CN104831519A - Plasma system for continuously processing yarn materials - Google Patents
Plasma system for continuously processing yarn materials Download PDFInfo
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- CN104831519A CN104831519A CN201510260954.0A CN201510260954A CN104831519A CN 104831519 A CN104831519 A CN 104831519A CN 201510260954 A CN201510260954 A CN 201510260954A CN 104831519 A CN104831519 A CN 104831519A
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- 239000000463 material Substances 0.000 title claims abstract description 28
- 238000012545 processing Methods 0.000 title abstract description 16
- 230000001276 controlling effect Effects 0.000 claims abstract description 4
- 238000012544 monitoring process Methods 0.000 claims abstract description 4
- 230000001105 regulatory effect Effects 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 30
- 239000007789 gas Substances 0.000 claims description 26
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 18
- 238000010924 continuous production Methods 0.000 claims description 15
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 238000004804 winding Methods 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 9
- 239000003708 ampul Substances 0.000 claims description 8
- 229920006231 aramid fiber Polymers 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 238000012546 transfer Methods 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 238000013461 design Methods 0.000 abstract description 2
- 238000007599 discharging Methods 0.000 abstract 2
- 239000000835 fiber Substances 0.000 description 11
- 238000004513 sizing Methods 0.000 description 10
- 229920002472 Starch Polymers 0.000 description 7
- 239000002131 composite material Substances 0.000 description 7
- 235000019698 starch Nutrition 0.000 description 7
- 239000008107 starch Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000004568 cement Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 206010003791 Aura Diseases 0.000 description 3
- 239000012752 auxiliary agent Substances 0.000 description 3
- 206010015037 epilepsy Diseases 0.000 description 3
- KRQUFUKTQHISJB-YYADALCUSA-N 2-[(E)-N-[2-(4-chlorophenoxy)propoxy]-C-propylcarbonimidoyl]-3-hydroxy-5-(thian-3-yl)cyclohex-2-en-1-one Chemical compound CCC\C(=N/OCC(C)OC1=CC=C(Cl)C=C1)C1=C(O)CC(CC1=O)C1CCCSC1 KRQUFUKTQHISJB-YYADALCUSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 238000009955 starching Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 239000004753 textile Substances 0.000 description 2
- 229910014033 C-OH Inorganic materials 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 229910014570 C—OH Inorganic materials 0.000 description 1
- 206010020112 Hirsutism Diseases 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 229920000561 Twaron Polymers 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- -1 phosphate ester Chemical class 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000004621 scanning probe microscopy Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000004762 twaron Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Abstract
The invention provides a plasma system for continuously processing yarn materials. The plasma system comprises a high-frequency power supply, a gas flow meter, a plasma discharging pipe and a gas inlet pipeline, wherein the plasma discharging pipe comprises a hollow medium pipe, a high-voltage electrode, a ground electrode and a pair of insulating plugs; the high-voltage electrode is arranged in the medium pipe, the medium pipe is externally uniformly wound with the ground electrode, and the insulating plugs are located at two ends of the medium pipe; a plurality of small holes for permitting yarns to pass through and gas in a pipe cavity of the medium pipe to flow out are formed in the cross sections of the insulating plugs; the high-frequency power supply is electrically connected with the high-voltage electrode and the ground electrode; the gas inlet pipeline is communicated with the medium pipe; the gas flow meter is arranged on the gas inlet pipeline and is used for monitoring, regulating and controlling the flow of gas entering the gas inlet pipeline. By virtue of the structural design of the system, the yarn materials can be well processed; furthermore, the cost is relatively low, and the efficiency is relatively high.
Description
(a) technical field
The present invention relates to plasma technique applied technical field, particularly a kind of plasma system of continuous process thread material.
(b) background technology
Plasma technique is that the partially ionized plasma that application plasma generator produces completes the means of certain industrial production target.Plasma technique is applied to textile industry, wherein a kind of comparatively conventional be atmospheric dielectric barrier discharge technology.Wherein one or two electrode dielectric covers by this technology, or medium is directly suspended on discharge space, or adopts granular Filled Dielectrics wherein, when being full of certain working gas between two sparking electrodes, and applies 10 between two electrodes
4~ 10
6v voltage, adopt 500W ~ 1KW high frequency or the pulse power to excite working gas can produce filament-like discharges plasma, main electrodes form is plate electrode., there is process uneven, the shortcomings such as easy calcination fiber in this kind of method mainly filament-like discharges.
What another kind was comparatively conventional is adopt the radio frequency of power 1KW ~ 10KW or high frequency electric source to excite the minimum gas in vacuum chamber to produce low pressure plasma, the advantage of this method to produce uniform and stable glow discharge, even to textile material process, effect is better.But due to the operation of low pressure plasma need vacuumize, equipment investment is large, complicated operation, is unsuitable for the processing process of sequential like thread material.
(c) summary of the invention
The invention provides a kind of plasma system of continuous process thread material, to solve the problem.
Embodiments providing a kind of plasma system for processing thread material continuously, comprising high frequency electric source, gas flowmeter, plasma discharge tube and admission line;
Plasma discharge tube comprises ground electrode in medium tube outside of the medium tube of hollow, the high-field electrode being built in medium tube, uniform winding and is positioned at a pair insulating plug at medium tube two ends; The cross section of insulating plug is provided with multiple for allowing yarn pass through and making the aperture that the intraluminal gas of medium tube flows out;
High frequency electric source is electrically connected with high-field electrode and ground electrode;
Admission line is communicated with medium tube;
Gas flowmeter is arranged on admission line, for monitoring and regulating and controlling the gas flow in air inlet pipe.
Wherein, medium tube is straight quartz ampoule.
Wherein, the cross-section center position of insulating plug is provided with central through hole, and high-field electrode inserts central through hole and fixes.
Wherein, also comprise yarn transfer device, this device comprises unwinding, idle guide rolls, tenslator and winding groove drum and coiler device stand.
Wherein, also comprise equipment stand, for placing described high frequency electric source, gas flowmeter, plasma discharge tube and safty shield, and fixed conveyor deflector roll.
Wherein, the quantity of the aperture on insulating plug is 1 ~ 20.
Wherein, also comprising for the protection of plasma discharge tube and the safty shield preventing human electric shock, cover on the outside of plasma discharge tube, is insulation safety protective cover.
Wherein, the power of high frequency electric source is 0 ~ 500W, and frequency is 10 ~ 20KHZ, and voltage is 0 ~ 10KV.
Wherein, during for the treatment of aramid fiber, the voltage 5KV of high frequency electric source, power 100W, pass into argon flow amount 1L/min, oxygen flow 0.1L/min.
Wherein, during for the treatment of 100 English Zhi Chunmian worsted yarn, the voltage 5KV of high frequency electric source, power 80W, pass into argon flow amount 1L/min.
Embodiments provide a kind of plasma system of continuous process thread material, be provided with tubular media layer, high-field electrode is built in medium tube, ground electrode is wrapped in medium tube outside, medium tube two ends are provided with insulating plug, insulating plug is provided with multiple aperture allowing yarn pass through, admission line is communicated with medium tube, be a simple hollow composite tubular structure like this by two electrodes and dielectric layer set, its tube chamber is then that plasma produces environment, yarn crosses the inner transmission continuously of tube chamber by the aperture on insulating plug, intraluminal plasma can evenly act on yarn fully, the processing process to thread material can be realized, its structure is simply efficient, a small amount of argon gas can passed into, helium or oxygen even only use when air and produce uniform aura or half glow discharge plasma, cost-saving.
The explanation of (d) accompanying drawing
Fig. 1 is the structural representation of an embodiment of the plasma system for processing thread material continuously provided by the invention;
The schematic diagram of the plasma discharge tube that Fig. 2 provides for the embodiment of the present invention;
The cross sectional representation of the insulating plug that Fig. 3 provides for the embodiment of the present invention and high-field electrode.
(c) detailed description of the invention
Embodiments provide a kind of plasma system for processing thread material continuously.This system comprises high frequency electric source, gas flowmeter, plasma discharge tube and admission line.
Plasma discharge tube comprises ground electrode in medium tube outside of the medium tube of hollow, the high-field electrode being built in medium tube, uniform winding and is positioned at a pair insulating plug at medium tube two ends; The cross section of insulating plug is provided with multiple for allowing yarn pass through and making the aperture that the intraluminal gas of medium tube flows out.
High frequency electric source is electrically connected with high-field electrode and ground electrode; Admission line is communicated with medium tube; Gas flowmeter is arranged on admission line, for monitoring and regulating and controlling the gas flow in air inlet pipe.
Preferably, as a kind of embodiment, shown in Figure 1, this system comprises:
A high frequency electric source 1, power 0 ~ 500W, frequency 10 ~ 20KHZ, voltage 0 ~ 10KV; Two digital display type gas flowmeters 2; T-shaped plasma discharge tube 4; And supporting admission line 3.Admission line 3 interior solid arrow direction is gas flow direction.
Wherein, T-shaped plasma discharge tube 4 is excitation device, and structure as shown in Figure 2, adopt the sub-glow plasma discharge structure of inductance type list dielectric impedance, comprise: a hollow quartz tube A, admission line is communicated with perpendicular to quartz ampoule and with quartz tube cavity, the two composition T font.Admission line is provided with an inlet suction port C.Quartz ampoule A two ends are provided with a pair insulated opening plug B.
Wherein, hollow quartz tube A can be one-body molded with the admission line of below inlet suction port C.
The lumen diameter of hollow quartz tube is between 1cm ~ 10cm, and the pipe thickness of quartz ampoule is between 0.1cm ~ 0.5cm.
The built-in high-field electrode D and of quartz ampoule A is wrapped in the ground electrode E outside quartz ampoule.Preferably, ground electrode is spirally wrapped around quartz ampoule outside equably.
Wherein, as shown in Figure 3, insulating plug B center is provided with central through hole to insulating plug, the central through hole of two insulating plugs is inserted at the two ends of high-field electrode D respectively, can fix high-field electrode D, central through hole surrounding is provided with aperture F, passes through and flow out for working gas for allowing yarn.The quantity of little perforate F can be selected according to actual needs between 1 ~ 20, and the embodiment of the present invention does not enumerate.
Preferably, this system also comprises safty shield 8, in order to protect T-shaped plasma discharge tube and to prevent human electric shock.
Preferably, also comprise equipment stand 5, in order to place plasma discharge tube, safty shield, and yarn idle guide rolls 7 is installed.
This system is also provided with a set of yarn transfer device, particularly, shown in Fig. 1, comprises unwinding 6, idle guide rolls 7, tenslator 9 and winding groove drum 10, coiler device stand 11.Hollow arrow shown in Fig. 1 is yarn transmission direction.
Yarn transfer device can regulate yarn winding speed easily, controls the yarn speed of service.Wherein, groove drum 10 controllable that reels yarn transfer rate.
Plasma treatment procedure is: yarn is after the unwinding of unwinding yarn cylinder 6, and enter tubulose atmospheric plasma generating means process through deflector roll 7, the little perforate F of insulating plug, main working parameters is: power: 0 ~ 500W; Frequency: 10 ~ 20KHZ; Voltage: 0 ~ 10KV; Processing speed: 0 ~ 50m/min; Gas flow: 0 ~ 5L/min.Yarn, after Cement Composite Treated by Plasma, from the perforate of other end insulating plug out, after idle guide rolls 7 and yarn tension control device 9, reels through winding groove drum 10.
In actual production process, preferably, in order to enhance productivity, the quantity of plasma discharge tube 4 can be multiple, the i.e. corresponding multiple plasma discharge tube 4 of same high frequency electric source, multiple built-in high-field electrodes are connected in parallel on the positive pole of high frequency electric source, and multiple ground electrode is then connected in parallel on the negative pole of high frequency electric source.Arrange admission line supporting with it and gas flowmeter, the number of yarns that such this system can process then is doubled and redoubled, and production efficiency becomes several times of increases simultaneously.
Such as, by 100 English Zhi Chunmian worsted yarns after the unwinding of unwinding yarn cylinder 6, after deflector roll 7, enter tubulose atmospheric plasma generating means process, voltage is set to 5KV, and power is set to 80W, passes into argon flow amount 1L/min, processing speed 10m/min.Yarn, after Cement Composite Treated by Plasma, after deflector roll and yarn tension control device 9, reels through winding groove drum 10.
The plasma that tubulose plasma producing apparatus produces not only can bombard cotton fiber surface and produces physical sputtering and chemical etching effect thus destroy the hydrophobic cuticle layer of fiber, and generate free radical at fiber surface simultaneously, cause plasma and implant functional group reactions, hydroxyl (C-OH), carboxyl (COOH) and carbonyl (C=O) isopolarity group is implanted at fiber surface, improve its surface energy significantly, strengthen its wettability, make its wetting time be reduced to from several hours 0.8 second even less, surface contact angle is reduced to 0 ° from about 140 °.After Cement Composite Treated by Plasma, making yarn be provided with excellent sizing performance, only using starch size and a small amount of ecological auxiliary agent, when not using PVA to carry out starching, obtaining excellent sizing performance.As compared to typically using fill a prescription traditional slashing technique of slurry sizing of 30%PVA1799 and 70% phosphate ester starch, yarn after the process of this plasma technique, starch size and a small amount of ecological auxiliary agent is used to carry out starching, the sizing rate of sizing, fracture strength, elongation at break, abrasion resistance can be made to improve 19.4%, 5.3%, 3.4% and 169.2% respectively, make 1mm hairiness index value reduce by 59.3%.
This invents the plasma treatment technique to thread material related to, and be the key point of ecological sizing, this technology not only solves the pollution problem of PVA to environment, and can be enterprise's saving cost of sizing agent.The current PVA1799 market price is about 1.5 ten thousand yuan/ton, and starch and converted starch price are 0.3 ~ 0.4 ten thousand yuan/ton, and starch per ton uses the cost of ecological auxiliary agent to be 0.05 ~ 0.07 ten thousand yuan.Compare with traditional Sizing Technology of 70% starch size formula with use 30%PVA, this project can save the cost of sizing agent of about 40%, but also can reduce the processing cost of waste sizing.
In addition, the plasma system of the continuous process thread material that the embodiment of the present invention provides, not only have good treatment effect for purified cotton yarns, the chemical fibre for Prof. Du Yucang also has good modified function.
Such as, by aramid fiber Twaron 1000 endless tow (line density 1100dtex, comprise 1000 fibers, single fiber diameter 10 μm) after the unwinding of unwinding yarn cylinder 6, after deflector roll 7, enter tubulose atmospheric plasma generating means process, voltage 5KV, power 100W, pass into argon flow amount 1L/min, oxygen flow 0.1L/min, processing speed 5m/min.Yarn, after Cement Composite Treated by Plasma, after deflector roll and yarn tension control device 9, reels through winding groove drum 10.
Aramid fiber has high strength, high-modulus, the many merits such as high temperature resistant, corrosion-resistant, but owing to lacking chemical active radical, smooth surface and wettability is poor, causes itself and the other materials such as resin, rubber bad adhesion, have impact on its development and application to a great extent.Aramid fiber is after the technical finesse that the present invention relates to, and through the test of Nanoscope E type scanning probe microscopy, its surface roughness rises to 3.58nm by 0.967nm, and roughness significantly increases; Be respectively 28.4%, 5.2%, 0% before fiber surface polar group-C-N-/-C-O-, the process of-CONH-,-COO-mass fraction, be increased to 35.4%, 11.3%, 2.1% respectively after process, polarity significantly improves; Adopt the interfacial shear force between fiber and epoxy resin before and after filament withdrawing measuring Cement Composite Treated by Plasma, be respectively 19.4,40.6Mpa, improve 109%.The above results proves, after the present invention relates to technical finesse, fiber surface roughness, polarity significantly improve, and the caking property between fiber surface and epoxy resin is significantly increased, and substantially increase result of use and value that carbon fiber is applied to reinforced composite field.
To sum up, the plasma system of the continuous process thread material that the embodiment of the present invention provides, the feature of its structural design and processing procedure is: (1) thread material is run along long tube direction in pipe inside, the plasma of interelectrode space and generation can be made full use of, obtain good treatment effect; (2) in pipe, space is relatively narrow and small, can reduce the use amount of oxygen, argon gas, nitrogen etc., reduces processing cost; (3) argon gas can be used as carrier gas, show also to obtain good aura or sub-aura treatment effect through practice; (4) high frequency electric source operating power 0 ~ 500W, hinge structure power consumption is little, can with less power, and comparatively faster processing speed obtains good treatment effect.(5) insulating plug the number of openings can be selected flexibly according to processing request, when threads pass into simultaneously long tube plasma discharge apparatus process time, plasma utilizes more abundant, and its working (machining) efficiency and economic benefit can increase substantially.(6) show through practice, this plasma process system only can use air, produces plasma, greatly reduce processing cost when namely additionally not passing into other gases.
It should be noted that, in this article, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thus make to comprise the process of a series of key element, method, article or equipment and not only comprise those key elements, but also comprise other key elements clearly do not listed, or also comprise by the intrinsic key element of this process, method, article person equipment.When not more restrictions, the key element limited by statement " comprising ... ", and be not precluded within process, method, article or the equipment comprising described key element and also there is other identical factor.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within the scope of protection of the invention.
Claims (10)
1. process a plasma system for thread material continuously, it is characterized in that, comprise high frequency electric source, gas flowmeter, plasma discharge tube and admission line;
Described plasma discharge tube comprises ground electrode in described medium tube outside of the medium tube of hollow, the high-field electrode being built in described medium tube, uniform winding and is positioned at a pair insulating plug at described medium tube two ends; The cross section of described insulating plug is provided with multiple for allowing yarn pass through and making the aperture that the intraluminal gas of described medium tube flows out;
Described high frequency electric source is electrically connected with described high-field electrode and described ground electrode;
Described admission line is communicated with described medium tube.
Described gas flowmeter is arranged on described admission line, for monitoring and regulating and controlling the gas flow in described air inlet pipe.
2. the plasma system of continuous process thread material according to claim 1, is characterized in that, described medium tube is straight quartz ampoule.
3. the plasma system of continuous process thread material according to claim 1, is characterized in that, the cross-section center position of described insulating plug is provided with central through hole, and described high-field electrode inserts described central through hole and fixes.
4. the plasma system of continuous process thread material according to claim 1, is characterized in that, also comprise yarn transfer device, and this device comprises unwinding, idle guide rolls, tenslator and winding groove drum and coiler device stand.
5. the plasma system of continuous process thread material according to claim 4, it is characterized in that, also comprise equipment stand, for placing described high frequency electric source, gas flowmeter, plasma discharge tube and described safty shield, and fixing described idle guide rolls.
6. the plasma system of continuous process thread material according to claim 1, is characterized in that, the quantity of described aperture is 1 ~ 20.
7. the plasma system of continuous process thread material according to claim 1; it is characterized in that; also comprising for the protection of plasma discharge tube and the safty shield preventing human electric shock, cover on the outside of described plasma discharge tube, is insulation safety protective cover.
8. the plasma system of continuous process thread material according to claim 1, is characterized in that, the power of described high frequency electric source is 0 ~ 500W, and frequency is 10 ~ 20KHZ, and voltage is 0 ~ 10KV.
9. the plasma system of continuous process thread material according to claim 1, is characterized in that, during for the treatment of aramid fiber, the voltage 5KV of described high frequency electric source, power 100W, pass into argon flow amount 1L/min, oxygen flow 0.1L/min.
10. the plasma system of continuous process thread material according to claim 1, is characterized in that, during for the treatment of 100 English Zhi Chunmian worsted yarn, the voltage 5KV of described high frequency electric source, power 80W, pass into argon flow amount 1L/min.
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Cited By (1)
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CN106973481A (en) * | 2017-03-10 | 2017-07-21 | 浙江理工大学 | A kind of atmospheric pressure plasma system for tubular material surface continuous modification |
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CN202865665U (en) * | 2012-10-22 | 2013-04-10 | 武汉工程大学 | Fiber modification device |
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CN1382829A (en) * | 2001-04-27 | 2002-12-04 | 中国科学院物理研究所 | Process for modifying inner surface of tubular workpiece |
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