CN104540313B - Plasma jet generating device for atmospheric pressure hollow substrate electrode - Google Patents
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Abstract
Description
技术领域technical field
本发明属于等离子体技术领域,涉及一种等离子体发生装置,尤其涉及一种大气压中空基底电极等离子体射流发生装置,可以用于金属材料的表面处理。The invention belongs to the field of plasma technology, and relates to a plasma generating device, in particular to an atmospheric pressure hollow base electrode plasma jet generating device, which can be used for surface treatment of metal materials.
背景技术Background technique
近年来,等离子体技术在物理学、化学、电子学、材料学,以及冶金化工等广泛领域以应用为中心的研究十分活跃。低温等离子体因其密度高,气体温度低,成份可控,并能产生各种活性物种,可以用来改变金属材料的表面特性。用于金属材料表面改性,传统的低温等离子体发生装置需要高频电源(射频13.56MHz或微波2.45GHz)来维持放电能量的供给,并在低气压环境下工作,需要真空泵来抽真空。因而,处理设备投资大,成本高。In recent years, application-centered research on plasma technology has been active in a wide range of fields such as physics, chemistry, electronics, materials science, and metallurgy and chemical engineering. Because of its high density, low gas temperature, controllable composition, and the ability to produce various active species, low-temperature plasma can be used to change the surface properties of metal materials. For surface modification of metal materials, traditional low-temperature plasma generators require high-frequency power (radio frequency 13.56MHz or microwave 2.45GHz) to maintain the supply of discharge energy, and work in a low-pressure environment, requiring a vacuum pump to evacuate. Therefore, the investment in processing equipment is large and the cost is high.
相对带有真空设备的低气压放电等离子体发生装置而言,大气压气体放电等离子体表面处理设备省去了真空装置,在常压大气环境中,就能对样品进行表面处理。此表面处理技术不仅降低了运行成本,而且提高了工作效率。其中,大气压等离子体射流(APPJ)潜在的应用价值最大。它一般采用交流和脉冲放电方式,在有绝缘介质隔离的两电极直接(有时使用单电极)发生放电产生等离子体,凭借气体的流动将等离子体带出放电腔体之外,形成等离子体射流。虽然APPJ很容易与被处理物体表面接触,有利于提高活性物种的利用率,但等离子体中的活性物种,尤其是金属或非金属离子,仅是在气流的作用下轰击被处理样品表面。因而,活性物种轰击的速度和能量受到一定的限制,降低了等离子体表面扩渗的效率,不利于APPJ在金属表面改性和去污方面的应用。Compared with the low-pressure discharge plasma generation device with vacuum equipment, the atmospheric pressure gas discharge plasma surface treatment equipment omits the vacuum device, and can perform surface treatment on samples in an atmospheric environment of normal pressure. This surface treatment technology not only reduces operating costs, but also improves work efficiency. Among them, the potential application value of atmospheric pressure plasma jet (APPJ) is the greatest. It generally adopts AC and pulse discharge methods, and directly (sometimes using a single electrode) discharges to generate plasma between two electrodes separated by an insulating medium, and the plasma is taken out of the discharge chamber by the flow of gas to form a plasma jet. Although APPJ is easy to contact with the surface of the treated object, which is beneficial to improve the utilization of active species, but the active species in the plasma, especially metal or non-metal ions, only bombard the surface of the treated sample under the action of airflow. Therefore, the speed and energy of the bombardment of active species are limited, which reduces the efficiency of plasma surface diffusion and infiltration, which is not conducive to the application of APPJ in metal surface modification and decontamination.
发明内容Contents of the invention
为了解决背景技术中所存在的技术问题,本发明提供一种大气压中空基底电极等离子体射流发生装置,以解决现有技术中大气压等离子体射流(APPJ)工作时,金属或非金属离子轰击速度和能量较低,金属材料表面改性和去污效率低下的问题。In order to solve the technical problems existing in the background technology, the present invention provides an atmospheric pressure hollow base electrode plasma jet generating device to solve the problem of metal or nonmetal ion bombardment velocity and Low energy, surface modification of metal materials and low efficiency of decontamination.
本发明的技术方案是:一种大气压中空基底电极等离子体射流发生装置,包括直流放电单元和用于提供直流放电单元放电电压的电源;上述直流放电单元包括导气管和电极组;上述电极组包括一个为圆柱形的高压电极和一个接地电极;所述导气管为中空管,上下两端分别设置有进气端口和出气端口;上述高压电极置于导气管轴向中心位置,其特殊之处在于:上述接地电极处还设置有用以形成窄小气流通道的中空金属基底单元;上述中空金属基底单元呈圆柱体,且沿轴向设置有一个通孔;中空金属基底单元的通孔与导气管同轴;上述接地电极呈L形,一直角边为圆柱体并与高压电极同轴,其端面在导气管出气端口处与高压电极端面相互正对,另一直角边为长方体,与中空金属基底单元端面相接;The technical solution of the present invention is: an atmospheric pressure hollow substrate electrode plasma jet generator, including a DC discharge unit and a power supply for providing the discharge voltage of the DC discharge unit; the DC discharge unit includes a gas guide tube and an electrode group; the electrode group includes A cylindrical high-voltage electrode and a grounding electrode; the air duct is a hollow tube, and the upper and lower ends are respectively provided with an air inlet port and an air outlet port; the above-mentioned high-voltage electrode is placed in the axial center of the air duct. The above-mentioned ground electrode is also provided with a hollow metal base unit for forming a narrow air flow channel; the above-mentioned hollow metal base unit is in the form of a cylinder, and a through hole is arranged in the axial direction; the through hole of the hollow metal base unit and the air duct Coaxial; the above-mentioned grounding electrode is L-shaped, and the right-angled side is a cylinder and is coaxial with the high-voltage electrode. The unit ends are connected;
上述直流放电单元与电源之间还串联有限流电阻;A current-limiting resistor is connected in series between the DC discharge unit and the power supply;
上述电源采用直流或脉冲电源,脉冲电源的频率为50Hz至13.56MHz;The above-mentioned power supply adopts DC or pulse power supply, and the frequency of the pulse power supply is 50Hz to 13.56MHz;
上述导气管的材质为云母、玻璃、陶瓷或聚四氟乙烯;The material of the above-mentioned air guide tube is mica, glass, pottery or polytetrafluoroethylene;
上述高压电极和接地电极相互正对的端面为平面;所述高压电极和接地电极的材质为铝、铁、铜、钨、镍、钽、铂、铝合金、铁合金、铜合金、钨合金、镍合金、钽合金;The end faces of the above-mentioned high-voltage electrode and the ground electrode facing each other are planes; the materials of the high-voltage electrode and the ground electrode are aluminum, iron, copper, tungsten, nickel, tantalum, platinum, aluminum alloy, iron alloy, copper alloy, tungsten alloy, nickel alloy, tantalum alloy;
上述中空金属基底单元的材质为铝或铜或铝合金或铜合金,中空金属基底单元通孔部分的孔径为4~100mm。The material of the above-mentioned hollow metal base unit is aluminum or copper or aluminum alloy or copper alloy, and the hole diameter of the through hole of the hollow metal base unit is 4-100 mm.
本发明的优点是:The advantages of the present invention are:
1.相对传统的低气压放电等离子体发生装置,本发明在大气环境下产生等离子体射流,用于金属材料表面处理,免去了真空设备,简化了操作流程,降低了运行成本。1. Compared with the traditional low-pressure discharge plasma generating device, the present invention generates plasma jets in an atmospheric environment for surface treatment of metal materials, eliminating the need for vacuum equipment, simplifying the operation process, and reducing operating costs.
2.相对传统的低气压放电等离子体发生装置的高频电源,本发明的供给电源可以为直流电源,降低了对电源设备的要求。2. Compared with the high-frequency power supply of the traditional low-pressure discharge plasma generator, the power supply of the present invention can be a DC power supply, which reduces the requirements for power supply equipment.
3.相对于传统的大气压等离子体射流(APPJ),本发明装置所产生的等离子体射流在气体流场和直流电场的共同作用下有更高的电子密度、更高的离子轰击速度和更高的离子能量。3. Compared with the traditional atmospheric pressure plasma jet (APPJ), the plasma jet produced by the device of the present invention has higher electron density, higher ion bombardment velocity and higher ion energy.
附图说明Description of drawings
图1为本发明的中空金属基底单元结构示意图;Fig. 1 is a schematic structural diagram of a hollow metal base unit of the present invention;
图2为本发明的直流放电单元结构俯视图;Fig. 2 is a top view of the DC discharge unit structure of the present invention;
图3为本发明的直流放电单元结构仰视图;Fig. 3 is a bottom view of the DC discharge unit structure of the present invention;
图4为本发明大气压中空基底电极等离子体射流发生装置主体俯视图;Fig. 4 is a top view of the main body of the atmospheric pressure hollow substrate electrode plasma jet generating device of the present invention;
图5为本发明大气压中空基底电极等离子体射流发生装置主体仰视图;5 is a bottom view of the main body of the atmospheric pressure hollow substrate electrode plasma jet generating device of the present invention;
图6为本发明工作示意图;Fig. 6 is the working schematic diagram of the present invention;
其中:11-通孔、10-中空金属基底单元、20-直流放电单元、21-导气管、22-高压电极、23-接地电极、31-进气端口、32-出气端口、40-发生装置主体结构、41-电源、42-限流电阻、51-处理样品、52-等离子体射流。Among them: 11-through hole, 10-hollow metal base unit, 20-DC discharge unit, 21-air duct, 22-high voltage electrode, 23-ground electrode, 31-inlet port, 32-outlet port, 40-generating device Main structure, 41-power supply, 42-limiting resistor, 51-processing sample, 52-plasma jet.
具体实施方式detailed description
参见图1-6,本发明提出了一种大气压中空基底电极等离子体射流发生装置,包括直流放电单元20和用于提供直流放电单元20放电电压的电源41;直流放电单元20包括导气管和电极组;电极组包括一个为圆柱形的高压电极22和一个接地电极23;导气管21为中空管,上下两端分别设置有进气端口31和出气端口32;高压电极22置于导气管21轴向中心位置,接地电极23处还设置有用以形成窄小气流通道的中空金属基底单元10;中空金属基底单元10呈圆柱体,且沿轴向设置有一个通孔;中空金属基底单元10的通孔与导气管21同轴;接地电极23呈L形,一直角边为圆柱体并与高压电极22同轴,其端面在导气管出气端口32处与高压电极22端面相互正对,另一直角边为长方体,与中空金属基底单元10端面相接;直流放电单元20与电源41之间还串联有限流电阻;电源41采用直流或脉冲电源,脉冲电源的频率为50Hz至13.56MHz;导气管21的材质为云母、玻璃、陶瓷或聚四氟乙烯;高压电极22和接地电极23相互正对的端面为平面;高压电极22和接地电极23的材质为铝、铁、铜、钨、镍、钽、铂、铝合金、铁合金、铜合金、钨合金、镍合金、钽合金;中空金属基底单元10的材质为铝或铜或铝合金或铜合金,中空金属基底单元10通孔部分的孔径为4~100mm。Referring to Fig. 1-6, the present invention proposes a kind of atmospheric pressure hollow base electrode plasma jet generation device, comprises DC discharge unit 20 and is used to provide the power supply 41 of discharge voltage of DC discharge unit 20; DC discharge unit 20 comprises air duct and electrode group; the electrode group includes a cylindrical high-voltage electrode 22 and a grounding electrode 23; the air guide tube 21 is a hollow tube, and the upper and lower ends are respectively provided with an air inlet port 31 and an air outlet port 32; the high voltage electrode 22 is placed on the air guide tube 21 At the axial center position, the ground electrode 23 is also provided with a hollow metal base unit 10 for forming a narrow airflow channel; the hollow metal base unit 10 is a cylinder, and a through hole is provided along the axial direction; the hollow metal base unit 10 The through hole is coaxial with the airway tube 21; the grounding electrode 23 is L-shaped, and the right-angled side is a cylinder and coaxial with the high-voltage electrode 22, and its end face is opposite to the end face of the high-voltage electrode 22 at the gas outlet port 32 of the airway tube. The right-angled side is a cuboid, connected to the end face of the hollow metal base unit 10; a current-limiting resistor is connected in series between the DC discharge unit 20 and the power supply 41; the power supply 41 adopts a DC or pulse power supply, and the frequency of the pulse power supply is 50Hz to 13.56MHz; The material of 21 is mica, glass, pottery or polytetrafluoroethylene; The end faces facing each other of high voltage electrode 22 and ground electrode 23 are planes; the material of high voltage electrode 22 and ground electrode 23 is aluminum, iron, copper, tungsten, nickel, Tantalum, platinum, aluminum alloy, iron alloy, copper alloy, tungsten alloy, nickel alloy, tantalum alloy; the material of the hollow metal base unit 10 is aluminum or copper or aluminum alloy or copper alloy, and the hole diameter of the through hole part of the hollow metal base unit 10 is 4~100mm.
一种大气压中空基底电极等离子体射流发生装置,包括中空金属基底单元和直流放电单元。所述中空金属基底单元包括一个通孔;所述直流放电单元包括一个导气管和两个电极,其中一个为圆柱形高压电极,另一个为接地电极。所述导气管具有用以接入工作气体的进气端口和让气体喷出的出气端口。所述高压电极置于导气管中心位置处,所述接地电极呈L形,一直角边为圆柱体,与高压电极同轴,其端面在导气管出气端口处与高压电极端面相互正对;另一直角边为长方体,与基底端面相接。An atmospheric-pressure hollow base electrode plasma jet generator includes a hollow metal base unit and a DC discharge unit. The hollow metal base unit includes a through hole; the DC discharge unit includes an air duct and two electrodes, one of which is a cylindrical high voltage electrode and the other is a ground electrode. The air guide tube has an inlet port for receiving working gas and an outlet port for letting the gas out. The high-voltage electrode is placed at the center of the airway tube, the ground electrode is L-shaped, the right-angled side is a cylinder, and is coaxial with the high-voltage electrode, and its end face is opposite to the end face of the high-voltage electrode at the air outlet port of the airway tube; The right angle side is a cuboid, which is connected with the base end face.
工作气体可选为惰性气体、氧气、丙烷、氨气、氮气和氢气,或上述气体的混合气体,工作气体较适宜的流量为0.01~10L/min。中空金属基底单元优选铝、铜,以及选自这些金属构成的合金,中空通孔部分的孔径为4~100mm,中空部分的高度为10~50mm。直流放电单元的导气管由云母、玻璃、陶瓷或聚四氟乙烯等绝缘材料制成,导气管内径为2~10mm,外径为4~12mm。直流放电单元的放电电极由铝、铁、铜、钨、镍、钽、铂,以及这些金属的合金制成,电极直径为1~8mm。直流放电单元的放电间隙最好为5~15mm。对于高压电极,提供直流或脉冲电压,电压幅值为100~10000V,其中脉冲频率为50Hz至13.56MHz。The working gas can be selected from inert gas, oxygen, propane, ammonia, nitrogen and hydrogen, or a mixture of the above gases, and the suitable flow rate of the working gas is 0.01-10L/min. The hollow metal base unit is preferably aluminum, copper, and an alloy selected from these metals, the diameter of the hollow through-hole part is 4-100 mm, and the height of the hollow part is 10-50 mm. The air guide tube of the DC discharge unit is made of insulating materials such as mica, glass, ceramics or polytetrafluoroethylene, the inner diameter of the air guide tube is 2-10mm, and the outer diameter is 4-12mm. The discharge electrode of the DC discharge unit is made of aluminum, iron, copper, tungsten, nickel, tantalum, platinum, and alloys of these metals, and the electrode diameter is 1-8mm. The discharge gap of the DC discharge unit is preferably 5-15 mm. For high-voltage electrodes, provide direct current or pulse voltage, the voltage amplitude is 100-10000V, and the pulse frequency is 50Hz-13.56MHz.
在导气管出气端口处,上述高压电极端面与导气管端面的间距不大于2mm。At the air outlet port of the airway tube, the distance between the end face of the high-voltage electrode and the end face of the airway tube is not greater than 2mm.
本发明提供的大气压中空基底电极等离子体射流发生装置实现了在大气压下产生高电子密度、高离子轰击速度和高离子能量的低温等离子体。工作时,高压电极通过限流电阻接电源的正极,接地电极接电源的负极,并接地。工作气体从导气管的进气端口流入,穿过导气管与电极之间的环形区域,从导气管的出气端口喷出,喷出的工作气体流入两电极正对的放电空间。因与接地电极相接的金属基底为中空结构,由于惯性的作用,当工作气体流速足够大时,工作气体在流经放电空间后继续沿原来的方向流动,流经金属基底的通孔。此特征促使形成围绕放电空间窄小的高速气流通道。选择合适的工作气体,控制气体的流量,当两电极外加电压足够高时,放电间隙中的气体被击穿,在大气环境下产生低温等离子体。窄小的气流通道约束着等离子体产生的空间,防止等离子体过度弥散,有利于高密度等离子体的产生。在气体流场和直流电场的共同作用下,形成具有高电子密度、高离子轰击速度和高离子能量的等离子体射流。该射流可以用来进行等离子体金属材料的表面处理。The atmospheric-pressure hollow base electrode plasma jet generator provided by the invention realizes the generation of low-temperature plasma with high electron density, high ion bombardment velocity and high ion energy under atmospheric pressure. When working, the high-voltage electrode is connected to the positive pole of the power supply through the current limiting resistor, the ground electrode is connected to the negative pole of the power supply, and grounded. The working gas flows in from the inlet port of the air duct, passes through the annular area between the air duct and the electrodes, and is ejected from the outlet port of the air duct, and the ejected working gas flows into the discharge space where the two electrodes are facing each other. Because the metal base connected to the ground electrode is a hollow structure, due to the effect of inertia, when the flow rate of the working gas is large enough, the working gas continues to flow in the original direction after flowing through the discharge space, and flows through the through holes of the metal base. This feature promotes the formation of a narrow, high-speed gas flow path around the discharge space. Select the appropriate working gas and control the flow of the gas. When the applied voltage of the two electrodes is high enough, the gas in the discharge gap will be broken down, and low-temperature plasma will be generated in the atmospheric environment. The narrow gas flow channel restricts the space for plasma generation, prevents excessive dispersion of plasma, and is conducive to the generation of high-density plasma. Under the joint action of gas flow field and DC electric field, a plasma jet with high electron density, high ion bombardment velocity and high ion energy is formed. The jet can be used for plasma surface treatment of metallic materials.
本发明提供的大气压中空基底电极等离子体射流发生装置,由一个中空金属基底单元,一个直流放电单元和一个电源设备组成。中空金属基底单元包括一个通孔,由铝、铜或其合金材料制成。直流放电单元包括一个导气管、一个高压电极和一个接地电极。导气管有两个端口,一个为进气端口,另一个为出气端口,导气管由云母、玻璃、陶瓷或聚四氟乙烯等绝缘材料制成;高压电极呈圆柱形,置于导气管内部的中心位置处,接地电极呈L形,一直角边为圆柱体,与高压电极同轴,其端面在导气管出气端口处与高压电极端面相互正对,另一直角边为长方体,与基底端面相接。两电极均为耐热的金属材料,可以采用铝、铁、铜、钨、镍、钽、铂,以及这些金属的合金,但不限于上述材料。电源设备提供直流或脉冲电压,当电压为脉冲时,其频率可从工频变化到13.56MHz的射频;电源设备还包括一个用来防止辉光放电向弧光放电转变的限流电阻。The atmospheric pressure hollow base electrode plasma jet generator provided by the present invention is composed of a hollow metal base unit, a DC discharge unit and a power supply device. The hollow metal base unit includes a through hole and is made of aluminum, copper or alloy materials thereof. The DC discharge unit consists of an air duct, a high voltage electrode and a ground electrode. The air duct has two ports, one is the inlet port and the other is the air outlet port. The air duct is made of insulating materials such as mica, glass, ceramics or polytetrafluoroethylene; the high-voltage electrode is cylindrical and placed inside the air duct. At the center, the grounding electrode is L-shaped, and the right-angled side is a cylinder, which is coaxial with the high-voltage electrode. catch. Both electrodes are made of heat-resistant metal materials, aluminum, iron, copper, tungsten, nickel, tantalum, platinum, and alloys of these metals can be used, but not limited to the above materials. The power supply equipment provides DC or pulse voltage, and when the voltage is pulsed, its frequency can be changed from power frequency to 13.56MHz radio frequency; the power supply equipment also includes a current-limiting resistor used to prevent the transition from glow discharge to arc discharge.
工作时,将被处理样品置于接地电极之上。工作气体从导气管的进气端口流入,穿过导气管与高压电极之间的环形区域,从出气端口喷出,流入两电极正对的放电空间。当两个电极之间所加电压足够高时,放电空间的工作气体被击穿,发生稳定的等离子体气体放电。When working, the sample to be processed is placed on the ground electrode. The working gas flows in from the air inlet port of the air duct, passes through the annular area between the air duct and the high-voltage electrode, is ejected from the gas outlet port, and flows into the discharge space where the two electrodes are facing each other. When the voltage applied between the two electrodes is high enough, the working gas in the discharge space is broken down, and a stable plasma gas discharge occurs.
由于惯性和金属基底中空结构的原因,工作气体继续沿原来的流动方向流经金属基底的通孔,防止了气体回流的发生,在放电空间周围形成窄小的高速气流通道。窄小的气流通道约束着等离子体产生的体积,防止等离子体过度弥散,有利于高密度等离子体的产生。工作气体流动的方向与直流电场的方向保持一致,气流和电场对离子的共同作用同时增强了离子轰击样品表面的速度和能量。高密度、高离子轰击速度和高离子能量的等离子体射流非常适合于金属材料表面处理,即通过等离子体表面扩渗,改变金属器件的力学性能或防腐蚀性能,以及去除金属器件的表面油污。Due to the inertia and the hollow structure of the metal base, the working gas continues to flow through the through holes of the metal base along the original flow direction, preventing the occurrence of gas backflow and forming a narrow high-speed air flow channel around the discharge space. The narrow gas flow channel restricts the volume of plasma generation, prevents excessive dispersion of plasma, and is conducive to the generation of high-density plasma. The direction of the working gas flow is consistent with the direction of the DC electric field, and the joint action of the gas flow and the electric field on the ions simultaneously enhances the speed and energy of the ions bombarding the sample surface. Plasma jets with high density, high ion bombardment velocity and high ion energy are very suitable for surface treatment of metal materials, that is, through plasma surface diffusion, changing the mechanical properties or anti-corrosion properties of metal devices, and removing surface oil on metal devices.
下面进一步详述本发明装置的结构和工作过程。The structure and working process of the device of the present invention will be further described in detail below.
在不同的附图中,给出了相似或者完全相同的装置结构示意图。图1为本发明的中空金属基底单元结构10示意图。中空金属基底单元10包括一个通孔11。图2为本发明的直流放电单元结构20示意图。图2为俯视图;图3为仰视图。直流放电单元20包括导气管21,高压电极22,和接地电极23。导气管21有两个端口,一个进气端口31,一个出气端口32。高压电极22置于导气管21中心位置;在导气管21的出气端口32处,高压电极22端面与导气管21端面的间距不大于2mm。接地电极23呈L形,一个直角边为圆柱体,其端面与高压电极22端面相互正对,间距为5~30mm;另一个直角边为长方体。图4为本发明大气压中空基底电极等离子体射流发生装置主体俯视图;图5为本发明大气压中空基底电极等离子体射流发生装置主体仰视图。接地电极23与中空金属基底10端面相接,并固定于中空金属基底10之上。高压电极22、接地电极23,以及通孔11同轴放置。图6为本发明的工作示意图。大气压中空基底电极等离子体射流发生装置整体结构50,除包括主体结构40以外,还包括电源设备41和用来防止辉光放电向弧光放电转变的限流电阻42。电源设备41的正极通过限流电阻42与高压电极22相接,负极与接地电极23相接,并接地。In different drawings, similar or identical device structure diagrams are shown. FIG. 1 is a schematic diagram of a hollow metal base unit structure 10 of the present invention. The hollow metal base unit 10 includes a through hole 11 . FIG. 2 is a schematic diagram of a DC discharge unit structure 20 of the present invention. Figure 2 is a top view; Figure 3 is a bottom view. The DC discharge unit 20 includes an air duct 21 , a high voltage electrode 22 , and a ground electrode 23 . The air duct 21 has two ports, an air inlet port 31 and an air outlet port 32 . The high-voltage electrode 22 is placed at the center of the airway tube 21; at the gas outlet port 32 of the airway tube 21, the distance between the end surface of the high-voltage electrode 22 and the end surface of the airway tube 21 is not greater than 2mm. The ground electrode 23 is L-shaped, one right-angled side is a cylinder, and its end face is opposite to the end face of the high-voltage electrode 22 with a distance of 5-30 mm; the other right-angled side is a cuboid. Fig. 4 is a top view of the main body of the atmospheric pressure hollow base electrode plasma jet generator of the present invention; Fig. 5 is a bottom view of the main body of the atmospheric pressure hollow base electrode plasma jet generator of the present invention. The ground electrode 23 is in contact with the end surface of the hollow metal base 10 and fixed on the hollow metal base 10 . The high voltage electrode 22, the ground electrode 23, and the through hole 11 are placed coaxially. Fig. 6 is a working diagram of the present invention. The overall structure 50 of the atmospheric-pressure hollow substrate electrode plasma jet generator includes, in addition to the main structure 40, a power supply 41 and a current-limiting resistor 42 used to prevent the transition from glow discharge to arc discharge. The positive pole of the power supply device 41 is connected to the high voltage electrode 22 through the current limiting resistor 42, and the negative pole is connected to the ground electrode 23 and grounded.
工作时,将被处理样品51置于接地电极23之上。工作气体从导气管21的进气端口31流入,流经高压电极22与导气管21之间的环形区域,从出气端口32流出,进入高压电极22与接地电极23所对的放电空间。因惯性的作用,工作气体继续流入中空金属基底10的通孔11。当施加在高压电极22和接地电极23之间的电压足够高时,在两电极22与23之间发生气体放电,在窄小的高速气流通道与电场共同作用下,产生高密度、高离子轰击速度和高离子能量的等离子体射流52,该射流可对置于接地电极23之上的被处理样品51进行表面处理。During operation, the processed sample 51 is placed on the ground electrode 23 . The working gas flows in from the inlet port 31 of the air duct 21 , flows through the annular area between the high voltage electrode 22 and the air duct 21 , flows out from the gas outlet port 32 , and enters the discharge space opposite the high voltage electrode 22 and the ground electrode 23 . Due to the effect of inertia, the working gas continues to flow into the through hole 11 of the hollow metal substrate 10 . When the voltage applied between the high-voltage electrode 22 and the ground electrode 23 is high enough, a gas discharge occurs between the two electrodes 22 and 23, and under the joint action of the narrow high-speed gas flow channel and the electric field, high-density, high-ion bombardment occurs Velocity and high ion energy plasma jet 52, which can perform surface treatment on the treated sample 51 placed on the ground electrode 23.
等离子体射流的密度,离子的轰击速度和能量主要受到电极间距、工作气体流量,以及外加电压的影响。电极间距宜选为5~15mm;工作气体流量一般在0.01~10L/min;外加电压通常在100~10000V,而放电电流在几毫安到几十毫安量级,产生维持稳定等离子体射流的能量通常在几瓦特到几十瓦特之间。值得说明的是,上述尺寸或参数仅是本发明等离子体发生装置的一个样例,该装置的尺寸并不限制于上述范围。The density of the plasma jet, the bombardment velocity and energy of the ions are mainly affected by the electrode distance, the flow rate of the working gas, and the applied voltage. The electrode spacing should be selected as 5-15mm; the working gas flow rate is generally 0.01-10L/min; the applied voltage is usually 100-10000V, and the discharge current is in the order of several milliamperes to tens of milliamperes to generate a stable plasma jet. The energy is usually between a few watts and tens of watts. It should be noted that the above dimensions or parameters are just an example of the plasma generating device of the present invention, and the dimensions of the device are not limited to the above range.
在本发明装置两电极直径可以为1mm,电极间距为6mm,导气管内径为1.7mm的条件下,当工作气体(氩气)流量为2L/min,外加电压为2434V时,等离子体射流从阳极喷向阴极,呈弥散状,局限于两电极正对的放电空间,且径向半径逐渐增大。此时,放电回路限流电阻100KΩ,放电维持电压234V,放电电流22mA。电极材料为铁,阴极位降区电势为165V,由公式ne=j/(Eμee)(电子密度ne,单位电荷e,电场强度E,电流密度j,以及电子迁移率μe)计算得到等离子体正柱区的电子数密度高达1014量级,比普通的直流辉光放电电子数密度高出1~2个数量级;离子轰击速度达到2×103cm/s,是静止气体放电时的6倍;离子沿着电场方向移动,尤其在阴极位降区,较大电势差的存在有效的提高了离子轰击能量。Under the conditions that the diameter of the two electrodes of the device of the present invention can be 1mm, the distance between the electrodes is 6mm, and the inner diameter of the air guide tube is 1.7mm, when the flow rate of the working gas (argon) is 2L/min, and the applied voltage is 2434V, the plasma jet flows from the anode Spray toward the cathode, in a diffuse shape, limited to the discharge space where the two electrodes are facing each other, and the radial radius gradually increases. At this time, the current limiting resistance of the discharge circuit is 100KΩ, the discharge maintenance voltage is 234V, and the discharge current is 22mA. The electrode material is iron, and the potential of the cathode drop region is 165V, which is determined by the formula n e = j/(Eμ e e) (electron density n e , unit charge e, electric field strength E, current density j, and electron mobility μ e ) It is calculated that the electron number density in the positive column region of the plasma is as high as 10 14 , which is 1-2 orders of magnitude higher than that of ordinary DC glow discharge; the ion bombardment speed reaches 2×10 3 cm/s, which is a static gas 6 times that of discharge; ions move along the direction of the electric field, especially in the cathode drop zone, where the existence of a large potential difference effectively increases the ion bombardment energy.
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