CN205356790U - It stabilizes even exoelectric device to be used for producing - Google Patents
It stabilizes even exoelectric device to be used for producing Download PDFInfo
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- CN205356790U CN205356790U CN201620108855.0U CN201620108855U CN205356790U CN 205356790 U CN205356790 U CN 205356790U CN 201620108855 U CN201620108855 U CN 201620108855U CN 205356790 U CN205356790 U CN 205356790U
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- crown
- arc chamber
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- bottom crown
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Abstract
The utility model discloses an it stabilizes even exoelectric device to be used for producing, including the arc chamber, the level sets up two top crowns that are parallel to each other and bottom crown in the arc chamber, and the top crown is connected with the DC power supply electricity, and the bottom crown passes through wire ground connection, and the lower surface of top crown is equipped with the triangle -shaped array, and the level is equipped with the coil between top crown and the bottom crown, and the coil is connected with the outside alternating current power supply electricity of arc chamber, is equipped with the connecting tube that is used for importing inert gas on the lateral wall of arc chamber. The utility model discloses be equipped with the coil that lets in the alternating current between top crown and bottom crown, add the magnetic field of reversal between the board of the two poles of the earth, spouting into an amount of inert gas through the past arc chamber of connecting tube, through the intensity and the frequency of adjusting alternating magnetic field, can improve exoelectric even degree simultaneously, avoid discharging and excessively discharge to filiform, the condition that develops into arc discharge at last takes place.
Description
Technical field
This utility model relates to plasma discharge field, particularly to a kind of device for producing stable and even discharging.
Background technology
The low temperature plasma that gas discharge produces is widely used in actual production is lived, such as sterilizing in medical domain, environmental treatment field processes for the desulfurization of waste gas tail gas, for the preparation etc. of material surface modifying, carbon nanomaterial in industry manufacture field.But discharge process is very unstable under atmospheric conditions, it is easy to be transitioned into arc discharge, only under vacuum conditions could relatively easily Uniform Discharge, this exists for fatal shortcoming for large-scale industrial production: need to adopt the vacuum system of complexity, it is difficult to realize production line balance.
As shown in Figure 1, the existing device obtaining Uniform Discharge under atmospheric conditions generally includes power supply 1, multistylus electrode 2 and plate electrode 3, obtains Uniform Discharge under atmospheric pressure by changing the density of pin array, the length of pin, interelectrode distance, change power supply type (direct current, exchange, nanosecond pulse etc.) on multistylus electrode 2.When this device has following defects that 1. broad-area electrode electric discharge, convergence electrode edge place electric field is uneven, there will be the Kelvin effect that electric current density increases, thus causing that broad-area electrode electric discharge is uneven, having had a strong impact on precision and the efficiency of atmosphere plasma process technology；2., during long-time continuous discharge, multistylus electrode 2 can not get improving due to electric current density non-uniform phenomenon, it is easy to excessively arrives filament-like discharges, finally develops into arc discharge；3. owing to each parameter of sparking electrode can not regulate in real time, and microcosmic discharge scenario can not be understood in real time, therefore can not adjust discharge condition in real time, it is difficult to obtain continual and steady Uniform Discharge.
Summary of the invention
In order to solve above-mentioned technical problem, this utility model provides a kind of simple in construction, can produce the device of continual and steady Uniform Discharge.
This utility model solves the technical scheme of the problems referred to above: a kind of device for producing stable and even discharging, including arc chamber, two pieces of top crowns being parallel to each other and bottom crown it is horizontally disposed with in described arc chamber, top crown electrically connects with DC source, bottom crown passes through wired earth, the lower surface of described top crown is provided with triangular array, and between described top crown and bottom crown, level is provided with coil, and coil electrically connects with the alternating current power supply outside arc chamber.
In the above-mentioned device for producing stable and even discharging, the sidewall of described arc chamber is provided with the connection pipeline for inputting noble gas, connects pipeline and is provided with flow valve.
In the above-mentioned device for producing stable and even discharging, the side of described arc chamber is provided with lens, and the outside of lens is provided with grating monochromator, and grating monochromator electrically connects with computer.
In the above-mentioned device for producing stable and even discharging, the edge of described top crown and bottom crown is all through circular arc polishing.
In the above-mentioned device for producing stable and even discharging, described coil place plane is parallel to top crown place plane.
The beneficial effects of the utility model are in that:
1. top crown lower surface of the present utility model is provided with triangular array, and the edge of top crown and bottom crown all adopts circular arc polishing, reduce the degree that electrode edge electric field is uneven, it is to avoid because edge occurs that the uneven situation of Kelvin effect guiding discharge that electric current density increases occurs.
2. this utility model is provided with the coil passing into alternating current between top crown and bottom crown, the magnetic field of alternation is added between two-plate, spray into a certain amount of noble gas at arc chamber simultaneously, by regulating intensity and the frequency of alternating magnetic field, the uniformity coefficient of electric discharge can be improved, avoiding electric discharge excessively to filament-like discharges, the situation finally developing into arc discharge occurs.
3. this utility model adopts High Resolution Grating Monochromator that electrode discharge is monitored in real time, so as the important parameters such as the spectrum launched when obtaining electric discharge, electron density, by regulating alternating magnetic field frequency and intensity and inert gas flow, change electric current density between electrode, to obtain continual and steady Uniform Discharge.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of existing Uniform Discharge device.
Fig. 2 is structural representation of the present utility model.
Detailed description of the invention
Below in conjunction with drawings and Examples, this utility model is further described.
As in figure 2 it is shown, this utility model includes arc chamber 6, being horizontally disposed with two pieces of top crowns being parallel to each other 7 and bottom crown 4 in described arc chamber 6, the edge of described top crown 7 and bottom crown 4, all through circular arc polishing, is absent from angle burr；Top crown 7 electrically connects with high-voltage DC power supply 10, and bottom crown 4 is by wired earth, and the lower surface of described top crown 7 is provided with triangular array 11；Between described top crown 7 and bottom crown 4, level is provided with coil 12, and described coil 12 place plane is parallel to top crown 7 place plane, and coil 12 electrically connects with the high-frequency ac power 5 outside arc chamber 6, thus producing the magnetic field of an alternation；The sidewall of described arc chamber 6 is provided with the connection pipeline 13 for inputting noble gas, connects pipeline 13 and is provided with the flow valve 14 controlling inert gas flow；The side of described arc chamber 6 is provided with lens 8, and the outside of lens 8 is provided with grating monochromator 9, and grating monochromator 9 electrically connects with computer, in order to the spectrum launched when obtaining electric discharge, the important parameter such as electron density.
Operation principle of the present utility model is as follows: plus high-voltage DC power supply 10 between two-plate, electric discharge is produced between two-plate, the parameters such as spectrum when discharging, electron density monitored in real time by grating monochromator 9, by regulating alternating magnetic field frequency and intensity and inert gas flow, thus changing electric current density between electrode, to obtain Uniform Discharge sustainedly and stably.
Claims (5)
1. the device being used for producing stable and even discharging, it is characterized in that: include arc chamber, two pieces of top crowns being parallel to each other and bottom crown it is horizontally disposed with in described arc chamber, top crown electrically connects with DC source, bottom crown passes through wired earth, the lower surface of described top crown is provided with triangular array, and between described top crown and bottom crown, level is provided with coil, and coil electrically connects with the alternating current power supply outside arc chamber.
2. the device for producing stable and even discharging according to claim 1, it is characterised in that: the sidewall of described arc chamber is provided with the connection pipeline for inputting noble gas, connects pipeline and is provided with flow valve.
3. the device for producing stable and even discharging according to claim 1, it is characterised in that: the side of described arc chamber is provided with lens, and the outside of lens is provided with grating monochromator, and grating monochromator electrically connects with computer.
4. the device for producing stable and even discharging according to claim 1, it is characterised in that: the edge of described top crown and bottom crown is all through circular arc polishing.
5. the device for producing stable and even discharging according to claim 1, it is characterised in that: described coil place plane is parallel to top crown place plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620108855.0U CN205356790U (en) | 2016-02-03 | 2016-02-03 | It stabilizes even exoelectric device to be used for producing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620108855.0U CN205356790U (en) | 2016-02-03 | 2016-02-03 | It stabilizes even exoelectric device to be used for producing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205356790U true CN205356790U (en) | 2016-06-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620108855.0U Expired - Fee Related CN205356790U (en) | 2016-02-03 | 2016-02-03 | It stabilizes even exoelectric device to be used for producing |
Country Status (1)
| Country | Link |
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| CN (1) | CN205356790U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108289364A (en) * | 2018-01-05 | 2018-07-17 | 安徽理工大学 | A kind of dielectric barrier discharge plasma auxiliary combustion equipment of water circulation cooling |
| CN108636070A (en) * | 2018-05-11 | 2018-10-12 | 江苏师范大学 | Exhaust treatment system |
| CN109718644A (en) * | 2019-01-14 | 2019-05-07 | 江苏河海新能源股份有限公司 | A kind of plasma desulfuration apparatus and method |
| CN112738968A (en) * | 2020-12-18 | 2021-04-30 | 北京北方华创微电子装备有限公司 | Plasma generating device and semiconductor processing equipment |
| CN112804806A (en) * | 2020-11-23 | 2021-05-14 | 北京劳动保障职业学院 | Magnetic confinement three-dimensional plasma jet array method and system |
| CN112888129A (en) * | 2020-12-14 | 2021-06-01 | 北京东方计量测试研究所 | Modulation method and device for homogenizing atmospheric gas discharge |
-
2016
- 2016-02-03 CN CN201620108855.0U patent/CN205356790U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108289364A (en) * | 2018-01-05 | 2018-07-17 | 安徽理工大学 | A kind of dielectric barrier discharge plasma auxiliary combustion equipment of water circulation cooling |
| CN108636070A (en) * | 2018-05-11 | 2018-10-12 | 江苏师范大学 | Exhaust treatment system |
| CN109718644A (en) * | 2019-01-14 | 2019-05-07 | 江苏河海新能源股份有限公司 | A kind of plasma desulfuration apparatus and method |
| CN112804806A (en) * | 2020-11-23 | 2021-05-14 | 北京劳动保障职业学院 | Magnetic confinement three-dimensional plasma jet array method and system |
| CN112888129A (en) * | 2020-12-14 | 2021-06-01 | 北京东方计量测试研究所 | Modulation method and device for homogenizing atmospheric gas discharge |
| CN112738968A (en) * | 2020-12-18 | 2021-04-30 | 北京北方华创微电子装备有限公司 | Plasma generating device and semiconductor processing equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160629 Termination date: 20170203 |