CN103179772A - Atmospheric direct-current glow discharge method and special device thereof - Google Patents
Atmospheric direct-current glow discharge method and special device thereof Download PDFInfo
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- CN103179772A CN103179772A CN2013100738919A CN201310073891A CN103179772A CN 103179772 A CN103179772 A CN 103179772A CN 2013100738919 A CN2013100738919 A CN 2013100738919A CN 201310073891 A CN201310073891 A CN 201310073891A CN 103179772 A CN103179772 A CN 103179772A
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Abstract
The invention relates to an atmospheric direct-current glow discharge method and a special device thereof. The special device structurally comprises a medium stopping discharge system, a glow discharge system, an air supply system and a high-voltage power source. The medium stopping discharge system comprises a coaxial medium tube and a metal rod electrode. The glow discharge system comprises a metal rod electrode and a flat plate electrode, wherein the flat plate electrode is arranged outside an open end of the coaxial medium tube. The high-voltage power source comprises an alternating current high-voltage power source and a direct current high-voltage power source, wherein the alternating current high-voltage power source is electrically connected with conductive liquid in the coaxial medium tube, and the direct current high-voltage power source is electrically connected with the flat plate electrode. The special device is simple in structure, convenient to operate, low in cost and applicable to batch production, and is suitable for industrial line production with no demand for a vacuum device, and widely applicable to fields of material preparation, surface treatment, material etching, ozone synthesis, water treatment, desulfurization and denitrification, sterilization and disinfection and the like.
Description
Technical field
The present invention relates to a kind of cold plasma discharge method, specifically a kind of method and isolated plant thereof that produces DC Atmospheric Pressure Glow Discharge.
Background technology
The DC glow plasma technology because simple in structure, cost is lower, easy to use and be widely used at industrial circle.About the DC glow plasma technology, certain research and application have been arranged at home and abroad.But there are certain defective in prior art and method in producing the glow plasma process: the one, and the direct current glow discharge in existing large gap generally realizes under low pressure, this just need to set up vacuum plant, thereby increased the structural complexity of electric discharge device, be unfavorable for the application of plasma technique; The 2nd, present Atomospheric pressure glow discharge only realizes in the small air gap of millimeter magnitude, and this has also limited the application of this technology undoubtedly.
Summary of the invention
One of purpose of the present invention just is to provide a kind of method that produces DC Atmospheric Pressure Glow Discharge, to produce the glow plasma in large gap, satisfies industrial use needs.
Two of purpose of the present invention just is to provide a kind of isolated plant that produces DC Atmospheric Pressure Glow Discharge, to solve the existing less problem of DC Atmospheric Pressure Glow Discharge device discharging gap.
One of purpose of the present invention is achieved in that a kind of method that produces DC Atmospheric Pressure Glow Discharge, the coaxial dielectric pipe of a double layered tubular closed container body that takes the shape of the letter U with axial central lumen and cross section is set, be full of conducting liquid in described closed container body, have the air inlet that leads to central lumen on the sidewall of described closed container body;
A metal bar electrode is set, the sealing end of metal bar electrode from described coaxial dielectric pipe penetrated the central lumen of described coaxial dielectric pipe, and with described metal bar electrode rear end ground connection, front end is arranged on the opening end of described coaxial dielectric tube hub inner chamber;
Plate electrode of arranged outside at coaxial dielectric pipe opening end;
Air supply system is connected with described air inlet;
Described coaxial dielectric pipe inner conductive liquid is electrically connected to the output of ac high voltage source, plate electrode is electrically connected to the output of DC high-voltage power supply;
By air supply system to coaxial dielectric pipe input service gas; Open the switch of DC high-voltage power supply and the switch of ac high voltage source (can first open the switch of DC high-voltage power supply or ac high voltage source), produce dielectric barrier discharge and utilize the active particle that produces in dielectric barrier discharge and ultraviolet light photo from lighting direct current glow discharge between metal bar electrode and plate electrode.
The present invention forms the dielectric barrier discharge system of ac high-voltage by coaxial dielectric pipe and metal bar electrode, and form the glow discharge system of high direct voltage by plate electrode and above-mentioned metal bar electrode, to realize under atmospheric pressure by the active particle that produces in dielectric barrier discharge and ultraviolet light photo from the direct-current discharge passage of lighting between metal bar electrode and plate electrode, thereby produce the direct current glow discharge than the continuation of air gaps spacing, at this moment, ac high voltage source can be disconnected, with energy savings.The present invention adopts the duplicate supply discharge mode, can a plurality of discharge cell in parallel, thus further enlarging the volume of direct current glow discharge plasma, equipment cost is low, and operating cost is low and stable, and can detect discharge parameter by other laboratory apparatus.
Two of purpose of the present invention is achieved in that a kind of isolated plant that produces DC Atmospheric Pressure Glow Discharge, includes dielectric barrier discharge system, glow discharge system, air supply system and high voltage source; Described dielectric barrier discharge system includes coaxial dielectric pipe and metal bar electrode, described coaxial dielectric pipe is the double layered tubular closed container body that takes the shape of the letter U with axial central lumen and cross section, be full of conducting liquid in described closed container body, have the air inlet that leads to central lumen, is connected with described air supply system on the sidewall of described closed container body; Described metal bar electrode penetrates the central lumen of described coaxial dielectric pipe from the sealing end of described coaxial dielectric pipe, and the front end of described metal bar electrode is positioned at the opening end place of described coaxial dielectric tube hub inner chamber, the rear end ground connection of described metal bar electrode; Described glow discharge system includes described metal bar electrode and is positioned at the plate electrode in the outside of described coaxial dielectric pipe opening end; Described high voltage source includes the ac high voltage source that is electrically connected to described coaxial dielectric pipe inner conductive liquid and the DC high-voltage power supply that is electrically connected to described plate electrode.
Described metal bar electrode is positioned on the axial line of described coaxial dielectric pipe, and the diameter of described metal bar electrode is 0.5-50mm.
Described plate electrode diameter or width are greater than the diameter of metal bar electrode.
Spacing between described coaxial dielectric pipe and described plate electrode is 1-200mm.
The voltage of described DC high-voltage power supply is 0-± 50kV, electric current is 0-400mA, power is 0-600W; The frequency of described ac high voltage source is 0-50MHz, voltage is 0-± 50kV.
Be connected with steady resistance between described DC high-voltage power supply and described plate electrode, the resistance of described steady resistance is 10-1000k Ω.
Described air supply system by the air inlet air feed of supply air line to described coaxial dielectric pipe, is provided with flowmeter, air gauge and air valve by gas cylinder or air pump on described supply air line.
The working gas that described air supply system provides to described air inlet is a kind of in air, argon gas, nitrogen or helium, or two or more mixture arbitrarily.
Particular advantages of the present invention is: light direct current glow discharge by dielectric barrier discharge, make the present invention can under atmospheric pressure produce long gap discharge evenly and the direct current glow discharge of stable performance.This direct current glow discharge can be closed dielectric barrier discharge, with energy savings after producing.Working gas, electrode distance etc. all can be used as physical parameter and regulate plasma parameter, thereby can produce as required the direct current glow discharge of particular plasma body parameter, can obtain the plasma of larger volume in than air gaps, therefore be with a wide range of applications, can be widely used in the fields such as material preparation, surface treatment, material etching, ozone are synthetic, water treatment, desulfurization removing nitric, sterilizing.In addition, the present invention plays a role in promoting to research, teaching and the application of glow discharge plasma technology.
The present invention is simple in structure, easy to operate, cheap, is fit to batch production, owing to need not vacuum plant, can be suitable for industrial continuous productive process.
Description of drawings
Fig. 1 is structural representation of the present invention.
In figure: 1, coaxial dielectric pipe, 2, the metal bar electrode, 3, plate electrode, 4, ac high voltage source, 5, DC high-voltage power supply, 6, steady resistance, 7, gas cylinder, 8, air valve, 9, air gauge, 10, flowmeter.
Embodiment
Embodiment 1:
As shown in Figure 1, direct current glow discharge device of the present invention includes coaxial dielectric pipe 1, metal bar electrode 2, plate electrode 3, air supply system and high voltage source.Wherein, form the dielectric barrier discharge system by coaxial dielectric pipe 1 and metal bar electrode 2, form glow discharge system by plate electrode 3 and metal bar electrode 2.
Wherein, the coaxial dielectric pipe 1 double layered tubular closed container body for taking the shape of the letter U with axial central lumen and cross section, be full of conducting liquid (this conducting liquid can be water) in this closed container body, have the air inlet that leads to central lumen on the sidewall of closed container body, in order to air supply system perfusion working gas.The internal diameter of coaxial dielectric pipe 1 can be set according to the size of the gas flow that passes into.
Plate electrode 3 is positioned at the outside of coaxial dielectric pipe 1 opening end, can adopt the metal-mades such as copper, aluminium to make the geometries such as circular or square.The diameter of plate electrode 3 (length or width) needs the diameter greater than metal bar electrode 2.Metal bar electrode 2 and the distance between plate electrode 3 in coaxial dielectric pipe 1 openend are 1-200mm.
Air supply system by gas cylinder 7 or air pump by supply air line and air inlet to coaxial dielectric pipe 1 air feed, be provided with flowmeter 10, air gauge 9 and air valve 8 on supply air line.The working gas that air supply system provides to air inlet is a kind of in air, argon gas, nitrogen or helium, or arbitrarily two or more, the mist of arbitrary proportion.
High voltage source includes the ac high voltage source 4 that is electrically connected to coaxial dielectric pipe 1 inner conductive liquid and the DC high-voltage power supply 5 that is electrically connected to plate electrode 3.The high-voltage output end of ac high voltage source 4 extend in the interior conducting liquid of coaxial dielectric pipe 1 by wire.Be connected with steady resistance 6 between DC high-voltage power supply 5 and plate electrode 3, the resistance of this steady resistance 6 is 10-1000k Ω.The parameter of DC high-voltage power supply 5 is: voltage 0-± 50kV, electric current 0-400mA, power 0-600W.The parameter of ac high voltage source 4 is: frequency 0-50MHz, and voltage 0-± 50kV.
Coaxial dielectric pipe 1, metal bar electrode 2 and plate electrode 3 all can increase or minification according to specific needs, perhaps change shape, also can be in parallel a plurality of, and to increase area or the volume of glow discharge.
Preferred version of the present invention is: the pipe range of coaxial dielectric pipe 1 is 150mm, and the diameter of outer tube is 13mm, and the diameter of inner layer pipe is 7mm; Coaxial double-layer glass tube 2 sealing termination wires; Metal bar electrode 2 adopts the tungsten pin to make, and diameter is 1mm, and length is 170mm; Plate electrode 3 is made of copper, and its diameter is 100mm; Discharge air-gap is that the end of metal bar electrode 2 of coaxial dielectric pipe 1 opening one end and the distance of plate electrode 3 are made as 50mm; The voltage of DC high-voltage power supply 5 is the negative high voltage of 15kV, and electric current is 13mA; The voltage of ac high voltage source 4 is 10kV; In circuit, the resistance of steady resistance 6 is 500 k Ω; Adopt gas cylinder 7 air feed, institute's supplied gas adopts argon gas, and flow is 3L/min.
Embodiment 2:
The method that the present invention produces DC Atmospheric Pressure Glow Discharge is: the coaxial dielectric pipe 1 that a double layered tubular closed container body that takes the shape of the letter U with axial central lumen and cross section is set, be full of conducting liquid in the closed container body, have the air inlet that leads to central lumen on the sidewall of closed container body.
A metal bar electrode 2 is set, the sealing end of metal bar electrode 2 from coaxial dielectric pipe 1 penetrated the central lumen of coaxial dielectric pipe 1, and metal bar electrode 2 rear end ground connection, front end are arranged on the opening end of coaxial dielectric pipe 1 central lumen.
Plate electrode 3 of arranged outside at coaxial dielectric pipe 1 opening end.
Air supply system is connected with air inlet.
One termination electrode of ac high voltage source 4 is accessed in the inner conductive liquid of coaxial dielectric pipe 1, plate electrode 3 is joined by the negative pole of steady resistance 6 with DC high-voltage power supply 5.
By air supply system to coaxial dielectric pipe 1 input service gas; After opening respectively the switch (order in no particular order) of DC high-voltage power supply 5 and ac high voltage source 4, produce dielectric barrier discharge between metal bar electrode 2 and coaxial dielectric pipe 1, utilize the active particle that produces in dielectric barrier discharge and ultraviolet light photo from lighting, namely produce direct current glow discharge between metal bar electrode 2 and plate electrode 3, form the glow plasma of air gaps.After direct current glow discharge produces, can close ac high voltage source 4, stop dielectric barrier discharge, with energy savings.
Embodiment 3:
Direct current glow discharge device of the present invention also can be completed by another mode: with metal bar electrode one end ground connection, and in the arranged outside of the metal bar electrode other end, the plate electrode that is electrically connected to DC high-voltage power supply is arranged; Be enclosed with the dielectric of ceramic wafer class in the first half of metal bar electrode, in the arranged outside of this dielectric, aluminium flake or other conducting mediums that is connected with ac high voltage source arranged.Like this, the dielectric barrier discharge system that is formed ac high-voltage by aluminium flake, ceramic wafer and metal bar electrode, and form the glow discharge system of high direct voltage by plate electrode and above-mentioned metal bar electrode, realizing under atmospheric pressure by the active particle that produces in dielectric barrier discharge and ultraviolet light photo from the direct-current discharge passage of lighting between metal bar electrode and plate electrode, thereby produce direct current glow discharge than the continuation of air gaps spacing.
Claims (9)
1. method that produces DC Atmospheric Pressure Glow Discharge, it is characterized in that, the coaxial dielectric pipe of a double layered tubular closed container body that takes the shape of the letter U with axial central lumen and cross section is set, be full of conducting liquid in described closed container body, have the air inlet that leads to central lumen on the sidewall of described closed container body;
A metal bar electrode is set, the sealing end of metal bar electrode from described coaxial dielectric pipe penetrated the central lumen of described coaxial dielectric pipe, and with described metal bar electrode rear end ground connection, front end is arranged on the opening end of described coaxial dielectric tube hub inner chamber;
Plate electrode of arranged outside at coaxial dielectric pipe opening end;
Air supply system is connected with described air inlet;
Described coaxial dielectric pipe inner conductive liquid is electrically connected to the output of ac high voltage source, plate electrode is electrically connected to the output of DC high-voltage power supply;
By air supply system to coaxial dielectric pipe input service gas; Open the switch of DC high-voltage power supply and the switch of ac high voltage source (can first open the switch of DC high-voltage power supply or ac high voltage source), produce dielectric barrier discharge and utilize the active particle that produces in dielectric barrier discharge and ultraviolet light photo from lighting direct current glow discharge between metal bar electrode and plate electrode.
2. a device that produces DC Atmospheric Pressure Glow Discharge, is characterized in that, includes dielectric barrier discharge system, glow discharge system, air supply system and high voltage source;
Described dielectric barrier discharge system includes coaxial dielectric pipe and metal bar electrode, described coaxial dielectric pipe is the double layered tubular closed container body that takes the shape of the letter U with axial central lumen and cross section, be full of conducting liquid in described closed container body, have the air inlet that leads to central lumen, is connected with described air supply system on the sidewall of described closed container body; Described metal bar electrode penetrates the central lumen of described coaxial dielectric pipe from the sealing end of described coaxial dielectric pipe, and the front end of described metal bar electrode is positioned at the opening end place of described coaxial dielectric tube hub inner chamber, the rear end ground connection of described metal bar electrode;
Described glow discharge system includes described metal bar electrode and is positioned at the plate electrode in the outside of described coaxial dielectric pipe opening end;
Described high voltage source includes the ac high voltage source that is electrically connected to described coaxial dielectric pipe inner conductive liquid and the DC high-voltage power supply that is electrically connected to described plate electrode.
3. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 2, is characterized in that, described metal bar electrode is positioned on the axial line of described coaxial dielectric pipe, and the diameter of described metal bar electrode is 0.5-50mm.
4. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 2, is characterized in that, described plate electrode diameter or width are greater than the diameter of metal bar electrode.
5. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 2, is characterized in that, the spacing between described coaxial dielectric pipe and described plate electrode is 1-200mm.
6. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 2, is characterized in that, the voltage of described DC high-voltage power supply is 0-± 50kV, electric current is 0-400mA, power is 0-600W; The frequency of described ac high voltage source is 0-50MHz, voltage is 0-± 50kV.
7. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 6, is characterized in that, is connected with steady resistance between described DC high-voltage power supply and described plate electrode, and the resistance of described steady resistance is 10-1000k Ω.
8. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 2, it is characterized in that, described air supply system by the air inlet air feed of supply air line to described coaxial dielectric pipe, is provided with flowmeter, air gauge and air valve by gas cylinder or air pump on described supply air line.
9. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 8, is characterized in that, the working gas that described air supply system provides to described air inlet is a kind of in air, argon gas, nitrogen or helium, or two or more mixture arbitrarily.
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| CN201310073891.9A CN103179772B (en) | 2013-03-08 | 2013-03-08 | Produce method and the special purpose device thereof of DC Atmospheric Pressure Glow Discharge |
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| CN201310073891.9A CN103179772B (en) | 2013-03-08 | 2013-03-08 | Produce method and the special purpose device thereof of DC Atmospheric Pressure Glow Discharge |
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| CN103442507A (en) * | 2013-08-14 | 2013-12-11 | 河北大学 | Device and method for generating barometric pressure uniform discharge |
| CN103491699A (en) * | 2013-09-30 | 2014-01-01 | 东南大学 | Shunt capacitance type low-temperature plasma jet generating device |
| CN105578699A (en) * | 2015-12-30 | 2016-05-11 | 河北大学 | Device and method for generating cold plasma brush |
| CN105925930A (en) * | 2016-06-07 | 2016-09-07 | 国网江苏省电力公司电力科学研究院 | Processing system used for improving outer insulting performance of composite insulating device |
| CN106068053A (en) * | 2016-06-28 | 2016-11-02 | 河北大学 | A kind of uniformly continuous that produces discharges or the device and method of plasma photon crystal |
| CN106304589A (en) * | 2016-09-08 | 2017-01-04 | 河北大学 | A kind of device and method increasing plasma plume |
| CN106851955A (en) * | 2017-04-01 | 2017-06-13 | 河北大学 | A kind of device and method of generation large volume homogenous atmospheric-pressure discharge |
| CN106998617A (en) * | 2017-05-27 | 2017-08-01 | 河北大学 | The device and method of large scale Atomospheric pressure glow discharge is produced based on microplasma spray gun |
| CN110178447A (en) * | 2016-12-29 | 2019-08-27 | 纯粹生物协同瑞典公司 | Electric discharge device and method for treatment fluid |
| CN111320227A (en) * | 2020-02-28 | 2020-06-23 | 大连理工大学 | Liquid electrode dielectric barrier discharge device |
| CN112153798A (en) * | 2020-09-11 | 2020-12-29 | 河北大学 | Device and method for generating large-diameter uniform plasma plume by using inert gas |
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| CN106068053B (en) * | 2016-06-28 | 2019-01-18 | 河北大学 | A kind of device and method can produce uniformly continuous electric discharge or plasma photon crystal |
| CN106068053A (en) * | 2016-06-28 | 2016-11-02 | 河北大学 | A kind of uniformly continuous that produces discharges or the device and method of plasma photon crystal |
| CN106304589A (en) * | 2016-09-08 | 2017-01-04 | 河北大学 | A kind of device and method increasing plasma plume |
| CN106304589B (en) * | 2016-09-08 | 2019-07-05 | 河北大学 | A kind of device and method increasing plasma plume |
| CN110178447A (en) * | 2016-12-29 | 2019-08-27 | 纯粹生物协同瑞典公司 | Electric discharge device and method for treatment fluid |
| US11096267B2 (en) | 2016-12-29 | 2021-08-17 | Pure Bio Synergy Sweden Ab | Electric discharge device and method for treatment of fluids |
| CN106851955A (en) * | 2017-04-01 | 2017-06-13 | 河北大学 | A kind of device and method of generation large volume homogenous atmospheric-pressure discharge |
| CN106998617A (en) * | 2017-05-27 | 2017-08-01 | 河北大学 | The device and method of large scale Atomospheric pressure glow discharge is produced based on microplasma spray gun |
| CN111320227A (en) * | 2020-02-28 | 2020-06-23 | 大连理工大学 | Liquid electrode dielectric barrier discharge device |
| CN112153798A (en) * | 2020-09-11 | 2020-12-29 | 河北大学 | Device and method for generating large-diameter uniform plasma plume by using inert gas |
| CN112153798B (en) * | 2020-09-11 | 2022-08-23 | 河北大学 | Device and method for generating large-diameter uniform plasma plume by using inert gas |
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