CN101252805A - Simple atmosphere pressure suspending electrode cold plasma fluid generator - Google Patents
Simple atmosphere pressure suspending electrode cold plasma fluid generator Download PDFInfo
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- CN101252805A CN101252805A CNA2008100109047A CN200810010904A CN101252805A CN 101252805 A CN101252805 A CN 101252805A CN A2008100109047 A CNA2008100109047 A CN A2008100109047A CN 200810010904 A CN200810010904 A CN 200810010904A CN 101252805 A CN101252805 A CN 101252805A
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Abstract
The invention relates to a simple cold plasma jet flow generating device for the barometric suspended electrode, which belongs to the technical field of the plasma discharging reactor. The cold plasma jet flow generating device is characterized in that a main body of the device is a millimeter magnitude quartz tube, a gas inlet opening is arranged at one end connected with a gas supplying source, and a jet flow outlet opening is arranged at the other end; a pair of needle electrodes are embedded into the quartz tube above the jet flow outlet opening, both the electrodes are symmetrical in the radial direction, the needle electrode at one side connected with an alternating current power supply is adopted as a power electrode, and the other electrode at the other side is suspended in the air and adopted as the suspended electrode; through applying voltage, the electrodes discharge to generate plasmas which are sprayed out of the tube to form the jet flow through the action of flowing air. The jet flow generating device has the advantages that the needle electrode structure can reduce the generation of the jet flow and maintain the voltage; the suspended electrode is favorable not only for enhancing the utilization factor of the energy, but also for effectively controlling the discharging intensity and maintaining the stable discharging; the non-pressure plasma jet flow is characterized in low temperature, large length, low produced and maintained voltage, long continuous working time and simple structure.
Description
Technical field
The invention belongs to the plasma discharge reactor having technical field, relate to a kind of cold-plasma jet generating means, specially refer to a kind of simple atmosphere pressure suspending electrode cold plasma fluid generator.
Background technology
Ion, electronics, excited atom, molecule and the free radical of low-temperature plasma body space enrichment all is as lively as a cricket reactive species, these active particle quantity are big, kind is many, activity is high, be easy to react with the material surface that is contacted, therefore in recent years, low temperature plasma obtains application more and more widely in fields such as sterilization, surface modification (improving the character of the aspects such as wettability, water absorption, printing and dyeing, adherence and conductivity of paper, film, textile and fiber), thin film deposition, etching processing, device cleanings.At present, most low temperature plasmas are to produce by gas discharge under the low pressure of hundreds of handkerchief, but for large-scale industrial production, there are two significant drawbacks in the low pressure plasma: (1) discharge and reative cell are in the low pressure state, need to adopt vacuum system, investment is high and use complicated; (2) batch processing efficient is low, need constantly open vacuum chamber and take out finished product interpolation test product, vacuumizes again then and charges into working gas, is difficult to continuous production.Therefore, be more suitable for being used for that extensive temperature production uses is the low temperature plasma of formation atmospheric pressure under.
The atmosphere cold plasma jet is that a kind of novel air of rising in recent years is pressed class glow plasma generation technique, and this technology can be enlarged the discharge in the short space and draw, and forms comparatively open atmospheric pressure class glow discharge plasma.Use multiple working gas and mist thereof and can produce cold-plasma jet effectively, have that puncture voltage is lower, ion and characteristics such as metastable atom concentration is higher, electron temperature is high, the neutral particle temperature is low, uniform parts is big in the plasma that produces, controllability is good, be the present research focus in plasma application field in the world.The many radio frequency inductive coupled or capacitive coupling discharging generations of tradition atmosphere cold plasma fluidic device by the quartz ampoule dielectric impedance, but for this plasma jet that under the dielectric impedance mode, produces by radio frequency discharge, when the radio-frequency power input exceeds a certain scope, the radio frequency plasma jet is converted into the high-temperature electric arc of lack of homogeneity easily, has reduced the stability of atmosphere cold plasma jet.Simultaneously, the structure relative complex of traditional jet source, the application of radio-frequency power supply has also increased the complexity of operation, control and maintenance.
Summary of the invention
The present invention aims to provide a kind of simple atmosphere pressure suspending electrode cold plasma fluid generator, has characteristics such as simple in structure, practical.With argon gas or helium is working gas, can in normal pressure open air environment, obtain uniform and stable cold-plasma jet, have that temperature is low, length is long, produce and keep advantages such as voltage is low, stream time is long, can be used for applications such as sterilization, surface modification, device cleaning.
Technical scheme of the present invention is: this device main body partly is the millimeter magnitude quartz ampoule of a both ends open, specification is internal diameter 5.5mm, external diameter 8mm, the one end is as the reactor air inlet, link to each other with air supply source through flowmeter by conduit, working gas that air supply source supplies is argon gas or helium, and the other end exports as plasma jet.The 10mm place has a pair of pin electrode to embed in the quartz ampoule apart from the jet exit top, and two pin electrodes are radial symmetric, spacing between electrodes 2.5mm.A side pin electrode that links to each other with the 48kHz alternating current source is a power electrode, and 0-10kV is adjustable for alternating current source voltage; The opposite side pin electrode relative with power electrode directly is suspended on every side in the open air environment need not ground connection, as suspension electrode.By applying voltage, the discharge generation plasma takes place between the electrode, under the flowing gas effect, the region of discharge plasma is ejected the outer jet that forms of pipe.When the input service gas flow keeps one regularly, continue to increase applied voltage, this simple atmosphere pressure suspending electrode cold plasma fluid generator will experience disruptive discharge, stable state jet, unstable state jet, jet and disappear and transfer discharge four-stage in the pipe to, and corresponding threshold voltage of each stage is according to use working gas difference difference to some extent.In the above four processes, what can be applicable to actual production is stable state jet stage and unstable state jet stage.Except that applied voltage, gas flow also can influence strength of discharge and jet pattern.If the input air-flow is too small, then can't produce plasma jet; If the input air-flow is excessive, then the jet exit place can form turbulent flow, unsuitable jet stable operation.Under above-mentioned specification and condition, forming the appropriate gas flow scope of stablizing argon gas or helium plasma jet is 0.08m
3/ h-0.3m
3/ h.In a word, by regulating applied voltage and working gas flow, can obtain even, stable cold-plasma jet.
Effect of the present invention and benefit are: by using pin pin electrode structure and introducing suspension electrode, can effectively improve, improve cold-plasma jet character.Because the pin electrode tip curvature is bigger, and two pin electrode spacings are nearer, therefore utilize pin pin electrode structure to be easier to produce than highfield, can obviously reduce plasma jet and produce and keep voltage; Jet characteristics has been optimized in the introducing of suspension electrode greatly, owing to need not use external device, when simplifying circuit structure, has more reduced the loss of energy at external loop, makes the easier jet that concentrates on of energy produce passage, has improved capacity usage ratio; In addition, suspension electrode can also be controlled the electric charge accumulation, effectively controls pin needle-discharging intensity, strengthens jet stability, prevents the jet thermalization.Use this device, can under the normal pressure open environment, obtain even, stable cold-plasma jet, have that temperature is low, length is long, produce and keep characteristics such as voltage is low, stream time long, simple in structure.
Description of drawings
Accompanying drawing 1 is the structural representation of simple atmosphere pressure suspending electrode cold plasma fluid generator of the present invention.
Among the figure:
101. flowmeter is used to control the working gas flow of input reactor.
102. air inlet is used for input service gas.
103. quartz ampoule, the reactor body part is used for fixing electrode position, provides discharge that environment takes place, and specification is internal diameter 5.5mm, external diameter 8mm.
104. power electrode as the energy input, is positioned at apart from 10mm place, quartz ampoule downstream port top, links to each other with 48kHz AC power source.
105. suspension electrode is positioned at the place apart from quartz ampoule downstream port top 10mm, directly being suspended in the surrounding air environment need not ground connection; Be radial symmetric with power electrode, two spacing between electrodes 2.5mm.
106. jet exit, promptly the quartz ampoule downstream port can be drawn the plasma of discharge generation in the short space, forms comparatively open plasma.
107.48kHz the AC power source, voltage 0-10kV is adjustable, is used to provide voltage.
108.48kHz AC power source ground connection.
Accompanying drawing 2 is simple atmosphere pressure suspending electrode cold plasma fluid generator vertical views.
Embodiment
Below in conjunction with technical scheme and accompanying drawing, be described in detail the specific embodiment of the present invention.
Working gas (helium or argon gas) enters quartz ampoule 103 by air inlet 102 behind flowmeter 101.10mm place, jet exit 106 top has a pair of pin electrode to embed in the quartz ampoule, and a side pin electrode that links to each other with 48kHz alternating current source 107 is a power electrode 104, and 0-10kV is adjustable for alternating current source voltage; The opposite side pin electrode relative with power electrode directly is suspended on every side in the open air environment need not ground connection, as suspension electrode 105; Two pin electrodes are radial symmetric, spacing between electrodes 2.5mm.
When applying ac high-voltage by power electrode and reach the gas breakdown threshold value, produce discharge between two pin electrodes, form the less differential of the arc of intensity; This moment is booster tension slightly, makes region of discharge ionization strengthen, and particle density increases, and under the flowing gas effect, the region of discharge plasma is ejected outside the pipe, forms uniform and stable class aura jet at jet exit 106 places, and length can reach 50mm-70mm.Do on-line analysis with oscilloscope and photomultiplier and find that the photoelectric current of stable state jet is identical with the applied voltage frequency, and per half period the pulsatile once peak appears, this rule is similar to the Atomospheric pressure glow discharge current status; Find that with the optical fiber temperature sensor monitors when with argon gas, when helium is working gas, stable state jet temperature only is about 20 ℃, to belong to typical low temperature plasma; Find fluerics enrichment OH, O, and excited atom isoreactivity reaction species by spectral detection.In addition, stable state argon gas or helium plasma jet be in case form, just can be continuously, stable operation a few hours.Therefore, the stable state jet that this simple atmosphere pressure suspending electrode cold plasma fluid generator produced can be used for applications such as sterilization, surface modification, device cleaning, is particularly suitable for the comparatively responsive material surface of temperature is handled.
When further improving voltage on the stable state basis, strength of discharge strengthens, and the fluerics brightens, but jet still can keep stable state, and jet length is almost constant; When voltage increases to a certain degree, a small amount of discharge filament appears in the fluerics, and spray transfer is to unstable state, and length slightly reduces.Find that by oscilloscope and photomultiplier measurement some tiny pulses appear in this moment in the photoelectric current main pulse, have certain thread discharge characteristic; Spectral detection finds that the fluerics still has a large amount of OH, O, reaches excited atom isoreactivity reaction species.Therefore, the unstable state jet still can be applicable to aspects such as sterilization, device cleaning, but should not be used for the surface modification of materials such as cloth, paper, in case local temperature is too high, causes and ablates or perforation.
Further strengthen voltage to certain value on the unstable state basis, the plasma jet at jet exit place will suddenly disappear, then at a large amount of random helical form discharge filaments of the inner appearance of jet pipe.This process has been avoided the further thermalization of jet, has strengthened the controllability of device, has increased the protection to the processing material simultaneously.To sum up, the availability phases of this simple atmosphere pressure suspending electrode cold plasma fluid generator is stable state jet and unstable state jet.
Except that applied voltage, gas flow also can influence strength of discharge and jet pattern.If air-flow is too small, then can't produce plasma jet; If delivery air is excessive, then the jet exit place can form turbulent flow, unsuitable jet stable operation.Under above-mentioned specification and condition, the appropriate gas flow scope that forms stable state argon gas or helium jet is 0.08m
3/ h-0.3m
3/ h.
Specific embodiment:
Adopting the high-purity argon gas of purity 99.999% is working gas, and the flux lower limit that can produce stable state jet and unstable state jet is 0.08m
3/ h.When flow is 0.26m
3During/h, each phase threshold voltage and jet characteristics are as follows:
1. produce discharge between two pin electrodes, the breakdown threshold that forms the low-intensity differential of the arc is 2.7kV.
2. further increase voltage, the voltage range that the stable state jet occurs is 3.6kV-4.4kV; Macroscopical temperature range of stable state jet is 18.7 ℃-22.3 ℃, and Electron Excited Temperature is 3329K-3715K; Jet length remains at about 60mm.
3. continue to increase voltage, the voltage range that the unstable state jet occurs is 4.4kV-5.6kV; Electron Excited Temperature is 3329K-4405K; The unstable state jet length is slightly short than the stable state jet, is about 40mm-60mm.
4. when applied voltage during greater than 5.6kV, jet disappears, then a large amount of random helical forms discharge filaments occur in that jet pipe is inner.
Claims (4)
1. simple atmosphere pressure suspending electrode cold plasma fluid generator, it is characterized in that: apparatus main body is the millimeter magnitude quartz ampoule of a both ends open, and an end that links to each other with air supply source is the generator air inlet, and the other end is a jet exit; Jet exit top quartz ampoule is embedded in a pair of pin electrode, and two electrodes are radial symmetric, and a side pin electrode that links to each other with alternating current source is a power electrode, and the opposite side pin electrode directly is suspended in and is suspension electrode in the air; By applying voltage, discharge generation plasma between two pin electrodes, under the flowing gas effect, the region of discharge plasma is ejected the outer jet that forms of pipe.
2. a kind of simple atmosphere pressure suspending electrode cold plasma fluid generator according to claim 1, it is characterized in that: jet exit top 10mm quartz ampoule is embedded with a pair of pin electrode, two electrodes are radial symmetric, spacing between electrodes 2.5mm, a side pin electrode that links to each other with alternating current source is a power electrode, the opposite side pin electrode directly is suspended in the air need not ground connection, as suspension electrode.
3. a kind of simple atmosphere pressure suspending electrode cold plasma fluid generator according to claim 1 is characterized in that: the power supply that adopts is 48kHz AC power source, and voltage 0-10kV is adjustable.
4. a kind of simple atmosphere pressure suspending electrode cold plasma fluid generator according to claim 1 is characterized in that: working gas that air supply source provides is argon gas or helium.
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|---|---|---|---|
| CNA2008100109047A CN101252805A (en) | 2008-03-31 | 2008-03-31 | Simple atmosphere pressure suspending electrode cold plasma fluid generator |
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| CN102065626A (en) * | 2011-01-21 | 2011-05-18 | 中国科学院西安光学精密机械研究所 | Atmospheric pressure non-thermal plasma brush generator and array combination thereof |
| CN101437352B (en) * | 2008-12-19 | 2011-12-14 | 华中科技大学 | Plasma relay apparatus |
| CN101652016B (en) * | 2009-08-27 | 2011-12-28 | 中国科学技术大学 | Constant-pressure linear cold-plasma jet generating device |
| CN101426327B (en) * | 2008-12-02 | 2012-01-25 | 华中科技大学 | Plasma jet device |
| CN102573259A (en) * | 2012-01-13 | 2012-07-11 | 北京交通大学 | Method for suppressing filamentary discharge and electrode structure |
| CN102595756A (en) * | 2012-03-15 | 2012-07-18 | 大连海事大学 | Generating device and generating method for gas-liquid mixed dielectric barrier discharge |
| CN103037611A (en) * | 2013-01-05 | 2013-04-10 | 安徽理工大学 | Device for generating air plasma brush at atmospheric pressure |
| CN103143462A (en) * | 2013-03-08 | 2013-06-12 | 厦门大学 | Fluidic generator |
| CN103260329A (en) * | 2013-04-23 | 2013-08-21 | 华中科技大学 | Plasma jet device with suspension electrode |
| CN104812154A (en) * | 2015-04-22 | 2015-07-29 | 西安交通大学 | Three-electrode dielectric barrier discharging plasma generation device |
| CN106312205A (en) * | 2016-10-08 | 2017-01-11 | 大连理工大学 | Method for electrosparking in atmospheric pressure cold plasma jet |
| CN106954332A (en) * | 2017-05-17 | 2017-07-14 | 北京交通大学 | A kind of glow discharge plasma generating means |
| RU2633705C1 (en) * | 2016-06-20 | 2017-10-17 | Федеральное государственное бюджетное учреждение науки Институт сильноточной электроники Сибирского отделения Российской академии наук (ИСЭ СО РАН) | Method of producing plasma jet and device for its implementation |
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| CN101437352B (en) * | 2008-12-19 | 2011-12-14 | 华中科技大学 | Plasma relay apparatus |
| CN101652016B (en) * | 2009-08-27 | 2011-12-28 | 中国科学技术大学 | Constant-pressure linear cold-plasma jet generating device |
| CN102065626B (en) * | 2011-01-21 | 2012-12-19 | 中国科学院西安光学精密机械研究所 | Atmospheric pressure non-thermal plasma brush generator and array combination thereof |
| CN102065626A (en) * | 2011-01-21 | 2011-05-18 | 中国科学院西安光学精密机械研究所 | Atmospheric pressure non-thermal plasma brush generator and array combination thereof |
| CN102573259A (en) * | 2012-01-13 | 2012-07-11 | 北京交通大学 | Method for suppressing filamentary discharge and electrode structure |
| CN102595756A (en) * | 2012-03-15 | 2012-07-18 | 大连海事大学 | Generating device and generating method for gas-liquid mixed dielectric barrier discharge |
| CN103037611B (en) * | 2013-01-05 | 2015-09-30 | 安徽理工大学 | Atmosphere air plasma brushes hair generating apparatus |
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| RU2633705C1 (en) * | 2016-06-20 | 2017-10-17 | Федеральное государственное бюджетное учреждение науки Институт сильноточной электроники Сибирского отделения Российской академии наук (ИСЭ СО РАН) | Method of producing plasma jet and device for its implementation |
| CN106312205A (en) * | 2016-10-08 | 2017-01-11 | 大连理工大学 | Method for electrosparking in atmospheric pressure cold plasma jet |
| CN106312205B (en) * | 2016-10-08 | 2018-01-16 | 大连理工大学 | Electric discharge machining method in atmosphere cold plasma jet |
| CN106954332A (en) * | 2017-05-17 | 2017-07-14 | 北京交通大学 | A kind of glow discharge plasma generating means |
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| CN107484321B (en) * | 2017-07-20 | 2019-08-23 | 中国科学院工程热物理研究所 | Plasma nozzle |
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Open date: 20080827 |