CN206266704U - A kind of high energy efficiency graphite boat - Google Patents
A kind of high energy efficiency graphite boat Download PDFInfo
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- CN206266704U CN206266704U CN201620966021.3U CN201620966021U CN206266704U CN 206266704 U CN206266704 U CN 206266704U CN 201620966021 U CN201620966021 U CN 201620966021U CN 206266704 U CN206266704 U CN 206266704U
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- graphite
- boat
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- graphite boat
- boat piece
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Abstract
The utility model is related to a kind of graphite boat, and in particular to a kind of high energy efficiency graphite boat field.The high energy efficiency graphite boat includes graphite boat boat piece, ceramic ring, ceramic rod, graphite rod, graphite nut and graphite block, the graphite boat boat piece is evenly distributed by certain spacing, a ceramic ring is provided between every two graphite boats boat piece, the graphite rod penetrates graphite boat boat piece and graphite block and connects graphite boat boat piece two ends, its top of the side of graphite boat boat piece at the graphite boat boat piece wherein one end bosom is provided with graphite electrode slab, its underpart is provided with lower graphite electrode slab, its opposite side is provided with potsherd, the potsherd is arranged on the both sides of the graphite boat boat piece of graphite electrode slab and center.Due to having added insulating ceramic film, change electric field, electric field is uniformly distributed in whole graphite boat, reduce the aberration rate of silicon chip, improve the uniformity of silicon chip surface silicon nitride layer structure.
Description
Technical field
The utility model is related to a kind of graphite boat, and in particular to a kind of high energy efficiency graphite boat field.
Background technology
Existing graphite boat does deposition reaction after carrying silicon chip in tubular type PECVD, due to original graphite boat high frequency glow
Electrode is by stove tail（With tubular type PECVD as object of reference）Conduct to fire door, so as to high-frequency electric field effect stove tail to fire door occurs
Weaken successively, cause sedimentation rate inconsistent, cause aberration；Secondly because aura can produce heat energy, high-frequency electric field strong production
Heat energy is just more, causes stove tail temperature and fire door temperature deviation big, so as to change the effect that silicon chip surface is passivated, the structure of generation is not
Unanimously, the uniformity of the structure of silicon chip is changed.
In order to solve the above technical problems, being necessary to be improved prior art, a kind of high energy efficiency graphite boat is designed, should
Piece of graphite boat piece at the bosom of wherein a layer of high energy efficiency graphite boat carries out insulation processing using potsherd so that the layer
Energy the boat body other end is transmitted to from electrode tip by this graphite boat piece, energy is conducted respectively by conduction sequence from inside to outside
To this layer of other graphite flakes of boat body, then other graphite boat pieces of this layer conduct to electrode tip energy from other end, and another
The energy of an outer boat body is then directly transmitted to the other end from electrode tip, and boat body the two poles of the earth energy passes through such conduction pattern, with
Just energy uniform conductive on boat body, so that the sedimentation rate in boiler tube is close.Due to having added insulating ceramic film, change electric field,
Electric field is uniformly distributed in whole graphite boat, reduce the aberration rate of silicon chip, improve the system of silicon chip surface silicon nitride layer structure
One property.
The content of the invention
In order to overcome defect present in background technology, the utility model solves the technical scheme that its technical problem is used
It is：
A kind of high energy efficiency graphite boat, including graphite boat boat piece, ceramic ring, ceramic rod, graphite rod, graphite nut and graphite
Block, the graphite boat boat piece is evenly distributed by certain spacing, and a ceramic ring, institute are provided between every two graphite boats boat piece
State and be provided with graphite boat boat piece for fixed mounting hole, the ceramic rod penetrates mounting hole by graphite boat boat piece and ceramic ring
An entirety is connected into, material storage is constituted between two pieces of adjacent graphite boat boat pieces and two adjacent ceramic rings empty
Between, the two ends graphite nut of the ceramic rod tightens fixation, the two ends of graphite boat boat piece graphite boat boat adjacent thereto
Graphite block is provided between piece, the graphite rod penetrates graphite boat boat piece and graphite block and connects graphite boat boat piece two ends, the stone
The two ends graphite nut of inker is fixed, a upper lateral part of the graphite boat boat piece at the graphite boat boat piece wherein one end bosom
It is provided with graphite electrode slab, the graphite boat for being provided with graphite electrode slab at the graphite boat boat piece wherein one end bosom
The bottom of boat piece is provided with lower graphite electrode slab, and the graphite boat boat piece is provided with graphite electrode slab at wherein one end bosom
The opposite side of the graphite boat boat piece of lower graphite electrode slab is provided with potsherd, the potsherd be arranged on graphite electrode slab and
The both sides of the graphite boat boat piece of center.
The potsherd can be arranged on the both sides of the graphite boat boat piece of lower graphite electrode slab and center.
It is preferred that the number of upper graphite electrode slab and lower graphite electrode slab is respectively 2.
It is preferred that the number of the graphite boat boat piece between two panels potsherd is more than 2.
A kind of high energy efficiency graphite boat involved by the utility model, at wherein one layer of the high energy efficiency graphite boat of bosom
Piece of graphite boat piece insulation processing is carried out using potsherd so that the energy of this layer by this graphite boat piece from electrode tip conduct
To the boat body other end, energy is conducted to this layer of other graphite flakes of boat body respectively by conduction sequence from inside to outside, then this layer
Other graphite boat pieces conduct to electrode tip energy from other end, and the energy of another boat body is then directly passed from electrode tip
The other end is led, boat body the two poles of the earth energy passes through such conduction pattern, so as to energy uniform conductive on boat body, so that in boiler tube
Sedimentation rate it is close.Due to having added insulating ceramic film, change electric field, electric field is uniformly distributed in whole graphite boat, reduce
The aberration rate of silicon chip, improves the uniformity of silicon chip surface silicon nitride layer structure.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is a kind of structural representation of high energy efficiency graphite boat of the utility model；
Fig. 2 is a kind of structural representation of one end of high energy efficiency graphite boat of the utility model；
Wherein:1st, graphite boat boat piece；2nd, ceramic ring；3rd, ceramic rod；4th, graphite rod；5th, graphite nut；6th, graphite block；7th, make pottery
Ceramics；8th, upper graphite electrode slab；9th, lower graphite electrode slab；10th, mounting hole.
Specific embodiment
The utility model is described in further detail presently in connection with accompanying drawing.Accompanying drawing is simplified schematic diagram, only showing
Meaning mode illustrates basic structure of the present utility model, therefore it only shows the composition relevant with the utility model.
Specific embodiment, refers to Fig. 1, Fig. 2, a kind of high energy efficiency graphite boat, including graphite boat boat piece, ceramic ring, ceramics
Rod, graphite rod, graphite nut and graphite block, the graphite boat boat piece are evenly distributed by certain spacing, every two graphite boats boat
A ceramic ring is provided between piece, is provided with the graphite boat boat piece for fixed mounting hole, the ceramic rod is penetrated
Graphite boat boat piece and ceramic ring are connected into an entirety by mounting hole, in two pieces of adjacent graphite boat boat pieces and two adjacent potteries
Material parking space is constituted between ceramic ring, the two ends graphite nut of the ceramic rod tightens fixation, the graphite boat boat piece
Two ends graphite boat boat piece adjacent thereto between be provided with graphite block, the graphite rod penetrates graphite boat boat piece and graphite block by stone
Black boat boat piece two ends connection, the two ends graphite nut of the graphite rod is fixed, the graphite boat boat piece wherein one end bosom
One upper lateral part of the graphite boat boat piece at place is provided with graphite electrode slab, setting at the graphite boat boat piece wherein one end bosom
The bottom for being equipped with the graphite boat boat piece of graphite electrode slab is provided with lower graphite electrode slab, and the graphite boat boat piece wherein one end is most
The opposite side that center is provided with the graphite boat boat piece of graphite electrode slab and lower graphite electrode slab is provided with potsherd, the pottery
Ceramics is arranged on the both sides of the graphite boat boat piece of graphite electrode slab and center.
The potsherd can be arranged on the both sides of the graphite boat boat piece of lower graphite electrode slab and center.
It is preferred that the number of upper graphite electrode slab and lower graphite electrode slab is respectively 2.
It is preferred that the number of the graphite boat boat piece between two panels potsherd is more than 2.
A kind of high energy efficiency graphite boat involved by the utility model, graphite boat has multiple graphite boat boat pieces 1, graphite boat boat
Piece 1 connects and composes boat body by ceramic ring 2 and graphite rod 4, ceramic rod 3, and many ceramic rings 7 are connected between graphite boat boat piece 1 simultaneously
Graphite boat boat piece 1 is arranged in upper and lower two-layer, bilevel graphite boat boat piece 1 is connected together by graphite rod 4 and constitutes phase
To independent boat body, material parking space is constituted between two pieces of adjacent graphite boat boat pieces 1 and two adjacent ceramic rings 7, should
Piece of graphite boat boat piece 1 at the bosom of wherein a layer of high energy efficiency graphite boat carries out insulation processing using potsherd 7 so that
The energy of this layer is transmitted to the boat body other end by this graphite boat boat piece 1 from electrode tip, and energy is by conduction sequence from inside to outside
This layer of other graphite boat boat pieces 1 of boat body are conducted to respectively, and then other graphite boat boat pieces 1 of this layer pass energy from other end
Electrode tip is directed at, and the energy of another boat body is then directly transmitted to the other end from electrode tip, boat body the two poles of the earth energy passes through this
The conduction pattern of sample, so as to energy uniform conductive on boat body, so that the sedimentation rate in boiler tube is close.Due to having added insulation to make pottery
Ceramics 7, changes electric field, electric field is uniformly distributed in whole graphite boat, reduces the aberration rate of silicon chip, improves silicon chip surface nitrogen
The uniformity of SiClx Rotating fields.
It is enlightenment with the above-mentioned desirable embodiment according to this patent, by above-mentioned description, relevant staff is complete
Various changes and amendments can be carried out in the range of without departing from this patented technology thought entirely.This technology of patent
Property scope is not limited to the content on specification, it is necessary to its technical scope is determined according to right.
Claims (4)
1. a kind of high energy efficiency graphite boat, including graphite boat boat piece（1）, ceramic ring（2）, ceramic rod（3）, graphite rod（4）, graphite spiral shell
Cap（5）And graphite block（6）, it is characterised in that：The graphite boat boat piece（1）It is evenly distributed by certain spacing, per two panels graphite
Boat boat piece（1）Between be provided with a ceramic ring（2）, the graphite boat boat piece（1）On be provided with for fixed mounting hole
（10）, the ceramic rod（3）Penetrate mounting hole（10）By graphite boat boat piece（1）And ceramic ring（2）An entirety is connected into, two
The adjacent graphite boat boat piece of block（1）The ceramic ring adjacent with two（2）Between constitute material parking space, the ceramic rod
（3）Two ends graphite nut（5）Tighten fixation, the graphite boat boat piece（1）Two ends graphite boat boat piece adjacent thereto（1）
Between be provided with graphite block（6）, the graphite rod（4）Penetrate graphite boat boat piece（1）And graphite block（6）By graphite boat boat piece（1）Two
End connection, the graphite rod（4）Two ends graphite nut（5）It is fixed, the graphite boat boat piece（1）Wherein at the bosom of one end
Graphite boat boat piece（1）A upper lateral part be provided with graphite electrode slab（8）, the graphite boat boat piece（1）Wherein one end most in
Graphite electrode slab is provided with the heart（8）Graphite boat boat piece（1）Bottom be provided with lower graphite electrode slab（9）, it is described
Graphite boat boat piece（1）Wherein graphite electrode slab is provided with the bosom of one end（8）With lower graphite electrode slab（9）Graphite boat boat
Piece（1）Opposite side be provided with potsherd（7）, the potsherd（7）It is arranged on graphite electrode slab（8）With the graphite of center
Boat boat piece（1）Both sides.
2. a kind of high energy efficiency graphite boat according to claim 1, it is characterised in that the potsherd（7）Can be arranged on down
Graphite electrode slab（9）With the graphite boat boat piece of center（1）Both sides.
3. a kind of high energy efficiency graphite boat according to claim 1, it is characterised in that the upper graphite electrode slab（8）With lower stone
Electrode ink block（9）Number be respectively 2.
4. a kind of high energy efficiency graphite boat according to claim 1 or claim 2, it is characterised in that the two panels potsherd（7）Between
Graphite boat boat piece（1）Number be more than 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620966021.3U CN206266704U (en) | 2016-08-29 | 2016-08-29 | A kind of high energy efficiency graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620966021.3U CN206266704U (en) | 2016-08-29 | 2016-08-29 | A kind of high energy efficiency graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206266704U true CN206266704U (en) | 2017-06-20 |
Family
ID=59036870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620966021.3U Expired - Fee Related CN206266704U (en) | 2016-08-29 | 2016-08-29 | A kind of high energy efficiency graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206266704U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107641798A (en) * | 2017-09-15 | 2018-01-30 | 浙江爱旭太阳能科技有限公司 | Improve the tubular type PERC battery graphite boats that EL corners black and stuck point blacks |
| CN107641799A (en) * | 2017-09-15 | 2018-01-30 | 浙江爱旭太阳能科技有限公司 | Improve the tubular type PERC battery graphite boats that EL corners black and stuck point blacks |
| CN111020531A (en) * | 2019-12-18 | 2020-04-17 | 常州时创能源股份有限公司 | Combined graphite boat sleeve and graphite boat |
| CN114016004A (en) * | 2021-10-13 | 2022-02-08 | 天合光能(宿迁)光电有限公司 | Graphite boat front electrode transformation structure for preventing sheet falling in furnace |
-
2016
- 2016-08-29 CN CN201620966021.3U patent/CN206266704U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107641798A (en) * | 2017-09-15 | 2018-01-30 | 浙江爱旭太阳能科技有限公司 | Improve the tubular type PERC battery graphite boats that EL corners black and stuck point blacks |
| CN107641799A (en) * | 2017-09-15 | 2018-01-30 | 浙江爱旭太阳能科技有限公司 | Improve the tubular type PERC battery graphite boats that EL corners black and stuck point blacks |
| CN107641799B (en) * | 2017-09-15 | 2024-01-12 | 浙江爱旭太阳能科技有限公司 | Tubular PERC battery graphite boat capable of improving EL corner blackening and stuck point blackening |
| CN107641798B (en) * | 2017-09-15 | 2024-01-12 | 浙江爱旭太阳能科技有限公司 | Tubular PERC battery graphite boat capable of improving EL corner blackening and stuck point blackening |
| CN111020531A (en) * | 2019-12-18 | 2020-04-17 | 常州时创能源股份有限公司 | Combined graphite boat sleeve and graphite boat |
| CN111020531B (en) * | 2019-12-18 | 2024-03-22 | 常州时创能源股份有限公司 | Combined graphite boat sleeve and graphite boat |
| CN114016004A (en) * | 2021-10-13 | 2022-02-08 | 天合光能(宿迁)光电有限公司 | Graphite boat front electrode transformation structure for preventing sheet falling in furnace |
| CN114016004B (en) * | 2021-10-13 | 2023-08-04 | 天合光能(宿迁)光电有限公司 | Graphite boat front electrode reconstruction structure capable of avoiding falling sheets in furnace |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170620 Termination date: 20170829 |
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| CF01 | Termination of patent right due to non-payment of annual fee |