CN103179772B - Produce method and the special purpose device thereof of DC Atmospheric Pressure Glow Discharge - Google Patents
Produce method and the special purpose device thereof of DC Atmospheric Pressure Glow Discharge Download PDFInfo
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- CN103179772B CN103179772B CN201310073891.9A CN201310073891A CN103179772B CN 103179772 B CN103179772 B CN 103179772B CN 201310073891 A CN201310073891 A CN 201310073891A CN 103179772 B CN103179772 B CN 103179772B
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Abstract
The present invention relates to a kind of method and the special purpose device thereof that produce DC Atmospheric Pressure Glow Discharge, the structure of its device includes dielectric barrier discharge system, glow discharge system, air supply system and high voltage source; Described dielectric barrier discharge system includes coaxial dielectric pipe and metal bar electrode; Described glow discharge system includes described metal bar electrode and is positioned at the plate electrode in outside of described coaxial dielectric pipe opening end; Described high voltage source includes the ac high voltage source be connected with described coaxial dielectric pipe inner conductive liquid electric and the DC high-voltage power supply be electrically connected with described plate electrode.Structure of the present invention is simple, easy to operate, cheap, be applicable to batch production, due to without the need to vacuum plant, industrial continuous productive process can be suitable for, also can be widely used in the fields such as material preparation, surface treatment, material etches, ozone synthesis, water treatment, desulfurization removing nitric, sterilizing.
Description
Technical field
The present invention relates to a kind of cold plasma discharge method, specifically a kind of method and special purpose device thereof producing DC Atmospheric Pressure Glow Discharge.
Background technology
DC glow plasma technology is because structure is simple, cost is lower, easy to use and be widely used at industrial circle.At home and abroad, certain investigation and application has been had about DC glow plasma technology.But there is certain defect producing in glow plasma process in prior art and method: one is that the direct current glow discharge of existing wide arc gap generally realizes at low pressure, this just needs to set up vacuum plant, thus add the structural complexity of electric discharge device, be unfavorable for the application of plasma technique; Two is that current Atomospheric pressure glow discharge only realizes in the small air gap of millimeter magnitude, and this also limit the application of this technology undoubtedly.
Summary of the invention
An object of the present invention is just to provide a kind of method producing DC Atmospheric Pressure Glow Discharge, to produce the glow plasma of wide arc gap, meets industrial use needs.
Two of object of the present invention is just to provide a kind of special purpose device producing DC Atmospheric Pressure Glow Discharge, to solve the less problem of existing DC Atmospheric Pressure Glow Discharge device discharging gap.
An object of the present invention is achieved in that a kind of method producing DC Atmospheric Pressure Glow Discharge, an axial central lumen of band is set and the coaxial dielectric pipe of double layered tubular closed container body that takes the shape of the letter U of cross section, in described closed container body, be full of conducting liquid, the sidewall of described closed container body has the air inlet leading to central lumen;
Arrange a metal bar electrode, penetrated the central lumen of described coaxial dielectric pipe by metal bar electrode from the sealing end of described coaxial dielectric pipe, and by described metal bar electrode rear end ground connection, front end is arranged on the opening end of described coaxial dielectric tube hub inner chamber;
At arranged outside plate electrode of coaxial dielectric pipe opening end;
Air supply system is connected with described air inlet;
Described coaxial dielectric pipe inner conductive liquid is electrically connected with the output of ac high voltage source, plate electrode is electrically connected with the output of DC high-voltage power supply;
By air supply system to coaxial dielectric pipe input service gas; Open the switch of DC high-voltage power supply and the switch (first can open the switch of DC high-voltage power supply or ac high voltage source) of ac high voltage source, produce dielectric barrier discharge and utilize the active particle and ultraviolet light photo that produce in dielectric barrier discharge from lighting direct current glow discharge between metal bar electrode and plate electrode.
The present invention forms the dielectric barrier discharge system of ac high-voltage by coaxial dielectric pipe and metal bar electrode, and the glow discharge system of high direct voltage is formed by plate electrode and above-mentioned metal bar electrode, with realize under atmospheric pressure by the active particle that produces in dielectric barrier discharge and ultraviolet light photo from the direct-current discharge passage lighted between metal bar electrode and plate electrode, thus the direct current glow discharge produced compared with the continuation of air gaps spacing, now, ac high voltage source can be disconnected, with energy savings.The present invention adopts duplicate supply discharge mode, can multiple discharge cell in parallel, thus expands the volume of direct current glow discharge plasma further, and equipment cost is low, and operating cost is low and stable, and can be detected discharge parameter by other laboratory apparatus.
Two of object of the present invention is achieved in that a kind of special purpose device producing DC Atmospheric Pressure Glow Discharge, includes dielectric barrier discharge system, glow discharge system, air supply system and high voltage source; Described dielectric barrier discharge system includes coaxial dielectric pipe and metal bar electrode, described coaxial dielectric pipe is the axial central lumen of band and the double layered tubular closed container body that takes the shape of the letter U of cross section, in described closed container body, be full of conducting liquid, the sidewall of described closed container body has the air inlet leading to central lumen, be connected with described air supply system; Described metal bar electrode penetrates the central lumen of described coaxial dielectric pipe from the sealing end of described coaxial dielectric pipe, and the front end of described metal bar electrode is positioned at the opening end place of described coaxial dielectric tube hub inner chamber, the rear end ground connection of described metal bar electrode; Described glow discharge system includes described metal bar electrode and is positioned at the plate electrode in outside of described coaxial dielectric pipe opening end; Described high voltage source includes the ac high voltage source be connected with described coaxial dielectric pipe inner conductive liquid electric and the DC high-voltage power supply be electrically connected with described plate electrode.
Described metal bar electrode is positioned on the axial line of described coaxial dielectric pipe, and the diameter of described metal bar electrode is 0.5-50mm.
Described plate electrode diameter or width are greater than the diameter of metal bar electrode.
Spacing between described coaxial dielectric pipe and described plate electrode is 1-200mm.
The voltage of described DC high-voltage power supply is 0-± 50kV, and electric current is 0-400mA, and power is 0-600W; The frequency of described ac high voltage source is 0-50MHz, and voltage is 0-± 50kV.
Be connected with steady resistance between described DC high-voltage power supply and described plate electrode, the resistance of described steady resistance is 10-1000k Ω.
Described air supply system by the air inlet air feed of supply air line to described coaxial dielectric pipe, described supply air line is provided with flowmeter, air gauge and air valve by gas cylinder or air pump.
Described air supply system is the one in air, argon gas, nitrogen or helium to the working gas that described air inlet provides, or mixtures two or more arbitrarily.
Particular advantages of the present invention is: light direct current glow discharge by dielectric barrier discharge, enables the present invention under atmospheric pressure produce long gap discharge evenly and the direct current glow discharge of stable performance.This direct current glow discharge can close dielectric barrier discharge, with energy savings after producing.Working gas, electrode distance etc. all can regulate plasma parameter as physical parameter, thus the direct current glow discharge of particular plasma body parameter can be produced as required, the plasma of larger volume can be obtained in compared with air gaps, therefore be with a wide range of applications, the fields such as material preparation, surface treatment, material etches, ozone synthesis, water treatment, desulfurization removing nitric, sterilizing can be widely used in.In addition, the present invention plays a role in promoting to the research of glow discharge plasma technology, teaching and application.
Structure of the present invention is simple, easy to operate, cheap, is applicable to batch production, due to without the need to vacuum plant, can be suitable for industrial continuous productive process.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
In figure: 1, coaxial dielectric pipe, 2, metal bar electrode, 3, plate electrode, 4, ac high voltage source, 5, DC high-voltage power supply, 6, steady resistance, 7, gas cylinder, 8, air valve, 9, air gauge, 10, flowmeter.
Embodiment
Embodiment 1:
As shown in Figure 1, direct current glow discharge device of the present invention includes coaxial dielectric pipe 1, metal bar electrode 2, plate electrode 3, air supply system and high voltage source.Wherein, form dielectric barrier discharge system by coaxial dielectric pipe 1 and metal bar electrode 2, form glow discharge system by plate electrode 3 and metal bar electrode 2.
Wherein, coaxial dielectric pipe 1 is the axial central lumen of band and the double layered tubular closed container body that takes the shape of the letter U of cross section, conducting liquid (this conducting liquid can be water) is full of in this closed container body, the sidewall of closed container body has the air inlet leading to central lumen, in order to air supply system perfusion working gas.The internal diameter of coaxial dielectric pipe 1, can set according to the size of the gas flow passed into.
Metal bar electrode 2 is staight shank fine needle body structure, is fixed in coaxial dielectric pipe 1, namely metal bar electrode 2 penetrate from the sealing end side of coaxial dielectric pipe 1 and cross-under be fixed on the central lumen of coaxial dielectric pipe 1, be positioned on the axial line of coaxial dielectric pipe 1.The front end of metal bar electrode 2 is positioned at the opening end place of coaxial dielectric pipe 1 central lumen, and this opening end is also the rear end ground connection of the gas outlet of working gas, metal bar electrode 2.Metal bar electrode 2 metal material such as tungsten, copper is made, its length and diameter can set according to the size of the length of coaxial dielectric pipe 1 and internal diameter, its diameter general control is within the scope of 0.5-50mm, and its length general control flushes making the mouth of pipe of electrode front end and coaxial dielectric pipe 1 opening end.
Plate electrode 3 is positioned at the outside of coaxial dielectric pipe 1 opening end, and the metal such as copper, aluminium can be adopted to make the geometries such as circular or square.The diameter (length or width) of plate electrode 3 need be greater than the diameter of metal bar electrode 2.Metal bar electrode 2 in coaxial dielectric pipe 1 openend and the distance between plate electrode 3 are 1-200mm.
Air supply system by gas cylinder 7 or air pump by supply air line and air inlet to coaxial dielectric pipe 1 air feed, supply air line is provided with flowmeter 10, air gauge 9 and air valve 8.Air supply system is the one in air, argon gas, nitrogen or helium to the working gas that air inlet provides, or arbitrarily two or more, the mist of arbitrary proportion.
High voltage source includes the ac high voltage source 4 be connected with coaxial dielectric pipe 1 inner conductive liquid electric and the DC high-voltage power supply 5 be electrically connected with plate electrode 3.The high-voltage output end of ac high voltage source 4 is extend in the conducting liquid in coaxial dielectric pipe 1 by wire.Between DC high-voltage power supply 5 and plate electrode 3, be connected with steady resistance 6, the resistance of this steady resistance 6 is 10-1000k Ω.The parameter of DC high-voltage power supply 5 is: voltage 0-± 50kV, electric current 0-400mA, power 0-600W.The parameter of ac high voltage source 4 is: frequency 0-50MHz, voltage 0-± 50kV.
Coaxial dielectric pipe 1, metal bar electrode 2 and plate electrode 3 all can increase or minification according to specific needs, or change shape, also can be in parallel multiple, to increase area or the volume of glow discharge.
Preferred version of the present invention is: the pipe range of coaxial dielectric pipe 1 is 150mm, and the diameter of outer tube is 13mm, and the diameter of inner layer pipe is 7mm; Coaxial double-layer glass tube 2 seals terminated wires; Metal bar electrode 2 adopts tungsten pin to make, and diameter is 1mm, and length is 170mm; Plate electrode 3 is made of copper, and its diameter is 100mm; The end of the metal bar electrode 2 of discharge air-gap and coaxial dielectric pipe 1 open at one end and the distance of plate electrode 3 are set to 50mm; The voltage of DC high-voltage power supply 5 is the negative high voltage of 15kV, and electric current is 13mA; The voltage of ac high voltage source 4 is 10kV; In circuit, the resistance of steady resistance 6 is 500k Ω; Adopt gas cylinder 7 air feed, institute's supplied gas adopts argon gas, and flow is 3L/min.
Embodiment 2:
The method that the present invention produces DC Atmospheric Pressure Glow Discharge is: arrange an axial central lumen of band and the coaxial dielectric pipe 1 of double layered tubular closed container body that takes the shape of the letter U of cross section, in closed container body, be full of conducting liquid, the sidewall of closed container body has the air inlet leading to central lumen.
A metal bar electrode 2 is set, metal bar electrode 2 is penetrated the central lumen of coaxial dielectric pipe 1 from the sealing end of coaxial dielectric pipe 1, and metal bar electrode 2 rear end ground connection, front end are arranged on the opening end of coaxial dielectric pipe 1 central lumen.
At arranged outside plate electrode 3 of coaxial dielectric pipe 1 opening end.
Air supply system is connected with air inlet.
By in the inner conductive liquid of a termination electrode access coaxial dielectric pipe 1 of ac high voltage source 4, plate electrode 3 is connected by the negative pole of steady resistance 6 with DC high-voltage power supply 5.
By air supply system to coaxial dielectric pipe 1 input service gas; After opening the switch (order in no particular order) of DC high-voltage power supply 5 and ac high voltage source 4 respectively, dielectric barrier discharge is produced between metal bar electrode 2 and coaxial dielectric pipe 1, utilize the active particle and ultraviolet light photo that produce in dielectric barrier discharge from lighting, namely between metal bar electrode 2 and plate electrode 3, produce direct current glow discharge, form the glow plasma of air gaps.After direct current glow discharge produces, ac high voltage source 4 can be closed, stop dielectric barrier discharge, with energy savings.
Embodiment 3:
Direct current glow discharge device of the present invention has also come by another mode: by metal bar electrode one end ground connection, and have in the arranged outside of the metal bar electrode other end plate electrode be electrically connected with DC high-voltage power supply; Be enclosed with the dielectric of ceramic wafer class in the first half of metal bar electrode, have the aluminium flake or other conducting mediums that are connected with ac high voltage source in the arranged outside of this dielectric.Like this, the dielectric barrier discharge system of ac high-voltage is made up of aluminium flake, ceramic wafer and metal bar electrode, and the glow discharge system of high direct voltage is formed by plate electrode and above-mentioned metal bar electrode, with realize under atmospheric pressure by the active particle that produces in dielectric barrier discharge and ultraviolet light photo from the direct-current discharge passage lighted between metal bar electrode and plate electrode, thus produce the direct current glow discharge compared with the continuation of air gaps spacing.
Claims (9)
1. one kind produces the method for DC Atmospheric Pressure Glow Discharge, it is characterized in that, an axial central lumen of band is set and the coaxial dielectric pipe of double layered tubular closed container body that takes the shape of the letter U of cross section, in described closed container body, be full of conducting liquid, the sidewall of described closed container body has the air inlet leading to central lumen;
A metal bar electrode is set, metal bar electrode is penetrated the central lumen of described coaxial dielectric pipe from the sealing end of described coaxial dielectric pipe, and by described metal bar electrode rear end ground connection, front end is arranged on the opening end place of described coaxial dielectric tube hub inner chamber;
At arranged outside plate electrode of coaxial dielectric pipe opening end;
Air supply system is connected with described air inlet;
Described coaxial dielectric pipe inner conductive liquid is electrically connected with the output of ac high voltage source, plate electrode is electrically connected with the output of DC high-voltage power supply;
By air supply system to coaxial dielectric pipe input service gas; Open the switch of DC high-voltage power supply and the switch of ac high voltage source respectively, produce dielectric barrier discharge, utilize the active particle and ultraviolet light photo that produce in dielectric barrier discharge from the direct current glow discharge of lighting between metal bar electrode and plate electrode; Close ac high voltage source afterwards, stop dielectric barrier discharge.
2. produce a device for DC Atmospheric Pressure Glow Discharge, it is characterized in that, include dielectric barrier discharge system, glow discharge system, air supply system and high voltage source;
Described dielectric barrier discharge system includes coaxial dielectric pipe and metal bar electrode, described coaxial dielectric pipe is the axial central lumen of band and the double layered tubular closed container body that takes the shape of the letter U of cross section, in described closed container body, be full of conducting liquid, the sidewall of described closed container body has the air inlet leading to central lumen, be connected with described air supply system; Described metal bar electrode penetrates the central lumen of described coaxial dielectric pipe from the sealing end of described coaxial dielectric pipe, and the front end of described metal bar electrode is positioned at the opening end place of described coaxial dielectric tube hub inner chamber, the rear end ground connection of described metal bar electrode;
Described glow discharge system includes described metal bar electrode and is positioned at the plate electrode in outside of described coaxial dielectric pipe opening end;
Described high voltage source includes the ac high voltage source be connected with described coaxial dielectric pipe inner conductive liquid electric and the DC high-voltage power supply be electrically connected with described plate electrode.
3. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 2, is characterized in that, described metal bar electrode is positioned on the axial line of described coaxial dielectric pipe, and the diameter of described metal bar electrode is 0.5-50mm.
4. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 2, is characterized in that, described plate electrode diameter or width are greater than the diameter of metal bar electrode.
5. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 2, is characterized in that, the spacing between described coaxial dielectric pipe and described plate electrode is 1-200mm.
6. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 2, is characterized in that, the voltage of described DC high-voltage power supply is 0-± 50kV, and electric current is 0-400mA, and power is 0-600W; The frequency of described ac high voltage source is 0-50MHz, and voltage is 0-± 50kV.
7. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 6, is characterized in that, is connected with steady resistance between described DC high-voltage power supply and described plate electrode, and the resistance of described steady resistance is 10-1000k Ω.
8. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 2, it is characterized in that, described air supply system by the air inlet air feed of supply air line to described coaxial dielectric pipe, described supply air line is provided with flowmeter, air gauge and air valve by gas cylinder or air pump.
9. the device of generation DC Atmospheric Pressure Glow Discharge according to claim 8, is characterized in that, described air supply system is the one in air, argon gas, nitrogen or helium to the working gas that described air inlet provides, or mixtures two or more arbitrarily.
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| CN103442507B (en) * | 2013-08-14 | 2015-11-18 | 河北大学 | A kind of device and method producing homogenous atmospheric-pressure discharge |
| CN103491699A (en) * | 2013-09-30 | 2014-01-01 | 东南大学 | Shunt capacitance type low-temperature plasma jet generating device |
| CN105578699B (en) * | 2015-12-30 | 2018-06-08 | 河北大学 | A kind of device and method for generating cold plasma brush |
| CN105925930A (en) * | 2016-06-07 | 2016-09-07 | 国网江苏省电力公司电力科学研究院 | Processing system used for improving outer insulting performance of composite insulating device |
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| CN106851955A (en) * | 2017-04-01 | 2017-06-13 | 河北大学 | A kind of device and method of generation large volume homogenous atmospheric-pressure discharge |
| CN106998617A (en) * | 2017-05-27 | 2017-08-01 | 河北大学 | The device and method of large scale Atomospheric pressure glow discharge is produced based on microplasma spray gun |
| CN111320227A (en) * | 2020-02-28 | 2020-06-23 | 大连理工大学 | Liquid electrode dielectric barrier discharge device |
| CN112153798B (en) * | 2020-09-11 | 2022-08-23 | 河北大学 | Device and method for generating large-diameter uniform plasma plume by using inert gas |
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