CN111020531B - Combined graphite boat sleeve and graphite boat - Google Patents
Combined graphite boat sleeve and graphite boat Download PDFInfo
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- CN111020531B CN111020531B CN201911310170.9A CN201911310170A CN111020531B CN 111020531 B CN111020531 B CN 111020531B CN 201911310170 A CN201911310170 A CN 201911310170A CN 111020531 B CN111020531 B CN 111020531B
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- pipe
- female
- graphite boat
- male
- front section
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 64
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 64
- 239000010439 graphite Substances 0.000 title claims abstract description 64
- 230000008021 deposition Effects 0.000 claims abstract description 12
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims 5
- 238000000576 coating method Methods 0.000 abstract description 16
- 239000011248 coating agent Substances 0.000 abstract description 12
- 230000005684 electric field Effects 0.000 abstract description 11
- 238000004140 cleaning Methods 0.000 abstract description 10
- 239000000919 ceramic Substances 0.000 description 46
- 239000010408 film Substances 0.000 description 38
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 13
- 238000000151 deposition Methods 0.000 description 10
- 239000010409 thin film Substances 0.000 description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000007888 film coating Substances 0.000 description 5
- 238000009501 film coating Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
Abstract
The invention discloses a combined graphite boat sleeve, which comprises a male pipe and a female pipe; the female pipe is configured to include a front section and a rear section, the outer diameters of the front section and the rear section are equal and larger than the outer diameter of the male pipe, the inner diameter of the rear section is equal to the inner diameter of the male pipe, and the front section has at least one inner diameter and is larger than the inner diameter of the rear section; when the male pipe and the female pipe are used in a combined mode, the male pipe extends into the female pipe from the front section part and is in contact with the rear section of the female pipe, so that at least one circle of groove is formed between the outer wall of the male pipe extending into the female pipe and the inner wall of the front section of the female pipe, and the front section of the female pipe forms a shielding wall for shielding film deposition at the groove wall of the groove. The invention also discloses a graphite boat adopting the combined graphite boat sleeve. The invention can reduce the influence of the film deposited on the graphite boat sleeve on the electric field between boat sheets as much as possible, stabilize the coating process, improve the coating quality and reduce the cleaning frequency of the graphite boat.
Description
Technical Field
The invention belongs to the technical field of auxiliary accessories of solar cell manufacturing equipment, and particularly relates to a graphite boat sleeve for tubular PECVD.
Background
PECVD (Plasma Enhanced Chemical Vapor Deposition), namely, the plasma enhanced chemical vapor deposition method, ionizes a gas containing atoms of a thin film component by means of microwaves or radio frequency or the like, locally forms plasma, has strong plasma chemical activity, easily reacts, and deposits a desired thin film on the surface of a substrate, thereby achieving good film formation quality. Currently, in the process of preparing industrial crystalline silicon batteries, PECVD is mostly used to deposit films with different characteristics on the surface of a substrate, such as a common silicon nitride film, a silicon oxynitride film, and the like. In the industrial tubular PECVD coating process, a ceramic sleeve with better insulativity and higher dielectric strength is sleeved on a ceramic rod of a graphite boat, is arranged between adjacent boat sheets and is in close contact with the boat sheets. The adjacent boat sheets are physically supported and electrically isolated through the ceramic sleeve, and an electric field is formed.
With the continuous development of cell processes and technologies, PECVD is applied in the preparation of other high-efficiency solar cells, such as tunnel oxide passivation contact cells (Topcon), amorphous silicon heterojunction cells (HIT), where PECVD is required for deposition of other thin film materials, including deposition of amorphous silicon thin films, doped amorphous silicon thin films, and the like. Along with the diversification of application scenes of PECVD (plasma enhanced chemical vapor deposition) coating technology, the conditions that the coating is uneven, the coating speed is reduced and even the coating cannot be continued start to appear, the quality of the coating is seriously affected, and the technology can only deposit thinner films at one time and cannot finish the technological requirements of thick films and the like. In addition, the cleaning frequency of the graphite boat is correspondingly increased, so that the graphite boat needs to be cleaned off line after being used once or for a plurality of times, the utilization rate of the graphite boat is low, and the use cost is increased. Therefore, the tubular PECVD has not been widely applied to the industrial preparation of the high-efficiency battery.
Disclosure of Invention
In order to solve the problems, the invention provides a combined graphite boat sleeve for spacing graphite boat sheets, which reduces the influence of a film deposited on the graphite boat sleeve on an electric field between the boat sheets as much as possible through the structural design of a groove formed by combining a male pipe and a female pipe and a shielding wall used for shielding the deposition at the groove wall, so as to stabilize a film coating process, improve film coating quality and reduce the cleaning frequency of the graphite boat.
The specific technical scheme is as follows:
scheme one: a combined graphite boat sleeve comprises a male tube and a female tube; the female pipe is configured to include a front section and a rear section, the outer diameters of the front section and the rear section are equal and larger than the outer diameter of the male pipe, the inner diameter of the rear section is equal to the inner diameter of the male pipe, and the front section has at least one inner diameter and is larger than the inner diameter of the rear section; when the male pipe and the female pipe are used in a combined mode, the male pipe extends into the female pipe from the front section part and is in contact with the rear section of the female pipe, so that at least one circle of groove is formed between the outer wall of the male pipe extending into the female pipe and the inner wall of the front section of the female pipe, and the front section of the female pipe forms a shielding wall for shielding film deposition at the groove wall of the groove.
As a preferred aspect, the front section has an inner diameter size; the cross section of the groove is rectangular.
As a preferred solution, the front section has two inner diameters, so that the groove wall of the groove has a round of step structure.
As a preferred option, the inner diameter distal to the posterior segment is smaller than the inner diameter proximal to the posterior segment.
As a preferable scheme, the front section is a reducing inner cavity; when the section of the groove is a right triangle, the minimum inner diameter of the front section is not smaller than the outer diameter of the male pipe; when the cross section of the groove is right trapezoid, the minimum inner diameter of the front section is larger than the outer diameter of the male pipe.
As a preferable scheme, the ratio of the depth of the groove to the width of the widest part is not less than 10, and the depth of the groove is larger than the length of the male pipe extending out of the female pipe; the male pipe and the female pipe are made of ceramic materials.
As a preferable scheme, the combined graphite boat sleeve specifically comprises a male pipe and a female pipe; when the male pipe and the female pipe are combined, a circle of groove is formed between the outer wall of the male pipe extending into the female pipe and the inner wall of the front section of the female pipe.
As a preferred solution, the combined graphite boat casing specifically includes two male pipes and two female pipes, which are arranged when used in combination: the male pipe extends into the female pipe from the front section part and is contacted with the rear section of the female pipe, the two female pipes are arranged back to back, and the end surfaces of the rear sections are mutually attached; when the male pipe and the female pipe are used in combination, two circles of grooves are formed between the outer wall of the male pipe extending into the female pipe and the inner wall of the front section of the female pipe.
As a preferred solution, the combined graphite boat casing specifically includes one male pipe and two female pipes, which are arranged when used in combination: the male pipe extends into the female pipe from the front section part and is in contact with the rear section of the female pipe, and the two female pipes are oppositely arranged with a gap left between the two female pipes; when the male pipe and the female pipe are used in combination, two circles of grooves are formed between the outer wall of the male pipe extending into the female pipe and the inner wall of the front section of the female pipe.
Scheme II: a graphite boat, comprising a graphite boat sheet, a support rod, and a combined graphite boat sleeve according to any one of the first scheme and the preferred scheme thereof; the support rod is used for supporting the graphite boat piece; the graphite boat sleeve is sleeved on the supporting rod and is arranged between the adjacent graphite boat sheets and used for supporting and fixing the graphite boat sheets, so that the same distance between the adjacent graphite boat sheets is kept.
The invention has the following beneficial effects:
(1) Through the structural design of the male pipe and the female pipe, a special groove structure and a shielding wall structure for shielding the deposition at the groove wall of the groove are formed after the male pipe and the female pipe are combined, so that continuous films are prevented from being formed between boat pieces as much as possible after film coating, and the influence of the films deposited on the graphite boat sleeve on the electric field between the boat pieces is reduced or eliminated.
(2) Because the film deposited on the graphite boat sleeve is discontinuous in the direction of the adjacent boat sheets, the ceramic sleeve is connected with two ends of the adjacent boat sheets, which are in contact, without a through plane, so that the influence of the deposited film on the electric field between the boat sheets is reduced or eliminated, the film coating process is stabilized, the film coating quality (comprising thickness, uniformity and the like) is improved, the cleaning times of the graphite boat are greatly reduced, and the process production cost is reduced.
(3) The male pipe and the female pipe are designed and combined separately, so that the ceramic sleeve is easy to manufacture, the manufacturing cost of the ceramic sleeve is reduced, the ceramic sleeve is convenient to clean, the ceramic sleeve can be better contacted with cleaning liquid medicine in the cleaning process, and each cleaning is more thorough.
(4) The male pipe and the female pipe can be manufactured into standard components with various sizes according to requirements, so that the standard components can be flexibly combined for different application scenes.
Drawings
FIG. 1 is a schematic view of a tubular PECVD graphite boat according to example 1;
FIG. 2 is an enlarged view of a portion of FIG. 1;
FIG. 3 is a schematic view of a prior art ceramic bushing: (a) perspective view, (b) side view, (c) front view;
fig. 4 is a schematic structural diagram of the ceramic sleeve according to example 2: before (a) combination and after (b) combination;
fig. 5 is a schematic diagram of the dimensional parameters of the male pipe in example 2: (a) a side view, (b) a front view;
fig. 6 is a schematic diagram of dimensional parameters of the parent tube in example 2: (a) a side view, (b) a front view;
FIG. 7 is a schematic view of another combined ceramic bushing according to embodiment 3;
FIG. 8 (a) is a schematic view of the ceramic sleeve of example 5 after assembly; FIG. 8 (b) is a schematic view of the ceramic sleeve of example 6 after assembly;
fig. 9 is a schematic diagram of a ceramic sleeve assembly 1: before (a) combination and after (b) combination;
FIG. 10 is a schematic diagram of a ceramic sleeve assembly 2;
FIG. 11 (a) is a schematic view showing the use state of embodiment 2; FIG. 11 (b) is a schematic view of the embodiment of FIG. 9 in use; fig. 11 (c) is a schematic view of the usage state of embodiment 3.
Detailed Description
Referring to fig. 1 and 2, embodiment 1 discloses a graphite boat for a tube-type PECVD process, which mainly comprises a graphite boat sheet 1 (for short, boat sheet 1), a ceramic sleeve 2, a nut 3, a clamping point 4, a ceramic rod 5, an electrode hole 6 and a graphite block 7, wherein: the boat piece 1 comprises a plurality of pieces which are arranged in parallel at equal intervals, and the boat piece 1 is provided with silicon wafer placement areas 8 which are uniformly arranged and clamping points 4 for fixing silicon wafers; the ceramic rod 5 comprises a plurality of ceramic rods penetrating through the boat piece 1 and is used for supporting the boat piece 1 and fastening the ceramic rods through nuts 3 at two ends; the ceramic sleeve 2 is sleeved on the ceramic rod 3 and is arranged between the adjacent boat pieces 1, and is used for supporting and fixing the boat pieces 1, keeping the same distance between the adjacent boat pieces 1 and insulating the adjacent boat pieces 1 to form an electric field. The graphite blocks 7 comprise two groups symmetrically arranged at two ends of the boat piece 1 and are used for conducting the boat pieces 1 with the same electrical property, which are arranged at intervals, each graphite block 7 is provided with an electrode hole 6, and the graphite blocks 7 are respectively connected with positive and negative electrodes, so that an electric field is formed between the adjacent boat pieces 1, and plasma is excited.
Fig. 3 shows a ceramic sleeve structure commonly used in the conventional tubular PECVD, wherein the ceramic sleeve is a hollow cylinder structure made of ceramic materials. After analysis and investigation, we found that films of different characteristics were deposited on the silicon wafer surface and on other material surfaces in the furnace tube, such as ceramic sleeves. After the thin film is deposited on the ceramic sleeve, the insulation and dielectric strength between adjacent boat pieces may be changed by the deposited thin film.
In the coating process, a continuous film is usually deposited on the surface of the ceramic sleeve, and when films with certain conductivity or higher dielectric constant such as amorphous silicon film and doped amorphous silicon film are deposited, the continuous film can weaken or even conduct the electric field between adjacent boat sheets, so that the coating effect is poor. After amorphous silicon and doped amorphous silicon films are deposited, as the films have certain conductivity and relatively high dielectric constant, adjacent boat sheets are communicated to form a conductive medium layer in the process after the films with certain continuous thickness are deposited on the ceramic sleeve, and the electric field between the adjacent boat sheets is weakened, so that uneven coating is caused, the coating speed is reduced, even the situation that coating cannot be continuously carried out is caused, and meanwhile, the situation that only thinner films can be deposited in one process can be caused, and the process requirements of thick films and the like cannot be met. Therefore, the invention improves the existing structure, so that the film is deposited on the ceramic sleeve and the graphite boat sheet to form a structure which cannot be communicated, and a plurality of specific embodiments and corresponding drawings are given below for illustration.
As shown in fig. 4, embodiment 2 discloses a combined ceramic sleeve, which adopts a combined structure and mainly comprises two parts of a male pipe 1 and a female pipe 2. The male pipe 1 is a hollow cylinder structure, basically the same as the existing ceramic sleeve structure, wherein: the outer diameter of the male pipe 1 is D1, the inner diameter is D, and the inner diameter is matched with the outer diameter of the sleeved ceramic rod; the wall thickness of the male pipe 1 is D1, d1=1/2 (D1-D); the length of the male pipe 1 is L1. The main pipe 2 is also of a hollow cylinder structure in appearance, and comprises a front section 21 and a rear section 22, wherein the outer diameters of the front section 21 and the rear section 22 are equal, and D2 is adopted; the inner diameter of the rear section 22 is equal to that of the male pipe 1, D is the inner diameter of the front section, D3 is the inner diameter of the front section, D1 is less than D3 and less than D2; the wall thickness of the rear section 22 is D2, d2=1/2 (D2-D); the wall thickness of the front section 21 is D3, d3=1/2 (D2-D3); the length of the main pipe 2 is L2, wherein the length of the front section 21 is L21, and the length of the rear section 22 is L22.
When the male pipe 1 and the female pipe 2 are combined, the male pipe 1 and the female pipe 2 are sleeved on the ceramic rod, and the male pipe 1 is pushed into the front section 21 of the female pipe 2 (or the female pipe 2 is pushed to the male pipe 1) until the male pipe 1 is contacted with the end face of the rear section 22 of the female pipe 2. Thus, the male tube 1 and the female tube 2 constitute a combined ceramic sleeve for spacing adjacent boat pieces, the combined effect being as shown in fig. 4 (b). After combination, a circle of groove 23 is formed before the male pipe 1 stretches into the outer wall of the part of the female pipe 2 and the outer wall of the front section of the female pipe 2, and the section of the groove 23 is rectangular. The depth h of the groove 23 is the length L21 of the front section 21, i.e. h=l21, and the width w=d2-d 3-d1.
In the coating process, in order to make the film deposited on the ceramic sleeve discontinuous in the direction of the adjacent boat pieces, a part for shielding the deposition can be arranged on the ceramic sleeve so as to avoid forming a continuous film between the adjacent boat pieces. In the present invention, the front section 21 of the main pipe can be used for film deposition at the wall of the shielding groove 23, so the front section 21 is also called a shielding wall 24. When the tube PECVD film is coated, the deposition amount of the film to the bottom of the groove 23 is smaller and smaller due to the effect of the shielding wall 24 after the plasma enters the groove 23, and the thickness of the film deposited on the interface between the front section 21 and the rear section 22 and the wall of the groove near the interface is almost zero in one process. That is, in embodiment 2, the shielding of the deposition is achieved by the shielding wall 24, the plasma cannot completely cover the entire wall of the groove 23 within the desired number of times (i.e., the number of times of coating), so that the film deposited on the wall of the groove 23 is discontinuous along the length direction of the sleeve, and further, the film deposited between the adjacent boat sheets is discontinuous, thereby reducing or eliminating the influence of the film deposited on the boat sheets due to the surface of the sleeve on the electric field between the boat sheets.
On the premise that the manufacturing process of the ceramic sleeve allows and the strength of the ceramic sleeve itself is satisfied, the deeper the depth h of the groove 23 is, the better the narrower the width w is, the better the shorter the exposed length of the male groove 1 after being pushed into the female groove 2 is, i.e. the smaller the L1-L21 is, the better the specific parameters can be designed and adjusted according to the process requirements, for example, h >1/2L1, h/w >10, so that after the plasma enters the groove 23, the bottom of the groove is difficult to reach, and correspondingly, the bottom of the groove has little film deposition in the expected use times, thereby avoiding the formation of continuous films between adjacent boat pieces.
Taking example 2 as an example, fig. 5 and 6 show a specific reference for designing the dimension parameters of the ceramic sleeve, and the data in the drawings can be known: l1=8mm, l2=9mm, d=8.2 mm, d1=10.2 mm, d2=12mm, d3=11 mm, l22=3mm, l21=h=6mm, d1=1 mm, d2=1.9 mm, d3=0.5 mm, w=0.4 mm. The dimensional tolerance range of mechanical manufacture is +/-0.05 mm; the service temperature of the ceramic sleeve is less than or equal to 600 ℃.
As shown in fig. 7, embodiment 3 discloses another combined ceramic sleeve structure, which is different from embodiment 2 mainly in the structure of the front section 21 of the main pipe, so that the sectional pattern of the groove 23 formed by combining the main pipe 1 and the main pipe 2 is also different. In embodiment 3, the main pipe front section 21 has two inner diameter sizes, and the groove 23 has two widths, that is, w1 and w2 shown in the drawing, and w1 is smaller than w2, whereby a circle of steps 25 is formed on the wall of the groove 23 (the inner wall of the main pipe front section 21). With this design, after the plasma enters the groove 23, it is difficult for the plasma to deposit and form a thin film at the step 25 due to the direction of the movement of the step 25 away from the plasma, and the continuous use time is relatively longer, the number of continuous use times is larger, and the cleaning frequency is lower, compared with embodiment 2.
Another embodiment 4 similar to that of fig. 7 differs only in that w1 is greater than w2. This structure makes the groove width narrower near the bottom of the groove 23, reduces the probability of plasma entering the bottom of the groove 23, can also achieve the purpose of prolonging the service time, and can also increase the overall strength of the sleeve relative to embodiment 3.
As shown in fig. 8, two other combined ceramic sleeve structures are provided, and the difference from embodiment 2 is that the two combined ceramic sleeve structures are different from each other in that the front section 21 of the main pipe is different in structure, and the inner wall of the front section 21 is slope-shaped, that is, the front section 21 has a reducing inner cavity, so that the sectional patterns of the grooves 23 formed by combining the male pipe 1 and the main pipe 2 are also different. In embodiment 5 corresponding to fig. 8 (a), the minimum inner diameter of the front section 21 is equal to the outer diameter of the male pipe 1, and the cross section of the groove 23 formed after the male pipe 1 extends into the female pipe 2 is triangular, and the inner cavity of the front section 21 has a horn-like structure, which is advantageous as described in embodiment 4. In the embodiment 6 corresponding to fig. 8 (b), the minimum inner diameter of the front section 21 is slightly larger than the outer diameter of the male pipe 1, and the cross section of the groove 23 formed after the male pipe 1 extends into the female pipe 2 is a right trapezoid, and the inner cavity of the front section 21 resembles a reverse horn structure, which has the advantages described in embodiment 3.
Furthermore, in order to meet the requirements of different application scenes in industrialization, two types of standard components made of a male pipe and a female pipe can be designed, and each type of standard component can be designed into various sizes so as to be matched with graphite boats of different types. When in use, the standard components can be combined differently according to the change of the distance between adjacent boat sheets in the graphite boat. As shown in fig. 9 (a), the male pipe and the female pipe shown in embodiment 2 are taken as an example, and one male pipe and two female pipes may be used in combination, and the combination effect is as shown in fig. 8 (b). Two male pipes and two female pipes can be combined to form the effect shown in fig. 10. However, because the distance between adjacent boat sheets of the graphite boat commonly used at present is smaller, the requirement can be met by adopting a male-female combination, and the cost is relatively smaller.
As shown in fig. 11, in the specific application, when the tube type PECVD film is coated, the plasma is deposited on the surface of the ceramic sleeve and enters the groove 23, and due to the effect of the shielding wall 24, the plasma is difficult to reach the bottom of the groove 23 and the step 25, so that the film deposited on the ceramic sleeve is discontinuous in the direction of the adjacent boat, and the electric field between the adjacent boat caused by the deposited film is prevented from being influenced.
In summary, compared with the traditional graphite boat sleeve, the combined graphite boat sleeve disclosed by the invention can better improve the coating quality, prolong the continuous service time of a graphite boat, reduce the cleaning frequency and reduce the production cost. Moreover, the mode of combining two, three, four parts and the like to form the ceramic sleeve is adopted, so that on one hand, the special-shaped sleeve can be machined more easily, and on the other hand, the special-shaped sleeve can be immersed in liquid medicine and dried after the cleaning is finished when the special-shaped sleeve is cleaned conveniently after the service life is reached.
Finally, it should be noted that while the above describes embodiments of the invention in terms of drawings, the present invention is not limited to the above-described embodiments and fields of application, which are illustrative, instructive, and not limiting. Those skilled in the art, having the benefit of this disclosure, may effect numerous forms of the invention without departing from the scope of the invention as claimed.
Claims (10)
1. The combined graphite boat sleeve is characterized by comprising a male pipe and a female pipe; the female pipe is configured to include a front section and a rear section, the outer diameters of the front section and the rear section are equal and larger than the outer diameter of the male pipe, the inner diameter of the rear section is equal to the inner diameter of the male pipe, and the front section has at least one inner diameter and is larger than the inner diameter of the rear section; when the male pipe and the female pipe are used in a combined mode, the male pipe extends into the female pipe from the front section part and is in contact with the rear section of the female pipe, so that at least one circle of groove is formed between the outer wall of the male pipe extending into the female pipe and the inner wall of the front section of the female pipe, and the front section of the female pipe forms a shielding wall for shielding film deposition at the groove wall of the groove.
2. The composite graphite boat sleeve of claim 1 wherein said front section has an inner diameter size; the cross section of the groove is rectangular.
3. The composite graphite boat sleeve of claim 1 wherein said front section has two inner diameters such that a ring of steps is provided on the walls of said groove.
4. The composite graphite boat sleeve of claim 3 wherein the inner diameter distal to the rear section is smaller than the inner diameter proximal to the rear section.
5. The composite graphite boat casing of claim 1, wherein the front section is a reducing interior cavity; when the section of the groove is a right triangle, the minimum inner diameter of the front section is not smaller than the outer diameter of the male pipe; when the cross section of the groove is right trapezoid, the minimum inner diameter of the front section is larger than the outer diameter of the male pipe.
6. The combined graphite boat casing of claim 1, wherein the ratio of the depth of the groove to the width at the widest point is not less than 10, and the depth of the groove is greater than the length of the male pipe extending out of the female pipe portion; the male pipe and the female pipe are made of ceramic materials.
7. The composite graphite boat casing of claim 1, comprising a male tube and a female tube; when the male pipe and the female pipe are combined, a circle of groove is formed between the outer wall of the male pipe extending into the female pipe and the inner wall of the front section of the female pipe.
8. The combined graphite boat sleeve of claim 1 comprising two male tubes and two female tubes arranged, when used in combination, to: the male pipe extends into the female pipe from the front section part and is contacted with the rear section of the female pipe, the two female pipes are arranged back to back, and the end surfaces of the rear sections are mutually attached; when the male pipe and the female pipe are used in combination, two circles of grooves are formed between the outer wall of the male pipe extending into the female pipe and the inner wall of the front section of the female pipe.
9. The combined graphite boat sleeve of claim 1 comprising a male tube and two female tubes arranged, when used in combination, to: the male pipe extends into the female pipe from the front section part and is in contact with the rear section of the female pipe, and the two female pipes are oppositely arranged with a gap left between the two female pipes; when the male pipe and the female pipe are used in combination, two circles of grooves are formed between the outer wall of the male pipe extending into the female pipe and the inner wall of the front section of the female pipe.
10. A graphite boat comprising a graphite boat sheet, a support rod, and a combined graphite boat casing as claimed in any one of claims 1 to 9; the support rod is used for supporting the graphite boat piece; the graphite boat sleeve is sleeved on the supporting rod and is arranged between the adjacent graphite boat sheets and used for supporting and fixing the graphite boat sheets, so that the same distance between the adjacent graphite boat sheets is kept.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911310170.9A CN111020531B (en) | 2019-12-18 | 2019-12-18 | Combined graphite boat sleeve and graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911310170.9A CN111020531B (en) | 2019-12-18 | 2019-12-18 | Combined graphite boat sleeve and graphite boat |
Publications (2)
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| WO2018209729A1 (en) * | 2017-05-18 | 2018-11-22 | 广东爱康太阳能科技有限公司 | Tubular perc double-sided photovoltaic cell and method for fabrication thereof and dedicated device |
| CN109183001A (en) * | 2018-11-27 | 2019-01-11 | 中山德华芯片技术有限公司 | A kind of graphite plate applied to epitaxial growth of semiconductor material growth |
| CN209210920U (en) * | 2018-11-07 | 2019-08-06 | 浙江艾能聚光伏科技股份有限公司 | A kind of structure improved graphite boat |
| CN211112209U (en) * | 2019-12-18 | 2020-07-28 | 常州时创能源股份有限公司 | Combined graphite boat sleeve and graphite boat |
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| DE102015014903A1 (en) * | 2015-11-18 | 2017-05-18 | Centrotherm Photovoltaics Ag | Wafer boat and plasma treatment device for wafers |
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| JPS62278185A (en) * | 1986-05-26 | 1987-12-03 | Sumitomo Electric Ind Ltd | Graphite boat for growth of compound semiconductor crystal |
| CN203491232U (en) * | 2013-10-16 | 2014-03-19 | 宁波富星太阳能有限公司 | Graphit boat |
| CN204257607U (en) * | 2014-10-09 | 2015-04-08 | 上海弘竣实业有限公司 | A kind of automatic graphite boat |
| CN104357808A (en) * | 2014-11-25 | 2015-02-18 | 浙江东达光伏有限公司 | Improved graphite boat |
| CN204348695U (en) * | 2015-02-09 | 2015-05-20 | 浙江晶科能源有限公司 | A kind of graphite boat of unequal-interval boat sheet |
| CN206266704U (en) * | 2016-08-29 | 2017-06-20 | 苏州旗正保精密机械有限公司 | A kind of high energy efficiency graphite boat |
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| WO2018209729A1 (en) * | 2017-05-18 | 2018-11-22 | 广东爱康太阳能科技有限公司 | Tubular perc double-sided photovoltaic cell and method for fabrication thereof and dedicated device |
| CN209210920U (en) * | 2018-11-07 | 2019-08-06 | 浙江艾能聚光伏科技股份有限公司 | A kind of structure improved graphite boat |
| CN109183001A (en) * | 2018-11-27 | 2019-01-11 | 中山德华芯片技术有限公司 | A kind of graphite plate applied to epitaxial growth of semiconductor material growth |
| CN211112209U (en) * | 2019-12-18 | 2020-07-28 | 常州时创能源股份有限公司 | Combined graphite boat sleeve and graphite boat |
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| CN111020531A (en) | 2020-04-17 |
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