CN107641798B - Tubular PERC battery graphite boat capable of improving EL corner blackening and stuck point blackening - Google Patents
Tubular PERC battery graphite boat capable of improving EL corner blackening and stuck point blackening Download PDFInfo
- Publication number
- CN107641798B CN107641798B CN201710834000.5A CN201710834000A CN107641798B CN 107641798 B CN107641798 B CN 107641798B CN 201710834000 A CN201710834000 A CN 201710834000A CN 107641798 B CN107641798 B CN 107641798B
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- Prior art keywords
- graphite
- boat
- blackening
- clamping
- corner
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 192
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 192
- 239000010439 graphite Substances 0.000 title claims abstract description 192
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 title claims abstract description 24
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 title claims abstract description 24
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 title claims abstract description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 12
- 239000010703 silicon Substances 0.000 claims abstract description 12
- 239000007787 solid Substances 0.000 claims description 11
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 238000007373 indentation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 13
- 239000007789 gas Substances 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 10
- 238000000576 coating method Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a tubular PERC battery graphite boat for improving EL corner blackening and stuck point blackening, which comprises an insulating rod and a plurality of unit boat pieces, wherein the unit boat pieces are sheet-shaped bodies, gaps are reserved between adjacent unit boat pieces, the insulating rod penetrates through the periphery of each unit boat piece to connect and fix all the unit boat pieces together, the end parts of the graphite boat separate the unit boat pieces through a plurality of graphite blocks, and the connecting rod penetrates through the graphite blocks and the unit boat pieces to connect and fix the graphite blocks and the unit boat pieces; at least one of the graphite blocks is a hollow graphite block. The unit boat piece is provided with a plurality of groups of clamping points for fixing the silicon wafer, each group of clamping points comprises a first clamping point located on the upper portion, a second clamping point located at the bottom and a third clamping point located in the middle, the first clamping point is located near one end of the graphite boat furnace mouth, and the second clamping point and the third clamping point are located far away from one end of the graphite boat furnace mouth. The invention can reduce the ratio of the corner blackening and the stuck point blackening of the PERC battery EL.
Description
Technical Field
The invention relates to the field of graphite boats, in particular to a tubular PERC battery graphite boat capable of improving EL corner blackening and stuck point blackening.
Background
The tubular PERC solar cell adopts tubular PECVD coating equipment to deposit a passivation film on the back surface of a silicon wafer, a process gas outlet hole of the tubular PECVD coating equipment is arranged at a furnace mouth, and the process gas is shielded by a graphite block on one side of a graphite boat close to the furnace mouth during gas outlet, so that the passivation film deposition of the silicon wafer on one side of the graphite boat close to the furnace mouth is affected, and EL corner blackening and stuck point blackening of the PERC cell are generated. The graphite blocks at two ends of the conventional graphite boat are of solid structures, so that the shielding of process gas is more serious. In addition, as the bottom clamping point and the middle clamping point of the conventional graphite boat are arranged on one side close to the furnace mouth, the upper clamping point is arranged on one side far away from the furnace mouth, the bottom clamping point and the middle clamping point are blocked by graphite blocks, and the blackening rate of the bottom clamping point is high.
Disclosure of Invention
The invention also aims to solve the technical problem of providing the tubular PERC battery graphite boat which can reduce the blackening ratio of the corners and the stuck points of the EL of the PERC battery.
In order to solve the technical problems, the invention provides a tubular PERC battery graphite boat for improving EL corner blackening and stuck point blackening, which comprises an insulating rod and a plurality of unit boat pieces, wherein the unit boat pieces are sheet-shaped bodies, gaps are reserved between adjacent unit boat pieces, the insulating rod penetrates through the periphery of each unit boat piece to connect and fix all the unit boat pieces together, the end parts of a graphite boat separate the unit boat pieces through a plurality of graphite blocks, and penetrate through the graphite blocks and the unit boat pieces through connecting rods to connect and fix the graphite blocks and the unit boat pieces, and at least one graphite block is a hollow graphite block;
the unit boat piece is provided with a plurality of groups of clamping points for fixing the silicon wafer, each group of clamping points comprises a first clamping point located on the upper portion, a second clamping point located at the bottom and a third clamping point located in the middle, the first clamping point is located near one end of the graphite boat furnace mouth, and the second clamping point and the third clamping point are located far away from one end of the graphite boat furnace mouth.
As an improvement of the scheme, the two ends of the graphite boat are separated from the unit boat sheets through hollow graphite blocks.
As an improvement of the scheme, the graphite boat is arranged at one end close to the furnace mouth and is separated from the unit boat sheets by the hollow graphite blocks.
As an improvement of the scheme, the graphite boat at each end is provided with at least two groups of graphite blocks, and the at least two groups of graphite blocks are arranged in the vertical direction.
As an improvement of the above scheme, the group of graphite blocks positioned below is a hollow graphite block.
As an improvement of the above-mentioned scheme, the group of graphite blocks located below is a hollow graphite block, and the group of graphite blocks located above includes a hollow graphite block and a solid graphite block for corresponding to the inductor.
As an improvement of the above scheme, the group of graphite blocks positioned above also comprises hollow graphite blocks provided with notches.
As an improvement of the above solution, the hollow graphite block is provided with at least one through hole.
As an improvement of the scheme, the through holes are in the shape of round holes, oval holes, square holes, rectangular holes or diamond holes;
the distance between the edge of the through hole and the edge of the graphite block is controlled within 5 mm.
As an improvement of the scheme, the connecting rod is a ceramic rod.
As an improvement of the scheme, the first clamping points, the second clamping points and the third clamping points are distributed in a triangle shape.
The implementation of the invention has the following beneficial effects:
according to the tubular PERC battery graphite boat, the end parts of the graphite boat are used for separating the unit boat sheets through the plurality of graphite blocks, and the graphite blocks and the unit boat sheets are penetrated through by the connecting rods so as to be connected and fixed. At least one graphite block is a hollow graphite block, so that shielding of the graphite block to process gas can be reduced, and the black corner and blackening proportion of the stuck point of the EL black edge of the tubular PERC battery can be reduced. The unit boat piece is provided with a plurality of groups of clamping points for fixing the silicon wafer, each group of clamping points comprises a first clamping point located on the upper portion, a second clamping point located at the bottom and a third clamping point located in the middle, the first clamping point is located near one end of the graphite boat furnace mouth, and the second clamping point and the third clamping point are located far away from one end of the graphite boat furnace mouth. And the second clamping point at the bottom is far away from the graphite block at the furnace mouth end, so that the influence of air flow blocking can be reduced, and the blackening proportion of the clamping point is reduced.
Drawings
FIG. 1 is a perspective view of a graphite boat of the present invention;
FIG. 2 is a front view of the graphite boat of the present invention;
FIG. 3 is a top view of the graphite boat of the present invention;
FIG. 4 is a schematic view of an end of a graphite boat adjacent to a furnace mouth in a first embodiment;
FIG. 5 is a schematic view of an end of a graphite boat near the tail of a furnace in a first embodiment;
FIG. 6 is a schematic view of an end of a graphite boat adjacent to a furnace mouth in a second embodiment;
FIG. 7 is a schematic view of an end of a graphite boat in a second embodiment near the tail of the furnace.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings, for the purpose of making the objects, technical solutions and advantages of the present invention more apparent.
As shown in fig. 1, 2 and 3, the invention provides a tubular PERC battery graphite boat for improving EL corner blackening and stuck point blackening, comprising an insulating rod 1 and a plurality of unit boat pieces 2, wherein the unit boat pieces 2 are sheet-shaped bodies, gaps are reserved between adjacent unit boat pieces 2, the insulating rod 1 penetrates through the periphery of each unit boat piece 2 to connect and fix all the unit boat pieces together, the end parts of the graphite boat separate the unit boat pieces 2 through a plurality of graphite blocks 3, and penetrate through the graphite blocks 3 and the unit boat pieces 2 through connecting rods 4 so as to connect and fix the graphite blocks 3 and the unit boat pieces 2; wherein at least one graphite block 3 is a hollow graphite block 3A. The end part of the graphite boat adopts the hollow graphite blocks, so that the shielding of the graphite blocks to process gas can be reduced, and the black corner and the blackening proportion of the stuck point of the EL black edge of the tubular PERC battery can be reduced.
Specifically, the EL black edge and black corner refers to a corner blackened cell image which is presented after the solar cell is tested by an EL tester. The EL (electroluminescence) tester is used for testing the inherent defects of the crystalline silicon solar cell and the component, can effectively detect whether the cell has broken pieces, hidden cracks, broken grids, scratches, sintering defects, black chips, abnormal coating, mixed blocking of the cell pieces, uneven resistance of the cell pieces and the like, and can judge whether the cell has abnormal silicon wafer feeding or abnormal process manufacturing procedure through an EL image.
The graphite boat comprises a furnace mouth end 10 and a furnace tail end 20, when the coating process is operated, the graphite boat is positioned in a furnace tube of the PECVD equipment, the furnace mouth end 10 is positioned at a tube orifice of the furnace tube, process gas is introduced into the tube from the furnace mouth, the furnace tail end 20 is positioned at the tube tail of the furnace tube, process waste gas is pumped from the furnace tail, and an electrode in the furnace tube is inserted into an electrode hole at the furnace tail end of the graphite boat.
The unit boat piece 2 is provided with a plurality of groups of clamping points 6 for fixing silicon wafers, each group of clamping points comprises a first clamping point 61 positioned at the upper part, a second clamping point 62 positioned at the bottom and a third clamping point 63 positioned in the middle, the first clamping point 61 is positioned at one end close to the graphite boat furnace mouth 10, and the second clamping point 62 and the third clamping point 63 are positioned at one end far away from the graphite boat furnace mouth, namely the furnace tail end 20. The first clamping point 61, the second clamping point 62 and the third clamping point 63 are preferably distributed in a triangle shape. Since the second stuck point 62 at the bottom is far away from the graphite block at the mouth end, the influence of air flow blocking can be reduced, and the blackening proportion of the stuck point can be reduced.
Among these, there are two cases of embodiments of the hollow graphite block of the present invention:
referring to fig. 4 and 5, the present invention provides a first embodiment of the graphite boat, in which both ends of the graphite boat are separated from the unit boat sheets by the hollow graphite blocks 3A, that is, both ends of the furnace mouth and the furnace tail of the graphite boat are separated from the unit boat sheets by the hollow graphite blocks 3A, so that the shielding of the graphite blocks to the process gas can be reduced to the greatest extent, and the proportion of the EL black edge and black angle of the tubular PERC battery can be reduced, and at this time, the removal rate of the EL black edge and black angle is as high as 80-90%. At least two electrode holes 5 are required for the graphite blocks at the furnace tail, and the electrode holes 5 are used for inserting the graphite boat into the electrodes.
Referring to fig. 6 and 7, the present invention provides a second embodiment of the graphite boat, with the ends of the graphite boat near the furnace mouth being separated by hollow graphite blocks 3A and the ends near the furnace tail being separated by solid graphite blocks 3B. However, the graphite blocks of the furnace tail need to be provided with at least two electrode holes 5, which electrode holes 5 are used for inserting the graphite boats into the electrodes.
Specifically, the graphite boat of each end is equipped with two at least groups of graphite piece, and two at least groups of graphite piece are vertical direction and arrange the setting. Preferably, the graphite boat at each end is provided with two sets of graphite blocks.
As shown in fig. 4 and 6, at the end of the graphite boat near the furnace mouth, two sets of graphite blocks are provided, including a first set of graphite boats 31 located above and a second set of graphite boats 32 located below. The second group of graphite boats 32 located below, the graphite blocks of which are provided with support feet 3E.
Wherein the first group of graphite boats 31 and the second group of graphite boats 32 have various embodiments, such as:
1. the second graphite boat 32 located below is a hollow graphite block 3A, and the first graphite boat 31 located above is a solid graphite block 3B (not shown).
2. The second graphite boat 32 located below is a hollow graphite block 3A, and the first graphite boat 31 located above includes a hollow graphite block 3A and a solid graphite block 3B, the solid graphite block 3B being for corresponding to the inductor. The sensor is arranged on other devices and is used for sensing the working state of the graphite boat, so that the automatic operation of the graphite boat is realized (as shown in figures 4 and 6).
The hollow graphite block 3A of the present invention is defined as follows: at least one through hole 3D is arranged on the common graphite block. The shape of the through hole 3D may be various, such as a circular hole, an elliptical hole, a square hole, a rectangular hole, or a diamond hole, but is not limited thereto. The shape and size of the through-holes of the graphite blocks at different positions should be set according to actual working conditions, and are not exemplified here.
The through holes should be set as large as possible to reduce the shielding of the air flow. However, in order to ensure that the hollow graphite block has ideal strength, the distance between the edge of the through hole and the edge of the graphite block is controlled within 5 mm.
Since the most serious air flow shielding is the area corresponding to the middle graphite blocks in the lower row, at least the group of graphite boats positioned below is ensured to have a hollow structure for obtaining the ideal effect of improving EL corner blackening and stuck point blackening.
More preferably, the set of graphite blocks 31 located above further comprises a hollow graphite block 3C provided with a notch for releasing stress generated during operation of the graphite boat and avoiding deformation or breakage of the graphite boat. The notches may be rectilinear or curved to accommodate stress relief requirements under different conditions. The hollow graphite block 3C with a notch shown in FIG. 4 has a linear notch, and the notch is communicated with the through hole.
The width of the notch is preferably 2-8mm, so that the stress of the graphite boat caused by temperature difference can be reduced, and the deformation or damage of the graphite boat can be avoided.
As shown in fig. 5 and 7, at the end of the graphite boat near the furnace tail, there are two sets of graphite blocks including a third set of graphite boats 33 located above and a fourth set of graphite boats 34 located below. A fourth group of graphite boats 34 located below, provided with graphite blocks provided with support feet 3E.
When the furnace ends of the graphite boats are also separated by hollow graphite blocks 3A, the third group of graphite boats 33 and the fourth group of graphite boats 34 have various embodiments, such as:
1. the fourth graphite boat 34 located below is a hollow graphite block 3A, and the third graphite boat 33 located above is a solid graphite block 3B (not shown).
2. The second graphite boat 34 positioned below and the third graphite boat 33 positioned above comprise a hollow graphite block 3A and a solid graphite block 3B, and the solid graphite block 3B is provided with electrode holes 5.
More preferably, the set of graphite blocks 33, 34 further comprises a graphite block 3F provided with notches for releasing stresses generated during operation of the graphite boat, avoiding deformation or breakage of the graphite boat.
Furthermore, the connecting rod is a ceramic rod and has good insulation effect, so that the graphite block 3 and the unit boat piece 2 are connected and fixed.
The application method of the graphite boat comprises the following steps:
s1, placing solar silicon wafers at corresponding positions of a unit boat, wherein each solar silicon wafer is fixed on the unit boat by a group of clamping points (a first clamping point 61 at the upper part, a second clamping point 62 at the bottom part and a third clamping point 63 in the middle respectively);
s2, placing the graphite boat into a quartz tube of a vacuum process for coating;
and S3, when the solar silicon wafer is coated, introducing process gas and turning on a radio frequency power supply, and uniformly depositing a passivation film on the solar silicon wafer.
Because the graphite blocks near one end of the furnace mouth of the graphite provided by the invention are hollow structures, or the graphite blocks at both ends are hollow structures, the shielding of the graphite blocks on process gas can be reduced, and the black edge and black angle and the blackening proportion of the stuck point of the EL black edge of the tubular PERC battery are reduced. Through multiple production application practices, the invention can reduce the occurrence probability of blackening of the EL black edge and the stuck point of the tubular PERC battery from the original 5% to 0.2%.
Finally, it should be noted that the above embodiments are only for illustrating the technical solution of the present invention and not for limiting the scope of the present invention, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solution of the present invention may be modified or substituted equally without departing from the spirit and scope of the technical solution of the present invention.
Claims (7)
1. The tubular PERC battery graphite boat for improving EL corner blackening and stuck point blackening comprises an insulating rod and a plurality of unit boat pieces, wherein the unit boat pieces are sheet-shaped bodies, gaps are reserved between the adjacent unit boat pieces, and the insulating rod penetrates through the periphery of each unit boat piece to connect and fix all the unit boat pieces together;
the unit boat sheet is provided with a plurality of groups of clamping points for fixing the silicon wafer, each group of clamping points comprises a first clamping point positioned at the upper part, a second clamping point positioned at the bottom and a third clamping point positioned in the middle, the first clamping point is positioned at one end close to the graphite boat furnace mouth, and the second clamping point and the third clamping point are positioned at one end far away from the graphite boat furnace mouth;
the hollow graphite block is provided with at least one through hole;
the through holes are in the shape of round holes, oval holes, square holes, rectangular holes or diamond holes;
the distance between the edge of the through hole and the edge of the graphite block is controlled within 5 mm;
the first clamping points, the second clamping points and the third clamping points are distributed in a triangle.
2. The tubular PERC cell graphite boat for improved EL corner blackening and stuck point blackening of claim 1, wherein the graphite boat is separated at both ends by a hollow graphite block from the cell boat sheets.
3. The tubular PERC cell graphite boat for improved EL corner blackening and stuck point blackening of claim 1, wherein the graphite boat is separated at one end near the mouth by a hollow graphite block from the cell boat sheets.
4. The tubular PERC cell graphite boat for improving EL corner blackening and stuck point blackening of claim 1, wherein the graphite boat at each end is provided with at least two sets of graphite blocks arranged in a vertical direction.
5. The tubular PERC cell graphite boat for improved EL corner blackening and stuck point blackening of claim 4, wherein the underlying set of graphite blocks is hollow graphite blocks.
6. The tubular PERC battery graphite boat for improved EL corner blackening and stuck point blackening of claim 4, wherein the set of graphite blocks below is a hollow graphite block and the set of graphite blocks above comprises a hollow graphite block and a solid graphite block, the solid graphite block being adapted to correspond to the inductor.
7. The tubular PERC cell graphite boat for improved EL corner blackening and stuck point blackening of claim 6, wherein the set of graphite blocks above further comprises hollow graphite blocks having indentations.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710834000.5A CN107641798B (en) | 2017-09-15 | 2017-09-15 | Tubular PERC battery graphite boat capable of improving EL corner blackening and stuck point blackening |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710834000.5A CN107641798B (en) | 2017-09-15 | 2017-09-15 | Tubular PERC battery graphite boat capable of improving EL corner blackening and stuck point blackening |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107641798A CN107641798A (en) | 2018-01-30 |
| CN107641798B true CN107641798B (en) | 2024-01-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710834000.5A Active CN107641798B (en) | 2017-09-15 | 2017-09-15 | Tubular PERC battery graphite boat capable of improving EL corner blackening and stuck point blackening |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107641798B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114068733A (en) * | 2020-08-10 | 2022-02-18 | 苏州阿特斯阳光电力科技有限公司 | Battery piece and photovoltaic module with same |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003197722A (en) * | 2001-12-26 | 2003-07-11 | Toshiba Ceramics Co Ltd | Jig for heat-treating semiconductor wafer, heat treatment unit using the same and method for manufacturing the same |
| JP2008034729A (en) * | 2006-07-31 | 2008-02-14 | Mitsui Eng & Shipbuild Co Ltd | Wafer boat |
| CN204558431U (en) * | 2015-04-24 | 2015-08-12 | 上海弘枫实业有限公司 | A kind of big-power solar cell piece graphite boat |
| CN105453249A (en) * | 2013-06-06 | 2016-03-30 | 森特瑟姆光伏股份有限公司 | Retainer, method for producing same and use thereof |
| CN206148411U (en) * | 2016-09-23 | 2017-05-03 | 苏州阿特斯阳光电力科技有限公司 | Graphite boat suitable for tubular PECVD |
| CN206266704U (en) * | 2016-08-29 | 2017-06-20 | 苏州旗正保精密机械有限公司 | A kind of high energy efficiency graphite boat |
| CN210261986U (en) * | 2017-09-15 | 2020-04-07 | 浙江爱旭太阳能科技有限公司 | Tubular PERC battery graphite boat for improving EL edge blackening and stuck point blackening |
-
2017
- 2017-09-15 CN CN201710834000.5A patent/CN107641798B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003197722A (en) * | 2001-12-26 | 2003-07-11 | Toshiba Ceramics Co Ltd | Jig for heat-treating semiconductor wafer, heat treatment unit using the same and method for manufacturing the same |
| JP2008034729A (en) * | 2006-07-31 | 2008-02-14 | Mitsui Eng & Shipbuild Co Ltd | Wafer boat |
| CN105453249A (en) * | 2013-06-06 | 2016-03-30 | 森特瑟姆光伏股份有限公司 | Retainer, method for producing same and use thereof |
| CN204558431U (en) * | 2015-04-24 | 2015-08-12 | 上海弘枫实业有限公司 | A kind of big-power solar cell piece graphite boat |
| CN206266704U (en) * | 2016-08-29 | 2017-06-20 | 苏州旗正保精密机械有限公司 | A kind of high energy efficiency graphite boat |
| CN206148411U (en) * | 2016-09-23 | 2017-05-03 | 苏州阿特斯阳光电力科技有限公司 | Graphite boat suitable for tubular PECVD |
| CN210261986U (en) * | 2017-09-15 | 2020-04-07 | 浙江爱旭太阳能科技有限公司 | Tubular PERC battery graphite boat for improving EL edge blackening and stuck point blackening |
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| Publication number | Publication date |
|---|---|
| CN107641798A (en) | 2018-01-30 |
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