CN204810665U - Electrode coplane discharge plasma generating device in pairs - Google Patents
Electrode coplane discharge plasma generating device in pairs Download PDFInfo
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- CN204810665U CN204810665U CN201520522289.3U CN201520522289U CN204810665U CN 204810665 U CN204810665 U CN 204810665U CN 201520522289 U CN201520522289 U CN 201520522289U CN 204810665 U CN204810665 U CN 204810665U
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- electrode
- paired
- paired electrode
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- pairs
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- 239000000463 material Substances 0.000 claims description 14
- 230000005611 electricity Effects 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 230000002349 favourable effect Effects 0.000 abstract 1
- 230000004888 barrier function Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
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- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The utility model relates to a plasma produces and low temperature plasma technical field, specifically discloses an electrode coplane discharge plasma generating device in pairs, and it includes medium and a plurality of to electrode in pairs, the electrode is that two intervals are nearer, positive and negative polarity identical's electrode in pairs, the adjacent positive and negative polarity between the electrode in pairs is opposite. The utility model discloses a nearer, the positive and negative spaced of design interval electrode in pairs forms the spaced electrode effect, has guaranteed plasma discharge's stability, is favorable to dielectric surface to form even exoelectric plasmasphere.
Description
Technical field
The utility model relates to plasma generation and lower temperature plasma technology field, is specifically related to a kind of paired electrode coplanar discharge plasma producing apparatus.
Background technology
Low temperature plasma is at material surface modifying, thin film deposition, light source, and there is a lot of application the aspect such as plasma etching.Dielectric barrier discharge is a kind of a kind of discharge type adding dielectric layer between sparking electrode.Due to the existence of medium, make electric discharge more stable, and it is excessive and form the danger of electric arc to avoid electric current.Dielectric barrier discharge is the important method of atmosphere pressure discharging.
Dielectric barrier discharge is distinguished can be divided into by discharging structure: body discharges, creeping discharge and coplanar discharge three kinds.Wherein coplanar discharge has greater advantage, is placed in homonymy and buries among medium due to electrode in coplanar discharge, and plasma generation is in dielectric surface and have certain thickness.This structure can carry out material surface modifying, thin film deposition by the device surface larger to thickness, also may be used for plasma source etc.
In the coplanar discharge device of usual design, the electrode buried in dielectric layer is " single electrode " arrangement, and adjacent electrode receives high-pressure side and the earth terminal of high voltage source respectively.In whole coplanar dielectric barrier discharge device, the electrode connecing power supply high voltage end and earth terminal is spaced.Due to the error of accuracy of electrode processing, produce in plasma process at the gas discharge of this device, first first electric discharge always produce in the region that electric field strength is maximum and expand, this just causes plasma only may result from the side of " single electrode ", instead of region produces between whole any two " single electrodes ".The plasma that such coplanar dielectric barrier discharge device produces has obvious inhomogeneities.
Utility model content
The purpose of this utility model, for providing a kind of paired electrode coplanar discharge plasma producing apparatus, can produce uniform plasma in coplanar discharge device.
In order to solve the problems of the technologies described above, the technical solution adopted in the utility model is:
A kind of paired electrode coplanar discharge plasma producing apparatus, it comprises medium and some to paired electrode; Paired electrode is the electrode that two spacing are comparatively near, positive-negative polarity is identical; Positive-negative polarity between adjacent paired electrode is contrary.
It also comprises two 2 single electrodes; Described medium is tabular medium; From while be provided with a single electrode A, some to paired electrode, a single electrode B successively to another side in tabular medium;
When the logarithm of described paired electrode is even number, single electrode A and even-even paired electrode connect high-tension electricity; Single electrode B and odd number are to paired electrode ground connection;
When the logarithm of described paired electrode is odd number, single electrode A, single electrode B and even-even paired electrode connect high-tension electricity; Odd number is to paired electrode ground connection.
Described tabular medium is pottery or quartz material; The material of described electrode is graphite, metal or alloy.
The material of described electrode is Al, and tabular medium material is Al
2o
3; The width of single electrode is 1mm; Distance between two electrodes of composition paired electrode is 3mm; Distance between distance between single electrode and paired electrode, adjacent two pairs of paired electrodes is 1 ~ 10mm.
Described medium is cylindric medium; Cylindric media inside surface is evenly provided with some to paired electrode.
The beneficial effects of the utility model are:
The paired electrode at a kind of nearer by design pitch, positive and negative interval of paired electrode coplanar discharge plasma producing apparatus that the utility model provides forms spaced electrode effect, ensure that the stable of plasma discharge, be conducive to the plasmasphere that dielectric surface forms Uniform Discharge.
Accompanying drawing explanation
The paired electrode coplanar discharge plasma producing apparatus schematic diagram that Fig. 1 provides for the utility model;
Fig. 2 is the end view of paired electrode.
In figure: 1. tabular medium, 2. single electrode A, 3. single electrode B, 4. paired electrode A, 5. paired electrode B, 6. positive wire, 7. cathode conductor, 8. cylindric medium.
Embodiment
Below in conjunction with the drawings and specific embodiments, the technical solution of the utility model and beneficial effect are described further.
Paired electrode coplanar discharge plasma producing apparatus of the present utility model comprises medium and some to paired electrode; Paired electrode is the electrode that two spacing are comparatively near, positive-negative polarity is identical; Positive-negative polarity between adjacent paired electrode is contrary.
As shown in Figure 1, the paired electrode coplanar discharge plasma producing apparatus in the present embodiment comprises tabular medium 1, several single electrodes, some to paired electrode.Tabular medium 1 is pottery or quartz material.Be provided with some electrodes in tabular medium 1, comprise single electrode and paired electrode.Paired electrode is nearer two the single electrodes in interval.The material of electrode is graphite, metal or alloy.In the present embodiment, tabular medium 1 is interior from being provided with a single electrode A 2,9 pairs of paired electrodes, a single electrode B 3 successively to another side.Single electrode A 2, single electrode B 3 and the 2nd in paired electrode, 4,6,8, to being connected with positive wire 6 respectively, connect high-tension electricity.In paired electrode the 1st, 3,5,7,9 to being connected with cathode conductor 7 respectively, ground connection.
In the prior art, all electrodes are all single electrodes, first first electric discharge always produce in the region that electric field strength is maximum and expand, this just causes plasma only may result from the side of single electrode, instead of region produces between whole any two single electrodes, the plasma that such coplanar dielectric barrier discharge device produces has obvious inhomogeneities.
The utility model provides the design of paired electrode, and in a pair paired electrode, two electrode positive-negative polarities are identical.Between single electrode A 2 and paired electrode A4, form high-intensity magnetic field, form plasma discharge.And paired electrode A 4, paired electrode B5 ground connection simultaneously, then ensure that the stable of plasma discharge.Experiment proves, such design forming spaced electrode effect, is conducive to the plasmasphere that tabular medium 1 surface forms Uniform Discharge.
In the present embodiment, paired electrode coplanar discharge plasma producing apparatus adopts and aluminium block is carried out anodised mode obtains.The material of electrode is Al, and tabular medium 1 material is Al
2o
3; The width of single electrode is 1mm.Distance between two electrodes of composition paired electrode is 3mm.Distance between distance between single electrode and paired electrode, adjacent two pairs of paired electrodes is 1 ~ 10mm.
In another embodiment, the positive-negative polarity cylindric medium 8 is evenly provided with between some to paired electrode, adjacent paired electrodes is contrary.After energising, cylindric medium 8 surface forms the plasmasphere of Uniform Discharge.
Claims (6)
1. a paired electrode coplanar discharge plasma producing apparatus, is characterized in that: it comprises medium and some to paired electrode; Paired electrode is the electrode that two spacing are comparatively near, positive-negative polarity is identical; Positive-negative polarity between adjacent paired electrode is contrary.
2. a kind of paired electrode coplanar discharge plasma producing apparatus according to claim 1, is characterized in that: it also comprises two 2 single electrodes; Described medium is tabular medium (1); From while be provided with a single electrode A (2), some to paired electrode, a single electrode B (3) successively to another side in tabular medium (1).
3. a kind of paired electrode coplanar discharge plasma producing apparatus according to claim 2, is characterized in that: when the logarithm of described paired electrode is even number, and single electrode A (2) and even-even paired electrode connect high-tension electricity; Single electrode B (3) and odd number are to paired electrode ground connection;
When the logarithm of described paired electrode is odd number, single electrode A (2), single electrode B (3) and even-even paired electrode connect high-tension electricity; Odd number is to paired electrode ground connection.
4. a kind of paired electrode coplanar discharge plasma producing apparatus according to claim 3, is characterized in that: described tabular medium (1) is pottery or quartz material; The material of described electrode is graphite, metal or alloy.
5. a kind of paired electrode coplanar discharge plasma producing apparatus according to claim 4, is characterized in that: the material of described electrode is Al, and tabular medium (1) material is Al
2o
3; The width of single electrode is 1mm; Distance between two electrodes of composition paired electrode is 3mm; Distance between distance between single electrode and paired electrode, adjacent two pairs of paired electrodes is 1 ~ 10mm.
6. a kind of paired electrode coplanar discharge plasma producing apparatus according to claim 1, is characterized in that: described medium is cylindric medium (8); Cylindric medium (8) outer surface is evenly provided with some to paired electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520522289.3U CN204810665U (en) | 2015-07-17 | 2015-07-17 | Electrode coplane discharge plasma generating device in pairs |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520522289.3U CN204810665U (en) | 2015-07-17 | 2015-07-17 | Electrode coplane discharge plasma generating device in pairs |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204810665U true CN204810665U (en) | 2015-11-25 |
Family
ID=54595408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520522289.3U Withdrawn - After Issue CN204810665U (en) | 2015-07-17 | 2015-07-17 | Electrode coplane discharge plasma generating device in pairs |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204810665U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106714434A (en) * | 2015-07-17 | 2017-05-24 | 核工业西南物理研究院 | Coplanar discharging plasma generating device of electrodes in pair |
| CN106961778A (en) * | 2017-04-27 | 2017-07-18 | 罗璐 | Low temperature plasma generating device and preparation method thereof and reactor |
-
2015
- 2015-07-17 CN CN201520522289.3U patent/CN204810665U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106714434A (en) * | 2015-07-17 | 2017-05-24 | 核工业西南物理研究院 | Coplanar discharging plasma generating device of electrodes in pair |
| CN106714434B (en) * | 2015-07-17 | 2024-04-09 | 核工业西南物理研究院 | Paired electrode coplanar discharge plasma generating device |
| CN106961778A (en) * | 2017-04-27 | 2017-07-18 | 罗璐 | Low temperature plasma generating device and preparation method thereof and reactor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20151125 Effective date of abandoning: 20240409 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20151125 Effective date of abandoning: 20240409 |