CN106312205A - Method for electrosparking in atmospheric pressure cold plasma jet - Google Patents

Method for electrosparking in atmospheric pressure cold plasma jet Download PDF

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Publication number
CN106312205A
CN106312205A CN201610874299.2A CN201610874299A CN106312205A CN 106312205 A CN106312205 A CN 106312205A CN 201610874299 A CN201610874299 A CN 201610874299A CN 106312205 A CN106312205 A CN 106312205A
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cold plasma
plasma jet
gas
cold
work
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CN201610874299.2A
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CN106312205B (en
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余祖元
邹日貌
徐文骥
李剑中
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Dalian University of Technology
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Dalian University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • B23H1/10Supply or regeneration of working media

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Plasma Technology (AREA)

Abstract

The invention relates to a method for electrosparking in an atmospheric pressure cold plasma jet, and belongs to the field of machining and tools. The macroscopic temperature of the atmospheric pressure cold plasma jet is lower than the room temperature or slightly higher than the room temperature, and any heat injury to a surface to be machined is avoided. During work, a work gas source enters a cold plasma jet generator through a pressure reducing valve and a gas flow and quality controller; and the flow of the work gas source and the output voltage of a high-voltage power source are adjusted, and therefore the cold plasma jet generator can generate the stable cold plasma jet. The position of the cold plasma jet generator is adjusted, and therefore the end of an electrode and to-be-machined areas of workpieces can be completely immersed in the cold plasma jet. According to the method for carrying out electrosparking in the atmospheric pressure cold plasma jet, under the same machining condition, the surface roughness and the electrode consumption lower than those in deionized water and the surface quality better than that in gas can be obtained.

Description

Electric discharge machining method in atmosphere cold plasma jet
Technical field
The present invention relates to a kind of method of spark machined in atmosphere cold plasma jet, belong to machining and Field of tool.
Background technology
Machining medium is the important component part of EDM System, to the production efficiency of spark machined, adds working medium The aspects such as amount, cost and Environmental Safety have important impact.Spark machined is widely used at present for liquid medium, It is broadly divided into spark processing oil and deionization from water.In liquid, the common fault of spark machined is that export license is bigger.Additionally, electricity consumption Spark processing oil, as working solution, also exists disaster hidden-trouble, and the gas decomposed in processing has pollution to environment, machines it After, need by acetone and other organic solvent, workpiece to be carried out.Using deionized water replacement spark processing oil as working solution, obtain Obtained bigger discharging gap and higher process velocity, but water there is also Faradaic current in processing as working solution, can be straight Connect and have influence on machining accuracy.1997, scholar is had to propose dry EDM, i.e. using compressed gas as machining medium, Have an advantage in that electrode wear rate is low.But short circuit ratio is the highest in Jia Gong.Further, the used tool of spark machined in this medium Electrode mostly is hollow edged electrode.But when processing fine structure or feature, spark machined tool-electrode is it is generally required to make online Making, diameter is generally also below 100 μm.It is extremely difficult less than the hollow edged electrode of 100 μm that on-line machining goes out external diameter, even if can be Prepared by line, due to the throttle effect of micro hole, it is also difficult to be passed through enough in processing gap less than the micropore of 100 μm by diameter Process all of air-flow.This makes to utilize dry EDM fine structure relatively difficult to achieve.Thereafter, though there being scholar to use outside The mode of ventilation, carries out electric spark capillary processing in gas and studies, but less effective, in processing, short circuit ratio is high, and export license is serious (more than 30%).Cold-plasma jet under atmospheric pressure is sprayed onto between electrode and workpiece as machining medium, it is possible to obtain with In liquid, the most different processing effect of dry EDM.And about using cold-plasma jet under atmospheric pressure as electric spark The correlational study of machining medium, is not reported so far.
Summary of the invention
The invention provides a kind of electric discharge machining method using atmosphere cold plasma jet as machining medium, if Standby simple, easy to use, to environment no infringement.Can be under identical machining energy, it is thus achieved that surface matter in relatively deionized water and gas Measure export license lower in more preferable finished surface, and relatively deionized water.
Technical scheme:
Electric discharge machining method in a kind of atmosphere cold plasma jet, equipment used be electric spark machine tool with Cold-plasma jet generating means;
Electric spark machine tool includes marble lathe bed 1, XYZ three-shaft linkage motion platform 2, pulse generator 3, rotates master Axle 4, tool-electrode 5, workpiece 7 and work holder 8;
Cold-plasma jet generating means includes cold plasma fluid generator 6, high voltage power supply 9, gas mass flow Amount controller 10, air relief valve 11 and work source of the gas 12;The high-voltage output end of high voltage power supply 9 and low-voltage output respectively with cold etc. from The electrode of daughter fluidic generator 6 correspondence is connected;Working gas by the source of the gas 12 that works through air relief valve 11 and gas mass flow Controller 10 is passed through cold plasma fluid generator 6;During work, open the valve of work source of the gas 12, adjust air relief valve 11 and enter And regulate the pressure entering gas mass flow controller 10, adjust gas mass flow controller 10, make working gas to set Fixed flow enters in cold plasma fluid generator 6;Open high voltage power supply 9, gradually step up output voltage, adjust electric discharge frequency Rate, until the outlet of cold plasma fluid generator 6 produces stable cold-plasma jet 13;Adjustment cold plasma is penetrated The position of flow-generator 6, makes region to be processed be submerged in completely in cold-plasma jet 13;Open spark machined pulse Generator 3 and control computer 14, control computer 14 and movement instruction pass to XYZ three-shaft linkage motion platform 2 and rotates Main shaft 4, XYZ three-shaft linkage motion platform 2 processes specific structure with rotation main shaft 4 according to movement instruction on workpiece 7 With feature.
Beneficial effects of the present invention: used atmospheric gas pressure cold-plasma jet macro-temperature as little as room temperature or summary in the present invention Higher than room temperature, machining area metal material surface will not be treated and cause hot injury.Wherein the ion of enriched, electronics, excite State atom, molecule and free radical isoreactivity particle, may make the spark discharge between workpiece and electrode be more easy to occur, and increase is put Electricity gap.The increase of discharging gap, may improve the discharge condition of interpolar, and processing bits are more easy to discharge, and short circuit ratio reduces, processing Efficiency improves.Therefore, it can on the premise of in retained gas, the electric discharging machining electrode proportion of goods damageds are low, it is thus achieved that more higher than in gas add Work efficiency rate.
Accompanying drawing explanation
Fig. 1 is the device schematic diagram of spark machined in atmosphere cold plasma jet.
Fig. 2 is that in atmosphere cold plasma jet, nitrogen jet current, deionized water, the surface of spark machined is thick respectively Rugosity (Ra) comparison diagram.
Fig. 3 is that the electrode of spark machined in atmosphere cold plasma jet, nitrogen jet current, deionized water respectively damages Consumption length vs's figure.
In figure: 1 marble lathe bed;2XYZ three-shaft linkage motion platform;3 pulse generators;
4 rotate main shaft;5 tool-electrodes;6 cold plasma fluid generators;7 workpiece;
8 work holders;9 high voltage power supplies;10 gas mass flow controllers;11 air relief valve;
12 work sources of the gas;13 cold-plasma jets;14 control computer.
Detailed description of the invention
Below in conjunction with accompanying drawing and technical scheme, further illustrate the detailed description of the invention of the present invention.
The present invention relates to electric discharge machining method in a kind of atmosphere cold plasma jet, the equipment of use the method is Electric spark machine tool and cold-plasma jet generating means.
Electric spark machine tool includes marble lathe bed 1, XYZ three-shaft linkage motor system 2, pulse generator 3, rotates master Axle 4, tool-electrode 5, processing workpiece 7, work holder 8.
Cold-plasma jet generating means includes cold plasma fluid generator 6, high voltage power supply 9, gas mass flow Amount controller 10, air relief valve 11, work source of the gas 12.
Before carrying out spark machined, according to accompanying drawing, these equipment are connected respectively: the high and low pressure outfan of high voltage power supply 9 Electrode corresponding with cold plasma fluid generator 6 respectively is connected;Working gas by work gas body source 12 through air relief valve 11 It is passed through cold plasma fluid generator 6 with gas mass flow controller 10;During work, open the valve of work source of the gas 12, The pressure adjusting air relief valve 11 makes the pressure entering gas mass flow controller 10 suitable, adjusts gas mass flow and controls Device 10, makes working gas enter in cold plasma fluid generator 6 with suitable flow;Open high voltage power supply 9, gradually step up Output voltage, adjusts discharge frequency, until the outlet of cold plasma fluid generator 6 produces stable cold-plasma jet 13;Adjust the position of cold plasma fluid generator 6, make region to be processed be submerged in completely in cold-plasma jet 13. Open spark machined pulse generator 3 and control computer 14, controlling computer 14 and movement instruction is passed to XYZ tri-axle Ganged movement system 2 and rotate main shaft 4, XYZ three-shaft linkage motor system 2 and rotate main shaft 4 can be according to movement instruction Specific structure and feature is processed on workpiece 7.After process finishing, successively close high voltage power supply 9, work source of the gas 12 valve, Gas mass flow controller 10, pulse generator 3 and control computer 14.
Embodiment
As a example by testing in conjunction with the fine groove of electric spark milling, illustrate using cold-plasma jet as spark machined medium Characteristic.Tool-electrode material is depressed place, and workpiece material is H62 pyrite, and work source of the gas uses purity to be the High Purity Nitrogen of 99.999% Gas.Electric spark fine groove machining experiment is carried out respectively in cold-plasma jet, nitrogen jet current, deionized water.The pulse power For the RC pulse power.Pulse power open-circuit voltage is set to 80V, and capacitance is respectively set to 3300pF, 8200pF.Adjust decompression Valve 11 output pressure is 0.3Mpa, adjusts gas flow quality controller 10 so that enter the gas of cold plasma generator 6 Flow is 15slm.Adjust the position of cold plasma generator 6, make the end of tool-electrode 5 and the region to be processed of workpiece 7 Be completely submerged in cold-plasma jet 13, and guarantee cold plasma generator 6 will not in the course of processing with lathe Other positions interfere.Now good NC code input prepared in advance can be controlled computer 14, start lathe and carry out electricity Spark discharge is processed.When with nitrogen jet current for machining medium, in processing, short circuit ratio is the highest to such an extent as to occur even in certain point After continuous short circuit, persistently processing 5 minutes, electrode is still hovered near this position, and discharge signal is also constantly in sequential short circuit shape State, observes finished surface after stopping processing, and galvanic corrosion Product bulk is very serious, and surface quality is excessively poor, therefore assert that processing is lost Lose.Fig. 2 is identical tool-electrode material, workpiece material, discharge parameter, in different machining mediums, and finished surface coarse Degree Ra value.In view of the twice experiment all failures because of sequential short circuit in nitrogen jet current, cover all processing rails the most completely Mark completes to specify processing, and can substantially observe that from scanning electron microscope machined surface quality relatively cold plasma is penetrated Stream is poor with in deionized water, does not the most carry out roughness Ra value measurement.From figure 2 it can be seen that under this experiment condition, make With atmosphere cold plasma jet as electro-discharge machining medium, it is possible to obtain preferably crudy.Fig. 3 is identical instrument Electrode material, workpiece material, discharge parameter, in different machining mediums, export license length experimental result.Owing to penetrating at nitrogen Twice experiment all failures because of sequential short circuit in stream, cover all machining locus the most completely and complete to specify processing, therefore Do not carry out export license linear measure longimetry.From figure 3, it can be seen that tool-electrode extends respectively in cold-plasma jet 0.1 μm, 0.4 μm, but the repetitive positioning accuracy of this experimental machine bed is 1 μm, it can thus be assumed that electricity in cold-plasma jet The tool-electrode of spark processing is not almost lost or extends, this machining accuracy being conducive to improving electric spark.And at equal conditions Under deionized water in add man-hour, tool-electrode has been lost 5.1 μm, 3 μm respectively.The most to sum up it is believed that cold plasma is penetrated Spark machined in stream, it is possible to obtain more preferable surface quality in gentle compared with in deionized water;The electricity lower than in deionized water Pole loss the higher machining accuracy thus brought.

Claims (3)

1. electric discharge machining method in an atmosphere cold plasma jet, it is characterised in that:
Equipment used in electric discharge machining method in atmosphere cold plasma jet be electric spark machine tool with cold grade from Daughter jet flow generating apparatus;Electric spark machine tool includes marble lathe bed (1), XYZ three-shaft linkage motion platform (2), pulse Generator (3), rotation main shaft (4), tool-electrode (5), workpiece (7) and work holder (8);Cold-plasma jet occurs Device includes cold plasma fluid generator (6), high voltage power supply (9), gas mass flow controller (10), air relief valve (11) With work source of the gas (12);The high-voltage output end of high voltage power supply (9) and low-voltage output respectively with cold plasma fluid generator (6) corresponding electrode is connected;Working gas by the source of the gas that works (12) through air relief valve (11) and gas mass flow controller (10) cold plasma fluid generator (6) it is passed through;During work, open the valve of work source of the gas (12), adjust air relief valve (11) And then regulation enters the pressure of gas mass flow controller (10), adjust gas mass flow controller (10), make work gas Body enters in cold plasma fluid generator (6) with the flow set;Open high voltage power supply (9), gradually step up output voltage, Adjust discharge frequency, until the outlet of cold plasma fluid generator (6) produces stable cold-plasma jet (13);Adjust The position of whole cold plasma fluid generator (6), makes region to be processed be submerged in completely in cold-plasma jet (13);Open Open spark machined pulse generator (3) and control computer (14), controlling computer (14) and movement instruction is passed to XYZ Three-shaft linkage motion platform (2) and rotate main shaft (4), XYZ three-shaft linkage motion platform (2) and rotation main shaft (4) according to fortune Dynamic instruction processes specific structure and feature on workpiece (7);After process finishing, close high voltage power supply (9), work gas successively The valve in source (12), gas mass flow controller (10), pulse generator (3) and control computer (14).
Electric discharge machining method in a kind of atmosphere cold plasma jet the most according to claim 1, it is characterised in that: Work source of the gas (12) is one or more mixing in nitrogen, oxygen, air, noble gas.
Electric discharge machining method in a kind of atmosphere cold plasma jet the most according to claim 1 and 2, its feature exists In: the generation form of atmosphere cold plasma jet is corona discharge or dielectric barrier discharge.
CN201610874299.2A 2016-10-08 2016-10-08 Electric discharge machining method in atmosphere cold plasma jet Expired - Fee Related CN106312205B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106513881A (en) * 2017-01-13 2017-03-22 大连理工大学 Method and device capable of improving machining efficiency of electric sparks in atmospheric pressure cold plasma jet
CN110270724A (en) * 2018-03-15 2019-09-24 上海交通大学 Pulsed discharge power generation methods in fine spark discharge processing

Citations (7)

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US6274837B1 (en) * 1999-06-16 2001-08-14 Saint-Gobain Industrial Ceramics, Inc. Method and apparatus for in-situ solid state doping of CVD diamonds and diamonds so made
CN1329531A (en) * 1999-02-24 2002-01-02 三菱电机株式会社 Method and device for discharge surface treatment
CN200953682Y (en) * 2006-06-07 2007-09-26 清华大学 Double-gas sources based atomosphere discharge cold plasma generator
CN101252805A (en) * 2008-03-31 2008-08-27 大连理工大学 Simple atmosphere pressure suspending electrode cold plasma fluid generator
CN102601677A (en) * 2012-03-30 2012-07-25 大连理工大学 Atmospheric cold plasma jet auxiliary cutting method
CN102625557A (en) * 2012-03-30 2012-08-01 大连理工大学 Generating device for atmospheric bare electrode cold plasma jet
CN104907649A (en) * 2015-05-26 2015-09-16 南京航空航天大学 Abrasive water jet-electric spark composite pass making method and device for metal part with thermal barrier coating

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1329531A (en) * 1999-02-24 2002-01-02 三菱电机株式会社 Method and device for discharge surface treatment
US6274837B1 (en) * 1999-06-16 2001-08-14 Saint-Gobain Industrial Ceramics, Inc. Method and apparatus for in-situ solid state doping of CVD diamonds and diamonds so made
CN200953682Y (en) * 2006-06-07 2007-09-26 清华大学 Double-gas sources based atomosphere discharge cold plasma generator
CN101252805A (en) * 2008-03-31 2008-08-27 大连理工大学 Simple atmosphere pressure suspending electrode cold plasma fluid generator
CN102601677A (en) * 2012-03-30 2012-07-25 大连理工大学 Atmospheric cold plasma jet auxiliary cutting method
CN102625557A (en) * 2012-03-30 2012-08-01 大连理工大学 Generating device for atmospheric bare electrode cold plasma jet
CN104907649A (en) * 2015-05-26 2015-09-16 南京航空航天大学 Abrasive water jet-electric spark composite pass making method and device for metal part with thermal barrier coating

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106513881A (en) * 2017-01-13 2017-03-22 大连理工大学 Method and device capable of improving machining efficiency of electric sparks in atmospheric pressure cold plasma jet
CN110270724A (en) * 2018-03-15 2019-09-24 上海交通大学 Pulsed discharge power generation methods in fine spark discharge processing
CN110270724B (en) * 2018-03-15 2021-01-08 上海交通大学 Spark machining method based on field jet surface induction discharge

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