CN111020532A - Graphite boat for solar cell coating - Google Patents
Graphite boat for solar cell coating Download PDFInfo
- Publication number
- CN111020532A CN111020532A CN201911415006.4A CN201911415006A CN111020532A CN 111020532 A CN111020532 A CN 111020532A CN 201911415006 A CN201911415006 A CN 201911415006A CN 111020532 A CN111020532 A CN 111020532A
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- boat piece
- ceramic ring
- graphite
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 103
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 98
- 239000010439 graphite Substances 0.000 title claims abstract description 98
- 239000011248 coating agent Substances 0.000 title claims abstract description 22
- 238000000576 coating method Methods 0.000 title claims abstract description 22
- 239000000919 ceramic Substances 0.000 claims abstract description 67
- 235000012431 wafers Nutrition 0.000 claims abstract description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 19
- 239000010703 silicon Substances 0.000 claims abstract description 19
- 238000004140 cleaning Methods 0.000 claims abstract description 12
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 5
- 238000010926 purge Methods 0.000 abstract description 2
- 239000007888 film coating Substances 0.000 description 8
- 238000009501 film coating Methods 0.000 description 8
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a graphite boat for coating a solar cell, which comprises a first graphite boat piece, a second graphite boat piece, a ceramic ring, a ceramic rod, a graphite nut and a clamping point, wherein the first graphite boat piece and the second graphite boat piece are alternately arranged in parallel, through holes are formed in the first graphite boat piece and the second graphite boat piece, the ceramic ring is arranged between the first graphite boat piece and the second graphite boat piece, the ceramic rod penetrates through the through holes and penetrates through the ceramic ring, the first graphite boat piece, the second graphite boat piece and the ceramic ring which are alternately arranged in parallel are tightly combined at two ends of the ceramic rod through the graphite nut, at least two cleaning holes are formed in the side wall of the ceramic ring, the clamping point holes are formed in positions, where the silicon wafers are placed, of the first graphite boat piece and the second graphite boat piece, and the clamping point is arranged in the clamping point holes; through set up two purge holes on the ceramic ring, can wash ceramic ring inside when wasing the graphite boat, effectively prevented because graphite powder makes adjacent two graphite boat pieces electrically conductive, guaranteed the effect of coating film.
Description
Technical Field
The invention relates to the field of solar cell production, in particular to a graphite boat for solar cell film coating.
Background
The graphite boat is a carrier for coating the silicon wafers in the solar cell, and when coating is carried out, the graphite boat inserted with the silicon wafers which are not coated is sent into a cavity of PECVD vacuum coating equipment and is subjected to discharge coating by utilizing a PECVD process. And after the film coating is finished, taking out the graphite boat, and unloading the silicon wafer from the graphite boat.
The existing graphite boat is easy to touch the graphite boat due to narrow storage space when the graphite boat is used for placing and taking the wafers, fragments of the silicon wafers can be caused, and the graphite boat wafers are required to be cleaned under the insulating condition during film coating, so that the graphite boat is required to be cleaned after being used, two ends of a ceramic ring are always in contact with the graphite boat wafers, after the graphite boat is used for a long time, graphite powder is generated by friction between the graphite boat wafers and the ceramic ring, a ceramic rod and the like, the graphite powder is accumulated in the ceramic ring and cannot be removed, the graphite boat wafers are conductive, and the film coating effect is influenced; in addition, the current graphite boat has low production efficiency and small coating quantity each time.
Disclosure of Invention
Aiming at overcoming the defects in the prior art, the invention mainly aims to overcome the defects in the prior art and discloses a graphite boat for coating a solar cell, which comprises a first graphite boat piece, a second graphite boat piece, a ceramic ring, a ceramic rod, a graphite screw cap and a clamping point, wherein the first graphite boat piece and the second graphite boat piece are alternately arranged in parallel, through holes are formed in the first graphite boat piece and the second graphite boat piece, the ceramic ring is arranged between the first graphite boat piece and the second graphite boat piece, the ceramic rod penetrates through the through holes and penetrates through the ceramic ring, the first graphite boat piece, the second graphite boat piece and the ceramic ring which are alternately arranged in parallel are tightly combined at two ends of the ceramic rod through the graphite screw cap, at least two cleaning holes are formed in the side wall of the ceramic ring, the positions of the first graphite boat piece and the second graphite boat piece for placing the silicon wafers are provided with the clamping point holes, and the clamping points are arranged in the clamping point holes.
Further, the cleaning holes are symmetrically arranged along the axis of the ceramic ring.
Further, the diameter of the ceramic ring is set to be 5 mm.
Further, the length of the ceramic ring is 10-12 mm.
Further, the length of the ceramic ring is 10.5 mm.
Furthermore, the number of the clamping point holes and the number of the clamping points are three, and the three clamping point holes are arranged in a triangular shape.
Further, the cross section of the end of the clamping point can be one of a triangle, a diamond, a circle and an ellipse.
The invention has the following beneficial effects:
1. through set up two purge holes on the ceramic ring, can wash ceramic ring inside when wasing the graphite boat, effectively prevented because graphite powder makes adjacent two graphite boat pieces electrically conductive, guaranteed the effect of coating film.
2. The size of the ceramic ring is limited, so that the number of the silicon wafers processed at one time can be increased, and the silicon wafers can be conveniently placed and taken out.
3. Three clamping points are arranged and distributed in a triangular mode, and the silicon wafer can be stably dragged.
Drawings
FIG. 1 is a perspective view of a graphite boat for solar cell coating according to the present invention;
FIG. 2 is an enlarged view taken at A in FIG. 1;
FIG. 3 is a front view of a graphite boat for solar cell coating according to the present invention;
FIG. 4 is a schematic view of the positions of the ceramic rings and the ceramic rods;
FIG. 5 is a schematic view of a ceramic tube structure;
FIG. 6 is a schematic view of a stuck point structure;
FIG. 7 is a side view of a stuck point;
the reference numbers are as follows:
1. the device comprises a first graphite boat piece, a second graphite boat piece, a ceramic ring, a ceramic rod, a graphite nut, a clamping point, a cleaning hole and a cleaning hole, wherein the first graphite boat piece is 2, the second graphite boat piece is 3, the ceramic ring is 4, the ceramic rod is 5, and the cleaning hole is 7.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1 to 4, a graphite boat for solar cell coating according to the present invention includes a first graphite boat piece 1, a second graphite boat piece 2, a ceramic ring 3, a ceramic rod 4, a graphite nut 5 and a clamping point 6, wherein the first graphite boat piece 1 and the second graphite boat piece 2 are alternately arranged in parallel, a plurality of through holes are formed in the first graphite boat piece 1 and the second graphite boat piece 2, the ceramic ring 3 is disposed between the first graphite boat piece 1 and the second graphite boat piece 2, the ceramic rod 4 passes through the through hole 7 and passes through the ceramic ring 3, both ends of the ceramic rod 4 tighten the first graphite boat piece 1, the second graphite boat piece 2 and the ceramic ring 3 which are alternately arranged in parallel through the graphite nut, in order to prevent adjacent two graphite boat pieces from affecting coating due to the conduction of graphite powder inside the ceramic ring 3, therefore, referring to fig. 5, at least two cleaning holes 7 are formed in the side wall of the ceramic ring 3, in order to enable the cleaning liquid to enter the ceramic ring 3 more quickly, the two cleaning holes 7 are symmetrically arranged on the axis of the ceramic ring 3; the diameter of the ceramic ring 3 is set to be 5mm, so that the distance between the two ceramic rings 3 can be increased, the silicon wafer is more conveniently placed, and the probability that the silicon wafer touches the ceramic rings 3 is reduced; in addition, in order to improve the film coating efficiency, the number of silicon wafers processed each time can be increased, the length of the ceramic ring 3 is 10-12mm, and preferably, the length of the ceramic ring is 10.5 mm; the positions of the first graphite boat piece and the second graphite boat piece for placing the silicon wafer are at least provided with three clamping point holes, the clamping points 6 are arranged in the clamping point holes, and the three clamping point holes are placed in a triangular shape, so that the silicon wafer can be placed more stably; referring to fig. 6-7, the middle of the clamping point 6 is matched with the clamping point hole, and two sections are provided with fixing grooves, so that the smaller the contact point between the clamping point 6 and the silicon wafer is, the better the coating effect is, and the cross section of the end part of the clamping point 6 can be triangular, rhombic, circular or elliptical.
When the graphite boat for solar cell film coating is used for loading in a PECVD process, the ceramic tube 3 is arranged in a size mode, so that the film coating efficiency of a silicon wafer can be effectively improved, the probability of silicon wafer fragments when the silicon wafer touches the ceramic ring 3 when being placed in the graphite boat is reduced, in addition, the ceramic ring 3 can be effectively cleaned by arranging the cleaning holes 7, the conduction between the adjacent graphite boat sheets is prevented, and the film coating effect is ensured.
The above are merely preferred embodiments of the present invention, and are not intended to limit the scope of the invention; it is intended that the following claims be interpreted as including all such alterations, modifications, and equivalents as fall within the true spirit and scope of the invention.
Claims (7)
1. A graphite boat for coating a film on a solar cell comprises a first graphite boat piece, a second graphite boat piece, a ceramic ring, a ceramic rod, a graphite nut and a clamping point, and is characterized in that the first graphite boat piece and the second graphite boat piece are alternately arranged in parallel, through holes are formed in the first graphite boat piece and the second graphite boat piece, the ceramic ring is arranged between the first graphite boat piece and the second graphite boat piece, the ceramic rod penetrates through the through holes and penetrates through the ceramic ring, the first graphite boat piece, the second graphite boat piece and the ceramic ring which are alternately arranged in parallel are tightly connected at two ends of the ceramic rod through the graphite nut, at least two cleaning holes are formed in the side wall of the ceramic ring, and the clamping point holes are formed in the positions, where silicon wafers are placed, of the first graphite boat piece and the second graphite boat piece, the clamping point is arranged in the clamping point hole.
2. The graphite boat for solar battery coating according to claim 1, wherein the cleaning holes are arranged symmetrically with respect to the axis of the ceramic ring.
3. The graphite boat for solar battery coating according to claim 1, wherein the diameter of the ceramic ring is set to 5 mm.
4. The graphite boat for solar battery coating according to claim 1, wherein the length of the ceramic ring is 10-12 mm.
5. The graphite boat for solar battery coating according to claim 4, wherein the length of the ceramic ring is 10.5 mm.
6. The graphite boat for solar battery coating according to claim 1, wherein the number of the clamping point holes and the clamping points is three, and the three clamping point holes are arranged in a triangle.
7. The graphite boat for solar battery coating according to claim 1, wherein the cross section of the end of the clamping point can be one of triangular, diamond, circular and oval.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911415006.4A CN111020532A (en) | 2019-12-31 | 2019-12-31 | Graphite boat for solar cell coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911415006.4A CN111020532A (en) | 2019-12-31 | 2019-12-31 | Graphite boat for solar cell coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111020532A true CN111020532A (en) | 2020-04-17 |
Family
ID=70197756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911415006.4A Pending CN111020532A (en) | 2019-12-31 | 2019-12-31 | Graphite boat for solar cell coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111020532A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116837446A (en) * | 2023-09-01 | 2023-10-03 | 无锡釜川科技股份有限公司 | Split electroplating device |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201962359U (en) * | 2011-01-11 | 2011-09-07 | 无锡绿波新能源设备有限公司 | Graphite boat carrier |
| CN102181846A (en) * | 2011-04-01 | 2011-09-14 | 石金精密科技（深圳）有限公司 | Cavity-type graphite boat |
| CN102354676A (en) * | 2011-10-25 | 2012-02-15 | 无锡绿波新能源设备有限公司 | Graphite boat |
| CN102610701A (en) * | 2012-04-06 | 2012-07-25 | 无锡绿波新能源设备有限公司 | Graphite boat being convenient to dismantle and assemble |
| CN202796886U (en) * | 2012-08-15 | 2013-03-13 | 常州市立新石墨有限公司 | Graphite boat |
| CN205177803U (en) * | 2015-12-03 | 2016-04-20 | 通威太阳能（合肥）有限公司 | Graphite boat |
| CN106191817A (en) * | 2016-09-23 | 2016-12-07 | 国家电投集团西安太阳能电力有限公司 | Solar silicon wafers plated film graphite boat piece and graphite boat |
| CN209232747U (en) * | 2018-12-31 | 2019-08-09 | 上海弘竣实业有限公司 | A kind of graphite boat that can carry 264 silicon wafers |
| CN211771540U (en) * | 2019-12-31 | 2020-10-27 | 昊诚光电（太仓）有限公司 | Graphite boat for solar cell coating |
-
2019
- 2019-12-31 CN CN201911415006.4A patent/CN111020532A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201962359U (en) * | 2011-01-11 | 2011-09-07 | 无锡绿波新能源设备有限公司 | Graphite boat carrier |
| CN102181846A (en) * | 2011-04-01 | 2011-09-14 | 石金精密科技（深圳）有限公司 | Cavity-type graphite boat |
| CN102354676A (en) * | 2011-10-25 | 2012-02-15 | 无锡绿波新能源设备有限公司 | Graphite boat |
| CN102610701A (en) * | 2012-04-06 | 2012-07-25 | 无锡绿波新能源设备有限公司 | Graphite boat being convenient to dismantle and assemble |
| CN202796886U (en) * | 2012-08-15 | 2013-03-13 | 常州市立新石墨有限公司 | Graphite boat |
| CN205177803U (en) * | 2015-12-03 | 2016-04-20 | 通威太阳能（合肥）有限公司 | Graphite boat |
| CN106191817A (en) * | 2016-09-23 | 2016-12-07 | 国家电投集团西安太阳能电力有限公司 | Solar silicon wafers plated film graphite boat piece and graphite boat |
| CN209232747U (en) * | 2018-12-31 | 2019-08-09 | 上海弘竣实业有限公司 | A kind of graphite boat that can carry 264 silicon wafers |
| CN211771540U (en) * | 2019-12-31 | 2020-10-27 | 昊诚光电（太仓）有限公司 | Graphite boat for solar cell coating |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116837446A (en) * | 2023-09-01 | 2023-10-03 | 无锡釜川科技股份有限公司 | Split electroplating device |
| CN116837446B (en) * | 2023-09-01 | 2023-12-01 | 无锡釜川科技股份有限公司 | Split electroplating device |
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