation furnace, thus, process gas concentration bottom brilliant boat is higher, relative is lower in the process gas concentration at brilliant boat top, this just causes the film forming thickness between the some wafers in the brilliant boat of same oxidation furnace inconsistent, and between sheet, uniformity is poor.
On the other hand, because the material of the brilliant boat of existing oxidation furnace is mainly quartzy, the brilliant boat overall weight of oxidation furnace is heavier.Owing to the brilliant boat of oxidation furnace lacking the stressed place of suitable carrying; staff is when carrying out brilliant boat dismounting; both hands can only be placed in the brace rod part on the brilliant boat of oxidation furnace; but because this segment space is less; often there will be the annular slice parts that staff touches brilliant boat; cause this part cracked because of the active force carried, thus cause whole brilliant boat to be scrapped because annular slice parts are cracked.
Utility model content
The purpose of this utility model is, is upwards increased gradually bottom the brilliant boat of oxidation furnace by the hollow diameter of a circle of annular slice parts, solves the problem that film forming thickness between the some wafers in the brilliant boat of same oxidation furnace is inconsistent.
Another object of the present utility model is, providing stressed place, preventing annular slice parts cracked by arranging handle on upper cover plate for during carrying.
The brilliant boat of a kind of oxidation furnace that the utility model provides, comprising: upper cover plate, lower cover, annular slice parts, feet and brace rod.Wherein, be connected by described brace rod between described upper cover plate with described lower cover; Described annular slice parts uniformity is distributed between described upper cover plate and lower cover, and the hollow diameter of a circle of the described annular slice parts top from the bottom of the brilliant boat of described oxidation furnace to the brilliant boat of described oxidation furnace increases gradually; Described feet is arranged on described annular slice parts.
Wherein, the material of described annular slice parts is quartz;
Wherein, described upper cover plate is circular sheet-like structures; Described lower cover is annular slice structure.
Further, the material of described upper cover plate is quartz; The material of described lower cover is quartz.
Wherein, the quantity of described brace rod is 3, and described brace rod forms an isosceles right triangle along the diametric connecting line of described annular slice parts.
Wherein, described feet comprises multiple support portions, and has difference in height between described multiple support portion.
Further, described feet comprises the first support portion, the second support portion and connects the linkage section of described first support portion and described second support portion, described first support portion is near described brace rod, and the height of described second support portion is less than the height of the first support portion.
Preferably, the quantity of described feet is 3, and each feet is all fixedly connected with described brace rod.
Preferred, described feet has tip, and the tip of described feet is one in triangular prism, quadrangular or conical structure or its combination.
Preferred, the material of described feet is quartz.
Wherein, described upper cover plate is provided with handle; Further, described handle and described brace rod, connect; Further, described handle is provided with groove or projection; Further, the material of described handle is quartz.
In the utility model, open circles in annular slice parts upwards increases gradually from bottom, thus be conducive to process gas and upwards spread and the wafer and the more abundant haptoreaction of process gas that make brilliant boat top, the one-tenth film uniformity of wafer when improving technique on brilliant boat, ensures good process.The utility model also by the stressed place that the handle arranged on upper cover plate is carried as the brilliant boat of oxidation furnace, greatly can facilitate the installation of brilliant boat and the facility of dismounting, prevent brilliant boat from damaging.
Accompanying drawing explanation
Fig. 1 is the three-dimensional view of embodiment of the present utility model;
Fig. 2 is the three-dimensional view of the embodiment after the utility model simplifies;
Fig. 3 is the cross sectional plan view on a certain annular slice parts of embodiment of the present utility model;
Fig. 4 be embodiment of the present utility model along the cutaway view on a certain annular slice parts in feet direction;
In figure, 10-upper cover plate, 20-lower cover, 30-annular slice parts, 40-feet, 50-brace rod, 60-open circles, 70-handle, 80-wafer, 41-first support portion, 42-second support portion, 43-the 3rd support portion, 400-is most advanced and sophisticated.
Embodiment
In order to enable the purpose of this utility model, feature and advantage become apparent more, refer to accompanying drawing.Notice, structure, ratio, size etc. that this specification institute accompanying drawings illustrates, content all only in order to coordinate specification to disclose, understand for person skilled in the art scholar and read, and be not used to limit the enforceable qualifications of the utility model, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under effect that the utility model can produce and the object that can reach, still all should drop on technology contents that the utility model discloses and obtain in the scope that can contain.
As shown in Figure 1 and Figure 2, the brilliant boat of a kind of oxidation furnace that the utility model provides, comprising: upper cover plate 10, lower cover 20, annular slice parts 30, feet 40 and brace rod 50.Wherein, be connected between described upper cover plate 10 with described lower cover 30 by described brace rod 50, described annular slice parts 30 are uniformly distributed between described upper cover plate 10 and described lower cover 20, and each annular slice parts 30 all have feet 40.
Continue with reference to figure 2, the diameter of the open circles 60 of annular slice parts 30 increases from bottom the brilliant boat of described oxidation furnace gradually to the top of the brilliant boat of described oxidation furnace.Because process gas spreads to the brilliant boat top of oxidation furnace bottom the brilliant boat of oxidation furnace, so the process gas concentration of process gas relative concentration in the brilliant boat top of oxidation furnace bottom the brilliant boat of oxidation furnace is higher, the diameter of the open circles 60 in the annular slice parts 30 bottom the brilliant boat of oxidation furnace is less, make bottom the brilliant boat of oxidation furnace wafer and the contact-making surface of process gas less; The diameter of the open circles 60 in the annular slice parts 30 at the brilliant boat top of oxidation furnace is comparatively large, and make wafer and the more abundant haptoreaction of process gas at the brilliant boat top of oxidation furnace, the one-tenth film uniformity of wafer during raising technique on the brilliant boat of oxidation furnace, ensures good process.
In preferred version, the ratio that the diameter of the open circles 60 of described annular slice parts 30 increases progressively from the bottom to top bottom the brilliant boat of oxidation furnace is 2mm, such as, what be applicable to the brilliant boat of described oxidation furnace of current main-stream wafer size (300mm) is 145mm by the diameter of the open circles 60 of lower several first (bottommost) annular slice parts 30, is 147mm by the diameter of the open circles 60 of lower several second annular slice parts 30.It should be noted that, the utility model does not limit the quantity of annular sheet component 30, conveniently illustrates, and decreases the quantity of annular slice parts 30 in Fig. 2; And the utility model does not limit the increasing proportion of the diameter of open circles 60, increasing proportion needs according to situation settings such as spacing, feet 40 length and the process gass between the brilliant boat height size of oxidation furnace, annular slice parts 30.
Wherein, described upper cover plate 10 is circular sheet-like structures, can slow down process gas and continues upwards to spread and play protection and supporting role; The material of described upper cover plate 10 is quartz, and quartz has higher mechanical strength and chemical stability.
Wherein, described lower cover 20 is annular slice structure, is conducive to process gas and moves upward bottom the brilliant boat of oxidation furnace, provide and protect and supporting role together with described upper cover plate 10; The material of described lower cover 20 is quartz.
As shown in Figure 3, in the present embodiment, the quantity of brace rod 50 is 3, makes the structural stability of the brilliant boat of oxidation furnace better; 3 brace rods 50 form an isosceles right triangle along the diametric line of described annular slice parts 30, so that the picking and placeing of wafer.
Continue with reference to figure 3, in the present embodiment, the quantity of the feet 40 on annular slice parts 30 is 3, and each feet 40 is all fixedly connected with described brace rod 50.
As shown in Figure 4, in the present embodiment, described feet 40 comprises the first support portion 42, support portion 41, second and connects the linkage section 43 of the first support portion 41 and the second support portion 42, the height of described second support portion 41 is less than the height of the first support portion 42, the wafer 80 of two kinds of different sizes can be carried, improve the utilance of the brilliant boat of oxidation furnace.It should be noted that, described feet 40 can comprise multiple support portion, and has the difference in height of successively decreasing successively between described multiple support portion, to carry the wafer of more than three kinds different sizes.All feets 40 of the brilliant boat of described oxidation furnace measure-alike, is supported by the support portion of feet 40 and spacing, ensures that same wafer size position in the brilliant boat of oxidation furnace is relatively consistent, the one-tenth film uniformity of wafer when improving technique on brilliant boat.
Continue with reference to figure 4, described feet 40 has a tip 400, carrys out supporting wafers 80 by most advanced and sophisticated 400, reduces the contact-making surface of wafer 80 and feet 40 with this.Such as, the tip 400 of described feet 40 is one in triangular prism, quadrangular or conical structure or its combination.
Preferably, the material of described feet 40 is quartz.
As shown in Figure 1 and Figure 2, in the present embodiment, described upper cover plate 10 is provided with handle 70, provides stressed place for when manpower transport or installation.
Preferably, 3 brace rods 50 are upwards extended by described upper cover plate 10 and are connected with described handle 70, the active force on handle 70 is evenly distributed on the brilliant boat of oxidation furnace, prevents unbalance stress from causing brilliant boat to damage.
Preferred, described handle 70 is provided with antiskid groove or projection, prevents from skidding; The material of described handle 70 is quartz.
In the utility model, open circles in annular slice parts upwards increases gradually from bottom, be beneficial to process gas upwards to spread and the wafer and the more abundant haptoreaction of process gas that make brilliant boat top, the one-tenth film uniformity of wafer during raising technique on brilliant boat, ensures good process.The utility model, by the handle arranged at upper cover plate, as the stressed place that brilliant boat is carried, greatly can facilitate installation and the dismounting of brilliant boat, prevent brilliant boat from damaging.
Claims (16)
1. the brilliant boat of oxidation furnace, comprise: upper cover plate, lower cover, annular slice parts, feet and brace rod, be connected by described brace rod between described upper cover plate with described lower cover, described annular slice parts uniformity is distributed between described upper cover plate and lower cover, described feet is arranged on described annular slice parts, it is characterized in that: the hollow diameter of a circle of the described annular slice parts top from the bottom of the brilliant boat of described oxidation furnace to the brilliant boat of described oxidation furnace increases gradually.
2. the brilliant boat of oxidation furnace as claimed in claim 1, is characterized in that: the material of described annular slice parts is quartz.
3. the brilliant boat of oxidation furnace as claimed in claim 1, is characterized in that: described upper cover plate is circular sheet-like structures.
4. the brilliant boat of the oxidation furnace as described in claim 1 or 3, is characterized in that: the material of described upper cover plate is quartz.
5. the brilliant boat of oxidation furnace as claimed in claim 1, is characterized in that: described lower cover is annular slice structure.
6. the brilliant boat of the oxidation furnace as described in claim 1 or 5, is characterized in that: the material of described lower cover is quartz.
7. the brilliant boat of oxidation furnace as claimed in claim 1, is characterized in that: the quantity of described brace rod is 3, and described brace rod forms an isosceles right triangle along the diametric connecting line of described annular slice parts.
8. the brilliant boat of oxidation furnace as claimed in claim 1, is characterized in that: described feet comprises multiple support portions, and has difference in height between described multiple support portion.
9. the brilliant boat of oxidation furnace as claimed in claim 8, it is characterized in that: described feet comprises the first support portion, the second support portion and connects the linkage section of described first support portion and described second support portion, described first support portion is near described brace rod, and the height of described second support portion is less than the height of the first support portion.
10. the brilliant boat of oxidation furnace as claimed in claim 1, is characterized in that: the quantity of described feet is 3, and each feet is all fixedly connected with described brace rod.
The brilliant boats of 11. oxidation furnaces as claimed in claim 1, is characterized in that: described feet has tip, and the tip of described feet is one in triangular prism, quadrangular or conical structure or its combination.
The brilliant boat of 12. oxidation furnaces as described in claim 1 claim, is characterized in that: the material of described feet is quartz.
The brilliant boat of 13. oxidation furnace as claimed in claim 1, is characterized in that: described upper cover plate is provided with handle.
The brilliant boat of 14. oxidation furnace as claimed in claim 13, is characterized in that: described handle is connected with described brace rod.
The brilliant boat of 15. oxidation furnaces as described in claim 13 or 14, is characterized in that: described handle is provided with groove or projection.
The brilliant boat of 16. oxidation furnaces as described in claim 13 or 14, is characterized in that: the material of described handle is quartz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520839960.7U CN205069608U (en) | 2015-10-27 | 2015-10-27 | Brilliant boat of oxidation furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520839960.7U CN205069608U (en) | 2015-10-27 | 2015-10-27 | Brilliant boat of oxidation furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205069608U true CN205069608U (en) | 2016-03-02 |
Family
ID=55396127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520839960.7U Active CN205069608U (en) | 2015-10-27 | 2015-10-27 | Brilliant boat of oxidation furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205069608U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115116910A (en) * | 2022-07-19 | 2022-09-27 | 宁夏中欣晶圆半导体科技有限公司 | Universal horizontal quartz boat and oxidation heat treatment method for silicon wafers of different specifications simultaneously |
-
2015
- 2015-10-27 CN CN201520839960.7U patent/CN205069608U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115116910A (en) * | 2022-07-19 | 2022-09-27 | 宁夏中欣晶圆半导体科技有限公司 | Universal horizontal quartz boat and oxidation heat treatment method for silicon wafers of different specifications simultaneously |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |