CN101466194A - Preionization atmos low-temperature plasma jet generator - Google Patents
Preionization atmos low-temperature plasma jet generator Download PDFInfo
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- CN101466194A CN101466194A CNA200910010111XA CN200910010111A CN101466194A CN 101466194 A CN101466194 A CN 101466194A CN A200910010111X A CNA200910010111X A CN A200910010111XA CN 200910010111 A CN200910010111 A CN 200910010111A CN 101466194 A CN101466194 A CN 101466194A
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- quartz ampoule
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- preionization
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 41
- 239000007789 gas Substances 0.000 claims abstract description 23
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052786 argon Inorganic materials 0.000 claims abstract description 11
- 239000003708 ampul Substances 0.000 claims description 29
- 239000010453 quartz Substances 0.000 claims description 29
- 229910052760 oxygen Inorganic materials 0.000 claims description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 14
- 239000001301 oxygen Substances 0.000 claims description 14
- 238000009413 insulation Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 5
- 239000000126 substance Substances 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract 6
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract 1
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 229910001882 dioxygen Inorganic materials 0.000 abstract 1
- 210000002381 plasma Anatomy 0.000 description 36
- 238000010891 electric arc Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
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- 239000002184 metal Substances 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
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- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
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- 229910052734 helium Inorganic materials 0.000 description 1
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Abstract
The invention relates to an atmospheric pressure low-temperature plasma jet reactor with preionization structure, which belongs to plasma discharge reactor technical field, and the reactor is characterized in that: the device main body is a millimeter magnitude main silica tube with one open end; a part is arranged above the open end at the lower part with 15 to 25mm, and the part becomes the thinnest at 20mm part, and a ring-shaped electrode is wound on the part; a thin silica tube is connected at the closed end arranged in the inner part thereof through the closed end arranged at the upper part of the silica tube; and a needle electrode is arranged in the thin silica tube. An earthing electrode is arranged below the open end of the main silica tube; and the argon gas is filled into the needle electrode, and the oxygen gas is filled into the main silica tube. The needle electrode and the ring-shaped electrode can be exerted with the same high voltage; the needle electrode discharge can supply the seed electrons for the ring-shaped electrode discharge, and a stable glowing discharge plasma jet is arranged between the ring-shaped electrode and the earthing electrode. The reactor has the beneficial effects that the obtained plasma jet can generate high-concentration chemical activity species, and the reactor has practical value.
Description
Technical field
The invention belongs to the plasma discharge reactor having technical field, relate to a kind of atmos low-temperature plasma jet generating means of preionization structure.
Background technology
Ion, electronics, excited atom, molecule and the free radical of low-temperature plasma body space enrichment all is as lively as a cricket reactive species, these active particle quantity are big, kind is many, activity is high, be easy to react with the material surface that is contacted, therefore in recent years, low temperature plasma obtains application more and more widely in fields such as sterilization, surface modification (improving the character of the aspects such as wettability, water absorption, printing and dyeing, adherence and conductivity of paper, film, textile and fiber), thin film deposition, etching processing, device cleanings.At present, most low temperature plasmas are to produce by gas discharge under the low pressure of hundreds of handkerchief, but for large-scale industrial production, there are two significant drawbacks in the low pressure plasma: (1) discharge and reative cell are in the low pressure state, need to adopt vacuum system, investment is high and use complicated.(2) batch processing efficient is low, need constantly open vacuum chamber and take out finished product interpolation test product, vacuumizes again then and charges into working gas, is difficult to continuous production.Therefore, be more suitable for being used for that extensive temperature production uses is the low temperature plasma of formation atmospheric pressure under.
Atmos low-temperature plasma jet is that a kind of novel air of rising in recent years is pressed class glow plasma generation technique, and this technology can be enlarged the discharge in the short space and draw, and forms comparatively open atmospheric pressure class glow discharge plasma.Use multiple working gas and mist thereof and can produce cold-plasma jet effectively, have that puncture voltage is lower, ion and characteristics such as the metastable state molecular concentration is higher, electron temperature is high, the neutral molecule temperature is low, uniform parts is big in the plasma that produces, controllability is good, be the present research focus in plasma application field in the world.Tradition atmos low-temperature plasma jet device is usually operated at He, Ar, O
2,, wish that the chemical active ingredient concentration that jet produces is high more good more, but in jet, add too much O with during gas mixes Deng gas in order to obtain high treatment effeciency
2Can the guiding discharge puncture raise with keeping voltage, discharge is instability easily, thereby carries out the transition to arc discharge, so greatly limited treatment effeciency.
Summary of the invention
The present invention aims to provide a kind of preionization atmos low-temperature plasma jet generator, mainly reduces O by the preionization mode
2The puncture of discharge with keep voltage, thereby improve the O in the jet
2Flow obtains high chemically active atmos low-temperature plasma jet.
Technical scheme of the present invention is: with Ar, O
2Mist is a working gas, can obtain uniform and stable Atomospheric pressure glow discharge low-temperature plasma jet in normal pressure open air environment.This device main body partly is the open millimeter magnitude master quartz ampoule in lower end, and specification is long 120mm, internal diameter 5.0mm, external diameter 7.0mm has a change warp at 15-25mm place, quartz ampoule openend top, become at the 20mm place the thinnest, interior through 3.0mm, outward through 4.0mm; The other end seals and in inside one thin quartz ampoule is installed, and specification is long 95mm, internal diameter 2.0mm, external diameter 3.0mm; Connect a syringe needle that is used for preionized discharge again in thin quartz ampoule inside, specification is long 45mm, internal diameter 0.5mm, external diameter 1.0mm.At the inner Ar gas that feeds of syringe needle, gas flow can be at 0.08-0.4m
3Change between/the h.30mm place sidepiece has an air inlet below main quartz ampoule blind end, feeds O here
2, flow can be at 0.08-0.13m
3Change between/the h.Become through locating to twine a becket at 20mm above main quartz ampoule openend, this becket and syringe needle all connect the high-voltage output end of power supply, are high-field electrodes.There is a metal electrode at the 15mm place apart from main quartz ampoule openend below, and this electrode is a grounding electrode, and its upper face is covered by a dielectric.By applying alternating voltage, discharge can produce discharge plasma to pin electrode as single electrode, then this discharge plasma under the blowing of Ar air-flow along microlith English pipe internal migration, arrive thin quartz ampoule lower opening place and ejaculation, also arrive simultaneously the main quartz ampoule region of discharge between ring electrode and the ground electrode, the zone discharge provides seed electrons for this reason.By regulating applied voltage and work Ar, O
2Gas flow can obtain uniform and stable Atomospheric pressure glow discharge low-temperature plasma jet between ring electrode and grounding electrode.
Effect of the present invention and benefit are: utilize the single needle tube discharge as preionization technique, make the puncture of the main discharge between ring electrode and the ground electrode and keep all reductions greatly of voltage, the generation that helps stable oxygen discharge with keep, so can effectively improve the oxygen flow in the discharge, produce the high concentration oxygen atom, thereby improve treatment effeciency.The discharge plasma jet that this generator produces has advantages such as temperature is moderate, discharge power big, discharge stability, O activity component concentration height, stream time length.
Description of drawings
Accompanying drawing is the structural representation of the atmos low-temperature plasma jet generator of preionization structure.
Among the figure:
101. flowmeter is used to control the Ar working gas flow of importing pin electrode.
102. flowmeter is used to control the O that imports ring electrode
2The working gas flow.
103. pin electrode produces the preionized discharge plasma.
104. microlith English glass tube, the discharge plasma that pin electrode produces move and arrive main quartz ampoule along this quartz ampoule and become through locating, for main discharge provides seed electrons.
105. main quartz ampoule plays restriction and the effect that guides flow of oxygen; Becoming, form the characteristic of so-called dielectric barrier discharge through locating to apply ring electrode.
106. ring electrode applies high voltage, produces main discharge, is the main discharge portion that forms high concentration of oxygen atoms.
107. the plasma jet district of discharge generation, the high concentration reactive specy mainly results from this zone.
108. insulation medium board plays a kind of negative feedback, can effectively suppress strength of discharge, avoids the generation of arc discharge.
109. ground electrode is another utmost point of ring electrode discharge.
Embodiment
Below in conjunction with technical scheme and accompanying drawing, be described in detail the specific embodiment of the present invention.
The working gas argon gas enters quartz ampoule 104 by needle tubing 103 among the figure behind flowmeter 101.Working gas oxygen enters main quartz ampoule 105 through flowmeter 102.20mm place, main quartz ampoule 105 opening ports top has one to become warp and twine a ring electrode 106.Main quartz ampoule 105 openends of distance below 15mm has an insulation medium board 108, and thickness is optional between 1.0-3.0mm, is metal electrode 109 below the dielectric, also is grounding electrode.On needle tubing electrode and ring electrode, apply a voltage (frequency: 30-60kHz, voltage 0-10kV is adjustable, maximum power 1.5kW), will produce discharge plasma, plasma jet zone 107.
When applying ac high-voltage by high-field electrode and reach the argon gas breakdown threshold, single-needle electrodes at first produces discharge, blows down at the Ar air-flow, and plasma discharging is known from experience and moved downwards along thin quartz ampoule 104, and goes out at the lower opening end-fire.At this moment, owing to have electronics from 104 plasmas that penetrate, for the discharge between 106 and 109 provides seed electrons.Boosted voltage makes oxygen begin discharge, thereby produce discharge plasma between 106 and 109 again.Do on-line analysis with oscilloscope and find that the discharging current of stable state jet is identical with the applied voltage frequency, and per half period the pulsatile once peak appears, this rule is similar to the Atomospheric pressure glow discharge current status; Find that with the optical fiber temperature sensor monitors jet maximum temperature is about 210 ℃, minimum 160 ℃, belongs to typical low temperature plasma; Find that by spectral detection O is rich in the fluerics, concentration can reach 9.8 * 10
17/ cm
3, than the highest O concentration of reporting at present in the world 2.1 * 10
17/ cm
3Exceed more than 3.6 times.Therefore, the stable state jet that this atmos low-temperature plasma jet generator produced can be used for applications such as sterilization, surface treatment, surface etch, surface coating, has very high efficient.
The mixed proportion of oxygen and argon gas must be suitable, utilizes the highest mixed proportion of this device oxygen can reach 20% at present, than present can reach in the world 5% exceeded three times the most at high proportion.The oxygen mix ratio is high more, and discharge breakdown is with to keep voltage high more, and the temperature of plasma jet is also high more.High again oxygen mix carries out the transition to arc discharge or thread discharge condition at last than the instable appearance of regular meeting guiding discharge.In discharge process, high voltage is followed strong discharge, and then O concentration also can raise fast, but cost is the rising of the temperature of plasma jet.The shakiness of too high voltage meeting guiding discharge.In the scope of above-mentioned discharge frequency, frequency is smaller to the discharge stability influence, and the frequency height, O concentration is also high, but the main discharge plasma temperature is also high more.
Embodiment:
Choosing argon gas (purity 99.999%) is the single-needle electrodes working gas, and the flux lower limit that can produce the stable state jet is 0.08m
3/ h.With oxygen is the ring electrode working gas, maximum flow 0.13m
3/ h.Now choosing argon flow amount is 0.26m
3/ h, oxygen flow are 0.13m
3/ h:
1. when applying the voltage of 4.0kV, the single needle preionized discharge produces, and boosted voltage is to 8.0kV again, then the ring electrode discharge generation.
2. further increase voltage, discharge can stable maintenance, and maximum voltage is 12kV, surpasses this voltage, and it is unstable that discharge can become, and arc discharge occurs, and discharge plasma jet temperature can raise rapidly.
3. in the parameter area of stable discharging, the maximum oxygen atomic concentration that is measured is 9.8 * 10
17/ cm
3
4. utilize this device, carry out body surface heavy oil clean, highest point reason efficient is 250 μ m/s.
Claims (5)
1. preionization atmos low-temperature plasma jet generator is characterized in that: apparatus main body is the open millimeter magnitude master quartz ampoule in a lower end, and top side aerating oxygen, lower open end are jet exit; Above the opening port, have one become through and becoming through locating to twine a ring electrode; At main quartz ampoule internal interface one thin quartz ampoule, one pin electrode is arranged by main quartz ampoule upper closed end mouth, in pin electrode, feed argon gas in thin quartz ampoule inside; Below main quartz ampoule openend, a grounding electrode is arranged, and on grounding electrode, cover an insulation medium board; Apply identical High Level AC Voltage on pin electrode and ring electrode, pin electrode can produce the single electrode discharge, and also can produce discharge between ring electrode and grounding electrode, and forms the discharge plasma jet in open air ambient.
2. a kind of preionization atmos low-temperature plasma jet generator according to claim 1, it is characterized in that: the 15-25mm place has one to become warp above main quartz ampoule lower open end, and 20mm becomes the thinnest and twines a ring electrode herein above main quartz ampoule lower open end.
3. a kind of preionization atmos low-temperature plasma jet generator according to claim 1 is characterized in that: at main quartz ampoule internal interface one thin quartz ampoule, in thin quartz ampoule inside one pin electrode is arranged by main quartz ampoule upper closed end mouth.
4. a kind of preionization atmos low-temperature plasma jet generator according to claim 1 is characterized in that: the power supply that adopts is an ac high voltage source, frequency 30-60kHz, voltage 0-20kV.
5. a kind of preionization atmos low-temperature plasma jet generator according to claim 1 is characterized in that: working gas that air supply source provides is argon gas and oxygen.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200910010111XA CN101466194A (en) | 2009-01-13 | 2009-01-13 | Preionization atmos low-temperature plasma jet generator |
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|---|---|---|---|
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