CN202072762U - Graphite boat - Google Patents
Graphite boat Download PDFInfo
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- CN202072762U CN202072762U CN2011200727840U CN201120072784U CN202072762U CN 202072762 U CN202072762 U CN 202072762U CN 2011200727840 U CN2011200727840 U CN 2011200727840U CN 201120072784 U CN201120072784 U CN 201120072784U CN 202072762 U CN202072762 U CN 202072762U
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- Prior art keywords
- graphite boat
- sheet
- lower electrode
- graphite
- sheets
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to a graphite boat which comprises at least 15 graphite boat sheets, a top electrode and a bottom electrode arranged corresponding to the top electrode. Two supporting legs are arranged at two ends of the bottom electrode, and the upper parts of the supporting legs are abutted against groove cushion blocks of the bottom electrode; the distance between the two supporting legs is a preset distance matched with a chamber body of a vacuum filming device; and the space between adjacent graphite boat sheets is 10mm to 13mm. The graphite boat provided by the utility model is the improvement of the conventional graphite boat, in particular to the improved designs on the height of a ceramic sleeve, a graphite spacer block and other accessories; and the number of graphite boat sheets is increased but the overall width of the graphite boat is not enlarged, so that not only are the carrying sheets increased, but also the operating requirements of PECVD (plasma-enhanced chemical vapor deposition) vacuum filming devices can be met. Therefore, the production efficiency of plated anti-reflecting films of silicon chips is improved.
Description
Technical field
The utility model relates to the solar battery sheet production technical field, relates in particular to a kind of graphite boat that solar battery sheet uses of producing.
Background technology
A kind of carrier of graphite boat during as solar battery sheet coated with antireflection film, its structure and size directly influence the efficiency of conversion and the production efficiency of silicon chip.Existing graphite boat comprises: graphite accessories such as graphite boat sheet, ceramic jacket, ceramic bar, graphite bars, graphite spacer block.Its principle of work is that uncoated silicon slice placed on the stuck point of graphite boat sheet, can be put the silicon chip of fixed qty on each boat sheet.Then, graphite boat is placed in the cavity of PECVD vacuum coating film equipment, adopts the pecvd process plated film that discharges.After plated film finishes, take out graphite boat, silicon chip is unloaded from graphite boat take off.
Existing graphite boat, because graphite boat sheet limited amount, and making the slide glass amount of graphite boat be restricted, production efficiency is low.
The utility model content
Main purpose of the present utility model is to provide a kind of graphite boat that improves graphite boat slide glass amount.
In order to achieve the above object, the utility model proposes a kind of graphite boat, comprise graphite boat sheet, top electrode and with the lower electrode of the corresponding setting of described top electrode, described lower electrode two ends are provided with feet, feet top is near the groove cushion block of lower electrode, and described graphite boat sheet is at least 15; Distance between two described feets is the predetermined distance with vacuum coating film equipment cavity coupling; Spacing between the described graphite boat sheet is 10-13mm.
Preferably, described graphite boat sheet comprises two outer plates, the intermediate that is connected with the lower electrode conduction, the lower electrode sheet that is connected with the lower electrode conduction and the pole piece that powers on that is connected with the top electrode conduction, connects by ceramic bar between the graphite boat sheet.
Preferably, described lower electrode sheet is spaced with the pole piece that powers on.
Preferably, also comprise ceramic jacket, be set on the described ceramic bar, between the graphite boat sheet.
Preferably, described graphite boat sheet is 15, comprises two outer plates, an intermediate, six power on pole piece and six lower electrode sheets; Described two outer plates all are connected with the top electrode conduction.
Preferably, the outer middle side part of described feet is provided with the first step of shelving the lower electrode sheet adjacent with described outer plate.
Preferably, described graphite boat sheet is 17, comprises two outer plates, an intermediate, eight power on pole piece and six lower electrode sheets; Described two outer plates all are connected with the lower electrode conduction; Described ceramic jacket height is 10mm.
Preferably, be provided with the second step of ccontaining described groove cushion block in the middle part of the described feet.
Preferably, described graphite boat sheet is 19, comprises two outer plates, an intermediate, eight power on pole piece and eight lower electrode sheets; Described two outer plates all are connected with the top electrode conduction.
Preferably, described graphite boat sheet is except that outer plate, and correspondence is placed the position hollow out of silicon chip.
A kind of graphite boat that the utility model proposes, by existing graphite boat is reequiped, specifically accessories such as the height of ceramic jacket and graphite spacer block are improved design, increase the boat sheet quantity of graphite boat but do not increase the overall width of graphite boat, make it can either increase the service requirements that slide counts can meet the PECVD vacuum coating film equipment again, and then improve silicon chip coated with antireflection film production efficiency.
Description of drawings
Fig. 1 is the structural representation of the utility model graphite boat first embodiment;
Fig. 2 is the structural representation of the feet of graphite boat shown in Figure 1;
Fig. 3 is the structural representation of the utility model graphite boat second embodiment;
Fig. 4 is the structural representation of the feet of graphite boat shown in Figure 3.
In order to make the technical solution of the utility model clearer, clear, be described in further detail below in conjunction with accompanying drawing.
Embodiment
The technical solutions of the utility model general thought is: accessories such as the height of the ceramic jacket of graphite boat and graphite spacer block are improved design, increase the boat sheet quantity of graphite boat but do not increase the overall width of graphite boat, make it can either increase the service requirements that slide counts can meet the PECVD vacuum coating film equipment again.
Below with reference to drawings and Examples, the technical scheme that realizes the utility model purpose is elaborated.Should be appreciated that specific embodiment described herein only in order to explanation the utility model, and be not used in qualification the utility model.
Existing graphite boat, because its graphite boat sheet fixed amount that can carry and less is fixed and can put the silicon chip number on each graphite boat sheet, therefore, its production efficiency is relatively low.
On each boat sheet, can put silicon chip and count under the fixed situation, have only, could improve the slide glass amount of graphite boat by increasing graphite boat sheet number.Consider that graphite boat need be put in the PECVD vacuum coating film equipment and work, be subjected to the restriction of caliber size on the PECVD vacuum coating film equipment, graphite boat can not infinitely enlarge, so must improve to accessories such as the height of its ceramic jacket and graphite spacer blocks, to guarantee in the boat sheet quantity that increases graphite boat, not increasing its overall width, make it can either increase the service requirements that slide counts can meet the PECVD vacuum coating film equipment again.
Please refer to Fig. 1 and Fig. 2, the utility model first embodiment proposes a kind of graphite boat, it comprises the graphite boat sheet, top electrode 101, lower electrode 102, ceramic jacket, ceramic bar, graphite bars (not shown) etc., the graphite boat sheet is 15, comprise two outer plates, one intermediate, six power on pole piece and six lower electrode sheets, on, lower electrode 101, be respectively equipped with small electrode 1011 and large electrode 1021 on 102, and cushion block 1013, groove cushion block 1022 spacer blocks such as graphite such as grade, lower electrode 102 two ends are provided with feet 1023, on, lower electrode 101, corresponding graphite spacer block is provided with the draw-in groove that the graphite boat sheet is installed on 102, two outer plates are fixed on top electrode 101 two ends, intermediate is connected with lower electrode 102 conductions, the pole piece that powers on is connected with top electrode 101 conductions, and the lower electrode sheet is connected with lower electrode 102 conductions.
Connect by ceramic bar between each graphite boat sheet, be with the ceramic jacket (not shown) on the ceramic bar, connect by ceramic bar between each graphite spacer block of upper and lower electrode 101,102, and conduct electricity by graphite bars.Spacing between the graphite boat sheet is 10-13mm.The graphite boat sheet except that outer plate, other each corresponding position hollow out of placing silicon chips of boat sheets.
In the present embodiment, feet 1023 outer middle side parts are provided with the first step 1024 of shelving the lower electrode sheet adjacent with outer plate.
Graphite boat after present embodiment improves is compared existing graphite boat sheet such as the graphite boat with 13 graphite boat sheets, many two graphite boat sheets, the quantity that each graphite boat sheet loads silicon chip at every turn can increase the 24-28 sheet, and under the situation that does not change working condition, its production efficiency will improve 30%.
Please refer to Fig. 3, the utility model one embodiment proposes a kind of graphite boat, comprise graphite boat sheet, top electrode 201 and with the lower electrode 202 of top electrode 201 corresponding settings, the graphite boat sheet comprises two outer plates 206, the intermediate 203 that is connected with lower electrode 202 conductions, the lower electrode sheet 205 that is connected with lower electrode 202 conductions and the pole piece 204 that powers on that is connected with top electrode 201 conductions, connect by the ceramic bar (not shown) between the graphite boat sheet, be with ceramic jacket on the ceramic bar, ceramic jacket is between the graphite boat sheet.Be respectively equipped with small electrode 2011 and large electrode 2021 on the upper and lower electrode 201,202, and graphite spacer block such as cushion block 2013, taper liner piece 2012, groove cushion block 2022, connect by ceramic bar between each graphite spacer block of upper and lower electrode 201,202, and conduct electricity by graphite bars, lower electrode 202 two ends are provided with feet 2023, and feet top is near the groove cushion block 2022 of lower electrode 202.
In the present embodiment, the graphite boat sheet is 17, comprises two outer plates 206, an intermediate 203, eight power on pole piece 204 and six lower electrode sheets 205, and lower electrode sheet 205 is spaced with the pole piece 204 that powers on; Two outer plates 206 all are connected with lower electrode 202 conductions.The graphite boat sheet except that outer plate 206, other each corresponding position hollow out of placing silicon chips of boat sheets.
For under the situation that increases graphite boat sheet quantity, do not increase the overall width of graphite boat, need to guarantee that the distance between two feets is the predetermined distance that mates with the vacuum coating film equipment cavity; On the basis of graphite boat with 15 graphite boat sheets, increase by two pole pieces 204 that power on, pole piece 204, two outer plates 206 that power on of hollow out all conducted electricity with lower electrode 202 and are connected in the middle of be replaced by the position that is about to original two outer plates 106 (please refer to Fig. 1).With original height is that the ceramic jacket of 11mm is replaced by and highly is the ceramic jacket of 10mm, change the ceramic bar and the graphite bars of appropriate length, change the thickness of graphite spacer blocks such as cushion block 2013, taper liner piece 2012, groove cushion block 2022, shorten the spacing between the graphite boat sheet, specifically can be defined as 10-13mm.
Because graphite boat sheet quantity increases, present embodiment is provided with the second step 2024 of storage tank cushion block 2022 at feet 2023 middle parts, see also Fig. 4, so that the distance between two feets meets the service requirements of PECVD vacuum coating film equipment.
Graphite boat after present embodiment improves is compared the graphite boat with 15 graphite boat sheets, many two graphite boat sheets, and the quantity that each graphite boat sheet loads silicon chip at every turn can increase the 24-28 sheet, and under the situation that does not change working condition, its production efficiency will improve 30%.
In other embodiments, be improved to graphite boat with 19 graphite boat sheets such as the graphite boat that will have 17 graphite boat sheets, similar to the aforementioned embodiment, its difference is, the graphite boat sheet is 19, comprises two outer plates 206, an intermediate 203, eight power on pole piece 204 and eight lower electrode sheets 205.Lower electrode sheet 205, two outer plates 206 that hollow outs in the middle of two are replaced by in two outer 206 position that specifically will graphite boat shown in Figure 2 all are connected with top electrode 202 conductions.Change undersized ceramic jacket, change the ceramic bar and the graphite bars of appropriate length, change the thickness of graphite spacer blocks such as cushion block, taper liner piece, groove cushion block, shorten the spacing between the graphite boat sheet, being arranged on the second step that feet middle part is used for the storage tank cushion block can outwards expand, so that the distance between two feets meets the service requirements of PECVD vacuum coating film equipment.
Under the situation that does not change working condition, the quantity that increases the graphite boat sheet is improved successively principle with other of the service requirements that meets the PECVD vacuum coating film equipment and is analogized.
The above only is a preferred embodiment of the present utility model; be not so limit claim of the present utility model; every equivalent structure or flow process conversion that utilizes the utility model specification sheets and accompanying drawing content to be done; or directly or indirectly be used in other relevant technical fields, all in like manner be included in the scope of patent protection of the present utility model.
Claims (10)
1. graphite boat, comprise graphite boat sheet, top electrode and with the lower electrode of the corresponding setting of described top electrode, described lower electrode two ends are provided with feet, feet top is characterized in that near the groove cushion block of lower electrode described graphite boat sheet is at least 15; Distance between two described feets is the predetermined distance with vacuum coating film equipment cavity coupling; Spacing between the described graphite boat sheet is 10-13mm.
2. graphite boat according to claim 1, it is characterized in that, described graphite boat sheet comprises two outer plates, the intermediate that is connected with the lower electrode conduction, the lower electrode sheet that is connected with the lower electrode conduction and the pole piece that powers on that is connected with the top electrode conduction, connects by ceramic bar between the graphite boat sheet.
3. graphite boat according to claim 2 is characterized in that, described lower electrode sheet is spaced with the pole piece that powers on.
4. graphite boat according to claim 3 is characterized in that, also comprises ceramic jacket, is set on the described ceramic bar, between the graphite boat sheet.
5. graphite boat according to claim 4 is characterized in that, described graphite boat sheet is 15, comprises two outer plates, an intermediate, six power on pole piece and six lower electrode sheets; Described two outer plates all are connected with the top electrode conduction.
6. graphite boat according to claim 5 is characterized in that, the outer middle side part of described feet is provided with the first step of shelving the lower electrode sheet adjacent with described outer plate.
7. graphite boat according to claim 4 is characterized in that, described graphite boat sheet is 17, comprises two outer plates, an intermediate, eight power on pole piece and six lower electrode sheets; Described two outer plates all are connected with the lower electrode conduction; Described ceramic jacket height is 10mm.
8. graphite boat according to claim 7 is characterized in that, described feet middle part is provided with the second step of ccontaining described groove cushion block.
9. graphite boat according to claim 4 is characterized in that, described graphite boat sheet is 19, comprises two outer plates, an intermediate, eight power on pole piece and eight lower electrode sheets; Described two outer plates all are connected with the top electrode conduction.
10. according to each described graphite boat among the claim 1-9, it is characterized in that described graphite boat sheet is except that outer plate, correspondence is placed the position hollow out of silicon chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200727840U CN202072762U (en) | 2011-03-18 | 2011-03-18 | Graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200727840U CN202072762U (en) | 2011-03-18 | 2011-03-18 | Graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202072762U true CN202072762U (en) | 2011-12-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200727840U Expired - Lifetime CN202072762U (en) | 2011-03-18 | 2011-03-18 | Graphite boat |
Country Status (1)
| Country | Link |
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| CN (1) | CN202072762U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102534564A (en) * | 2012-02-24 | 2012-07-04 | 湖南红太阳光电科技有限公司 | Graphite boat with electrode holes formed on double sides for PECVD (Plasma Enhanced Chemical Vapor Deposition) |
| CN102610701A (en) * | 2012-04-06 | 2012-07-25 | 无锡绿波新能源设备有限公司 | Graphite boat being convenient to dismantle and assemble |
| CN102856176A (en) * | 2012-09-27 | 2013-01-02 | 合肥海润光伏科技有限公司 | Tubular plasma enhanced chemical vapor deposition (PECVD) film coating method |
| CN103996741A (en) * | 2014-05-20 | 2014-08-20 | 奥特斯维能源（太仓）有限公司 | Solar cell graphite boat and film coating method thereof |
| CN109148343A (en) * | 2018-08-15 | 2019-01-04 | 横店集团东磁股份有限公司 | A kind of silicon chip of solar cell plated film graphite boat |
| CN111118478A (en) * | 2019-12-31 | 2020-05-08 | 湖南红太阳光电科技有限公司 | PECVD equipment for preparing heterojunction battery thin film |
-
2011
- 2011-03-18 CN CN2011200727840U patent/CN202072762U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102534564A (en) * | 2012-02-24 | 2012-07-04 | 湖南红太阳光电科技有限公司 | Graphite boat with electrode holes formed on double sides for PECVD (Plasma Enhanced Chemical Vapor Deposition) |
| CN102610701A (en) * | 2012-04-06 | 2012-07-25 | 无锡绿波新能源设备有限公司 | Graphite boat being convenient to dismantle and assemble |
| CN102610701B (en) * | 2012-04-06 | 2014-02-05 | 无锡绿波新能源设备有限公司 | Graphite boat being convenient to dismantle and assemble |
| CN102856176A (en) * | 2012-09-27 | 2013-01-02 | 合肥海润光伏科技有限公司 | Tubular plasma enhanced chemical vapor deposition (PECVD) film coating method |
| CN103996741A (en) * | 2014-05-20 | 2014-08-20 | 奥特斯维能源（太仓）有限公司 | Solar cell graphite boat and film coating method thereof |
| CN103996741B (en) * | 2014-05-20 | 2016-04-06 | 奥特斯维能源（太仓）有限公司 | A kind of solar cell graphite boat and film plating process thereof |
| CN109148343A (en) * | 2018-08-15 | 2019-01-04 | 横店集团东磁股份有限公司 | A kind of silicon chip of solar cell plated film graphite boat |
| CN111118478A (en) * | 2019-12-31 | 2020-05-08 | 湖南红太阳光电科技有限公司 | PECVD equipment for preparing heterojunction battery thin film |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: SHENZHEN GOLD STONE TECHNOLOGY CO., LTD. Free format text: FORMER NAME: GOLD STONE PRECISION TECHNOLOGY(SHENZHEN)CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 518000, Shenzhen, Guangdong, Baoan District Fuyong Street on the south side of the first floor of Great Ocean Road 4, two floor East Patentee after: Shenzhen Gold Stone Technology Co., Ltd. Address before: 518000 Guangdong city of Shenzhen province Baoan District manhole Street third Jiao Sha Tau Tong industrial area ranked first, one to two Patentee before: Gold stone precision technology (Shenzhen) Co., Ltd. |
|
| C56 | Change in the name or address of the patentee |
Owner name: SHENZHEN GOLD STONE TECHNOLOGY STOCK CO., LTD. Free format text: FORMER NAME: SHENZHEN GOLD STONE TECHNOLOGY CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: Baoan District Songgang street, Shenzhen city 518105 Guangdong province with rich industrial zone safety run road No. 2 Patentee after: Shenzhen Gold Stone Technology Co., Ltd Address before: 518000, Shenzhen, Guangdong, Baoan District Fuyong Street on the south side of the first floor of Great Ocean Road 4, two floor East Patentee before: Shenzhen Gold Stone Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20111214 |