CN106222629B - A kind of plated film graphite boat - Google Patents
A kind of plated film graphite boat Download PDFInfo
- Publication number
- CN106222629B CN106222629B CN201610737788.3A CN201610737788A CN106222629B CN 106222629 B CN106222629 B CN 106222629B CN 201610737788 A CN201610737788 A CN 201610737788A CN 106222629 B CN106222629 B CN 106222629B
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- CN
- China
- Prior art keywords
- graphite boat
- piece
- plated film
- specific region
- graphite
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Chemical Vapour Deposition (AREA)
- Cell Electrode Carriers And Collectors (AREA)
Abstract
The invention discloses a kind of plated film graphite boats, belong to solar cell coating technique field, and membrane thickness unevenness designs during to solve the problems, such as existing graphite boat plated film.Plated film provided by the invention includes spaced the first graphite boat piece of multi-disc with graphite boat；First graphite boat piece has silicon chip film-coated region and specific region, and the silicon chip film-coated region pre-determined distance is deviateed in the specific region；Along the center of graphite boat in outward direction, the resistivity of the specific region of each first graphite boat piece is incremented by successively.The plated film of the present invention with graphite boat plated film film thickness evenly, can reduce unsuccessfully piece ratio, raising battery efficiency.
Description
Technical field
The present invention relates to solar cell coating technique fields, and in particular to a kind of plated film graphite boat.
Background technology
At present, crystal silicon solar energy battery industry still in occupation of 90% the market share, show this kind of solar cell
There is powerful vitality and competitiveness, and silicon chip is the carrier of solar cell, wherein one in silicon chip production and processing
Process is plasma reinforced chemical vapour deposition (PECVD) plated film, and effect is to improve the solar energy conversion ratio of silicon chip.The process
In need to use graphite boat, graphite boat is silicon chip film-coated carrier, by the way that silicon chip is put into graphite boat through Both Plasma Chemical Vapor
Deposition deposits a layer depth blue SiN in silicon chip surfacex。
The factors such as structure, the size of graphite boat directly affect the transfer efficiency and production efficiency of silicon chip.At present, actual production
In common tubular type low frequency direct method PECVD using resistance-type heating entire cavity is heated to required temperature, in cavity
The graphite boat with many clamping plates is placed, silicon chip is placed in the both sides of clamping plate, using formation potential difference between two panels silicon chip with reacting
Gas completes glow discharge and carries out plated film, and this method has many advantages, such as good passivation effect, while the compactness that forms a film is high.
But since above-mentioned graphite boat volume is larger, temperature is caused in coating process to be conducted in graphite boat uneven, from
And lead to silicon chip at edge boat piece often the higher film forming of temperature be thicker, and the silicon temperature in boat at boat piece compared with low filming compared with
It is thin, same graphite boat silicon chip is thus caused to will appear the phenomenon that certain amount SiNx depositions are blocked up or excessively thin, generates failure piece.Cause
This, there is an urgent need for a kind of novel graphite boat with solve the problems, such as presently, there are.
Invention content
It is an object of the invention to propose a kind of plated film graphite boat of plated film film thickness evenly.
Another object of the present invention is to propose a kind of plated film graphite for reducing failure boat piece ratio, improving battery efficiency
Boat.
For this purpose, the present invention uses following technical scheme：
A kind of plated film graphite boat, including spaced the first graphite boat piece of multi-disc；First graphite boat piece has
The silicon chip film-coated region pre-determined distance is deviateed in silicon chip film-coated region and specific region, the specific region；Along along graphite boat
In outward direction, the resistivity of the specific region of each first graphite boat piece is incremented by successively for the heart.
As the preferred embodiment of the present invention, the section of the specific region is rectangle；The length of the specific region
Degree is equal to the width of first graphite boat piece, and the width of the specific region is less than the length of first graphite boat piece, institute
The center for stating specific region is located on the center line of the first graphite boat piece short side.
As the preferred embodiment of the present invention, spaced the second graphite boat piece of multi-disc is further included；Every described
Two graphite boat pieces are connect with one of electrode of graphite boat, every first graphite boat piece with graphite boat another
Electrode connects.
As the preferred embodiment of the present invention, the maximum resistivity of the specific region is 10-3Ω m, minimum resistance
Rate is 10-5Ω·m。
As the preferred embodiment of the present invention, the resistivity of second graphite boat piece is 8 × 10-6Ω m to 13 ×
10-6Between Ω m.
As the preferred embodiment of the present invention, first graphite boat piece and second graphite boat piece are arranged in parallel.
As the preferred embodiment of the present invention, the quantity of second graphite boat piece is between 8 to 12.
As the preferred embodiment of the present invention, the quantity of first graphite boat piece is between 7 to 11.
As the preferred embodiment of the present invention, the radio-frequency signal generator for being connect with electrode is further included.
Beneficial effects of the present invention are：
The plated film of present invention graphite boat is equipped with a kind of special graphite boat piece, and silicon is deviateed in the specific region of the graphite boat piece
Piece coating film area certain distance, and along the center of graphite boat in outward direction, the resistivity of specific region is incremented by successively, passes through control
To the electric field strength on boat side in graphite boat boat processed, so as to achieve the effect that balance in boat with boat side coated film deposition speed, effectively carry
High plated film film thickness homogeneity reduces failure piece ratio, improves battery average efficiency.
Description of the drawings
Fig. 1 is the structure diagram for the first graphite boat piece that the preferred embodiment of the present invention one provides；
Fig. 2 is the structure diagram for the plated film graphite boat that the preferred embodiment of the present invention one provides.
In figure label for：
1st, the first graphite boat piece；2nd, the second graphite boat piece；3rd, radio-frequency signal generator；11st, silicon chip film-coated region；12nd, given zone
Domain.
Specific embodiment
Technical solution to further illustrate the present invention below with reference to the accompanying drawings and specific embodiments.
Preferred embodiment one：
This preferred embodiment provides a kind of plated film graphite boat.As shown in Fig. 2, plated film includes the first stone of multi-disc with graphite boat
Black boat piece 1, the second graphite boat piece of multi-disc 2 and the radio-frequency signal generator 3 for being connect with electrode.
First graphite boat piece 1 and the second graphite boat piece 2 are parallel and be arranged at intervals, and every second graphite boat piece 2 is and graphite
One of electrode connection of boat, every first graphite boat piece 1 are connect with another electrode of graphite boat.
As shown in Figure 1, the first graphite boat piece 1 has silicon chip film-coated region 11 and specific region 12.Specific region 12 is
Specific electric resistance region needs to be process using doping process, and section is preferably processed to rectangle；The length of specific region 12
Degree is equal to the width of the first graphite boat piece 1, and the width of specific region 12 is less than the length of the first graphite boat piece 1, specific region 12
Center be located on the center line of 1 short side of the first graphite boat piece.
Silicon chip film-coated 11 pre-determined distance of region is deviateed in specific region 12, which can carry out according to actual use situation
Setting.
Along the center of graphite boat in outward direction, the resistivity of the specific region 12 of each first graphite boat piece 1 is incremented by successively.
Specially：When graphite boat has n the first graphite boat pieces 1 of piece, along the center of graphite boat in outward direction, each first graphite boat piece 1
The resistivity of specific region 12 be followed successively by ρ0, ρ1……ρn-1, ρn, the magnitude relationship of resistivity is ρ0〈ρ1〈……〈ρn-1〈ρn,
Since the resistivity of the specific region 12 of the first graphite boat piece 1 (outer boat piece) on the outside of graphite boat is higher, the region is caused to divide
It is larger so that the voltage in the silicon chip film-coated region 11 of the outer boat piece electric field strength that becomes smaller dies down, so as to reduce the silicon chip of outer boat piece
The film deposition rate of coating film area 11；The specific region 12 of the first graphite boat piece 1 (center boat piece) at graphite boat center
Resistivity is relatively low, and the punishment pressure is smaller, thus voltage becomes larger at the silicon chip film-coated region 11 of the first graphite boat piece 1 in boat, electricity
Pond intensity becomes strong, and film deposition rate is accelerated, and finally makes in boat and boat side film thickness difference is away from becoming smaller, whole boat graphite boat plated film film thickness is equal
Even property is improved.
The quantity of first graphite boat piece 1 between 7 to 11, the quantity of the second graphite boat piece 28 to 12 it
Between, it can be configured according to actual use demand.The maximum resistivity of specific region 12 is 10-3Ω m, minimum specific resistance are
10-5Ω m, the resistivity of the second graphite boat piece 2 is 8 × 10-6Ω m to 13 × 10-6Between Ω m.
Preferred embodiment two：
This preferred embodiment provides a kind of plated film graphite boat.Plated film includes 10 first graphite boat pieces and 11 with graphite boat
The second graphite boat piece of piece, the second graphite boat piece resistivity are 9 × 10-6Ω m, the first graphite boat piece (outer boat on the outside of graphite boat
Piece) specific region resistivity be 10-3Ω m, the specific region of first graphite boat piece (center boat piece) at graphite boat center
Resistivity be 10-5Ω m, along the center of graphite boat in outward direction, the resistivity of the specific region of each first graphite boat piece
Gradually it is incremented to 10-3Ω·m。
Silicon nitride film deposition is carried out to 156mm × 156mm polysilicon chips using conventional polysilicon cvd nitride silicon technology
Technique, and statistical test is carried out, while test being averaged after plated film to the film thickness at graphite boat center and outside after the completion of technique
Efficiency.Comparative result is as shown in the table.
| Old graphite boat | New graphite boat | |
| Film thickness difference away from | 8nm | 2nm |
| Battery average efficiency | 18.22 | 18.26 |
| Failure piece ratio | 6.25% | 2.5% |
Finally, it is to be noted that, herein, term " comprising ", "comprising" or its any other variant are intended to
Cover non-exclusive inclusion, so that process, method, article or equipment including a series of elements not only include those
Element, but also including other elements that are not explicitly listed or further include as this process, method, article or set
Standby intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
Also there are other identical elements in the process, method, article or apparatus that includes the element.
It is the embodiment provided with reference to attached drawing above, is only to realize preferred embodiment of the invention rather than its limitations, it is any
It modifies to the specific embodiment of the present invention or equivalent replacement is carried out to some technical characteristics, without departing from skill of the present invention
The spirit of art scheme should all cover in the claimed technical solution range of the present invention.Protection scope of the present invention is also wrapped
It includes those skilled in the art and does not make the creative labor the thinkable any alternate embodiments of institute.
Claims (9)
1. a kind of plated film graphite boat, which is characterized in that including spaced the first graphite boat piece of multi-disc (1)；
First graphite boat piece (1) has silicon chip film-coated region (11) and specific region (12), and the specific region (12) is inclined
From silicon chip film-coated region (11) pre-determined distance；
Along the center of graphite boat in outward direction, the resistivity of the specific region (12) of each first graphite boat piece (1)
It is incremented by successively.
2. a kind of plated film graphite boat according to claim 1, which is characterized in that the section of the specific region (12) is
Rectangle；
The length of the specific region (12) is equal to the width of first graphite boat piece (1), the width of the specific region (12)
For degree less than the length of first graphite boat piece (1), the center of the specific region (12) is located at first graphite boat piece (1)
On the center line of short side.
3. a kind of plated film graphite boat according to claim 2, which is characterized in that further include spaced multi-disc second
Graphite boat piece (2)；
Every second graphite boat piece (2) connect with one of electrode of graphite boat, every first graphite boat piece
(1) it is connect with another electrode of graphite boat.
A kind of 4. plated film graphite boat according to claim 3, which is characterized in that the maximum electricity of the specific region (12)
Resistance rate is 10-3Ω m, minimum specific resistance 10-5Ω·m。
A kind of 5. plated film graphite boat according to claim 4, which is characterized in that the electricity of second graphite boat piece (2)
Resistance rate is 8 × 10-6Ω m to 13 × 10-6Between Ω m.
6. a kind of plated film graphite boat according to claim 5, which is characterized in that first graphite boat piece (1) and institute
The second graphite boat piece (2) is stated to be arranged in parallel.
A kind of 7. plated film graphite boat according to claim 6, which is characterized in that the number of second graphite boat piece (2)
Amount is between 8 to 12.
8. according to a kind of any plated film graphite boats of claim 1-7, which is characterized in that first graphite boat piece
(1) quantity is between 7 to 11.
9. according to a kind of any plated film graphite boats of claim 1-7, which is characterized in that further include to connect with electrode
The radio-frequency signal generator (3) connect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610737788.3A CN106222629B (en) | 2016-08-26 | 2016-08-26 | A kind of plated film graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610737788.3A CN106222629B (en) | 2016-08-26 | 2016-08-26 | A kind of plated film graphite boat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106222629A CN106222629A (en) | 2016-12-14 |
| CN106222629B true CN106222629B (en) | 2018-06-08 |
Family
ID=57556197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610737788.3A Expired - Fee Related CN106222629B (en) | 2016-08-26 | 2016-08-26 | A kind of plated film graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106222629B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111893455B (en) * | 2020-09-08 | 2023-10-03 | 河北美普兰地环保科技有限公司 | Metal substrate carbon nano film material manufacturing equipment and preparation method thereof |
| CN112663030A (en) * | 2020-12-28 | 2021-04-16 | 无锡松煜科技有限公司 | Vertical photovoltaic cell passivation deposition device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102290359A (en) * | 2010-06-15 | 2011-12-21 | 东京毅力科创株式会社 | Support structure, processing container structure and processing apparatus |
| CN103614708A (en) * | 2013-12-10 | 2014-03-05 | 浙江正泰太阳能科技有限公司 | Graphite boat with gradient type spacing |
| CN203999811U (en) * | 2014-08-14 | 2014-12-10 | 内蒙古日月太阳能科技有限责任公司 | Graphite boat |
| CN204348695U (en) * | 2015-02-09 | 2015-05-20 | 浙江晶科能源有限公司 | A kind of graphite boat of unequal-interval boat sheet |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58212125A (en) * | 1982-06-02 | 1983-12-09 | Hitachi Ltd | Jig for heat treatment |
-
2016
- 2016-08-26 CN CN201610737788.3A patent/CN106222629B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102290359A (en) * | 2010-06-15 | 2011-12-21 | 东京毅力科创株式会社 | Support structure, processing container structure and processing apparatus |
| CN103614708A (en) * | 2013-12-10 | 2014-03-05 | 浙江正泰太阳能科技有限公司 | Graphite boat with gradient type spacing |
| CN203999811U (en) * | 2014-08-14 | 2014-12-10 | 内蒙古日月太阳能科技有限责任公司 | Graphite boat |
| CN204348695U (en) * | 2015-02-09 | 2015-05-20 | 浙江晶科能源有限公司 | A kind of graphite boat of unequal-interval boat sheet |
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| Publication number | Publication date |
|---|---|
| CN106222629A (en) | 2016-12-14 |
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