CN101838800B - Device and method for processing surface of material by atmospheric-pressure micro-discharge plasma - Google Patents
Device and method for processing surface of material by atmospheric-pressure micro-discharge plasma Download PDFInfo
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Abstract
The invention relates to a device and a method for processing the surface of a material by atmospheric-pressure micro-discharge plasma. A metal bar-shaped electrode and a medium obstruction pipe which are coaxially sleeved and arranged form electrode-medium pipes, a plurality of such electrode-medium pipes which are arranged in parallel form an electrode array face, an upper electrode array face is connected with a high-voltage wire, a lower electrode array face is grounded, the included angle between the axial directions of electrodes is 0 to 180 degrees, and plasma is generated between the upper electrode array face and the lower electrode array face. The invention utilizes the electrode array faces to construct an asymmetric electrode structure with medium obstruction discharge, can accurately control the position and the discharge time of a plasma discharge filament passage, leads a micro-nano pattern structure to the surface of a fibre or a film which continuously runs evenly, lowers the energy consumption and improves the cohesiveness between a high-performance fibre and resin and the performances relevant to the surface micro-nano pattern structure, such as the growth state of biological cells at the surface of the fibre or the film, the optical characteristic of the surface of the fibre or the film and the like.
Description
Technical field
The present invention relates to the filamentary material field of surface treatment, particularly relate to a kind of device and method of processing surface of material by atmospheric-pressure micro-discharge plasma.
Background technology
High performance fibre material is because advantages such as its high specific strength, high ratio modulus are the first-selections of light structures matrix material skeleton strongthener.Owing to high-strength high-modulus polyethylene (UHMPE), gather-p-phenylene terephthalamide (PPTA), TLCP (TLCP), gather-the p-phenylene-Ben Bing Er oxazole (PBO), gather high-performance fiber any surface finish such as p-phenylene-benzo dithiazole (PBT), thomel; Lack micro-nano patterning; Lack reactive group, free energy is low, thereby causes wetting property bad; Influence the adhesivity of fiber and resin, and the mechanical characteristic of matrix material.
There are various physical chemistry treatment processs to be applied to the improvement of these high-performance fiber surface property at present.Like Silverstein M.S. etc. at " the superhigh molecular weight polyethylene fibers surface property of acid etch and the relation between the cohesiveness " " Relationship between surface properties and adhesion for etched ultra high molecular weight polyethylene fibers " (Composites Sciences and Technology; 1993; 48 (1-4); Introduced surface modifying method in article 151-157) with chromic acid agent treated UHMWPE fiber; Discovery is after chromic acid is handled; Though the surface adhesion performance of UHMWPE has improved 6 times, this method makes fiber receive corrosion, and is very big to the fibre strength influence.It is thus clear that the more fragile polymer body matrix of chemical treatment method, and cause pollution to environment.
The diameter of most of fiber is at tens microns, and the method that plasma discharge is handled can only influence fiber surface in nanometer scale, is suitable for the surface treatment of fiber.Disclose fabric subatmospheric plasma processing apparatus like CN1259759 and ZL99218828.8, but these two devices need expensive vacuum system, volume ratio is bigger, is unfavorable for industrial continuous production.
Dielectric barrier discharge can under atmospheric pressure or be higher than the low-temperature plasma that produces big volume, high-energy-density under the normal atmosphere, is a kind of typical nonequilibrium state geseous discharge.Do not need vacuum apparatus just can under lower temperature, obtain all kinds of active particles required in the plasma application, have more wide application prospect, therefore receive domestic and international researchist's extensive attention in recent years with respect to low pressure discharge.
At present the atmospheric dielectric barrier discharge is handled the material surface operating frequency generally in 1K to 100K scope, and per half time cycle only produces once or discharge process several times, and discharge temp is low, and the plasma density of corresponding acquisition (strength of discharge) is low.And along with the raising of exciting voltage; Plasma body generally show as in time with discharge space in the filament shape discharging current form that has high-energy-density in a large number of stochastic distribution; The thread channel time and the position of discharge are uncontrollable, present the. fugitive, can not make full use of energy consumption; Be prone to cause fusing property damage, limited industrial application fiber.
Summary of the invention
Technical problem to be solved by this invention provides a kind of device and method of processing surface of material by atmospheric-pressure micro-discharge plasma; Can evenly import micro-nano patterning at the fiber membrane material surface of continuously operation, overcome the insufficient phenomenon of fiber treatment that the spatial and temporal distributions at random of existing atmospheric dielectric discharge-blocking device discharge filament causes.
The technical solution adopted for the present invention to solve the technical problems is: the device that a kind of processing surface of material by atmospheric-pressure micro-discharge plasma is provided; Comprise air chamber, electrod-array face, sample support frame, towing mechanism and high-voltage power supply; Described air chamber one end is provided with import, and the other end is provided with outlet; The side of described air chamber is provided with blowing mouth; Described air chamber inside is provided with described sample support frame; The position of described sample support frame is corresponding with outlet with described import; Described sample support frame is respectively equipped with at least two electrod-array faces up and down, and wherein, the electrod-array face above described sample support frame is called the top electrode array surface, and the electrod-array face below described sample support frame is called the lower electrode array surface; Described top electrode array surface and lower electrode array surface are parallel to each other, and corresponding one by one; Described electrod-array face is made up of at least two ten electrode-medium tube of parallel arranged; Electrode-the medium tube of described top electrode array surface links to each other with pressure-wire at same end; Described pressure-wire links to each other with described high-voltage power supply; Electrode-the medium tube of described lower electrode array surface links to each other with grounding wire at same end; Described ground connection; Described towing mechanism comprises interconnective roller and stepper-motor; Described ingress and described exit are provided with described roller.
Electrode-the medium tube of the device of described processing surface of material by atmospheric-pressure micro-discharge plasma is made up of coaxial being enclosed within the dielectric impedance pipe of metal stick electrode; Described metal stick electrode fits tightly the inwall of described dielectric impedance pipe; Described dielectric impedance pipe is processed by insulating material or semiconductor material; Described metal stick electrode is processed by the good conductor material.
Described dielectric impedance tube wall thickness is 0.1-3.0mm, and interior diameter is 0.101-2.001mm; The diameter of described metal stick electrode is 0.1-2.0mm.
Described insulating material is pottery or glass or tetrafluoroethylene; Described good conductor material is stainless steel or copper or aluminium or iron or tungsten-copper alloy.
The top electrode array surface of the device of described processing surface of material by atmospheric-pressure micro-discharge plasma and lower electrode array surface support the location by tetrafluoroethylene; The gap that keeps 3.0-20.0mm between described top electrode array surface and the lower electrode array surface.
Described import and outlet are extended in the sample support frame two ends of the device of described processing surface of material by atmospheric-pressure micro-discharge plasma; Described sample support frame is processed by the insulation high temperature material.
The import of the air chamber of the device of described processing surface of material by atmospheric-pressure micro-discharge plasma is the crack shape with outlet.
The axial angle of electrode-medium tube of the top electrode array surface of the device of described processing surface of material by atmospheric-pressure micro-discharge plasma and lower electrode array surface is greater than 0 degree and less than 180 degree.
The technical solution adopted for the present invention to solve the technical problems is: a kind of method of processing surface of material by atmospheric-pressure micro-discharge plasma also is provided, may further comprise the steps:
(1) sample is passed through the sample support frame in roller and the air chamber, entering passes between the upper/lower electrode array surface;
(2) assist gas or the assist gas that mixes reactant gases are injected air chamber through the blowing mouth that links to each other with the gas mass flow amount controller;
(3) opening excitation frequency is 1-500KHz, and PV is 1-20KV, and power is interchange or the pulsed high voltage generator of 1-3000W, between the upper/lower electrode array surface, forms the plasma body zone;
(4) open stepper-motor, with the 1-70m/min speed of setting sample is carried out plasma body and handle continuously.
The method of described processing surface of material by atmospheric-pressure micro-discharge plasma, the assist gas that in described step (2), feeds is helium or argon gas or nitrogen, flow is 0.1-10L/min; The reactant gases that feeds is hydrogen or oxygen, and flow is 0.1-100ml/min.
Beneficial effect
Owing to adopted above-mentioned technical scheme; The present invention compared with prior art; Have following advantage and positively effect: the present invention can control the yardstick and the stochastic distribution property of discharge filament preferably, evenly produces micro-nano etching pattern at fiber or film surface, and imports reactive group; Can reduce discharge power, effectively improve the efficiency of plasma body, obviously improve the structure and the performance of fiber or thin-film material surface, improve gas and energy utilization ratio simultaneously, simple in structure, be easy to control.
In the atmospheric low-temperature plasma discharge, the discharge filament fixed is created in the vertical direction cross-point position of two electrod-array faces, has avoided occurring at random site, has practiced thrift mass energy consumption; Parallel electrod-array face retrains the consistence on the discharge time that further causes each filament again with the locus of discharge filament, thereby the space-time of realizing the discharge plasma treatment zone is controlled.
Description of drawings
Fig. 1 is a system schematic of the present invention;
Fig. 2 is an air chamber left view of the present invention;
Fig. 3 is an air chamber vertical view of the present invention;
Fig. 4 is the discharge partial schematic diagram that the electrode-medium tube axial direction due angle of upper/lower electrode array surface among the present invention becomes 90 degree;
Fig. 5 is polyethylene terephthalate (PET) the fiber surface synoptic diagram that does not pass through plasma treatment;
Fig. 6 is polyethylene terephthalate (PET) the fiber surface synoptic diagram of handling through the present invention.
Embodiment
Below in conjunction with specific embodiment, further set forth the present invention.Should be understood that these embodiment only to be used to the present invention is described and be not used in the restriction scope of the present invention.Should be understood that in addition those skilled in the art can do various changes or modification to the present invention after the content of having read the present invention's instruction, these equivalent form of values fall within the application's appended claims institute restricted portion equally.
Embodiment of the present invention relates to a kind of device of processing surface of material by atmospheric-pressure micro-discharge plasma; Can control the yardstick and the stochastic distribution property of discharge filament preferably; Evenly produce micro-nano etching pattern at fiber or film surface, and import reactive group, improve the adhesive property of matrix material; Reduce discharge power; Improve the utilization ratio of plasma body effectively, can be conveniently used in the serialization production process, and can be applied to improve the growth conditions of fiber membrane surface biological cell, the performances relevant such as optical characteristics on fiber membrane surface with the surface micronano patterning.As shown in Figure 1, this device comprises air chamber 1, electrod-array face, sample support frame 6, towing mechanism and high-voltage power supply.
As shown in Figures 2 and 3, an end of air chamber 1 is provided with import 8, and the other end is provided with outlet 9, also is provided with blowing mouth 7 in the side of air chamber 1.This blowing mouth 7 links to each other with external gas cylinder through mass-flow gas meter (not drawing among the figure).Assist gas or the assist gas that mixes reactant gases are after gas cylinder output, and through mass-flow gas meter control, the blowing mouth 7 from air chamber 1 gets into, and the diameter of blowing mouth 7 is 3mm, and gas is gone out with outlet 9 places from the import 8 of air chamber 1.Wherein, the import 8 of air chamber 1 is slit-shaped with outlet 9; Assist gas can be rare gas elementes such as helium, argon gas, also can be nitrogen; Reactant gases generally uses oxygen, or hydrogen isoreactivity gas.Concrete what gas that uses can be selected according to needed treatment effect.
The face that the electrod-array face is made up of the electrode-medium tube of 20 parallel arranged at least, a general electrod-array face is no more than 2000 electrode-medium tube, and the distance between electrode-medium tube is confirmed according to practical situation.Electrode-medium tube is made up of metal stick electrode 13 coaxial being enclosed within the dielectric impedance pipe 12; Dielectric impedance pipe 12 can be processed by isolators such as pottery, tetrafluoroethylene or glass, and metal stick electrode 13 can be processed by stainless steel or copper or aluminium or high temperature resistant good conductor such as iron or tungsten-copper alloy.Should combine closely between metal stick electrode 13 and dielectric impedance pipe 12 inwalls; Guarantee between metal stick electrode 13 and the dielectric impedance pipe 12 very close to each other; The diameter of common metal stick electrode 13 is 0.1-2.0mm; The interior diameter of dielectric impedance pipe 12 is 0.101-2.001mm, the wall thickness 0.1-3.0mm of dielectric impedance pipe 12, and length is confirmed as required.
Towing mechanism comprises interconnective roller 10 and stepper-motor (not drawing among the figure).Import 8 places at air chamber 1 all are placed with roller 10 with outlet 9 places, and the rotating speed of step motor control roller 10 makes that fibrous bundle can be according to pre-set velocity through the plasma body zone, and the speed of stepper-motor can be regulated in 1-70m/min.
This shows; In this plasma body electric discharge device, the discharge filament fixed is created in the vertical direction cross-point position of two electrodes-medium tube array surface (being top electrode array surface and lower electrode array surface), has avoided occurring at random site; Parallel electrod-array face retrains the consistence on the discharge time that further causes each filament again with the locus of discharge filament; Thereby the space-time of realizing the discharge plasma treatment zone is controlled, and electrode-medium tube diameter has restriction to discharge channel, produces the filament shape micro discharge plasma of stationkeeping; Can reduce discharge power, effectively improve the efficiency of plasma body.
Embodiment of the present invention also relates to a kind of method of processing surface of material by atmospheric-pressure micro-discharge plasma, may further comprise the steps: (1) through the sample support frame in roller and the air chamber, entering passes between the upper/lower electrode array surface with sample; (2) assist gas or the assist gas that mixes reactant gases are injected air chamber through the blowing mouth that links to each other with the gas mass flow amount controller; Gas can be gone out from the import of crack shape and the outlet of air chamber; Wherein, assist gas can be rare gas elementes such as helium, argon gas, also can be nitrogen; Reactant gases generally uses oxygen, or hydrogen isoreactivity gas; (3) opening excitation frequency is 1-500KHz; PV is 1-20KV; Power is interchange or the pulsed high voltage generator of 1-3000W; Between top electrode array surface and lower electrode array surface, form the plasma body zone, because the electric-force gradient in the path of shortest distance is maximum between top electrode array surface and lower electrode array surface, so gas discharge channel fixedly is created in as on Fig. 4 and the path shown in Figure 5;
(4) open stepper-motor, with the 1-70m/min speed of setting sample is carried out plasma body and handle continuously.
Further specify the present invention with regard to several concrete embodiment below.
Embodiment 1: use the electrod-array face of length and width as 3m*1m; Metal stick electrode 13 is made of copper, and its diameter is 0.15mm, and dielectric impedance pipe 12 is processed by pottery; Its interior diameter is 0.151mm; Thickness of pipe is 1.0mm, and electrode and dielectric material are adjusted into 90 degree with the upper/lower electrode-medium tube axial direction due angle of every group of electrod-array face, and the spacing of discharging up and down is 3mm.
Roller 10 is connected on the stepper-motor, uses step motor control roller 10 rotating speeds.Open steel cylinder, assist gas argon gas and reactant gases oxygen are connected on the air chamber 1 lateral blowing mouth 7 through mass flow controller, be input in the air chamber 1, adjustments of gas flow and proportion of composing can change plasma characteristics.The flow that feeds argon gas in the present embodiment is 2L/min, and the flow of aerating oxygen is 10ml/min.Present embodiment can also only feed the assist gas argon gas, and the flow of the argon gas that feeds this moment so is 3L/min.
Hi-line 2 is linked to each other with low-temperature plasma electrical source (being high-voltage power supply), and grounding wire 3 ground connection start low-temperature plasma electrical source; This power supply is an AC power; Its excitation frequency is made as 30KHz, and PV is made as 10KV, and power is made as 100W; To produce plasma body 11 between top electrode array surface 4 and the lower electrode array surface 5, as shown in Figure 4.
With diameter is that the PET fiber curtain cotton rope of 1mm is walked around roller 10, passes air chamber 1, under the support of sample support frame 6, is driven by step-by-step motor, and carries out plasma treatment with the setting speed of 30m/min.
Through observing the variation of fiber surface hydrophilicity, infiltrating raising helps dipping solution opens at the filamentary material surface spreading, can express practical function of the present invention.Use deionized water hydrophilic modified effect to be characterized at the contact angle that fiber surface forms.
After the PET cord thread used the present invention to feed to handle in the plasma body zone that straight argon or argon oxygen gas mixture produce, the result was as shown in table 1.
Table 1PET cord thread is handled the contact angle of front and rear surfaces and deionized water
It is thus clear that through after the plasma treatment, PET cord thread surface property promotes, reduce with the contact angle of deionized water, explain that its wetting ability has obtained enhancing.
With electron microscope the PET cord thread before and after handling is carried out surface topography and observe, the PET cord thread fiber surface that plasma treatment is not passed through in discovery is smooth, smooth, and surface topography does not have obvious fluctuating, and is as shown in Figure 5.And through the surface of the PET cord thread after the plasma treatment; Significant etching effect is arranged, and surface arrangement the etched hole of the depression of uniform micro-nano magnitude, makes the specific surface area of fiber surface increase; The riveting wellability fixed and filamentary material that helps resin improves, and is as shown in Figure 6.Infrared and XPS test shows, through the PET cord thread surface after the plasma treatment have-OH ,-OOH isopolarity group introduces, and makes water can sprawl more easily or infiltrate on PET cord thread surface.
Embodiment 2: use the electrod-array face of length and width as 1m*1m; Metal stick electrode 13 is processed by tungsten-copper alloy, and diameter is 2mm, and dielectric impedance pipe 12 is processed by glass; Its interior diameter is 2.001mm; Thickness of pipe is 3mm, and electrode and dielectric material are adjusted into 45 degree with the upper/lower electrode-medium tube axial direction due angle of every group of electrod-array face, and distance is 20mm between the upper and lower.
Roller 10 is connected on the stepper-motor, uses step motor control roller 10 rotating speeds.Open steel cylinder, assist gas helium and reactant gases oxygen are connected on the air chamber 1 lateral blowing mouth 7 through mass flow controller, be input in the air chamber 1, adjustments of gas flow and proportion of composing can change plasma characteristics.The helium gas flow that feeds in the present embodiment is 3L/min, and the oxygen flow of feeding is 30ml/min.Present embodiment can also only feed the assist gas helium, and the helium gas flow that feeds this moment so is 7L/min.
Hi-line 2 is linked to each other with low-temperature plasma electrical source (being high-voltage power supply); Grounding wire 3 ground connection start low-temperature plasma electrical source, and this power supply is the pulse power; Its excitation frequency is made as 100KHz; PV is made as 15KV, and power is made as 100W, will produce plasma body 11 between top electrode array surface 4 and the lower electrode array surface 5.
The pbo fiber bundle is walked around roller 10 traction, pass air chamber 1, under the support of sample support frame 6, drive, carry out plasma treatment with the setting speed of 10m/min by step-by-step motor.
Interface shear strength through the pbo fiber after the plasma treatment has been brought up to 25MPa by original 18MPa, and SEM observes discoverys, the fiber surface coarse injustice that becomes, and the formation crosslinking structure, specific fiber surface amasss and is greatly improved.The IR analysis revealed, because plasma treatment makes the pbo fiber surface introduce polar group (hydroxyl, carboxyl etc.), wellability has obtained enhancing.
Claims (9)
1. the device of a processing surface of material by atmospheric-pressure micro-discharge plasma; Comprise air chamber (1), electrod-array face, sample support frame (6), towing mechanism and high-voltage power supply; It is characterized in that described air chamber (1) one end is provided with import (8), the other end is provided with outlet (9); The side of described air chamber (1) is provided with blowing mouth (7); Described air chamber (1) inside is provided with described sample support frame (6); The position of described sample support frame (6) is corresponding with described import (8) and outlet (9); Described sample support frame (6) is respectively equipped with at least two electrod-array faces up and down; Wherein, Electrod-array face above described sample support frame is called top electrode array surface (4), and the electrod-array face below described sample support frame is called lower electrode array surface (5); Described top electrode array surface (4) is parallel to each other with lower electrode array surface (5), and corresponding one by one; Described electrod-array face is made up of at least two ten electrode-medium tube of parallel arranged; Electrode-the medium tube of described top electrode array surface (4) links to each other with pressure-wire (2) at same end; Described pressure-wire (2) links to each other with described high-voltage power supply; Electrode-the medium tube of described lower electrode array surface (5) links to each other with grounding wire (3) at same end; Described grounding wire (3) ground connection; Described towing mechanism comprises interconnective roller (10) and stepper-motor; Described import (8) is located to locate to be provided with described roller (10) with described outlet (9); Described top electrode array surface (4) is 45 °-90 ° with the axial angle of electrode-medium tube of lower electrode array surface (5).
2. the device of processing surface of material by atmospheric-pressure micro-discharge plasma according to claim 1 is characterized in that, described electrode-medium tube is made up of coaxial being enclosed within the dielectric impedance pipe (12) of metal stick electrode (13); Described metal stick electrode (13) fits tightly the inwall of described dielectric impedance pipe (12); Described dielectric impedance pipe (12) is processed by insulating material or semiconductor material; Described metal stick electrode (13) is processed by the good conductor material.
3. the device of processing surface of material by atmospheric-pressure micro-discharge plasma according to claim 2 is characterized in that, described dielectric impedance pipe (12) thickness of pipe is 0.1-3.0mm, and interior diameter is 0.101-2.001mm; The diameter of described metal stick electrode (13) is 0.1-2.0mm.
4. the device of processing surface of material by atmospheric-pressure micro-discharge plasma according to claim 2 is characterized in that, described insulating material is pottery or glass or tetrafluoroethylene; Described good conductor material is stainless steel or copper or aluminium or iron or tungsten-copper alloy.
5. the device of processing surface of material by atmospheric-pressure micro-discharge plasma according to claim 1 is characterized in that, described top electrode array surface (4) and lower electrode array surface (5) support the location by tetrafluoroethylene; The gap that keeps 3.0-20.0mm between described top electrode array surface (4) and the lower electrode array surface (5).
6. the device of processing surface of material by atmospheric-pressure micro-discharge plasma according to claim 1 is characterized in that, described import (8) and outlet (9) are extended in described sample support frame (6) two ends; Described sample support frame (6) is processed by the insulation high temperature material.
7. the device of processing surface of material by atmospheric-pressure micro-discharge plasma according to claim 1 is characterized in that, described import (8) and outlet (9) are the crack shape.
8. a method of utilizing the device of the said processing surface of material by atmospheric-pressure micro-discharge plasma of claim 1 is characterized in that, may further comprise the steps:
(1) sample is passed through the sample support frame in roller and the air chamber, entering passes between the upper/lower electrode array surface;
(2) assist gas or the assist gas that mixes reactant gases are injected air chamber through the blowing mouth that links to each other with the gas mass flow amount controller;
(3) opening excitation frequency is 1-500KHz, and PV is 1-20KV, and power is interchange or the pulsed high voltage generator of 1-3000W, between the upper/lower electrode array surface, forms the plasma body zone;
(4) open stepper-motor, with the 1-70m/min speed of setting sample is carried out plasma body and handle continuously.
9. method according to claim 8 is characterized in that, the assist gas that in described step (2), feeds is helium or argon gas or nitrogen, and flow is 0.1-10L/min; The reactant gases that feeds is hydrogen or oxygen, and flow is 0.1-100ml/min.
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101096820A (en) * | 2007-06-22 | 2008-01-02 | 东华大学 | Atmosphere pressure plasma treatment fasciculus or fibre string surface device and method thereof |
| CN101122015A (en) * | 2007-09-11 | 2008-02-13 | 东华大学 | Method for preparing nano silicon-base porous luminescent material by normal pressure plasma gas phase deposition |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3872363B2 (en) * | 2002-03-12 | 2007-01-24 | 京セラ株式会社 | Cat-PECVD method |
| KR100469132B1 (en) * | 2004-05-18 | 2005-01-29 | 주식회사 아이피에스 | Cyclically pulsed two level plasma atomic layer deposition apparatus and method thereof |
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2010
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101096820A (en) * | 2007-06-22 | 2008-01-02 | 东华大学 | Atmosphere pressure plasma treatment fasciculus or fibre string surface device and method thereof |
| CN101122015A (en) * | 2007-09-11 | 2008-02-13 | 东华大学 | Method for preparing nano silicon-base porous luminescent material by normal pressure plasma gas phase deposition |
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