CN111020531A - Combined graphite boat sleeve and graphite boat - Google Patents
Combined graphite boat sleeve and graphite boat Download PDFInfo
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- CN111020531A CN111020531A CN201911310170.9A CN201911310170A CN111020531A CN 111020531 A CN111020531 A CN 111020531A CN 201911310170 A CN201911310170 A CN 201911310170A CN 111020531 A CN111020531 A CN 111020531A
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 66
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 66
- 239000010439 graphite Substances 0.000 title claims abstract description 66
- 230000008021 deposition Effects 0.000 claims abstract description 9
- 210000002421 cell wall Anatomy 0.000 claims abstract description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 abstract description 17
- 238000004140 cleaning Methods 0.000 abstract description 11
- 239000011248 coating agent Substances 0.000 abstract description 11
- 230000005684 electric field Effects 0.000 abstract description 11
- 239000000919 ceramic Substances 0.000 description 43
- 239000010408 film Substances 0.000 description 32
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 239000010409 thin film Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 description 7
- 238000000151 deposition Methods 0.000 description 7
- 210000004027 cell Anatomy 0.000 description 6
- 239000007888 film coating Substances 0.000 description 6
- 238000009501 film coating Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000002301 combined effect Effects 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Manufacturing Of Tubular Articles Or Embedded Moulded Articles (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a combined graphite boat sleeve, which comprises a male pipe and a female pipe; the female tube is configured to include a front section and a rear section, the front and rear sections having an outer diameter equal to and greater than the outer diameter of the male tube, the rear section having an inner diameter equal to the inner diameter of the male tube, the front section having at least one inner diameter size and each being greater than the rear section inner diameter; public pipe and female pipe are when being used by the combination, public pipe stretches into and contacts with female pipe back end from female pipe anterior segment part to form at least round slot between the outer wall that public pipe stretches into female pipe part and the inner wall of female pipe anterior segment, female pipe anterior segment forms the wall that shelters from that is used for sheltering from the film deposition of slot cell wall department. The invention also discloses a graphite boat adopting the combined graphite boat sleeve. The invention can reduce the influence of the film deposited on the graphite boat sleeve on the electric field between the boat sheets as much as possible, stabilize the coating process, improve the coating quality and reduce the cleaning frequency of the graphite boat.
Description
Technical Field
The invention belongs to the technical field of auxiliary accessories of solar cell manufacturing equipment, and particularly relates to a graphite boat sleeve for tubular PECVD (plasma enhanced chemical vapor deposition).
Background
Pecvd (plasma Enhanced Chemical Vapor deposition), which is a plasma-Enhanced Chemical Vapor deposition method, ionizes a gas containing film component atoms by means of microwaves, radio frequencies, or the like, locally forms a plasma, has strong Chemical activity, is easily reacted, deposits a desired film on a substrate surface, and has good film formation quality. Currently, in the industrial crystalline silicon cell manufacturing process, films with different characteristics, such as common silicon nitride films, silicon oxynitride films, and the like, are deposited on the surface of a substrate in a PECVD manner. In an industrial tubular PECVD coating process, a ceramic sleeve with good insulation and high dielectric strength is usually sleeved on a ceramic rod of a graphite boat, is arranged between adjacent boat sheets and is in close contact with the boat sheets. The adjacent boat sheets are physically supported and electrically isolated through ceramic sleeves, and an electric field is formed.
With the continuous development of cell processes and technologies, PECVD is applied to the preparation of other high-efficiency solar cells, such as tunnel oxide passivation contact cells (Topcon), amorphous silicon heterojunction cells (HIT), and in this case, PECVD needs to be applied to the deposition process of other thin film materials, including the deposition of amorphous silicon thin films, doped amorphous silicon thin films, and the like. With the diversification of the application scenes of the PECVD coating process, the situation that the coating is uneven, the coating rate is reduced, and even the coating cannot be continued begins to appear, so that the coating quality is seriously influenced, and only a thin film can be deposited by one-time process, so that the process requirements of a thick film and the like cannot be met. In addition, the cleaning frequency of the graphite boat is correspondingly increased, so that the graphite boat needs to be offline cleaned after being used once or for a plurality of times, the utilization rate of the graphite boat is low, and the use cost is increased. Therefore, the tubular PECVD is not widely applied to the industrial preparation of the high-efficiency battery.
Disclosure of Invention
In order to solve the problems, the invention provides a combined graphite boat sleeve for spacing graphite boat pieces, and through the structural design of a groove formed by combining a male pipe and a female pipe and a shielding wall for shielding the deposit at the groove wall of the groove, the influence of a film deposited on the graphite boat sleeve on an electric field between the boat pieces is reduced as much as possible, so that the film coating process is stabilized, the film coating quality is improved, and the graphite boat cleaning frequency is reduced.
The specific technical scheme is as follows:
the first scheme is as follows: a combined graphite boat sleeve comprises a male pipe and a female pipe; the female tube is configured to include a front section and a rear section, the front and rear sections having an outer diameter equal to and greater than the outer diameter of the male tube, the rear section having an inner diameter equal to the inner diameter of the male tube, the front section having at least one inner diameter size and each being greater than the rear section inner diameter; public pipe and female pipe are when being used by the combination, public pipe stretches into and contacts with female pipe back end from female pipe anterior segment part to form at least round slot between the outer wall that public pipe stretches into female pipe part and the inner wall of female pipe anterior segment, female pipe anterior segment forms the wall that shelters from that is used for sheltering from the film deposition of slot cell wall department.
Preferably, the front section has an inner diameter; the cross section of the groove is rectangular.
Preferably, the front section has two inner diameter sizes, so that a ring of step structures are arranged on the groove wall of the groove.
Preferably, the inner diameter distal to the posterior section is smaller than the inner diameter proximal to the posterior section.
As a preferred scheme, the front section is a reducing inner cavity; when the cross section of the groove is a right triangle, the minimum inner diameter of the front section is not less than the outer diameter of the male pipe; when the cross section of the groove is in a right trapezoid shape, the minimum inner diameter of the front section is larger than the outer diameter of the male pipe.
Preferably, the ratio of the depth of the groove to the width of the widest part is not less than 10, and the depth of the groove is greater than the length of the part of the male pipe extending out of the female pipe; the male pipe and the female pipe are both made of ceramic materials.
As a preferred scheme, the combined graphite boat sleeve specifically comprises a male pipe and a female pipe; when the male pipe and the female pipe are combined for use, a circle of groove is formed between the outer wall of the part, extending into the female pipe, of the male pipe and the inner wall of the front section of the female pipe.
As a preferred scheme, the combined graphite boat casing specifically comprises two male pipes and two female pipes, and when being used in combination, the combined graphite boat casing is arranged as follows: the male pipe extends into the front section of the female pipe and is in contact with the rear section of the female pipe, the two female pipes are arranged back to back, and the end surfaces of the rear sections are mutually attached; when the male pipe and the female pipe are used in a combined mode, two circles of grooves are formed between the outer wall of the part, extending into the female pipe, of the male pipe and the inner wall of the front section of the female pipe.
As a preferred scheme, the combined graphite boat sleeve specifically comprises a male pipe and two female pipes, and when being used in combination, the combined graphite boat sleeve is arranged as follows: the male pipe extends into the front section of the female pipe and is in contact with the rear section of the female pipe, and the two female pipes are oppositely arranged with a gap left between the two female pipes; when the male pipe and the female pipe are used in a combined mode, two circles of grooves are formed between the outer wall of the part, extending into the female pipe, of the male pipe and the inner wall of the front section of the female pipe.
Scheme II: a graphite boat comprises a graphite boat sheet, a support rod and a combined graphite boat sleeve pipe in any one of the first scheme and the preferred scheme; the support rod is used for supporting the graphite boat piece; the graphite boat sleeve is sleeved on the supporting rod and arranged between the adjacent graphite boat pieces and used for supporting and fixing the graphite boat pieces, so that the adjacent graphite boat pieces keep the same distance.
The invention has the following beneficial effects:
(1) through the structural design of the male tube and the female tube, after the male tube and the female tube are combined for use, a special groove structure and a shielding wall structure for shielding the deposition at the groove wall of the groove are formed, so that the formation of a continuous film between the boat sheets after film coating is avoided as much as possible, and the influence of the film deposited on the graphite boat sleeve on an electric field between the boat sheets is reduced or eliminated.
(2) Because the film deposited on the graphite boat sleeve is discontinuous in the direction of the adjacent boat pieces, a through plane is not formed between the two ends of the ceramic sleeve connected with the adjacent boat pieces in contact, so that the influence of the deposited film on the electric field between the boat pieces is reduced or eliminated, the coating process is further stabilized, the coating quality (including thickness, uniformity and the like) is improved, the cleaning frequency of the graphite boat is greatly reduced, and the process production cost is also reduced.
(3) The male pipe and the female pipe are separately designed and combined for use, so that the ceramic bushing cleaning device is easy to manufacture on one hand, reduces the manufacturing cost of the ceramic bushing, facilitates cleaning of the ceramic bushing on the other hand, can be in better contact with cleaning liquid medicine in the cleaning process, and is more thorough to clean every time.
(4) The male pipe and the female pipe can be made into standard parts with various sizes according to requirements, so that flexible combination of different application scenes can be realized.
Drawings
FIG. 1 is a schematic structural view of a tubular PECVD graphite boat according to example 1;
FIG. 2 is an enlarged view of a portion of FIG. 1;
fig. 3 is a schematic diagram of a prior art ceramic bushing structure: (a) perspective view, (b) side view, (c) front view;
fig. 4 is a schematic structural view of the ceramic bushing according to embodiment 2: (a) before combination, (b) after combination;
FIG. 5 is a schematic drawing showing the dimensional parameters of the male pipe in example 2: (a) a side view, (b) a front view;
FIG. 6 is a schematic diagram of the dimensional parameters of the mother tube in example 2: (a) a side view, (b) a front view;
FIG. 7 is a schematic structural view of another composite ceramic bushing according to embodiment 3;
FIG. 8(a) is a schematic view of the assembled ceramic bushing of example 5; FIG. 8(b) is a schematic view of the assembled ceramic bushing of example 6;
fig. 9 is a schematic combination diagram of the ceramic bushing 1: (a) before combination, (b) after combination;
FIG. 10 is an assembled view of the ceramic bushing, schematically illustrated in FIG. 2;
FIG. 11(a) is a schematic view showing a state of use in example 2; FIG. 11(b) is a schematic view of the embodiment of FIG. 9 in use; FIG. 11(c) is a schematic view showing a state of use in example 3.
Detailed Description
Referring to fig. 1 and fig. 2, embodiment 1 discloses a more common graphite boat for a tubular PECVD process, which mainly includes a graphite boat piece 1 (boat piece 1 for short), a ceramic sleeve 2, a nut 3, a clamping point 4, a ceramic rod 5, an electrode hole 6, and a graphite block 7, wherein: the boat piece 1 comprises a plurality of boat pieces which are arranged in parallel at equal intervals, and the boat piece 1 is provided with silicon wafer placing areas 8 which are uniformly distributed and clamping points 4 for fixing the silicon wafers; the ceramic rod 5 comprises a plurality of boat pieces 1 which are arranged in a penetrating way, is used for supporting the boat pieces 1 and is fastened through nuts 3 at two ends; the ceramic sleeve 2 is sleeved on the ceramic rod 3 and arranged between the adjacent boat sheets 1, and is used for supporting and fixing the boat sheets 1 to keep the same distance between the adjacent boat sheets 1 on one hand, and keeping the insulation between the adjacent boat sheets 1 on the other hand, so as to form an electric field. The graphite blocks 7 comprise two groups which are symmetrically arranged at two ends of the boat sheet 1 and are used for conducting the boat sheets 1 which are arranged at intervals and have the same electrical property, each graphite block 7 is provided with an electrode hole 6, and the graphite blocks 7 are respectively connected with a positive electrode and a negative electrode, so that an electric field is formed between the adjacent boat sheets 1, and plasma is excited.
Fig. 3 shows a structure of a ceramic sleeve commonly used in the conventional tubular PECVD, wherein the ceramic sleeve is a hollow cylinder structure made of ceramic. After analysis and investigation, we find that films with different characteristics are deposited on the surface of the silicon wafer and also on the surface of other materials in the furnace tube, such as a ceramic sleeve. After the ceramic sleeve is deposited with the thin film, the insulation and dielectric strength between adjacent boat sheets may be changed by the deposited thin film.
In the coating process, a continuous film is usually deposited on the surface of the ceramic sleeve, and when films with certain conductivity or higher dielectric constant, such as amorphous silicon films and doped amorphous silicon films, are deposited, the electric field between adjacent boat sheets is weakened or even conducted by the continuous film, so that the coating effect is poor. After the amorphous silicon and doped amorphous silicon thin films are deposited, because the thin films have certain conductivity and relatively high dielectric constant, after the ceramic sleeve is deposited with the thin films with certain continuous thickness, the adjacent boat sheets are communicated to form a conductive dielectric layer in the process, and the electric field between the adjacent boat sheets is weakened, so that the conditions of uneven film coating, reduced film coating rate and even incapability of continuing film coating are caused, and meanwhile, the condition that only a thin film can be deposited in one process can occur, and the process requirements of thick films and the like cannot be met. To this end, the present invention improves the conventional structure such that the thin film deposition on the ceramic sleeve and the graphite boat cannot form a connected structure, and several embodiments and corresponding drawings are given below for explanation.
As shown in fig. 4, embodiment 2 discloses a combined ceramic bushing, which is a combined structure and mainly comprises a male pipe 1 and a female pipe 2. Public pipe 1 is the hollow circular cylinder structure, and is the same with current ceramic bushing structure is basic, wherein: the outer diameter of the male pipe 1 is D1, the inner diameter is D, and the inner diameter of the male pipe is matched with the outer diameter of the sleeved ceramic rod; the wall thickness of the male pipe 1 is D1, D1 is 1/2 (D1-D); the male pipe 1 has a length L1. The mother pipe 2 is also of a hollow cylindrical structure in appearance, and comprises a front section 21 and a rear section 22, wherein the front section 21 and the rear section 22 have the same outer diameter and are both D2; the inner diameter of the rear section 22 is equal to that of the male pipe 1 and is D, the inner diameter of the front section is D3, D1 is more than D3 and more than D2; the wall thickness of the rear section 22 is D2, D2 ═ 1/2 (D2-D); the tube wall thickness of the front segment 21 is D3, D3 ═ 1/2 (D2-D3); the length of the mother tube 2 is L2, wherein the length of the front section 21 is L21, and the length of the rear section 22 is L22.
When public pipe 1 and female 2 combination uses, public pipe 1 and female 2 all overlap locate the ceramic rod on, push public pipe 1 into female 2 (or push female 2 towards public pipe 1) anterior segment 21, until public pipe 1 and female 2 back end 22's of pipe terminal surface contact. Thus, the male tube 1 and the female tube 2 constitute a combined ceramic bushing for spacing adjacent boat pieces, and the combined effect is shown in fig. 4 (b). After combination, a circle of groove 23 is formed before the outer wall of the part, extending into the female pipe 2, of the male pipe 1 and the outer wall of the front section of the female pipe 2, and the cross section of the groove 23 is rectangular. The depth h of the groove 23 is the length L21 of the front section 21, i.e., h is L21 and the width w is d2-d3-d 1.
In the coating process, in order to make the film deposited on the ceramic sleeve discontinuous in the direction of the adjacent boat sheets, a part for shielding deposition can be arranged on the ceramic sleeve to avoid forming a continuous film between the adjacent boat sheets. In the present invention, the front section 21 of the mother tube can be used to shield the thin film deposition on the wall of the trench 23, and therefore the front section 21 is also referred to as the shielding wall 24. When the tubular PECVD coating is carried out, after plasma enters the groove 23, the deposition amount of a film towards the bottom of the groove 23 is less and less due to the action of the shielding wall 24, and the thickness of the film deposited on the interface of the front section 21 and the rear section 22 and the wall of the groove nearby in one process is almost zero. That is, in embodiment 2, the shielding wall 24 shields the deposition, and the plasma cannot completely cover the wall of the whole groove 23 within the expected number of times of use (i.e. the number of times of coating), so that the film deposited on the wall of the groove 23 is discontinuous along the length direction of the sleeve, and further the film deposited between adjacent boat pieces is discontinuous, thereby reducing or eliminating the influence of the film deposited on the surface of the sleeve on the electric field between the boat pieces.
On the premise that the manufacturing process of the ceramic bushing allows and the strength of the ceramic bushing is met, the depth h of the groove 23 is required to be as deep as possible, the width w is as narrow as possible, the length of the exposed part of the male groove 1 pushed into the female groove 2 is as short as possible, namely, the L1-L21 is as small as possible, and specific parameters can be designed and adjusted according to process requirements, for example, h >1/2L1 and h/w >10, so that the bottom of the groove is difficult to reach after plasma enters the groove 23, and accordingly, the bottom of the groove is hardly subjected to film deposition within expected use times, and continuous films are prevented from being formed between adjacent boat sheets.
Taking example 2 as an example, fig. 5 and 6 show a specific design reference for the ceramic bushing size parameter, and the data in the figure shows that: l1-8 mm, L2-9 mm, D-8.2 mm, D1-10.2 mm, D2-12 mm, D3-11 mm, L22-3 mm, L21-6 mm, D1-1 mm, D2-1.9 mm, D3-0.5 mm, and w-0.4 mm. The size tolerance range of mechanical manufacturing is +/-0.05 mm; the service temperature of the ceramic bushing is less than or equal to 600 ℃.
As shown in fig. 7, embodiment 3 discloses another combined ceramic bushing structure, which is different from embodiment 2 mainly in the structure of the front section 21 of the female pipe, so that the sectional patterns of the grooves 23 formed by combining the male pipe 1 and the female pipe 2 are also different. In embodiment 3, the front section 21 of the mother tube has two inner diameter sizes, and accordingly, the groove 23 has two widths, w1 and w2, and w1 is smaller than w2, thereby forming a ring of steps 25 on the groove wall (inner wall of the front section 21 of the mother tube) of the groove 23. By this design, after the plasma enters the trench 23, since the step 25 is opposite to the moving direction of the plasma, the plasma is difficult to deposit and form a film at the step 25, and compared with embodiment 2, the plasma can be continuously used for a relatively longer time, the number of times of continuous use is more, and the cleaning frequency is lower.
Another embodiment 4, similar to that of figure 7, differs only in that w1 is greater than w 2. This structure makes the groove width near the bottom of the groove 23 narrower, which reduces the probability of plasma entering the bottom of the groove 23, also achieves the purpose of prolonging the service time, and also increases the overall strength of the bushing compared to embodiment 3.
As shown in fig. 8, two other combined ceramic sleeve structures are respectively provided, which are different from embodiment 2 in that the structure of the front section 21 of the female pipe is different, and the inner wall of the front section 21 is in a slope shape, that is, the front section 21 has a variable diameter inner cavity, so that the cross-sectional patterns of the groove 23 formed after the male pipe 1 and the female pipe 2 are combined are also different. In the embodiment 5 corresponding to fig. 8(a), the minimum inner diameter of the front section 21 is equal to the outer diameter of the male pipe 1, the cross section of the groove 23 formed after the male pipe 1 extends into the female pipe 2 is triangular, and the inner cavity of the front section 21 is similar to a trumpet-shaped structure, which is advantageous as described in embodiment 4. In the embodiment 6 corresponding to fig. 8(b), the minimum inner diameter of the front section 21 is slightly larger than the outer diameter of the male pipe 1, the cross section of the groove 23 formed after the male pipe 1 extends into the female pipe 2 is a right trapezoid, and the inner cavity of the front section 21 is similar to an inverted trumpet-shaped structure, which is advantageous as described in embodiment 3.
Furthermore, in order to meet the requirements of different application scenes in industrialization, the male pipe and the female pipe can be made into two types of standard parts, and each type of standard part can be designed into various sizes so as to be matched with graphite boats of different models. When in use, the standard parts can be combined differently according to the change of the distance between the adjacent boat sheets in the graphite boat. As shown in fig. 9(a), taking the male pipe and the female pipe shown in example 2 as an example, one male pipe and two female pipes can be used in combination, and the combined effect is shown in fig. 8 (b). Two male pipes and two female pipes can also be combined to form the effect shown in fig. 10. However, the distance between adjacent boat sheets of the graphite boat commonly used at present is small, so that the requirements can be met by adopting a male-female combination, and the cost is relatively small.
As shown in fig. 11, in a specific application, during the tubular PECVD coating, plasma is deposited on the surface of the ceramic sleeve and enters the groove 23, and due to the effect of the shielding wall 24, the plasma hardly reaches the bottom of the groove 23 and the step 25, so that the film deposited on the ceramic sleeve is discontinuous in the direction of the adjacent boat, and the electric field between the adjacent boat caused by the deposited film is prevented from being affected.
In conclusion, compared with the traditional graphite boat sleeve, the combined graphite boat sleeve disclosed by the invention can better improve the coating quality, prolong the continuous use time of the graphite boat, reduce the cleaning frequency and reduce the production cost. And the mode that two, three, four parts and the like are combined to form the ceramic sleeve can make the special-shaped sleeves be machined more easily, and can also facilitate the immersion of liquid medicine when the special-shaped sleeves are cleaned after the service life is reached and drying after the cleaning is finished.
Finally, it should be noted that while the above describes exemplifying embodiments of the invention with reference to the accompanying drawings, the invention is not limited to the embodiments and applications described above, which are intended to be illustrative and instructive only, and not limiting. Those skilled in the art, having the benefit of this disclosure, may effect numerous modifications thereto without departing from the scope of the invention as defined by the appended claims.
Claims (10)
1. A combined graphite boat sleeve is characterized by comprising a male pipe and a female pipe; the female tube is configured to include a front section and a rear section, the front and rear sections having an outer diameter equal to and greater than the outer diameter of the male tube, the rear section having an inner diameter equal to the inner diameter of the male tube, the front section having at least one inner diameter size and each being greater than the rear section inner diameter; public pipe and female pipe are when being used by the combination, public pipe stretches into and contacts with female pipe back end from female pipe anterior segment part to form at least round slot between the outer wall that public pipe stretches into female pipe part and the inner wall of female pipe anterior segment, female pipe anterior segment forms the wall that shelters from that is used for sheltering from the film deposition of slot cell wall department.
2. The modular graphite boat sleeve of claim 1, wherein said forward section has an inner diameter dimension; the cross section of the groove is rectangular.
3. The modular graphite boat sleeve of claim 1, wherein said forward section has two inner diameter sizes such that a ring of steps are formed on the walls of said groove.
4. The modular graphite boat sleeve of claim 3, wherein the inner diameter distal to the rear section is smaller than the inner diameter proximal to the rear section.
5. The assembled graphite boat sleeve of claim 1, wherein the front section is a reducing inner cavity; when the cross section of the groove is a right triangle, the minimum inner diameter of the front section is not less than the outer diameter of the male pipe; when the cross section of the groove is in a right trapezoid shape, the minimum inner diameter of the front section is larger than the outer diameter of the male pipe.
6. The modular graphite boat sleeve of claim 1, wherein the ratio of the depth of the groove to the width of the widest portion is not less than 10, and the depth of the groove is greater than the length of the male tube extending out of the female tube; the male pipe and the female pipe are both made of ceramic materials.
7. The modular graphite boat sleeve of claim 1, comprising a male tube and a female tube; when the male pipe and the female pipe are combined for use, a circle of groove is formed between the outer wall of the part, extending into the female pipe, of the male pipe and the inner wall of the front section of the female pipe.
8. The modular graphite boat sleeve of claim 1, comprising two male tubes and two female tubes, when used in combination, arranged to: the male pipe extends into the front section of the female pipe and is in contact with the rear section of the female pipe, the two female pipes are arranged back to back, and the end surfaces of the rear sections are mutually attached; when the male pipe and the female pipe are used in a combined mode, two circles of grooves are formed between the outer wall of the part, extending into the female pipe, of the male pipe and the inner wall of the front section of the female pipe.
9. The modular graphite boat sleeve of claim 1, comprising a male tube and two female tubes, arranged when used in combination to: the male pipe extends into the front section of the female pipe and is in contact with the rear section of the female pipe, and the two female pipes are oppositely arranged with a gap left between the two female pipes; when the male pipe and the female pipe are used in a combined mode, two circles of grooves are formed between the outer wall of the part, extending into the female pipe, of the male pipe and the inner wall of the front section of the female pipe.
10. A graphite boat comprising a graphite boat sheet, a support rod, and the composite graphite boat sleeve of any one of claims 1 to 9; the support rod is used for supporting the graphite boat piece; the graphite boat sleeve is sleeved on the supporting rod and arranged between the adjacent graphite boat pieces and used for supporting and fixing the graphite boat pieces, so that the adjacent graphite boat pieces keep the same distance.
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| CN201911310170.9A CN111020531B (en) | 2019-12-18 | 2019-12-18 | Combined graphite boat sleeve and graphite boat |
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| CN201911310170.9A CN111020531B (en) | 2019-12-18 | 2019-12-18 | Combined graphite boat sleeve and graphite boat |
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| CN111020531B CN111020531B (en) | 2024-03-22 |
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| CN111020531B (en) | 2024-03-22 |
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