CN102625557A - Generating device for atmospheric bare electrode cold plasma jet - Google Patents

Generating device for atmospheric bare electrode cold plasma jet Download PDF

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Publication number
CN102625557A
CN102625557A CN201210089200XA CN201210089200A CN102625557A CN 102625557 A CN102625557 A CN 102625557A CN 201210089200X A CN201210089200X A CN 201210089200XA CN 201210089200 A CN201210089200 A CN 201210089200A CN 102625557 A CN102625557 A CN 102625557A
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China
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electrode
cylindrical housings
plasma jet
pin
injector
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CN201210089200XA
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Chinese (zh)
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徐文骥
刘新
宋金龙
孙晶
武立波
王续跃
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Dalian University of Technology
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Dalian University of Technology
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Abstract

The invention provides a generating device for an atmospheric bare electrode cold plasma jet. The generating device comprises a working gas source, a pressure reducing valve, an adjustable flow meter, a high-voltage power supply, a cylindrical shell, a nozzle electrode and a pin electrode, wherein the tail part of the cylindrical shell made of insulating material is connected with a gas supply system; the front end of the cylindrical shell is connected with the nozzle electrode through a thread; the pin electrode is fixedly arranged in a central hole of the cylindrical shell; a certain discharging clearance is kept between the tip of the pin electrode and the nozzle electrode; a plurality of through holes parallel to the central hole of the cylindrical shell are distributed around the central hole; the through holes are used for conveying the working gas to a discharging area in the nozzle electrode; a high-voltage output end of the high-voltage power supply is connected with the pin electrode; and a low-voltage output end of the high-voltage power supply is connected with the nozzle electrode and is grounded. Cold plasma is generated at the tip of the pin electrode by adjusting the high-voltage power supply and the flow of the working gas, and the cold plasma is jetted from an outlet of the nozzle electrode so as to form the cold plasma jet. According to the generating device provided by the invention, uniform and stable cold plasma jet can be obtained under an atmospheric open air environment.

Description

Atmospheric pressure bare electrode cold-plasma jet generating means
Technical field
The invention belongs to the plasma discharge reactor having technical field, relate to a kind of atmospheric pressure bare electrode cold-plasma jet generating means.
Background technology
Plasma can be divided into two kinds according to macroscopic property, first high temperature gas ions, and macroscopical temperature is up to 10 6～10 8K is in thermodynamic equilibrium state; It two is low temperature plasmas, and macroscopical temperature is lower, about 10 2～10 5K.Low temperature plasma can be divided into hot plasma (macroscopical temperature 10 again by temperature 3～10 5K, thermodynamical equilibrium or near-thermal mechanical balance) and cold plasma (macroscopical temperature 10 2～10 3K, non-equilibrium thermodynamics).
Though the macroscopical temperature of cold plasma is not high; But the ratio of electron temperature wherein and gas temperature is approximately 10～100 to 1; Therefore has very high chemism equally: a large amount of ion, electronics, excited atom, molecule and the free radical isoreactivity particles of enrichment wherein; The active particle kind that is produced in the chemical reactor than common liquids and gases is more, activity is stronger, is easy to react with the material surface that is contacted.Therefore, fields such as cold plasma, solid film deposition synthetic at sterilization, ozone, surface modification (improving the character such as water absorption, conductivity, adherence, printing and dyeing property and wettability of film, paper, textile and fiber), plasma etching, device cleaning, air pollution processing obtain application more and more widely in recent years.
The cold-plasma jet technology is an a kind of novel type of aura cold plasma generation technique of rising in recent years, can the discharge in the short space be enlarged and draw.The cold-plasma jet diameter is tens microns to several millimeters; Jet length can reach tens millimeters; Can be applied to easily among a small circle or Local treatment, and puncture voltage is lower, ion and metastable atom concentration is higher, electron temperature is high, the neutral particle temperature is low, uniform parts is big in the plasma that produces, controllability is good.
At present; Most cold plasmas are under the low pressure below the hundreds of handkerchief, to produce through gas discharge; For large-scale industrial production, the low pressure plasma need adopt vacuum system, skill money height and application of complex; Batch processing picks and places test product at every turn and all need vacuumize again and charge into working gas, is difficult to continuous production.And the cold plasma of formation is owing to the needing no vacuum chamber under the atmospheric pressure, and the processed workpiece size is unrestricted, but advantages such as continuous operation are more suitable for being used for large-scale production and application.
The many inductive coupled or capacitive coupling discharging generations of current atmosphere cold plasma fluidic device by dielectric impedance; Power supply adopts radio-frequency power supply, microwave power supply or high-voltage pulse power source usually; The cost of these three types of power supplys is higher, operates, controls and safeguard relative complex.The device that working medium barrier discharge (DBD) produces plasma jet depends on dielectrics such as quartz, and there are problems such as machinability is poor, intensity is low in this type of medium, makes the fluidic device of dielectric barrier discharge be difficult for promoting aborning.In addition; The atmosphere cold plasma fluidic device uses inert gases such as helium, argon gas and mist thereof as working gas usually; For the discharge under the atmospheric pressure environment; Gas consumption is very huge, considers from economy, if use nitrogen or oxygen will significantly reduce the expense with gas as working gas.The research of gas generation atmosphere cold plasma jet is still immature but current use nitrogen or oxygen are worked.
Publication number is that the invention of CN101252805A adopts the crosspointer suspension electrode to produce the atmosphere cold plasma jet; Publication number is the patent of CN101330794A, CN101466194A, CN101426327A, CN101652016A, uses the electrode of different structure to carry out dielectric barrier discharge generation atmosphere cold plasma jet respectively.These devices are owing to the electrode suspension or because the cold-plasma jet that dielectric impedance produces; If be applied to metal material is handled; Then this type of cold-plasma jet be prone to and metal between disruptive discharge takes place, produce high-temperature electric arc, the burn surface to be machined.
Summary of the invention
The present invention aims to provide a kind of atmospheric pressure bare electrode cold-plasma jet generating means, has characteristics such as simple in structure, safe in utilization, practical.Available nitrogen or the oxygen gas of working obtains uniform and stable cold-plasma jet in the under atmospheric pressure open air ambient.
A kind of atmospheric pressure bare electrode cold-plasma jet generating means comprises working gas source, pressure-reducing valve, adjustable flow meter, high voltage source, cylindrical housings, injector electrode, pin electrode composition.
Working gas gets into the cylindrical housings afterbody by the working gas source through pressure-reducing valve and adjustable flow meter.
The high-voltage output end of high voltage source connects pin electrode, and low-voltage output connects injector electrode and ground connection.
The afterbody of cylindrical housings is connected with air supply system, and front end is connected with injector electrode through screw thread; There is a centre bore identical with the pin electrode external diameter cylindrical housings center, is used for placing also pilot pin electrode; Around the centre bore of cylindrical housings, be uniformly distributed with some through holes in parallel, in order to working gas is transported to the region of discharge in the injector electrode.
The injector electrode afterbody is a tubular, closely is connected through screw thread with cylindrical housings; The front portion of injector electrode is a frustum, and the frustum top has a circular hole to export as injector electrode, and cold-plasma jet penetrates through this outlet circular hole.
Pin electrode is fixed in the centre bore of cylindrical housings; There is certain distance at the pin electrode tip apart from injector electrode outlet circular hole.
Through adjustment supply voltage and working gas flow, cold plasma will produce at the pin electrode tip, and sprayed by the injector electrode outlet with air-flow, form cold-plasma jet.The macroscopical temperature of the atmosphere cold plasma jet that uses this device to form is as room temperature or a little more than room temperature.
Usefulness of the present invention is: this device uses the structure of pin electrode and injector electrode, under atmospheric pressure can produce stable cold-plasma jet.Because adopt the form of bare electrode, the cold-plasma jet temperature of generation is low, and not can and the metal works surface take place between disruptive discharge; Not only can use the inert gas gas of working, also can use nitrogen or oxygen, with guarantee lower with pneumatolytic this; Can use direct current or medium and low frequency high voltage source, compare radio-frequency power supply, microwave power supply and the pulse power, the acquisition cost of power supply reduces significantly, uses simplyr, and the electromagnetic interference to electrical network and miscellaneous equipment is also lower simultaneously; Be operated in the open operational environment of atmospheric pressure, the needing no vacuum chamber need not special atmosphere, conveniently under most of operating modes, uses.In a word; Use this device; Can under the normal pressure open environment, obtain even, stable cold-plasma jet, this device has characteristics such as the voltage that the plasma jet temperature is low, length long, produce and keep jet is low, stream time is long, electrode structure is simple, processing ease.
Description of drawings
Fig. 1 is the structural representation of atmospheric pressure bare electrode cold-plasma jet generating means of the present invention.
Among the figure, 1 cylindrical housings, 2 pin electrodes, 3 injector electrodes, 4 cold-plasma jets, 5 high voltage sourcies, 6 adjustable flow meters, 7 pressure-reducing valves, 8 working gas sources.
Fig. 2 (a) is the axial, cross-sectional view of cylindrical housings in the embodiment of the invention.
Fig. 2 (b) is the longitudinal section view of cylindrical housings in the embodiment of the invention.
Fig. 3 is the axial, cross-sectional view of injector electrode in the embodiment of the invention.
Embodiment
Below in conjunction with accompanying drawing to further explain of the present invention.
A kind of atmospheric pressure bare electrode cold-plasma jet generating means comprises working gas source 8, pressure-reducing valve 7, adjustable flow meter 6, is linked in sequence through pipeline; The output of adjustable flow meter 6 connects the tail end of cylindrical housings 1 through pipeline; Pin electrode 2 is fixed in the through hole at cylindrical housings 1 center, and injector electrode 3 is fixed on the front end of cylindrical housings 1, and coaxial with pin electrode 2; The output one termination pin electrode 2 of high voltage source 5, another termination injector electrode 3 and ground connection.Working gas is by getting into cylindrical housings 1 with firm discharge from tail end through pressure-reducing valve 7, adjustable flow meter 6 in the working gas source 8; Pass the air vent hole that is uniformly distributed with around pin electrode 2; Get into injector electrode 3; The discharge generation plasma takes place in the tip at pin electrode 2, and blows out nozzle formation jet with air-flow.
Working gas can be nitrogen, oxygen or inert gas, also can be the gaseous mixture of above several kinds of gases.
High voltage source 5 can be DC high-voltage power supply or in, the low-frequency ac high voltage source.When using DC high-voltage power supply, the power output end negative pole is linked to each other with pin electrode 2, positive pole links to each other and ground connection with injector electrode 3; When using ac high voltage source, the ac high-voltage output of power supply is connected with pin electrode 2, low-voltage output is connected and ground connection with injector electrode 3.
Cylindrical housings 1 integral body material good by insulation property and that machinability is good is processed, and can be materials such as nylon, plastics, polytetrafluoroethylene.Cylindrical housings 1 is adding man-hour, need guarantee quality of fit between centre bore and the pin electrode 2, and assurance pin electrode 3 is installed the higher axiality that has afterwards with injector electrode 3.The air vent hole diameter that around centre bore, is uniformly distributed with in the cylindrical housings 1 is big as far as possible in allowed limits, and to reduce the obstruction to working gas, the quantity of air vent hole is advisable with 4 to 8, and axial symmetry evenly distributes around centre bore.
Pin electrode 2 integral body and material anti-ablation good by electric conductivity processed, and can select for use copper arc welding electrode or tungsten electrode to block, grind and form.The diameter article on plasma body jet influence of pin electrode 2 is little, can between 1～3mm, select.The tip of pin electrode 2 whether sharp-pointed article on plasma body jet generation and stable considerable influence is arranged, need observe pin electrode 2 tips during use and whether take place to ablate and rust, if most advanced and sophisticated rust need be refaced at once.
Injector electrode 3 integral body material good by electric conductivity and that machinability is good is processed, such as stainless steel, copper, aluminium alloy etc.The outlet diameter of injector electrode 3 is selected between 1.5～5mm according to the difference of using.
Atmospheric pressure bare electrode cold-plasma jet generating means of the present invention at first connects all pipelines and circuit in use; Open pressure-reducing valve 7, through the working gas flow of adjustable flow meter 6 adjustment cold-plasma jets, this flow needs the 0.1m that do not coexist according to the application scenario of the difference of injector electrode 3 outlet diameters and cold-plasma jet 3/ h to 2.0m 3Select between/the h, the big young pathbreaker of flow influences the length and the discharge voltage of cold-plasma jet, can be definite through testing; Adjust the output voltage of high voltage source 5 from low to high, up to the stable cold-plasma jet of generation, and do not have till the thread discharge breakdown between pin electrode 2 and the injector electrode 3, at this moment, cold-plasma jet can come into operation.Under the constant situation of distance at the outlet diameter of injector electrode 3 between constant and pin electrode 2 and the injector electrode 3; After stable cold-plasma jet produces; The output voltage of the flow of working gas and high voltage source 5 does not all need to change, and only needs the break-make of Control work gas and high voltage source 5 to get final product.
Specific embodiment:
Fig. 2 is for using the cylindrical housings 1 of polytetrafluoroethylene material processing.The tail end of cylindrical housings 1 is processed into Internal Pipe Thread among Fig. 2 (a), is used for connecting common snap joint, makes things convenient for the access of working gas pipeline; The other end of cylindrical housings 1 is processed into common internal thread, when making things convenient for injector electrode 3 to insert, can guarantee the axiality between injector electrode 3 and the pin electrode 2; The cylindrical housings 1 two ends internal thread end all leaves escape to make things convenient for screw thread processing; The center-hole diameter 1.6mm of cylindrical housings 1; Shown in Fig. 2 (a) and Fig. 2 (b), the axisymmetric air vent hole that to be uniformly distributed with 6 diameters be 3mm around the centre bore in cylindrical housings 1.
The material of injector electrode 3 is a brass among Fig. 3, and an end that is connected with cylindrical housings 1 is processed into external screw thread; Injector electrode 3 outlet diameters are 4mm.
Pin electrode 2 uses the argon arc welding tungsten electrode of diameter 1.6mm to grind and forms.Pin electrode 2 is installed on the centre bore of cylindrical housings 1, screws in the screwed hole of cylindrical housings 1 injector electrode 3 fixing again; Vertical range is 2.5mm between the outlet of adjustment pin electrode 2 and injector electrode 3.
High voltage source 5 adopts midfrequent ac high voltage source, power supply output frequency 50k～120kHz, output voltage 0～10kV, maximum power 150W; Press output to connect pin electrode 2, low-voltage output connects injector electrode 3 and ground connection.
Working gas adopts the high pure nitrogen of purity 99.999%.
According to the connected mode of Fig. 1, pipeline is connected in the snap joint of cylindrical housings 1 afterbody, open pressure-reducing valve 7, adjustment adjustable flow meter 6 makes flow reach 0.8m 3/ h; Open high voltage source 5, adjust frequency to 55kHz, increase electric power output voltage gradually since 0, approximately reach about 750V up to the output voltage peak-to-peak value, can observe cold-plasma jet 4 and spray and go out, jet temperature and room temperature are suitable; Continue to increase voltage, cold-plasma jet 4 will be brighter, and length also can be longer; Thread discharge breakdown appears between pin electrode 2 and injector electrode 3; This moment, high voltage source 5 was in pulse state; The stability decreases of plasma discharge; The temperature of cold-plasma jet 4 also improves rapidly, and pin electrode is most advanced and sophisticated can should be avoided occurring thread discharge as far as possible and occur because of discharge ablation rust.
Under stable operating voltage, cold-plasma jet can work long hours.After the process finishing, close high voltage source 5 and pressure-reducing valve 7, need not adjust the flow of adjustable flow meter 6 and the output voltage of high voltage source 5; Directly open pressure-reducing valve 7 and high voltage source 5 when using next time, can produce stable cold-plasma jet, need not to adjust once more electric power output voltage and working gas flow.

Claims (1)

1. atmospheric pressure bare electrode cold-plasma jet generating means; Comprise working gas source, pressure-reducing valve, adjustable flow meter, cylindrical housings, high voltage source, injector electrode, pin electrode, it is characterized in that: the working gas source gets into the cylindrical housings afterbody through pressure-reducing valve and adjustable flow meter; The high-voltage output end of high voltage source connects pin electrode, and low-voltage output connects injector electrode and ground connection; The afterbody of cylindrical housings is connected with air supply system, and front end is connected with injector electrode, and the centre bore of cylindrical housings is placed and the pilot pin electrode;
The insulation of circular cylindrical shell body and function is processed; Be uniformly distributed with some through holes around the centre bore of cylindrical housings, and the axial symmetry distribution parallel of these through holes with centre bore;
Injector electrode is processed with electric conducting material; The injector electrode afterbody is a tubular, closely is connected with cylindrical housings with screw thread; The front portion of injector electrode is round table-like, and the round platform top has a circular hole to export as injector electrode;
The material that pin electrode is ablated with conductive high temperature resistance is processed; Pin electrode is fixed in the centre bore of cylindrical housings; Pin electrode is most advanced and sophisticated to have distance with injector electrode outlet circular hole.
CN201210089200XA 2012-03-30 2012-03-30 Generating device for atmospheric bare electrode cold plasma jet Pending CN102625557A (en)

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Application publication date: 20120801