CN2604845Y - Atmospheric radio-frequency and DC mixed cold plasma generator - Google Patents
Atmospheric radio-frequency and DC mixed cold plasma generator Download PDFInfo
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- CN2604845Y CN2604845Y CN 03236573 CN03236573U CN2604845Y CN 2604845 Y CN2604845 Y CN 2604845Y CN 03236573 CN03236573 CN 03236573 CN 03236573 U CN03236573 U CN 03236573U CN 2604845 Y CN2604845 Y CN 2604845Y
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Abstract
An atmospheric pressure radio frequency and DC hybrid cold plasma generator, which comprises a spraying gun, a radio frequency power supply, a DC power supply, and a gas supply. The generator is characterized in that the spraying gun comprises a shell, one end of the shell is closed, and the other end is equipped with a nozzle. A radio frequency electrode is arranged inside the shell and a ground electrode encloses around the radio frequency electrode, as well as a DC electrode beyond the ground electrode. The radio frequency electrode is connected with the radio frequency power supply, and the ground electrode is grounded; the DC electrode is connected with the DC power supply; a plurality of insulators is arranged between the radio frequency electrode, the ground electrode, and the DC electrode. A radio frequency discharge space is formed between the radio frequency electrode and the ground electrode; and a DC discharge space is formed between the ground electrode and the DC electrode, the DC discharge space is called DC acceleration section. One end of the radio frequency discharge space is communicated with the intake duct, and the intake duct is communicated with the gas supply. The other end of the radio frequency space is communicated with the DC acceleration section through the ground electrode porous nozzle. The gas is ionized and broken down in the radio frequency discharge space forms plasma, which flows into the DC acceleration section through the ground electrode porous nozzle; and then the plasma is further ionized and accelerated by the DC electric field in the DC acceleration section, finally is sprayed out from the shell nozzle; the discharge occurs under atmospheric pressure.
Description
[technical field]
The present invention relates to a kind of plasma generator, refer to radio frequency and direct current mixed type cold plasma generator under the normal pressure especially.
[background technology]
Plasma technique is just developing rapidly in recent years, and is widely used, for example can be used for: (1) microelectronics industry silicon chip cleans, and substitutes present acid and washed with de-ionized water.(2) clean all biochemical contaminated surfaces, comprise by chemical and biological weapons surfaces contaminated and space.(3) substitute wet chemistry method, can be used for pharmacy and food service industry disinfect in situ.(4) be used for medical device sterilization and treating for skin disease.(5) be used to clean the radioactive material surface, the evidence plasma technique is present unique feasible means, and in the world discarded radioactive material can only landfill disposal at present.(6) food fresh keeping sterilization.(8) textile enterprise's dress material modification.(9) etching metal, semiconductor and dielectric substance etc.
In air, make gas breakdown ionization produce plasma needs several kilovolts high pressure.Generate plasma at present and mainly contain dual mode: a kind of is to utilize electric arc to produce plasma, and gas temperature will be up to more than 3000 ℃ during arc discharge, and the direct current heat balance plasma torch of generation can be used for cutting, welding and the surface spraying of metal.But the plasma torch of high temperature has also limited its purposes, because it can burn the article that all are faced.Another kind of mode is to utilize corona discharge to produce plasma, but corona discharge is difficult to produce the uniform large-area plasma, and under several kilovolts high pressure, current range only is the micromicroampere magnitude, generally just is used for producing ozone and makes sterilization usefulness.Existing plasma technique will make gas puncture under non-high pressure and produce plasma, and keeps and stablize the large tracts of land non-thermal discharge, can only carry out in vacuum chamber, thereby limit its application.
[utility model content]
The purpose of this utility model is to provide a kind of normal-pressure radio-frequency and direct current mixed type cold plasma generator, under atmospheric pressure steady operation also can produce the cold plasma line of porous ejection, thereby has opened up road for plasma technique in the application of wide spectrums such as cleaning, sterilization, sterilization.
In order to achieve the above object, the utility model provides a kind of normal-pressure radio-frequency and direct current mixed type cold plasma generator, comprise a shell, this shell one end sealing, the other end is provided with spout, it is characterized in that: in this shell, be provided with radio frequency electrode and the ground electrode that is coated on this radio frequency electrode periphery, and the direct current accelerating electrode.Be provided with insulator between this radio frequency electrode and the ground electrode, also be provided with insulator between DC electrode and the ground electrode, be provided with the radio frequency discharge interval between this radio frequency electrode and the ground electrode, be provided with the direct current accelerating sections between this DC electrode and this ground electrode.The interval end of this radio frequency discharge communicates with air induction conduit by the insulating material air vent hole, this air induction conduit is communicated with air supply source, the other end enters the direct current accelerating sections by the porous spout of ground electrode, plasma after radio frequency ionization is again by the direct current accelerating sections, through further ionization and porous spout and the shell spout ejection of acceleration back by DC electrode.
Described normal-pressure radio-frequency and direct current mixed type cold plasma generator, it is characterized in that: in this shell, be provided with radio frequency electrode and ground electrode, ground electrode is coated on this radio frequency electrode periphery, this DC electrode is coated on this ground electrode periphery, this radio frequency electrode, ground electrode and DC electrode are the cylindrical shape of hollow, the inner chamber of this radio frequency electrode is communicated with air induction conduit, be provided with the cylindrical shape insulator between this radio frequency electrode and the ground electrode, this insulator is provided with one along its strip through slot that axially connects, this through slot forms the radio frequency discharge interval, to should being provided with most air vent holes by through slot, this ground electrode perisporium is provided with most to spout that should through slot on this radio frequency electrode perisporium; Be provided with the cylindrical shape insulator between this ground electrode and this DC electrode, this insulator is provided with one with above-mentioned corresponding to its strip through slot that axially connects, form direct current accelerating sections article on plasma body at this through slot and further quicken and ionization, on this DC electrode perisporium to being provided with most spouts by through slot.
Described normal-pressure radio-frequency and direct current mixed type cold plasma generator, it is characterized in that: be provided with radio frequency electrode in this shell, ground electrode and DC electrode, ground electrode is coated on this radio frequency electrode periphery, be provided with insulator between this radio frequency electrode and the ground electrode, this radio frequency electrode comprises the path section of interconnected hollow, changeover portion and big footpath section, this path section is the less cylindrical shape of external diameter, this changeover portion is tubaeform, should big footpath section be the bigger cylindrical shape of external diameter, should big footpath section have perisporium and end wall, end wall in this big footpath section is provided with most through holes, the inner chamber of this path section is communicated with air induction conduit, this ground electrode is cylindrical shape and has perisporium corresponding with this radio frequency electrode and end wall, is provided with insulator between this radio frequency electrode and the ground electrode, and this insulator is provided with one and the corresponding through hole of above-mentioned through hole between the end wall of the end wall of relative this radio frequency electrode and this ground electrode, form the radio frequency discharge interval at this through hole, correspondence is provided with most spouts on the end wall of this ground electrode; This DC electrode is that the circular metal plate that has porous constitutes, the end wall of this DC electrode and this ground electrode is put down and is provided with and the corresponding through hole of this ground electrode, also be provided with insulator between this DC electrode and this ground electrode, this insulator is provided with a corresponding through hole that connects with above-mentioned radio frequency discharge district between the end wall of ground electrode and DC electrode, form the direct current accelerating sections at this through hole, this DC electrode has the insulating material that has spout to coat.
Described normal-pressure radio-frequency and direct current mixed type cold plasma generator is characterized in that: this radio-frequency power supply is the radio-frequency power supply of 13.56MHz or 27.12MHz.
Described normal-pressure radio-frequency and direct current mixed type cold plasma generator, it is characterized in that: this plasma discharge is depressed at normal atmosphere and is carried out, and be that radio frequency low-voltage gas breakdown is arranged, the rms voltage of gas during by rf arcing is 50 volts to 250 volts scopes.
Described normal-pressure radio-frequency and direct current mixed type cold plasma generator, it is characterized in that: the gas after radio frequency source punctures forms plasma, this plasma outwards sprays through the further ionization of direct current accelerating sections with after quickening again, and the power of DC power supply is less than 500W.
Described normal-pressure radio-frequency and direct current mixed type cold plasma generator is characterized in that: this air supply source institute supplied gas is argon gas or helium.
Described normal-pressure radio-frequency and direct current mixed type cold plasma generator is characterized in that: this air supply source institute supplied gas is the mist of argon gas or helium and a spot of reacting gas or liquid.
Described normal-pressure radio-frequency and direct current mixed type cold plasma generator is characterized in that: this partial reaction gas can be introduced by the air vent hole in the insulating material between DC electrode and the ground electrode.
Described normal-pressure radio-frequency and direct current mixed type cold plasma generator is characterized in that: this radio frequency electrode, ground electrode and DC electrode are respectively equipped with the porous spout.
Described normal-pressure radio-frequency and direct current mixed type cold plasma generator, when its power surpasses 300 watt-hours, can be in this radio frequency electrode, ground electrode and DC electrode periphery are established the cool cycles water pipe respectively.
Normal-pressure radio-frequency of the present utility model and direct current mixed type cold plasma generator be steady operation under atmospheric pressure, its advantage is: 1, adopt radio-frequency power supply can produce the cold plasma of uniform large-area under normal pressure, the past, this type of cold plasma can only take place in vacuum chamber.2, the employing Dc bias electric field that DC power supply provided is to the further ionization acceleration of the cold plasma that is produced.3, in this radio frequency electrode, ground electrode and DC electrode are respectively equipped with the porous spout, so that improve the area of ejection plasma line.4, not only can be written into working gas, and can be written into working gas, and can add other any reacting gas and liquid composition with the argon gas conduct with the helium conduct.5, partial reaction gas can be introduced by the air vent hole in the insulating material between DC electrode and the ground electrode.6, the plasma line temperature of its ejection contains the ion composition usually less than 200 degrees centigrade hardly and spray in the line.7, directly can adopt the radio-frequency power supply of 13.56MHz or 27.12MHz to excite discharge, the rms voltage during its disruptive discharge only is between 50 volts to 250 volts, so it is different from high-voltage corona discharge, the build-up of luminance frequency range is 1 to 100 KHz, and the build-up of luminance rms voltage is 1 to 5 kilovolt.
Normal-pressure radio-frequency of the present utility model and direct current mixed type cold plasma generator can spray the cold plasma line that contains a large amount of metastable active ingredients, owing to be under atmospheric pressure, so this line contains the ion composition hardly.Main application of the present invention is: by the large area plasma line that contains a large amount of active ingredients of ejection, can be used for cleaning the surface contamination that surface contamination that all organic substances bring and biological virus and bacterium are caused, for example, with oxygen during as reacting gas, its active oxygen can be very fast and organic and organism reaction form carbon dioxide packing and water, because the line temperature is lower, so contaminated body surface is cleaned and can not damage when sterilizing with it, also can not bring secondary pollution to substrate.By changing different reacting gass, can be used for body surface is carried out modification etching organic and inorganic material and chemical vapour deposition film material.
By changing discharge power, gas flow, gas ingredients can be controlled the length of plasma line ejection and avoid arcing phenomenon between the electrode.
[description of drawings]
Fig. 1 is the structure cross-sectional schematic of first kind of embodiment of the present utility model;
Fig. 2 is the structure cross-sectional schematic of second kind of embodiment of the present utility model;
Fig. 3 is the structure cross-sectional schematic of the third embodiment of the present utility model.
At first, see also Fig. 1, normal-pressure radio-frequency of the present utility model and direct current mixed type cold plasma system, comprise spray gun, radio-frequency power supply 101, air supply source 102, this spray gun comprises a shell, this shell is by insulator 104, ground electrode 105 and insulator 111 constitute, this shell one end is provided with insulator 104, the other end is provided with insulating material spout 117, in this shell, be provided with radio frequency electrode 103, the ground electrode 105 of hollow and DC electrode 112, this radio frequency electrode 103 is conical, its external diameter towards an end of shell closed material 104 is bigger, end external diameter towards ground electrode porous spout 115 is less, ground electrode 105 is coated on this radio frequency electrode 103 peripheries, the inner chamber of this ground electrode 105 has with this radio frequency electrode 103 corresponding shape and offers porous spout 115 (among the figure shown in the black and white gap on its end face, the diameter value of small sircle hole can be 0.5 to 1.5 millimeter scope, uniform on its end face), this radio frequency electrode 103 is connected with radio-frequency power supply 101 by radio frequency cable 109, these ground electrode 105 ground connection, blind end place near shell between this radio frequency electrode 103 and the ground electrode 105 is provided with insulator 104, be provided with symmetrical through hole 120 in this insulator 104, this through hole is connected with air induction conduit 107, this air induction conduit 107 is communicated with air supply source 102 by pressure reduction control valve door 106, form radio frequency discharge interval 108 between this radio frequency electrode 103 and the ground electrode 105, interval 108 1 ends of this radio frequency discharge communicate with this ground electrode porous spout 115.This DC electrode 112 is coated by insulating material 111 and 113, this insulating material 113 is provided with a spout 117, be provided with air vent hole 119 in the insulating material 111, should be communicated with air induction conduit 122 by interior air vent hole, this air induction conduit 122 is communicated with air supply source 102 by air valve 121 and pressure loading valve 106, this DC electrode end face is provided with porous spout 116 (among the figure shown in the black and white gap, the diameter value of small sircle hole can be 0.5 to 1.5 millimeter scope, uniform on its end face), this DC electrode and DC power supply 118 link, form the direct-current discharge interval in the cavity 114 of the insulating material 111 between this DC electrode and this ground electrode end face, this direct-current discharge cavity 114 is called the direct current accelerating sections.This DC electrode 112, this ground electrode 105 and this radio frequency electrode 103 can be by metal materials, as stainless steel, and aluminium, copper etc. are processed into, insulating material such as insulator 104,111 and 113 useful ceramics, polytetrafluoroethylene.
Radio-frequency power supply 101 can adopt the radio-frequency power supply of 13.56MHz or 27.12MHz or other frequency to excite discharge, and discharge is carried out under normal pressure.
The radio frequency electrode 103 of normal-pressure radio-frequency cold plasma spray gun of the present utility model is conical, sets up the discharge range 108 of taper barrel, because of the radius of curvature difference of discharge range 108, therefore more helps the puncture of gas.Be provided with direct current accelerating sections 114, help further improving ionization rate and improve the speed that sprays the plasma line, and then improve the length of ejection plasma; The argon gas that can directly excite under normal pressure of the present utility model forms stable cold argon plasma.This radio frequency electrode 103 connects radio-frequency power supply 101 by radio frequency source cable 109.Can adopt argon gas or helium as being written into gas, and sneak into partial reaction gas, gas flow can be controlled by control pressure loading valve 106 and gas flowmeter, it is that 6 millimeters internal diameters are 4 millimeters or other gas conduit near diameter that air induction conduit 107 and 122 can adopt external diameter, seals with elastic tape with the spray gun junction.Insulator 104 also plays the effect of enclosed electrode end, insulator 113 plays the effect of external isolated dc electrode 112, mist is through behind the discharge range 108, spray to direct current accelerating sections 114 by ground electrode porous spout 115, regulate the discharge power and the voltage of direct current accelerating sections, make the cold plasma line of ejection DC electrode porous spout and shell spout 117 be fit to various application aims.
See also Fig. 2, second kind of embodiment of the present utility model.This spray gun radio frequency electrode 202, ground electrode 205 and DC electrode 213 are the cylindrical shape of hollow, be provided with cylindrical shape insulator 204 between this radio frequency electrode 202 and this ground electrode 205, be provided with cylindrical shape insulator 212 between this DC electrode 213 and this ground electrode 205, the inner chamber of this radio frequency electrode 202 is communicated with air induction conduit by air vent hole 209 in the insulating material 204, this air induction conduit is communicated with air supply source 203 by control pressure loading valve 206, this insulator 204 is provided with one along its strip through slot 222 that axially connects, form the radio frequency discharge interval at this through slot 222, this insulator 212 is provided with a strip through slot 233 along its axial corresponding through slot 222, form the direct-current discharge interval at through slot 233, be called the direct current accelerating sections, this DC electrode is connected with DC power supply 218.On radio frequency electrode 202 perisporiums, corresponding respectively through slot 222 and through slot 233 are provided with most air vent holes 221 on ground electrode 205 perisporiums and on the perisporium of DC electrode 213,223 and 234 (among the figure shown in the black and white gap, the diameter value of small sircle hole can be 0.5 to 1.5 millimeter scope, along uniform on its perisporium), the most air vent holes on this up/down perforation groove and three electrodes connect mutually.This radio frequency electrode 202 connects radio-frequency power supply 201 by radio frequency source cable 208.
Left end between insulator 215 and three electrodes is sealed by elastic tape, and makes radio frequency electrode and DC electrode to external insulation; It is in order to make DC electrode to external insulation that insulating material 214 coats DC electrode 213, and the multiple holes of corresponding DC electrode is provided with spout 216 on this insulating material 214.
After mist is introduced in radio frequency electrode cavity 2020, go into radio frequency discharge range 222 through a plurality of spout of radio frequency electrode 221 is laggard, after radio frequency ionization, form plasma, this plasma sprays to direct current accelerating sections 233 by most corresponding spouts 223 set on ground electrode 205 perisporiums, regulate the discharge power and the voltage of direct current accelerating sections, make the cold plasma line of ejection DC electrode porous spout 234 and shell spout 216 be fit to various application aims.
Radio-frequency power supply 201 can adopt the radio-frequency power supply of 13.56MHz or 27.12MHz or other frequency to excite discharge, and discharge is carried out under normal pressure.
Above-mentioned its discharge of second embodiment is the discharge range discharge range that forms two strips between three concentric metallic cylinder, purpose is the plasma line that concentrates on a bigger spout, be decomposed into the less plasma line of diameter, and make it be distributed in the interval outwards ejection of a bar shaped.The plasma of the most spouts 223 of 233 pairs of ejections of direct current accelerating sections ground electrode plays further acceleration, and this spray gun can improve the line width of ejection line greatly.
See also Fig. 3, the normal-pressure radio-frequency of the third embodiment of the present utility model and direct current mixed type cold plasma spray gun, this radio frequency electrode 303 comprises the path section 3031 of interconnected hollow, changeover portion 3032 and big footpath section 3033, this path section 3031 is the less cylindrical shape of external diameter, changeover portion 3032 is tubaeform, should big footpath section 3033 be the bigger cylindrical shape of external diameter, should big footpath section 3033 have perisporium 3034 and end wall 3035, be provided with most through holes 3036 (among the figure shown in the black and white gap in the end wall 3035 of this big footpath section, the diameter value of small sircle hole can be 0.5 to 1.5 millimeter scope, uniform on its end face), the inner chamber 305 of this path section 3031 is communicated with this air induction conduit 309 by air vent hole 3042 in the insulating material 312, this air induction conduit 309 is communicated with air supply source 302 by by-pass valve control 307, and this radio frequency electrode 303 connects radio-frequency power supply 301 by radio frequency source cable 308.The ground electrode 306 that is coated on these radio frequency electrode 303 peripheries also is cylindrical shape and has the perisporium corresponding with this radio frequency electrode 3061 and end wall 3062, be provided with insulator 304 between this radio frequency electrode 303 and the ground electrode 306, this insulator 304 is provided with one and the corresponding through hole 3041 of above-mentioned through hole between the end wall 3062 of the end wall 3035 of relative this radio frequency electrode and this ground electrode, this through hole 3041 forms the radio frequency discharge interval, the end wall 3035 of this radio frequency electrode and the end wall 3062 of this ground electrode are parallel, corresponding through hole 3041 is provided with most spouts 311 (among the figure shown in the black and white gap on the end wall 3062 of this ground electrode, the diameter value of small sircle hole can be 0.5 to 1.5 millimeter scope, uniform on its end face), the right part that is coated on ground electrode is provided with circular plate type DC electrode 3210 and insulator 3501, this DC electrode 3210 is parallel with ground electrode end wall 3062, be provided with the through hole 3052 of the most spouts 311 of a corresponding ground electrode in this insulating material 3501, in this through hole 3052, form the direct current accelerating sections, this DC electrode end wall is provided with most spouts 313 (among the figure shown in the black and white gap, the diameter value of small sircle hole can be 0.5 to 1.5 millimeter scope, uniform on its end face), DC electrode 3210 is connected with DC electrode 333 by lead, be provided with sky 3070 in this insulating material 3501, this endoporus one end is communicated with air induction conduit 3072, and be communicated with air supply source 302 by by-pass valve control 3071, the other end is communicated with direct current accelerating sections 3052.Edge material 312 coats radio frequency electrode 303 rear ends and seals with elastic tape, it is to make DC electrode to external insulation that insulator 3501 and insulating material 3503 coat DC electrode 3210 purposes, and insulating material 3503 is provided with the shell spout 339 of most spouts 313 of corresponding DC electrode.
This use is novel can directly to puncture mist formation plasma under normal pressure, mist enters into radio frequency discharge interval 3041 after by radio frequency electrode spout 3036 and forms plasmas, this plasma sprays to direct current accelerating sections 3052 by the most spouts 311 on ground electrode 306 end walls, regulate the discharge power and the voltage of direct current accelerating sections, make the cold plasma line of ejection DC electrode porous spout 313 and shell spout 339 be fit to various application aims.Partial reaction gas can be introduced directly into direct current accelerating sections 3052 by the endoporus 3070 of insulating material 3501, so that improve the ratio of the shared gas gross of reacting gas, also avoided simultaneously too much reacting gas (as surpass total gas couette 5%) directly introduce the radio frequency discharge district and just form arcing phenomenon between the electrode easily.
It is 27.12MHz and 13.56MHz power supply that radio-frequency power supply 301 can adopt frequency respectively, and two kinds of power supplys can use separately with plasma gun, can directly excite argon gas to form stable cold argon plasma under normal pressure.
Above-mentioned the 3rd embodiment makes the plasma line that concentrates on a bigger spout, is decomposed into the less plasma beam of a plurality of diameters and flows to outer ejection.This spray gun can improve the effective area of ejection line greatly.
Can adopt argon gas or helium as being written into working gas, in addition, can mix and add a spot of reacting gas or liquid composition according to different needs, as oxygen, nitrogen, charcoal fluorine four, water etc., the ratio of the shared total gas flow of reacting gas is in 5%.Gas is ionized the formation plasma at discharge range, outwards sprays by spout then to have a large amount of active atomics and molecular beam.The line length of ejection plasma when selecting discharge as required.
, tackle two electrodes and adopt water-cooled greater than 300 watt-hours in the discharge gross power, for example establish the cool cycles water pipe respectively in this radio frequency electrode and ground electrode periphery.When the discharge gross power less than 300 watt-hours, there is no need to use water-cooled.
Claims (10)
1, a kind of normal-pressure radio-frequency and direct current mixed type cold plasma generator, comprise spray gun, radio-frequency power supply, DC power supply, air supply source, it is characterized in that: comprise a shell in this spray gun, this shell one end sealing, the other end is provided with spout, in this shell, be provided with radio frequency electrode, be coated on the ground electrode of this radio frequency electrode periphery, and DC electrode.This radio frequency electrode is connected with radio-frequency power supply, this ground electrode ground connection, this DC electrode is connected with DC power supply, be provided with insulator between this radio frequency electrode and the ground electrode, also be provided with insulator between this DC electrode and the ground electrode, be provided with discharge range between this radio frequency electrode and the ground electrode, this discharge range one end communicates with air induction conduit, this air induction conduit is communicated with air supply source, the other end and direct-current discharge are interval to connect, and gas is after the ionization of radio frequency discharge district, and the direct-current discharge district that flows through further obtains ionization and acceleration, after outwards spray the cold plasma line through spout, discharge is carried out under normal pressure.
2, normal-pressure radio-frequency as claimed in claim 1 and direct current mixed type cold plasma generator, it is characterized in that: in this shell, be provided with radio frequency electrode, the ground electrode of hollow and the DC electrode of hollow, ground electrode is coated on this radio frequency electrode periphery, this radio frequency electrode is conical, the inner chamber of this ground electrode has and this radio frequency electrode corresponding shape, this radio frequency electrode is connected with radio-frequency power supply, this ground electrode ground connection, the blind end place that is positioned at shell between this radio frequency electrode and the ground electrode is provided with insulator, be provided with through hole in this insulator, this through hole is communicated with air induction conduit, and this air induction conduit is communicated with air supply source by gas flow switch and gas pressure reducer, forms discharge range between this radio frequency electrode and ground electrode, this discharge range one end communicates with air induction conduit, and the other end communicates with ground electrode porous spout; Between this DC electrode and this ground electrode, be provided with insulating material, be provided with a cavity in this insulating material, form the direct current accelerating sections at this cavity, the plasma of process ground electrode porous spout ejection enters the direct current accelerating sections between DC electrode and the ground electrode, plasma is after the further ionization of direct current accelerating sections and quickening, again through DC electrode porous spout and the ejection of shell spout.Partial reaction gas can be incorporated into the direct current accelerating sections by the through hole in the insulating material between this DC electrode and the ground electrode.
3, normal-pressure radio-frequency as claimed in claim 1 and direct current mixed type cold plasma generator, it is characterized in that: in this shell, be provided with radio frequency electrode, ground electrode and DC electrode, this ground electrode is coated on this radio frequency electrode periphery, this DC electrode is coated on this ground electrode periphery, this radio frequency electrode, this ground electrode and this DC electrode are the cylindrical shape of hollow, three electrodes are made and are used the insulating material mutually insulated by metal material, the inner chamber of this radio frequency electrode is communicated with air induction conduit by the insulating material air vent hole, be provided with the cylindrical shape insulator between this radio frequency electrode and this ground electrode, this insulator is provided with one along its strip through slot that axially connects, form the radio frequency discharge interval at this through slot, to being provided with a plurality of air vent holes by through slot, also be provided with a plurality of on this ground electrode perisporium on this radio frequency electrode perisporium to spout that should through slot; Also be provided with the cylindrical shape insulator between this ground electrode and this DC electrode, this insulator is provided with a strip through slot along its axial perforation corresponding with above-mentioned strip through slot, form the direct current accelerating sections at this through slot, on this DC electrode perisporium to being provided with most spouts by direct current accelerating sections through slot, the plasma that is produced by the radio frequency discharge district flows into the direct current accelerating sections via a plurality of spouts of ground electrode, again by after the further ionization of direct current accelerating sections and quickening, via the most spouts and the ejection of shell spout of DC electrode.This radio frequency electrode is connected with radio-frequency power supply, this ground electrode ground connection, and this DC electrode is connected with DC power supply, and this air induction conduit is communicated with air supply source by pressure-reducing valve.
4, normal-pressure radio-frequency as claimed in claim 1 and direct current mixed type cold plasma generator, it is characterized in that: in this shell, be provided with radio frequency electrode, ground electrode and DC electrode, three electrodes are made and are used the insulating material mutually insulated by metal material, ground electrode is coated on this radio frequency electrode periphery, be provided with insulator between this radio frequency electrode and the ground electrode, this radio frequency electrode comprises the path section of interconnected hollow, changeover portion and big footpath section, this path section is the less cylindrical shape of external diameter, this changeover portion is tubaeform, should big footpath section be the bigger cylindrical shape of external diameter, should big footpath section have perisporium and end wall, end wall in this big footpath section is provided with most through holes, the inner chamber of this path section is communicated with air induction conduit by the insulating material air vent hole, this air induction conduit is communicated with air supply source by pressure-reducing valve, this ground electrode is cylindrical shape and has perisporium corresponding with this radio frequency electrode and end wall, this ground electrode end wall is provided with most through holes, be provided with insulator between this radio frequency electrode and this ground electrode, this insulator is provided with a corresponding through hole between the end wall of the end wall of relative this radio frequency electrode and this ground electrode, form the radio frequency discharge interval at this through hole, the end wall of the big footpath of this radio frequency electrode section is parallel with the end wall of this ground electrode; This DC electrode is a circular plate type, this DC electrode plane is parallel with the end wall of this ground electrode, between this DC electrode and this ground electrode, be provided with an insulator, the most through holes of corresponding above-mentioned ground electrode are provided with a cavity in this insulator, form the direct current accelerating sections in this cavity, this flat board DC electrode is provided with most through holes that should cavity, is provided with a through hole in the insulator between this DC electrode and this ground electrode, one section of this through hole is communicated with air supply source, and the other end is communicated with the direct current accelerating sections.The plasma that is produced by the radio frequency discharge district flows into the direct current accelerating sections through a plurality of spouts of ground electrode, again by after the further ionization of direct current accelerating sections and quickening, through the most spouts and the ejection of shell spout of DC electrode.This DC electrode is connected with DC power supply, this ground electrode ground connection, and this radio frequency electrode is connected with radio-frequency power supply.
5, normal-pressure radio-frequency as claimed in claim 1 and direct current mixed type cold plasma generator, it is characterized in that: this radio frequency electrode, ground electrode and DC electrode are evenly equipped with most little spouts respectively on its end face, the diameter range of each little spout is the 0.5-1.5 millimeter.
6, normal-pressure radio-frequency as claimed in claim 1 and direct current mixed type cold plasma generator is characterized in that: this air supply source institute supplied gas is argon gas or helium.
7, normal-pressure radio-frequency as claimed in claim 1 and direct current mixed type cold plasma generator is characterized in that: this air supply source institute supplied gas is the mist of argon gas or helium and a spot of reacting gas or liquid.
8, normal-pressure radio-frequency as claimed in claim 1 and direct current mixed type cold plasma generator is characterized in that: this radio frequency electrode, this DC electrode are with insulating material outward and coat, and this ground electrode and shell can be designed as one.
9, normal-pressure radio-frequency as claimed in claim 1 and direct current mixed type cold plasma generator, it is characterized in that: this radio-frequency power supply is the radio-frequency power supply of 13.56MHz or 27.12MHz, the breakdown rms voltage of gas is 50 volts to 250 volts.
10, as claim 1 described normal-pressure radio-frequency and direct current mixed type cold plasma generator, it is characterized in that: the gas after rf arcing forms plasma, and this plasma outwards sprays through the further ionization of Dc bias accelerating sections with after quickening again.
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| CN 03236573 CN2604845Y (en) | 2003-01-27 | 2003-01-27 | Atmospheric radio-frequency and DC mixed cold plasma generator |
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| CN 03236573 CN2604845Y (en) | 2003-01-27 | 2003-01-27 | Atmospheric radio-frequency and DC mixed cold plasma generator |
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Cited By (9)
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| CN101023713B (en) * | 2004-09-29 | 2010-09-29 | 积水化学工业株式会社 | Plasma processing apparatus |
| CN102896114A (en) * | 2011-07-26 | 2013-01-30 | 中国科学院微电子研究所 | Novel normal-pressure double-medium blocking flat-opening type active free radical cleaning equipment |
| CN103796412A (en) * | 2013-12-24 | 2014-05-14 | 苏州市奥普斯等离子体科技有限公司 | Ordinary pressure plasma spray gun device |
| CN105722294A (en) * | 2014-12-01 | 2016-06-29 | 无锡源清天木生物科技有限公司 | Atmospheric pressure discharge cold plasma generator |
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| CN109088213A (en) * | 2018-07-03 | 2018-12-25 | 镇江市华展电子科技有限公司 | Bent radio-frequency connector shell |
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2003
- 2003-01-27 CN CN 03236573 patent/CN2604845Y/en not_active Expired - Fee Related
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| CN101023713B (en) * | 2004-09-29 | 2010-09-29 | 积水化学工业株式会社 | Plasma processing apparatus |
| CN102896114A (en) * | 2011-07-26 | 2013-01-30 | 中国科学院微电子研究所 | Novel normal-pressure double-medium blocking flat-opening type active free radical cleaning equipment |
| CN103796412A (en) * | 2013-12-24 | 2014-05-14 | 苏州市奥普斯等离子体科技有限公司 | Ordinary pressure plasma spray gun device |
| CN105722294A (en) * | 2014-12-01 | 2016-06-29 | 无锡源清天木生物科技有限公司 | Atmospheric pressure discharge cold plasma generator |
| CN105792496A (en) * | 2016-02-26 | 2016-07-20 | 苏州工业职业技术学院 | Atmospheric pressure plasma spraying gun |
| CN106231771A (en) * | 2016-08-31 | 2016-12-14 | 大连民族大学 | A kind of protection mechanism of plasma laryngoscope sterilizing unit |
| CN109088213A (en) * | 2018-07-03 | 2018-12-25 | 镇江市华展电子科技有限公司 | Bent radio-frequency connector shell |
| CN109091690A (en) * | 2018-09-20 | 2018-12-28 | 华蓥市职业教育培训中心 | A kind of novel low temperature plasma sterilizer |
| CN114231936A (en) * | 2021-11-09 | 2022-03-25 | 中山市博顿光电科技有限公司 | Anti-pollution device, ionization cavity and radio frequency ion source |
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