CN206505900U - A kind of graphite boat of stuck point position optimization - Google Patents
A kind of graphite boat of stuck point position optimization Download PDFInfo
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- CN206505900U CN206505900U CN201720163541.5U CN201720163541U CN206505900U CN 206505900 U CN206505900 U CN 206505900U CN 201720163541 U CN201720163541 U CN 201720163541U CN 206505900 U CN206505900 U CN 206505900U
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- stuck point
- groove
- boat
- boat piece
- hole
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Abstract
The utility model discloses a kind of graphite boat of stuck point position optimization, the unit boat piece that it is mainly arranged by insulating bar and in the horizontal direction is constituted, unit boat piece is the plates being vertically arranged, there is gap between adjacent cells boat piece, insulating bar runs through in the periphery of each unit boat piece and whole unit boat pieces is connected and fixed, surfaces externally and internally positioned at the unit boat piece in two outsides is provided with groove, through hole is provided with positioned at middle unit boat piece, the stuck point for being used for fixing silicon chip is provided with the neighboring area of groove and through hole, the peristoma of groove and through hole is shaped as the shape of square four corner arc transition, mainly by top margin, base and two side compositions, stuck point is 3 and is located in the neighboring area of groove and through hole and respectively close to base and the center of two sides.The utility model can increase the conductive uniformity of silicon chip, so as to improve plating film uniformity, lift the appearance yield and photoelectric transformation efficiency of solar cell.
Description
Technical field
The utility model is related to a kind of graphite boat, more particularly to a kind of graphite boat of stuck point position optimization.
Background technology
The manufacture of solar cell needs by making herbs into wool, diffusion, etching, plated film, silk-screen printing and sinters this six big process.
Wherein, filming process is that the method for using plasma reinforced chemical vapour deposition plates silicon nitride film in front side of silicon wafer, to reduce too
Sunlight reflects and plays passivation to silicon chip surface., it is necessary to by uncoated silicon chip when silicon chip carries out its surface coating process
On the loader for inserting PECVD vacuum coating equipments, at present, loader generally uses graphite boat, and usually operating personnel will spend
Silicon chip in basket inserts special graphite boat or silicon chip is inserted to special graphite boat, concrete operations by automatic charging ＆ discharging machine
Process is：By silicon chip insertion graphite boat and by fixing card point location thereon, then, the graphite boat for being loaded with silicon chip is placed on
In PECVD vacuum coating equipments, plated film is carried out to silicon chip using pecvd process.
Existing graphite boat typically blocks three sides of silicon chip using 3 fixed stuck points, and silicon chip is fixed.But, two
Individual stuck point correspondence is near an angle of silicon chip, and another stuck point correspondence is attached positioned at the central point of the other a line of silicon chip
Closely.In coating process, because stuck point skewness causes silicon chip film-coated uneven, formation aberration, while reducing battery
Photoelectric transformation efficiency.
Utility model content
The purpose of this utility model, which is that offer is a kind of, can improve battery outward appearance yields, improve photoelectric transformation efficiency
The graphite boat of stuck point position optimization, the silicon chip film-coated inequality that traditional coated graphite boat can be avoided to produce.
The purpose of this utility model is realized by following technical measures：A kind of graphite boat of stuck point position optimization, its
It is characterised by：Several unit boat pieces that it is mainly arranged by insulating bar and in the horizontal direction are constituted, and the unit boat piece is perpendicular
There is gap between the plates directly set, adjacent unit boat piece, the insulating bar run through in the periphery of each unit boat piece and
Whole unit boat pieces is connected and fixed, the surfaces externally and internally positioned at the unit boat piece in two outsides is provided with some and silicon chip
Shape is identical and its size is less than the groove of die size, and the groove on each outer cells boat piece surfaces externally and internally is relative
Should, it is less than the through hole of die size provided with some and its size identical with silicon chip shape positioned at middle unit boat piece, in institute
The stuck point for being provided with the neighboring area of groove and through hole and being used for fixing silicon chip is stated, the peristoma of the groove and through hole is shaped as pros
The shape of four corner arc transition of shape, is mainly made up of top margin, base and two sides, and the stuck point is 3 and is located at recessed
In the neighboring area of groove and through hole and respectively close to base and the center of two sides.
The utility model is different from the mal-distribution structure of traditional coated graphite boat stuck point, the stuck point correspondence of the graphite boat
The center on three sides of groove and through hole is evenly distributed on, the conductive uniformity of silicon chip can be increased, so as to improve plated film
Uniformity, lifts the appearance yield and photoelectric transformation efficiency of solar cell.In addition, the utility model is by the horizontal direction
Several unit boat pieces composition of arrangement, provided with several grooves and through hole being arranged in array, Ke Yigen on unit boat piece
According to the actual conditions and needs of coating process, array distribution of the silicon chip to be coated on unit boat piece is adjusted, so as to improve silicon chip
The uniformity of plated film.
As a kind of embodiment of the present utility model, being used for provided with the insertion respective slot in the groove bottom of groove
The pore vacuumized.
As a kind of embodiment of the present utility model, the quantity of the unit boat piece is 2~50, adjacent cells boat piece it
Between spacing be 5~50mm.
As a kind of embodiment of the present utility model, groove and through hole on the unit boat piece uniformly divide in array
Cloth, array is shaped as square, rectangle, circle or hexagon.
As a kind of embodiment of the present utility model, the quantity of groove and through hole on each unit boat piece is respectively 5
~20, between adjacent grooves, the distance between adjacent through-holes be 5~300mm.
As a kind of embodiment of the present utility model, the length of side L of the unit boat piece upper groove and through hole is respectively 80
~200mm.
As a kind of improvement of the present utility model, the stuck point is main by for the circle in unit boat piece mounting hole
Cylindricality installation portion, a pair of fixture blocks and installation axle composition, the installation axle connection installation portion and fixture block, between installation portion and fixture block
Form the bayonet socket for engaging silicon chip, the fixture block is hollow triangle blocks or hollow cylindrical block body, so that
The corresponding region of silicon chip surface is not blocked so that plated film is uniform.The shielded area at silicon chip stuck point can be reduced, improve plated film
Uniformity.
The gross thickness of stuck point described in the utility model is 2~6mm；The maximum length of the cross section of the stuck point be 2~
8mm；The length in orthographic projection region of the hollow space of stuck point on silicon chip is 1~7mm.
As a kind of embodiment of the present utility model, the insulating bar uses ceramic rod, it would however also be possible to employ other insulation
Material is made.
Compared with prior art, the utility model has following significant advantage：
(1) the utility model is different from the mal-distribution structure of traditional coated graphite boat stuck point, the stuck point pair of the graphite boat
The center on three sides of groove and through hole is should be evenly distributed in, the conductive uniformity of silicon chip can be increased, so as to improve plating
Film uniformity, lifts the appearance yield and photoelectric transformation efficiency of solar cell.
(2) the utility model stuck point is cylinder and the group of hollow triangle blocks or hollow cylindrical block body
Structure is closed, the shielded area at silicon chip stuck point can be reduced, improves plating film uniformity.
(3) the utility model is made up of several unit boat pieces arranged in the horizontal direction, provided with being on unit boat piece
Several grooves and through hole of array arrangement, can adjust silicon chip to be coated and exist according to the actual conditions and needs of coating process
Array distribution on unit boat piece, so as to improve silicon chip film-coated uniformity.
(4) the utility model is simple in construction, easily realizes, practical, suitable for being widely popularized and being applicable.
Brief description of the drawings
Below in conjunction with accompanying drawing, the utility model is described in further detail.
Fig. 1 is overall structure diagram of the present utility model；
Fig. 2 is the structural representation that the utility model is located at middle unit boat piece；
Fig. 3 is the structural representation of the stuck point of the utility model one embodiment；
Fig. 4 is the structural representation of the stuck point of the utility model another embodiment.
Embodiment
As illustrated in fig. 1 and 2, be a kind of graphite boat 1 of stuck point position optimization of the utility model, it mainly by insulating bar and
The several unit boat pieces composition arranged in horizontal direction, the quantity of unit boat piece is 2~50, in the present embodiment, unit boat piece
For four, insulating bar uses ceramic rod 3, and unit boat piece is vertically arranged rectangular patch body, has between adjacent unit boat piece
It is 5~50mm to have the spacing between gap, adjacent cells boat piece.Ceramic rod 3 runs through in the periphery of each unit boat piece and incited somebody to action all
Unit boat piece be connected and fixed, the two ends of ceramic rod 3 are held within the unit boat piece 21 in two outsides by fixed component 9
Outer surface on.Positioned at two outsides unit boat piece 21 surfaces externally and internally provided with some identical with silicon chip shape and its size is small
In the groove 4 of die size, the groove 4 on each surfaces externally and internally of outer cells boat piece 21 is corresponding, in the bottom land of groove 4
The pore 7 that is used to vacuumize of the face provided with the insertion respective slot 4, positioned at middle unit boat piece 22 provided with some and silicon
Plate shape is identical and its size be less than the quantity of groove on the through hole 5 of die size, each unit boat piece and through hole for 5~
20.Groove and through hole on unit boat piece be uniformly distributed in array, and array is shaped as square, rectangle, circle or six
Side shape etc..Between adjacent grooves, the distance between adjacent through-holes be 5~300mm, the depth of groove is 2~5mm.Unit boat piece
The length of side L of upper groove and through hole is 80~200mm.The card for being used for fixing silicon chip is provided with the neighboring area of groove 4 and through hole 5
The peristoma of point 6, groove 4 and through hole 5 is shaped as the shape of square four corner arc transition, mainly by top margin, base and two
Bar side is constituted, and stuck point 6 is 3 and is located in the neighboring area of groove 4 and through hole 5 and corresponding to the centre bit on base and side
Put.
Stuck point 6 is main by for the cylindrical installation portion 61 in unit boat piece mounting hole, a pair of fixture blocks 62 and peace
Dress axle 63 is constituted, the connection installation portion 61 of installation axle 63 and fixture block 62, is formed between installation portion 61 and fixture block 62 for engaging silicon
The bayonet socket of piece, in one of the embodiments, fixture block 62 are hollow triangle blocks, and referring to Fig. 4, installation axle 63 is connected to
On the inner top surface of fixture block 62, connecting rod 64 is provided between the inwall of installation axle 63 and fixture block 62, fixture block 62 does not block silicon chip table
The corresponding region in face is uniform so as to plated film；In another embodiment, fixture block 62 is hollow cylindrical block body, referring to Fig. 3.
The gross thickness of stuck point 6 is 2~6mm.The maximum length of the cross section of stuck point 6 is 2~8mm.The hollow space of stuck point 6 is on silicon chip
Orthographic projection region length be 1~7mm.
Embodiment not limited to this of the present utility model, according to the above of the present utility model, according to the general of this area
Logical technological know-how and customary means, under the premise of the above-mentioned basic fundamental thought of the utility model is not departed from, the utility model may be used also
To make the modification of other diversified forms, replace or change, all fall within the utility model rights protection scope.
Claims (10)
1. a kind of graphite boat of stuck point position optimization, it is characterised in that：What it was mainly arranged by insulating bar and in the horizontal direction
Several unit boat piece compositions, the unit boat piece is to have gap, institute between vertically arranged plates, adjacent unit boat piece
State insulating bar in the periphery of each unit boat piece to run through and whole unit boat pieces is connected and fixed, the list positioned at two outsides
The surfaces externally and internally of first boat piece is less than the groove of die size provided with some identical with silicon chip shape and its size, positioned at each outer
Groove on side unit boat piece surfaces externally and internally is corresponding, and being used for provided with the insertion respective slot takes out true in the groove bottom of groove
Empty pore, is less than the logical of die size positioned at middle unit boat piece provided with some and its size identical with silicon chip shape
Hole, is provided with the stuck point for being used for fixing silicon chip, the peristoma shape of the groove and through hole in the neighboring area of the groove and through hole
Shape is the shape of square four corner arc transition, is mainly made up of top margin, base and two sides, and the stuck point is 3
And in the neighboring area of groove and through hole and respectively close to base and the center of two sides.
2. the graphite boat of stuck point position optimization according to claim 1, it is characterised in that：The quantity of the unit boat piece is
2~50, the spacing between adjacent cells boat piece is 5~50mm.
3. the graphite boat of stuck point position optimization according to claim 2, it is characterised in that：Groove on the unit boat piece
It is uniformly distributed with through hole in array, array is shaped as square, rectangle, circle or hexagon.
4. the graphite boat of stuck point position optimization according to claim 3, it is characterised in that：Groove on each unit boat piece
Be respectively 5~20 with number of openings, between adjacent grooves, the distance between adjacent through-holes be 5~300mm.
5. the graphite boat of stuck point position optimization according to claim 4, it is characterised in that：The unit boat piece upper groove and
The length of side L of through hole is respectively 80~200mm.
6. the graphite boat of stuck point position optimization according to claim 5, it is characterised in that：The stuck point is main by for pacifying
Cylindrical installation portion, a pair of fixture blocks and installation axle composition in unit boat piece mounting hole, the installation axle connect installation portion
And fixture block, the bayonet socket for engaging silicon chip is formed between installation portion and fixture block, the fixture block is hollow triangle blocks
Or hollow cylindrical block body, the installation axle is connected on the inner top surface of fixture block, in the installation axle and the inwall of fixture block
Between be provided with connecting rod, the fixture block do not block the corresponding region of silicon chip surface so that plated film is uniform.
7. the graphite boat of stuck point position optimization according to claim 6, it is characterised in that：The gross thickness of the stuck point is 2
~6mm.
8. the graphite boat of stuck point position optimization according to claim 7, it is characterised in that：The cross section of the stuck point is most
Long length is 2~8mm.
9. the graphite boat of stuck point position optimization according to claim 8, it is characterised in that：The hollow space of stuck point is in silicon chip
On orthographic projection region length be 1~7mm.
10. the graphite boat of stuck point position optimization according to claim 9, it is characterised in that：The insulating bar is using ceramics
Rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720163541.5U CN206505900U (en) | 2017-02-22 | 2017-02-22 | A kind of graphite boat of stuck point position optimization |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720163541.5U CN206505900U (en) | 2017-02-22 | 2017-02-22 | A kind of graphite boat of stuck point position optimization |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206505900U true CN206505900U (en) | 2017-09-19 |
Family
ID=59840940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720163541.5U Active CN206505900U (en) | 2017-02-22 | 2017-02-22 | A kind of graphite boat of stuck point position optimization |
Country Status (1)
| Country | Link |
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| CN (1) | CN206505900U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108004524A (en) * | 2018-01-15 | 2018-05-08 | 江苏微导纳米装备科技有限公司 | A kind of plated film carrier |
| CN109244020A (en) * | 2018-11-06 | 2019-01-18 | 通威太阳能（安徽）有限公司 | A kind of novel pipe PECD graphite boat stuck point |
| CN109440084A (en) * | 2018-09-29 | 2019-03-08 | 东方日升新能源股份有限公司 | A kind of graphite boat for solar battery double-sided coating |
-
2017
- 2017-02-22 CN CN201720163541.5U patent/CN206505900U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108004524A (en) * | 2018-01-15 | 2018-05-08 | 江苏微导纳米装备科技有限公司 | A kind of plated film carrier |
| CN109440084A (en) * | 2018-09-29 | 2019-03-08 | 东方日升新能源股份有限公司 | A kind of graphite boat for solar battery double-sided coating |
| CN109244020A (en) * | 2018-11-06 | 2019-01-18 | 通威太阳能（安徽）有限公司 | A kind of novel pipe PECD graphite boat stuck point |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 69, C District, Leping Town Industrial Park, Sanshui, Foshan, Guangdong Patentee after: Guangdong Asahi Polytron Technologies Inc Address before: No. 69, C District, Leping Town Industrial Park, Sanshui, Foshan, Guangdong Patentee before: Guangdong Aiko Solar Energy Technology Co., Ltd. |