CN204348695U - A kind of graphite boat of unequal-interval boat sheet - Google Patents
A kind of graphite boat of unequal-interval boat sheet Download PDFInfo
- Publication number
- CN204348695U CN204348695U CN201520088896.3U CN201520088896U CN204348695U CN 204348695 U CN204348695 U CN 204348695U CN 201520088896 U CN201520088896 U CN 201520088896U CN 204348695 U CN204348695 U CN 204348695U
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- China
- Prior art keywords
- graphite boat
- boat piece
- piece
- length
- ceramic jacket
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a kind of graphite boat of unequal-interval boat sheet, comprise some graphite boat piece, described graphite boat piece is provided with the groove of some loading silicon chips, be connected by ceramic bar between described graphite boat piece, described ceramic bar is provided with the ceramic jacket of different length between graphite boat piece, the ceramic jacket of described different length makes to form different spacing between graphite boat piece.The utility model, by the spacing between adjustment graphite boat piece, promotes solar cell plated film uniformity, and compatible with conventional solar cell production line, is suitable for large-scale production.
Description
Technical field
The utility model relates to a kind of graphite boat, is specifically related to a kind of graphite boat of unequal-interval boat sheet.
Background technology
At present, in the production process of solar cell, tubular type PECVD is usually adopted to carry out the plated film of solar cell.When carrying out plated film, carrier during cell piece plated film is generally graphite boat.When plated film, graphite boat piece enters radio-frequency power supply indirectly, and silicon chip is as a part for electrode, and the distance between graphite boat piece is all equidistant, so electric field strength is wherein consistent.But due to the impact of some uncertain factors such as reacting gas distribution, temperature, after plated film terminates, the thickness outside graphite boat is often thicker, have impact on the plated film uniformity of whole boat.
Summary of the invention
Technical problem to be solved in the utility model is to provide a kind of graphite boat of unequal-interval boat sheet, by the spacing between adjustment graphite boat piece, promotes solar cell plated film uniformity, and compatible with conventional solar cell production line, is suitable for large-scale production.
The technical scheme that the utility model technical solution problem adopts is: a kind of graphite boat of unequal-interval boat sheet, comprise some graphite boat piece, described graphite boat piece is provided with the groove of some loading silicon chips, be connected by ceramic bar between described graphite boat piece, it is characterized in that: the ceramic jacket described ceramic bar being provided with different length between graphite boat piece, the ceramic jacket of described different length makes to form different spacing between graphite boat piece.
Preferred as one, the ceramic jacket length on described graphite boat between graphite boat piece is in the outer part greater than the ceramic jacket length between graphite boat piece in the inner part successively.
Preferred as one, ceramic jacket length on described graphite boat between outermost graphite boat piece and graphite boat piece adjacent inside it is greater than the ceramic jacket length between the graphite boat piece of inner side and graphite boat piece adjacent outside it, and the ceramic jacket between all the other graphite boat piece, from outer to inner, ceramic jacket length is in the outer part more than or equal to ceramic jacket length in the inner part.
Preferred as one, described ceramic jacket length is 10 ~ 15mm.
Preferred as one, the quantity of described graphite boat piece is 11 ~ 21.
Preferred as one, the groove described graphite boat piece being loaded silicon chip is hollow out or non-hollow out, and described number of recesses is 4 ~ 7.
The beneficial effects of the utility model are: regulate spacing different between graphite boat piece by the ceramic jacket being provided with different length on ceramic bar between graphite boat piece, distance between orderly change graphite boat piece, promote solar cell plated film uniformity, and compatible with conventional solar cell production line, be suitable for large-scale production.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model embodiment 1.
Fig. 2 is that schematic diagram is looked on a left side for the utility model embodiment 1.
Below in conjunction with accompanying drawing, the utility model is described further.
Embodiment
Embodiment 1: as shown in accompanying drawing 1, Fig. 2, a kind of graphite boat of unequal-interval boat sheet, comprise ten a slice graphite boat piece 1, described graphite boat piece 1 is provided with the hollow out groove 2 that six are loaded silicon chip, be connected by ceramic bar 3 between each graphite boat piece 1, ceramic bar 3 is provided with between graphite boat piece 1 ceramic jacket 4 of different length, ceramic jacket 4 length of wherein starting at outside graphite boat two successively between each first and graphite boat piece 1 adjacent inside it is 15mm, and namely the spacing of each first graphite boat piece 1 and second graphite boat piece 1 is 15mm; Ceramic jacket 4 length outside graphite boat two between each second and graphite boat piece 1 adjacent inside it is 14mm, and namely the spacing of each second graphite boat piece 1 and the 3rd graphite boat piece 1 is 14mm; Ceramic jacket 4 length outside graphite boat two between each 3rd and graphite boat piece 1 adjacent inside it is 13mm, and namely the spacing of each 3rd graphite boat piece 1 and the 4th graphite boat piece 1 is 13mm; Ceramic jacket 4 length outside graphite boat two between each 4th and graphite boat piece 1 adjacent inside it is 12mm, and namely the spacing of each 4th graphite boat piece 1 and the 5th graphite boat piece 1 is 12mm; Ceramic jacket 4 length outside graphite boat two between each 5th and (namely middle) graphite boat piece 1 adjacent inside it is 11mm, and namely the spacing of each 5th graphite boat piece 1 and the 6th (i.e. middle a slice) graphite boat piece 1 is 11mm.
Embodiment 2: the graphite boat of another kind of unequal-interval boat sheet, comprise 19 graphite boat piece 1, described graphite boat piece 1 is provided with the hollow out groove 5 that four are loaded silicon chip, be connected by ceramic bar 2 between each graphite boat piece 1, ceramic bar 2 is provided with between graphite boat piece 1 ceramic jacket 4 of different length, wherein outside graphite boat two, starts at ceramic jacket 4 length between each first successively to graphite boat piece 1 adjacent between the 4th
allfor 14mm, namely each first is 14mm to the spacing of graphite boat piece 1 adjacent between the 4th; Ceramic jacket 4 length between graphite boat piece 1 adjacent between each 4th to the 7th outside graphite boat two is 12mm, and the spacing of namely adjacent between each 4th to the 7th graphite boat piece 1 is 12mm; Ceramic jacket 4 length between graphite boat piece 1 adjacent between each 7th to the tenth (i.e. middle a slice) outside graphite boat two is 10mm, and the spacing of namely adjacent between each 7th to the tenth (i.e. middle a slice) graphite boat piece 1 is 10mm.
Embodiment 3: the graphite boat of another unequal-interval boat sheet, comprise 20 a slice graphite boat piece 1, described graphite boat piece 1 is provided with the hollow out groove 5 that seven are loaded silicon chip, be connected by ceramic bar 2 between each graphite boat piece 1, ceramic bar 2 is provided with between graphite boat piece 1 ceramic jacket 4 of different length, ceramic jacket 4 length of wherein starting at outside graphite boat two successively between each first to the 6th graphite boat piece 1 between graphite boat piece 1 is 13mm, and namely each first is 13mm to the spacing of graphite boat piece 1 adjacent between the 6th; Ceramic jacket 4 length between graphite boat piece 1 adjacent between each 6th outside all the other graphite boats two is 10mm, and the spacing of namely adjacent between each 6th graphite boat piece 1 graphite boat piece 1 is 10mm.
Claims (6)
1. the graphite boat of a unequal-interval boat sheet, comprise some graphite boat piece (1), described graphite boat piece (1) is provided with the groove (2) of some loading silicon chips, be connected by ceramic bar (3) between described graphite boat piece (1), it is characterized in that: the ceramic jacket (4) being provided with different length between the upper graphite boat piece (1) of described ceramic bar (3), the ceramic jacket (4) of described different length makes to form different spacing between graphite boat piece (1).
2. graphite boat as claimed in claim 1, is characterized in that: ceramic jacket (4) length on described graphite boat between graphite boat piece (1) is in the outer part greater than ceramic jacket (4) length between graphite boat piece (1) in the inner part successively.
3. graphite boat as claimed in claim 1, it is characterized in that: ceramic jacket (4) length on described graphite boat between outermost graphite boat piece (1) and graphite boat piece adjacent inside it (1) is greater than ceramic jacket (4) length between the graphite boat piece (1) of inner side and graphite boat piece adjacent outside it (1), and the ceramic jacket (4) between all the other graphite boat piece (1), from outer to inner, ceramic jacket (4) length is in the outer part more than or equal to ceramic jacket (4) length in the inner part.
4. graphite boat as claimed in claim 1, is characterized in that: described ceramic jacket (4) length is 10 ~ 15mm.
5. graphite boat as claimed in claim 1 or 2, is characterized in that: the quantity of described graphite boat piece (1) is 11 ~ 21.
6. graphite boat as claimed in claim 1 or 2, is characterized in that: the upper groove (2) loading silicon chip of described graphite boat piece (1) is hollow out or non-hollow out, and described groove (2) quantity is 4 ~ 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520088896.3U CN204348695U (en) | 2015-02-09 | 2015-02-09 | A kind of graphite boat of unequal-interval boat sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520088896.3U CN204348695U (en) | 2015-02-09 | 2015-02-09 | A kind of graphite boat of unequal-interval boat sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204348695U true CN204348695U (en) | 2015-05-20 |
Family
ID=53231947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520088896.3U Expired - Fee Related CN204348695U (en) | 2015-02-09 | 2015-02-09 | A kind of graphite boat of unequal-interval boat sheet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204348695U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106222629A (en) * | 2016-08-26 | 2016-12-14 | 奥特斯维能源（太仓）有限公司 | A kind of plated film graphite boat |
| CN107204380A (en) * | 2017-06-12 | 2017-09-26 | 徐州中辉光伏科技有限公司 | A kind of solar energy battery adopted silicon chip and its coating process and filming equipment |
| CN108666242A (en) * | 2018-05-09 | 2018-10-16 | 晋能清洁能源科技股份公司 | A kind of method and graphite carrier that can improve plating film uniformity |
| CN110767585A (en) * | 2019-11-07 | 2020-02-07 | 无锡鼎桥新能源科技有限公司 | Solar cell coating graphite boat piece and graphite boat |
| CN111020531A (en) * | 2019-12-18 | 2020-04-17 | 常州时创能源股份有限公司 | Combined graphite boat sleeve and graphite boat |
-
2015
- 2015-02-09 CN CN201520088896.3U patent/CN204348695U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106222629A (en) * | 2016-08-26 | 2016-12-14 | 奥特斯维能源（太仓）有限公司 | A kind of plated film graphite boat |
| CN106222629B (en) * | 2016-08-26 | 2018-06-08 | 奥特斯维能源（太仓）有限公司 | A kind of plated film graphite boat |
| CN107204380A (en) * | 2017-06-12 | 2017-09-26 | 徐州中辉光伏科技有限公司 | A kind of solar energy battery adopted silicon chip and its coating process and filming equipment |
| CN107204380B (en) * | 2017-06-12 | 2019-08-09 | 徐州中辉光伏科技有限公司 | A kind of solar energy battery adopted silicon chip and its coating process and filming equipment |
| CN108666242A (en) * | 2018-05-09 | 2018-10-16 | 晋能清洁能源科技股份公司 | A kind of method and graphite carrier that can improve plating film uniformity |
| CN108666242B (en) * | 2018-05-09 | 2023-11-17 | 晋能清洁能源科技股份公司 | Method capable of improving coating uniformity and graphite carrier |
| CN110767585A (en) * | 2019-11-07 | 2020-02-07 | 无锡鼎桥新能源科技有限公司 | Solar cell coating graphite boat piece and graphite boat |
| CN110767585B (en) * | 2019-11-07 | 2022-05-24 | 无锡鼎桥新能源科技有限公司 | Solar cell coating graphite boat piece and graphite boat |
| CN111020531A (en) * | 2019-12-18 | 2020-04-17 | 常州时创能源股份有限公司 | Combined graphite boat sleeve and graphite boat |
| CN111020531B (en) * | 2019-12-18 | 2024-03-22 | 常州时创能源股份有限公司 | Combined graphite boat sleeve and graphite boat |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150520 Termination date: 20210209 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |