CN109803476A - A kind of body arc discharge plasma generating device - Google Patents
A kind of body arc discharge plasma generating device Download PDFInfo
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- CN109803476A CN109803476A CN201711143554.7A CN201711143554A CN109803476A CN 109803476 A CN109803476 A CN 109803476A CN 201711143554 A CN201711143554 A CN 201711143554A CN 109803476 A CN109803476 A CN 109803476A
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Abstract
The invention belongs to plasmas to generate and lower temperature plasma technology field, and in particular to a kind of body arc discharge plasma generating device.The present apparatus includes power supply, upper grid electrode group and lower grid electrode group, the grating type electrode group is made of the single grid electrode of multiple parallel, coplanar arrangements, upper grid electrode group and Under The Grille electrode group are respectively connected to two poles of power supply, two grating type electrodes can be exposed opposite, or in which one be imbedded in certain depth, or both under dielectric layer and be all imbedded in certain depth under dielectric layer.The present apparatus reduces discharge voltage；It is more conducive to gas discharge at existing fringing field and maintains and reduce reactance capacity；The capacitance for changing electrode structure is more advantageous to the capacitor matching of circuit.Compared to ordinary electrode structure, discharge voltage of the present invention is low, discharging efficiency is high, capacitor is adjustable is conducive to Circuit Matching and plasma is evenly distributed.
Description
Technical field
The invention belongs to plasmas to generate and lower temperature plasma technology field, and in particular to a kind of body plasma discharging
Body generating device.
Background technique
Plasma technique is one of basis of modern science and technology, is widely applied to the neck such as material, light source, energy
Domain.Lower temperature plasma technology is the important branch of plasma technique, is widely applied to material preparation, material surface changes
Property, film deposition and the fields such as plasma source and plasma etching.In low temperature plasma application, plasma
Body generating device is the important component during plasma application, is related to the application water of efficiency of energy utilization and plasma
Equality various problems.The generation of plasma and plasma producing apparatus have much relations, and plasma producing apparatus is
The important component of plasma application, good plasma generating equipment can effectively improve discharging efficiency, reduce lost work
The plasma of consumption and generation more evenly, is more advantageous to the application of plasma, improves corona treatment processing performance.
In general, inductive type and capacitive electrode structure are used in plasma producing apparatus electrode design, are specifically answered
Used time is selected according to needs and power supply natures are specifically applied, and capacitive electrode structure is relatively easy, electric with its structure
The advantages that field distribution is uniform, the fields such as modification, plasma source are widely used on the surface of the material.It is put in direct-current discharge, low frequency
In electricity and high-frequency discharge, plate capacitive electrode structure is in the highest flight.This electrode is simple with discharging structure, is easy to add
The features such as work is with designing and being conducive to specific plasma application.Flat pole structure generallys use simple processing method,
It is processed into cylindrical or other shapes.But in this common electrode structure, minimum difference is generated in machining accuracy be will lead to
Electric field is unevenly distributed, and then generates the stronger discharge channel in part, and electricity can be further amplified after generating in this discharge channel
Plasma caused by the inhomogeneities of field is unevenly distributed.Meanwhile the capacitor of device can be made to fix when electrode structure fixation,
It is difficult to be adjusted in terms of Circuit Matching, causes the electric discharge firing voltage of plasma producing apparatus high, discharging efficiency is low.
Summary of the invention
The purpose of the present invention is be directed to fill using the capacitive plasma of cylindrical plate electrode in the prior art
In setting, device discharges, and firing voltage is high, and the low problem of discharging efficiency provides a kind of body arc discharge plasma generating device.
Technical scheme is as follows:
A kind of body arc discharge plasma generating device, including power supply, upper grid electrode group and lower grid electrode group, the lattice
Grating electrode group is made of the single grid electrode of multiple parallel, coplanar arrangements, upper grid electrode group and Under The Grille electrode component
Not Jie Ru power supply two poles, two grating type electrodes can be exposed opposite or in which one is imbedded in certain depth under dielectric layer,
Or both be all imbedded in certain depth under dielectric layer.
A kind of body arc discharge plasma generating device, single grid electrode are the cuboid of a length of 100mm, and cuboid is transversal
Face is the square that side length is 1mm, and the spacing between each single grid single electrode is 10mm.
A kind of body arc discharge plasma generating device, single grid electrode can be for the rectangular of cuboid article shape protrusion
Body strip structure, a height of 0.5mm of protrusion, width 1mm, thickness is identical as cuboid strip structure thickness, is 1mm.
A kind of body arc discharge plasma generating device, the single electrode phase in the upper grid electrode group and Under The Grille electrode group
It is mutually vertical, and the interval of upper grid electrode and Under The Grille electrode is smaller, typically less than 10mm.
The material of a kind of body arc discharge plasma generating device, the upper grid electrode group and Under The Grille motor group is stone
Ink, metal, alloy.
A kind of body arc discharge plasma generating device, it is single in the upper grating type electrode group and Under The Grille formula electrode group
Grid electrode is mutually perpendicular to, and protrusion is distributed in the central location in two crosspoints.
The beneficial effects of the present invention are:
In order to overcome plasma distribution caused by traditional parallel plates discharge capacity type electrode structure simply reinforced
Unevenly, the problems such as firing voltage is high caused by the capacitor of electric discharge device is fixed, is not easily adjustable, discharging efficiency is low, this hair
It is bright to devise a kind of body plasma discharging body device, occurred by a kind of body discharge plasma with grating type electrode structure
Device improves the above problem, obtains better effects.
It is generated a kind of macroscopically uniform, microcosmic non-uniform due to grid electrode structure equally distributed in the present invention
Field distribution: being more also easy to produce gas discharge at high electric field, to reduce discharge voltage；Gas discharge dimension is more conducive at existing fringing field
Hold and reduce reactance capacity.Grating type electrode structure helps to change the capacitance of electrode structure, is more advantageous to the capacitor of circuit
Matching problem.Meanwhile macroscopically equally distributed grating type electrode structure makes plasma be easier to reach and be uniformly distributed.
Thus, relative to the plasma producing apparatus of ordinary flat type electrode structure, a kind of body electric discharge of the invention etc.
Plasma generator includes that discharge voltage is low, discharging efficiency is high, capacitor is adjustable is conducive to Circuit Matching and plasma distribution
Uniformly.
Detailed description of the invention
Fig. 1 is the structural representation of the grid electrode and tie-portion of a kind of body arc discharge plasma generating device of the invention
Figure；
Fig. 2 is a kind of grid electrode partial top schematic diagram of body arc discharge plasma generating device of the invention
Fig. 3 is a kind of structural schematic diagram of the single grid electrode of body arc discharge plasma generating device of the invention；
Fig. 4 is the grid electrode and tie-portion with protrusion of a kind of body arc discharge plasma generating device of the invention
Structural schematic diagram；
Fig. 5 is that a kind of grid electrode partial top with protrusion of body arc discharge plasma generating device of the invention shows
It is intended to
Fig. 6 is a kind of structure of the single grid electrode with protrusion of body arc discharge plasma generating device of the invention
Schematic diagram；
In figure: 1 is upper grid electrode group；2 be Under The Grille electrode group；3 be single grid electrode；7 be protrusion.
Specific embodiment
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
A kind of body arc discharge plasma generating device of the invention, including power supply, upper grid electrode group 1 and lower grid electrode
Group 2 is constituted, and the grating type electrode group is made of the single grid electrode 3 of multiple parallel, coplanar arrangements, single grid electrode 3
For the cuboid of a length of 100mm, cuboid cross section is the square that side length is 1mm, between each single grid single electrode 3
Spacing is 10mm.
As shown in Figure 1, the upper grid electrode group 1 and Under The Grille electrode group 2 are respectively connected to power supply under use state
Two poles, two grating type electrodes can be exposed opposite or in which one is imbedded in certain depth, or both under dielectric layer and all buries
Ensconce certain depth under dielectric layer.Under energized state, two grating type electrode groups and between, produced under power supply effect
Raw body discharges and generates the plasma being evenly distributed.
The material of upper grid electrode group 1 and Under The Grille motor group 2 is graphite, metal or alloy.
As depicted in figs. 1 and 2, the single electrode 3 in the upper grid electrode group 1 and Under The Grille electrode group 2 is mutually perpendicular to, and
The interval of upper grid electrode and Under The Grille electrode is smaller, typically less than 10mm.
As shown in figure 3, the single electrode section in described two grating type electrode groups is rectangular cuboid.
In another embodiment, as shown in figure 4, single grid electrode 3 can be the length with cuboid article shape protrusion 7
Cube strip structure, a height of 0.5mm of protrusion, width 1mm, thickness is identical as cuboid strip structure thickness, is 1mm.Such as Fig. 5 institute
Show, the single grid electrode 3 in upper grating type electrode group 1 and Under The Grille formula electrode group 2 is mutually perpendicular to, and protrusion 7 is distributed in two
The central location in a crosspoint.As shown in fig. 6, having cuboid protrusion 7 on single grid electrode 3 in grating type electrode group.
A kind of body arc discharge plasma generating device generates plasma method, it is characterised in that including following step
It is rapid:
By described two grating type electrodes are exposed or either or both of them is all buried in dielectric layer certain depth, two
A electrode gap is less than 10mm, is respectively connected to two poles of power supply.Under the action of power supply, it will be produced between two grating type electrodes
Raw body electric discharge, forms homogeneous plasma.A kind of body arc discharge plasma generating device, can be in low pressure, hyperbar or big
Homogeneous plasma is generated under air pressure, discharge voltage is relatively low and discharging efficiency improves, and plasma is evenly distributed, Ke Yiyong
In material surface modifying, film deposition, light source or other application.
It is described to be used for grating type plasma producing apparatus, it can be generated under low pressure, hyperbar or atmospheric pressure uniformly
Plasma, discharge voltage is relatively low and discharging efficiency improves, and plasma is evenly distributed, can be used for material surface and change
Property, film deposition, light source or other application.
Claims (6)
1. a kind of body arc discharge plasma generating device, including power supply, upper grid electrode group and lower grid electrode group, feature exist
In: the grating type electrode group is made of the single grid electrode of multiple parallel, coplanar arrangements, upper grid electrode group and Under The Grille
Electrode group is respectively connected to two poles of power supply, and two grating type electrodes can be exposed opposite or in which one is imbedded under dielectric layer
Certain depth, or both is all imbedded in certain depth under dielectric layer.
2. a kind of body arc discharge plasma generating device as described in claim 1, it is characterised in that: single grid electrode is length
For the cuboid of 100mm, cuboid cross section is the square that side length is 1mm, the spacing between each single grid single electrode
For 10mm.
3. a kind of body arc discharge plasma generating device as described in claim 1, it is characterised in that: single grid electrode can be with
For the cuboid strip structure with cuboid article shape protrusion, protrusion a height of 0.5mm, width 1mm, thickness and cuboid bar shaped knot
Structure thickness is identical, is 1mm.
4. a kind of body arc discharge plasma generating device as described in claim 1, it is characterised in that: the upper grid electrode group
It is mutually perpendicular to the single electrode in Under The Grille electrode group, and the interval of upper grid electrode and Under The Grille electrode is smaller, it is generally small
In 10mm.
5. a kind of body arc discharge plasma generating device as claimed in claim 2 or claim 3, it is characterised in that: the upper grid electricity
The material of pole group and Under The Grille motor group is graphite, metal, alloy.
6. a kind of body arc discharge plasma generating device as claimed in claim 3, it is characterised in that: the upper grating type electrode
Single grid electrode in group and Under The Grille formula electrode group is mutually perpendicular to, and protrusion is distributed in the central location in two crosspoints.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711143554.7A CN109803476A (en) | 2017-11-17 | 2017-11-17 | A kind of body arc discharge plasma generating device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711143554.7A CN109803476A (en) | 2017-11-17 | 2017-11-17 | A kind of body arc discharge plasma generating device |
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| CN201711143554.7A Pending CN109803476A (en) | 2017-11-17 | 2017-11-17 | A kind of body arc discharge plasma generating device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111629506A (en) * | 2020-05-20 | 2020-09-04 | 中国人民解放军空军工程大学 | Large-area space uniform plasma generator and generation method |
| CN113630948A (en) * | 2021-08-16 | 2021-11-09 | 西安交通大学 | Grid array type uniform plasma device |
| CN113747647A (en) * | 2021-08-16 | 2021-12-03 | 西安交通大学 | Double-grid-surface type uniform plasma generator and preparation method thereof |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07315807A (en) * | 1994-05-24 | 1995-12-05 | V M C:Kk | Ozonizer |
| DE29702056U1 (en) * | 1997-01-30 | 1998-06-04 | Mann, Rido, Dr., 64331 Weiterstadt | Device for excitation of air and gases |
| US20050005948A1 (en) * | 2003-06-16 | 2005-01-13 | Kurunczi Peter Frank | Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads |
| JP2005188424A (en) * | 2003-12-26 | 2005-07-14 | Ngk Insulators Ltd | Plasma generating electrode, and plasma reactor |
| WO2006134123A2 (en) * | 2005-06-16 | 2006-12-21 | Siemens Aktiengesellschaft | Method and device for producing large atmospheric pressure plasmas |
| CN102548177A (en) * | 2012-01-13 | 2012-07-04 | 北京交通大学 | Discharge electrode structure of plasma air purification device |
| CN102711909A (en) * | 2009-12-24 | 2012-10-03 | 奇诺格有限责任公司 | Electrode arrangement for a dielectric barrier discharge plasma treatment and method for plasma treatment of a surface |
| JP2016030231A (en) * | 2014-07-29 | 2016-03-07 | 株式会社Ｉｈｉ環境エンジニアリング | Gas treatment apparatus |
| WO2017026016A1 (en) * | 2015-08-07 | 2017-02-16 | 三菱電機株式会社 | Solar battery cell and method for fabricating solar battery cell |
| CN208258158U (en) * | 2017-11-17 | 2018-12-18 | 核工业西南物理研究院 | A kind of body arc discharge plasma generating device |
-
2017
- 2017-11-17 CN CN201711143554.7A patent/CN109803476A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07315807A (en) * | 1994-05-24 | 1995-12-05 | V M C:Kk | Ozonizer |
| DE29702056U1 (en) * | 1997-01-30 | 1998-06-04 | Mann, Rido, Dr., 64331 Weiterstadt | Device for excitation of air and gases |
| US20050005948A1 (en) * | 2003-06-16 | 2005-01-13 | Kurunczi Peter Frank | Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads |
| JP2005188424A (en) * | 2003-12-26 | 2005-07-14 | Ngk Insulators Ltd | Plasma generating electrode, and plasma reactor |
| WO2006134123A2 (en) * | 2005-06-16 | 2006-12-21 | Siemens Aktiengesellschaft | Method and device for producing large atmospheric pressure plasmas |
| CN102711909A (en) * | 2009-12-24 | 2012-10-03 | 奇诺格有限责任公司 | Electrode arrangement for a dielectric barrier discharge plasma treatment and method for plasma treatment of a surface |
| CN102548177A (en) * | 2012-01-13 | 2012-07-04 | 北京交通大学 | Discharge electrode structure of plasma air purification device |
| JP2016030231A (en) * | 2014-07-29 | 2016-03-07 | 株式会社Ｉｈｉ環境エンジニアリング | Gas treatment apparatus |
| WO2017026016A1 (en) * | 2015-08-07 | 2017-02-16 | 三菱電機株式会社 | Solar battery cell and method for fabricating solar battery cell |
| CN208258158U (en) * | 2017-11-17 | 2018-12-18 | 核工业西南物理研究院 | A kind of body arc discharge plasma generating device |
Non-Patent Citations (1)
| Title |
|---|
| 宁录胜;徐明;郭成安;赵鹏;闻路红;张新荣;: "单电极介质阻挡放电离子源研究", 分析化学, no. 02 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111629506A (en) * | 2020-05-20 | 2020-09-04 | 中国人民解放军空军工程大学 | Large-area space uniform plasma generator and generation method |
| CN113630948A (en) * | 2021-08-16 | 2021-11-09 | 西安交通大学 | Grid array type uniform plasma device |
| CN113747647A (en) * | 2021-08-16 | 2021-12-03 | 西安交通大学 | Double-grid-surface type uniform plasma generator and preparation method thereof |
| CN113747647B (en) * | 2021-08-16 | 2023-03-14 | 西安交通大学 | Double-grid-surface type uniform plasma generator and preparation method thereof |
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