CN109831866B - Double-ring electrode coplanar discharge plasma generating device - Google Patents
Double-ring electrode coplanar discharge plasma generating device Download PDFInfo
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- CN109831866B CN109831866B CN201711180889.6A CN201711180889A CN109831866B CN 109831866 B CN109831866 B CN 109831866B CN 201711180889 A CN201711180889 A CN 201711180889A CN 109831866 B CN109831866 B CN 109831866B
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Abstract
The invention belongs to the technical field of low-temperature plasmas, and particularly relates to a double-ring electrode coplanar discharge plasma generating device. The device is formed by closely arranging a power supply and a double-ring-shaped electrode unit buried in a dielectric layer; the double-ring electrode units comprise an inner ring electrode and an outer ring electrode, the inner ring electrode and the outer ring electrode are buried in a dielectric layer to a certain depth, the inner ring electrode is grounded, the outer ring electrode is connected with a high-frequency and high-voltage electrode of a high-voltage power supply, large-area uniform plasmas can be generated after the double-ring electrode units are combined, coplanar discharge plasmas are generated on the surface of the dielectric layer between the inner ring electrode and the outer ring electrode under the action of high voltage, and the plasmas are uniformly distributed.
Description
Technical Field
The invention belongs to the technical field of low-temperature plasmas, and particularly relates to a double-ring electrode coplanar discharge plasma generating device.
Background
The low-temperature plasma technology is widely applied to the aspects of material surface modification, film deposition, plasma light source, plasma etching and the like. In practical applications, a large area, uniform, efficient plasma generator is generally desired.
Dielectric barrier discharge is a form of discharge in which a dielectric layer is added between discharge electrodes. Due to the existence of the medium, the discharge is more stable, and the danger of arc formation caused by excessive current is avoided. Dielectric barrier discharge is an important method for atmospheric pressure discharge. Coplanar discharge is an important form of dielectric barrier discharge, as opposed to the other two forms of dielectric barrier discharge: the plasma generator comprises a body discharge, a creeping discharge and a coplanar discharge, wherein the coplanar discharge can place an electrode on one side, so that the purpose of generating plasma on one side of the plasma generator is realized. This gives the coplanar discharge a great advantage in practical applications: because the electrodes are arranged on the same side and buried in the medium in the coplanar discharge, the plasma is generated on the surface of the medium and has a certain thickness, and the structure can carry out material surface modification and film deposition on the surface of a device with larger thickness, and meanwhile, the safety is increased because the electrodes are arranged on the same side.
In a coplanar discharge device designed in general, a straight-line electrode positive electrode and negative electrode interval arrangement structure is adopted, namely: the linear electrodes are arranged in a way of being buried in the dielectric layer, the adjacent electrodes are respectively connected to a high-voltage end and a grounding end of a high-voltage power supply, and the positive electrodes and the negative electrodes are arranged at intervals. Due to the errors of electrode processing precision and the change of physical characteristics after discharge, after gas discharge of the device with the linear electrode positive electrode and negative electrode interval arrangement structure is generated, a discharge area is easy to generate in certain areas and form current channel enhancement, so that plasma can be generated only on one side of a 'linear electrode', but not in an area between any two 'linear electrodes' in a space on one side of the whole coplanar dielectric barrier discharge device, and the plasma generated by the coplanar dielectric barrier discharge device has obvious non-uniformity. In addition, the linear electrode array is not easy to array, and it is difficult to realize the electrode array in the large-area coplanar discharge plasma source and the non-planar coplanar discharge structure.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a double-ring electrode coplanar discharge plasma generating device.
The technical scheme of the invention is as follows:
a double-ring electrode coplanar discharge plasma generating device is formed by tightly arranging a power supply and double-ring electrode units buried in a dielectric layer; the double-ring electrode units comprise an inner ring electrode and an outer ring electrode, the inner ring electrode and the outer ring electrode are buried in a dielectric layer to a certain depth, the inner ring electrode is grounded, the outer ring electrode is connected with a high-frequency and high-voltage electrode of a high-voltage power supply, large-area uniform plasmas can be generated after the double-ring electrode units are combined, coplanar discharge plasmas are generated on the surface of the dielectric layer between the inner ring electrode and the outer ring electrode under the action of high voltage, and the plasmas are uniformly distributed.
A double-ring electrode coplanar discharge plasma generating device is characterized in that the material of a double-ring electrode unit is graphite, metal or alloy.
A double-ring electrode coplanar discharge plasma generating device, the interval of the double-ring electrode unit is smaller, generally smaller than 3mm.
A double-ring electrode coplanar discharge plasma generating device is characterized in that the shape of a double-ring electrode unit is triangle, quadrangle, pentagon, hexagon, decagon, dodecagon or a combination thereof.
A double-ring electrode coplanar discharge plasma generating device, the thickness of the inner ring electrode and the outer ring electrode is less than 2mm,
a double-ring electrode coplanar discharge plasma generating device, the width of the inner ring electrode and the outer ring electrode is smaller than 2mm.
A double-ring electrode coplanar discharge plasma generating device is characterized in that the distance between an inner ring electrode and an outer ring electrode is smaller than 10mm, and the inner ring electrode and the outer ring electrode are closely arranged on a plane or a spherical surface to form a large-area coplanar discharge plasma generating device.
The invention has the beneficial effects that:
the invention relates to a double-ring electrode coplanar discharge plasma generating device, which is formed by closely arranging a plurality of ring electrode units buried in a dielectric layer; an annular electrode unit is composed of annular electrodes with a certain thickness, an inner triangle, a quadrangle, a pentagon, a hexagon, a decagon, a dodecagon or a combination thereof. In the use state, the inner ring electrode and the outer ring electrode of the double-ring electrode unit are respectively grounded and connected with high frequency and high voltage, and all the double-ring electrodes are buried under the dielectric layer to a certain depth. In the electrified state, coplanar discharge plasmas are generated between the double-ring electrodes under the action of high voltage, and the plasmas are uniformly distributed. The multiple double-ring electrode units can generate large-area uniform plasmas after being combined.
The technology uses polygonal double-ring electrodes connected with two poles of a power supply to realize electrode arrays in a large-area coplanar discharge plasma source and a non-planar coplanar discharge structure, and solves the problems that plasma generated by the device has obvious non-uniformity and is difficult to array in a coplanar discharge device adopting 'straight-line electrodes' with positive poles and negative poles arranged at intervals in the prior art. The double-ring electrode coplanar discharge plasma generating device can be used for coplanar discharge plasma generating devices, can generate uniform plasmas between any two double-ring electrodes under low pressure, high pressure or atmospheric pressure, and can be used in the fields of material surface modification and the like.
Drawings
FIG. 1 is a schematic view of a ring electrode unit and wiring portion of a dual ring electrode coplanar discharge plasma generator according to the present invention;
FIG. 2 is a schematic diagram of a plurality of ring electrode unit arrays of a double ring electrode coplanar discharge plasma generating apparatus according to the present invention;
FIG. 3 is a schematic top view of a plurality of double-ring electrode unit arrays of a double-ring electrode coplanar discharge plasma generator according to the present invention;
FIG. 4 is a schematic diagram of a double-ring electrode coplanar discharge plasma generator according to the present invention;
FIG. 5 is a schematic top view of a double-ring electrode coplanar discharge plasma generator according to the present invention;
in the figure: 1 is an inner ring electrode, 2 is an outer ring electrode, 3 is the width of the inner ring electrode, and 4 is the distance between the inner ring electrode and the outer ring electrode.
Detailed Description
The invention will be described in further detail with reference to the accompanying drawings and specific examples.
As shown in the figure, the double-ring electrode coplanar discharge plasma generating device is formed by tightly arranging a power supply and double-ring electrode units buried in a dielectric layer; the double-ring electrode unit comprises an inner ring electrode 1 and an outer ring electrode 2, and the inner ring electrode 1 and the outer ring electrode 2 are buried in a dielectric layer to a certain depth. In the use state, the inner ring electrode 1 of the double-ring electrode unit is grounded, and the outer ring electrode 2 is connected with a high-frequency and high-voltage electrode of a high-voltage power supply.
In the energized state, coplanar discharge plasmas are generated on the surface of the medium layer between the inner ring electrode 1 and the outer ring electrode 2 under the action of high voltage, and the plasmas are uniformly distributed.
The multiple double-annular electrode units can generate large-area uniform plasmas after being combined.
The material of the double-ring-shaped electric unit is graphite, metal or alloy; the spacing between the double annular electrode units is small, typically less than 3mm.
The shape of the double-annular electrode unit is triangle, quadrangle, pentagon, hexagon, decagon, dodecagon or the combination thereof; the thickness of the inner ring electrode 1 and the outer ring electrode 2 is smaller than 2mm, and the width 3 of the inner ring electrode 1 and the outer ring electrode 2 is smaller than 2mm.
The interval 4 between the inner ring electrode 1 and the outer ring electrode 2 is smaller than 10mm, and the inner ring electrode and the outer ring electrode can be closely arranged on a plane or a spherical surface to form a large-area coplanar discharge plasma generating device.
When the plasma generating device works, the inner double-ring electrode is buried in the dielectric layer for a certain depth, the double rings are respectively connected to the grounding end or the high-frequency and high-voltage end of the power supply, and under the action of the high-frequency and high-voltage, coplanar discharge is generated on the surfaces of the dielectric layers on the paired electrodes, so that plasma is formed.
The device for generating the coplanar discharge plasma can generate uniform plasma at low pressure, high pressure or atmospheric pressure, and can be used for material surface modification, film deposition, light source or other applications.
Those of ordinary skill in the art will recognize that the embodiments described herein are for the purpose of aiding the reader in understanding the principles of the present invention and should be understood that the scope of the invention is not limited to such specific statements and embodiments. Numerous other specific modifications and combinations of parts can be devised by those skilled in the art which fall within the scope of the invention in light of the teachings of this invention.
Claims (6)
1. A double-ring electrode coplanar discharge plasma generating device is characterized in that: the dual-ring electrode unit is formed by tightly arranging a power supply and a dual-ring electrode unit buried in a dielectric layer; the double-ring electrode unit comprises an inner ring electrode (1) and an outer ring electrode (2), wherein the inner ring electrode (1) and the outer ring electrode (2) are buried in a dielectric layer to a certain depth, the inner ring electrode (1) is grounded, the outer ring electrode (2) is connected with a high-frequency and high-voltage electrode of a high-voltage power supply, large-area uniform plasmas can be generated after a plurality of double-ring electrode units are combined, the surface of the dielectric layer between the inner ring electrode (1) and the outer ring electrode (2) generates coplanar discharge plasmas under the action of high voltage, and the plasmas are uniformly distributed.
2. A double-ring electrode coplanar discharge plasma generating apparatus as defined in claim 1 wherein: the material of the double-ring-shaped electrode unit is graphite or metal.
3. A double-ring electrode coplanar discharge plasma generating apparatus as defined in claim 1 wherein: the interval between the two annular electrode units is smaller than 3mm.
4. A double-ring electrode coplanar discharge plasma generating apparatus as defined in claim 1 wherein: the thickness of the inner ring electrode (1) and the outer ring electrode (2) is smaller than 2mm.
5. A double-ring electrode coplanar discharge plasma generating apparatus as defined in claim 1 wherein: the widths (3) of the inner ring electrode (1) and the outer ring electrode (2) are smaller than 2mm.
6. A double-ring electrode coplanar discharge plasma generating apparatus as defined in claim 1 wherein: the space (4) between the inner ring electrode (1) and the outer ring electrode (2) is smaller than 10mm, and the inner ring electrode and the outer ring electrode are closely arranged on a plane or a spherical surface to form a large-area coplanar discharge plasma generating device.
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| CN201711180889.6A CN109831866B (en) | 2017-11-23 | 2017-11-23 | Double-ring electrode coplanar discharge plasma generating device |
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| CN201711180889.6A CN109831866B (en) | 2017-11-23 | 2017-11-23 | Double-ring electrode coplanar discharge plasma generating device |
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| CN109831866B true CN109831866B (en) | 2023-10-20 |
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| CN111617716A (en) * | 2020-06-09 | 2020-09-04 | 常州大学 | Metal honeycomb type plasma discharge reactor |
| CN113511439B (en) * | 2021-06-30 | 2022-09-16 | 南京工业大学 | Be used for municipal administration kitchen garbage transfer deodorizing device |
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