CN104540313A - Atmospheric plasma jet generation device with hollow substrate and electrodes - Google Patents
Atmospheric plasma jet generation device with hollow substrate and electrodes Download PDFInfo
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- CN104540313A CN104540313A CN201410830861.2A CN201410830861A CN104540313A CN 104540313 A CN104540313 A CN 104540313A CN 201410830861 A CN201410830861 A CN 201410830861A CN 104540313 A CN104540313 A CN 104540313A
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Abstract
The invention relates to an atmosphere plasma jet generation device with a hollow substrate and electrodes. The atmosphere plasma jet generation device comprises a DC discharge unit and a power supply used for supplying a discharge voltage to the DC discharge unit. The DC discharge unit comprises an air guide pipe and an electrode set. The electrode set comprises the cylindrical high-voltage electrode and the grounding electrode. The air guide pipe is a hollow pipe. The upper end and the lower end of the air guide pipe are provided with an air inlet port and an air outlet port respectively. The high-voltage electrode is arranged at the center of the air guide pipe in the axial direction. A hollow metal substrate unit used for forming a narrow airflow channel is further arranged at the grounding electrode. The hollow metal substrate unit is a cylinder and is provided with a through hole in the axial direction. The atmosphere plasma jet generation device with the hollow substrate and the electrodes is simple in operation process and low in running cost.
Description
Technical field
The invention belongs to technical field of plasma, relate to a kind of plasma producing apparatus, particularly relate to a kind of atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus, may be used for the surface treatment of metal material.
Background technology
In recent years, plasma technique is in physics, chemistry, electronics, materialogy, and the application-centered research of the wide spectrum such as chemical metallurgy is very active.Low temperature plasma because of its density high, gas temperature is low, and composition is controlled, and can produce various active specy, can be used for changing the surface characteristic of metal material.For metal surface properties modification, traditional low temperature plasma generating means needs high frequency electric source (radio frequency 13.56MHz or microwave 2.45GHz) to carry out the supply of sustain discharge energy, and works under hypobaric, needs vacuum pump to vacuumize.Thus, treatment facility investment is large, and cost is high.
Relatively with the low pressure discharge plasma producing apparatus of vacuum equipment, atmospheric pressure gas discharge plasma surface processing equipment eliminates vacuum plant, in normal pressure atmospheric environment, just can carry out surface treatment to sample.This process for treating surface not only reduces operating cost, and improves operating efficiency.Wherein, the using value that atmosphere pressure plasma jet flow (APPJ) is potential is maximum.It generally adopts and exchanges and pulsed discharge mode, there is electric discharge generation plasma in two electrodes of isolating there being dielectric directly (sometimes using single electrode), plasma is taken out of outside discharging chamber by the flowing by means of gas, forms plasma jet.Although APPJ is easy to and object to be treated surface contact, be conducive to the utilance improving active specy, the active specy in plasma, especially metal or nonmetallic ion are only bombard treated sample surface under the effect of air-flow.Thus, speed and the energy of active specy bombardment are subject to certain restrictions, and reduce plasma surface and expand the efficiency of oozing, be unfavorable for the application of APPJ in metal surface modification and decontamination.
Summary of the invention
In order to solve technical problem existing in background technology, the invention provides a kind of atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus, during to solve that in prior art, atmosphere pressure plasma jet flow (APPJ) works, metal or nonmetallic ion bombardment speed and energy lower, metal surface properties modification and the low problem of detersive efficiency.
Technical scheme of the present invention is: a kind of atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus, comprises direct-current discharge unit and for providing the power supply of direct-current discharge cell discharge voltage; Above-mentioned direct-current discharge unit comprises wireway and electrode group; Above-mentioned electrode group comprises one for columniform high-field electrode and a grounding electrode; Described wireway is hollow tube, and upper and lower two ends are respectively arranged with air inlet port and air outlet; Above-mentioned high-field electrode is placed in wireway axial centre position, and its special character is: above-mentioned grounding electrode place is also provided with the hollow metal base unit forming narrow gas channel; Above-mentioned hollow metal base unit is cylinder, and is provided with a through hole vertically; The through hole of hollow metal base unit is coaxial with wireway; Above-mentioned grounding electrode is L-shaped, and a right-angle side is cylinder and coaxial with high-field electrode, its end face wireway air outlet place and high-field electrode end face facing each other, another right-angle side is cuboid, connects with hollow metal base unit end face;
Also current-limiting resistance is in series with between above-mentioned direct-current discharge unit and power supply;
Above-mentioned power acquisition direct current or the pulse power, the frequency of the pulse power is 50Hz to 13.56MHz;
The material of above-mentioned wireway is mica, glass, pottery or polytetrafluoroethylene;
Above-mentioned high-field electrode and grounding electrode end face facing each other are plane; The material of described high-field electrode and grounding electrode is aluminium, iron, copper, tungsten, nickel, tantalum, platinum, aluminium alloy, ferroalloy, copper alloy, tungsten alloy, nickel alloy, tantalum alloy;
The material of above-mentioned hollow metal base unit is aluminium or copper or aluminium alloy or copper alloy, and the aperture of hollow metal base unit throughhole portions is 4 ~ 100mm.
Advantage of the present invention is:
1. relatively traditional low pressure discharge plasma producing apparatus, the present invention produces plasma jet under atmospheric environment, for metal material surface process, eliminates vacuum equipment, simplifies operating process, reduce operating cost.
2. the high frequency electric source of relatively traditional low pressure discharge plasma producing apparatus, supply power of the present invention can be DC power supply, reduces the requirement to power-supply device.
3., relative to traditional atmosphere pressure plasma jet flow (APPJ), the plasma jet that apparatus of the present invention produce has the ion energy of higher electron density, higher Ions Bombardment speed and Geng Gao under the acting in conjunction of gas flowfield and DC electric field.
Accompanying drawing explanation
Fig. 1 is hollow metal base unit structural representation of the present invention;
Fig. 2 is direct-current discharge cellular construction vertical view of the present invention;
Fig. 3 is direct-current discharge cellular construction upward view of the present invention;
Fig. 4 is atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus main body vertical view of the present invention;
Fig. 5 is atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus main body upward view of the present invention;
Fig. 6 is operating diagram of the present invention;
Wherein: 11-through hole, 10-hollow metal base unit, 20-direct-current discharge unit, 21-wireway, 22-high-field electrode, 23-grounding electrode, 31-air inlet port, 32-air outlet, 40-generating means agent structure, 41-power supply, 42-current-limiting resistance, 51-processing sample, 52-plasma jet.
Embodiment
See Fig. 1-6, the present invention proposes a kind of atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus, comprising direct-current discharge unit 20 and for providing the power supply 41 of direct-current discharge unit 20 discharge voltage; Direct-current discharge unit 20 comprises wireway and electrode group; Electrode group comprises one for columniform high-field electrode 22 and a grounding electrode 23; Wireway 21 is hollow tube, and upper and lower two ends are respectively arranged with air inlet port 31 and air outlet 32; High-field electrode 22 is placed in wireway 21 axial centre position, and grounding electrode 23 place is also provided with the hollow metal base unit 10 forming narrow gas channel; Hollow metal base unit 10 in cylinder, and is provided with a through hole vertically; The through hole of hollow metal base unit 10 is coaxial with wireway 21; Grounding electrode 23 is L-shaped, and a right-angle side is cylinder and coaxial with high-field electrode 22, its end face wireway air outlet 32 place and high-field electrode 22 end face facing each other, another right-angle side is cuboid, connects with hollow metal base unit 10 end face; Also current-limiting resistance is in series with between direct-current discharge unit 20 and power supply 41; Power supply 41 adopts direct current or the pulse power, and the frequency of the pulse power is 50Hz to 13.56MHz; The material of wireway 21 is mica, glass, pottery or polytetrafluoroethylene; High-field electrode 22 and grounding electrode 23 end face facing each other are plane; The material of high-field electrode 22 and grounding electrode 23 is aluminium, iron, copper, tungsten, nickel, tantalum, platinum, aluminium alloy, ferroalloy, copper alloy, tungsten alloy, nickel alloy, tantalum alloy; The material of hollow metal base unit 10 is aluminium or copper or aluminium alloy or copper alloy, and the aperture of hollow metal base unit 10 throughhole portions is 4 ~ 100mm.
A kind of atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus, comprises hollow metal base unit and direct-current discharge unit.Described hollow metal base unit comprises a through hole; Described direct-current discharge unit comprises a wireway and two electrodes, and one of them is cylindrical pressure electrode, and another is grounding electrode.Described wireway has air inlet port in order to cut-in operation gas and the air outlet that allows gas spray.Described high-field electrode is placed in wireway center position, and described grounding electrode is L-shaped, and a right-angle side is cylinder, coaxial with high-field electrode, its end face wireway air outlet place and high-field electrode end face facing each other; Another right-angle side is cuboid, connects with substrate end face.
Working gas is chosen as inert gas, oxygen, propane, ammonia, nitrogen and hydrogen, or the mist of above-mentioned gas, and the flow that working gas is comparatively suitable for is 0.01 ~ 10L/min.The preferred aluminium of hollow metal base unit, copper, and the alloy being selected from these metals formation, the aperture of hollow via-hole part is 4 ~ 100mm, and the height of hollow space is 10 ~ 50mm.The wireway of direct-current discharge unit is made up of insulating material such as mica, glass, pottery or polytetrafluoroethylene, and wireway internal diameter is 2 ~ 10mm, and external diameter is 4 ~ 12mm.The sparking electrode of direct-current discharge unit is by aluminium, iron, copper, tungsten, nickel, tantalum, platinum, and the alloy of these metals is made, and electrode diameter is 1 ~ 8mm.The discharging gap of direct-current discharge unit is preferably 5 ~ 15mm.For high-field electrode, provide direct current or pulse voltage, voltage magnitude is 100 ~ 10000V, and wherein pulse frequency is 50Hz to 13.56MHz.
At wireway air outlet place, the spacing of above-mentioned high-field electrode end face and wireway end face is not more than 2mm.
Atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus provided by the invention achieves the low temperature plasma under atmospheric pressure producing high electron density, high ion bombardment speed and high ion energy.During work, high-field electrode connects the positive pole of power supply by current-limiting resistance, and grounding electrode connects the negative pole of power supply, and ground connection.Working gas flows into from the air inlet port of wireway, through the annular region wireway and electrode, sprays from the air outlet of wireway, and the working gas of ejection flows into the just right discharge space of two electrodes.Because the metallic substrates connected with grounding electrode is hollow structure, due to the effect of inertia, when working gas flow velocity is enough large, working gas continues, along the flowing of original direction, to flow through the through hole of metallic substrates after flowing through discharge space.This feature is impelled and is formed around the narrow high velocity air passage of discharge space.Select suitable working gas, control the flow of gas, when two electrode applied voltages are enough high, the gas in discharging gap is breakdown, under atmospheric environment, produce low temperature plasma.Narrow gas channel constrains the space of plasma generation, prevents the excessive disperse of plasma, is conducive to the generation of high-density plasma.Under the acting in conjunction of gas flowfield and DC electric field, form the plasma jet with high electron density, high ion bombardment speed and high ion energy.This jet can be used for carrying out the surface treatment of plasma metal material.
Atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus provided by the invention, by a hollow metal base unit, a direct-current discharge unit and a power-supply device composition.Hollow metal base unit comprises a through hole, is made up of aluminium, copper or its alloy material.Direct-current discharge unit comprises a wireway, a high-field electrode and a grounding electrode.Wireway has two ports, and one is air inlet port, and another is air outlet, and wireway is made up of insulating material such as mica, glass, pottery or polytetrafluoroethylene; High-field electrode is cylindrical, and be placed in the center position of wireway inside, grounding electrode is L-shaped, one right-angle side is cylinder, coaxial with high-field electrode, its end face wireway air outlet place and high-field electrode end face facing each other, another right-angle side is cuboid, connects with substrate end face.Two electrodes are heat-resisting metal material, can adopt aluminium, iron, copper, tungsten, nickel, tantalum, platinum, and the alloy of these metals, but are not limited to above-mentioned material.Power-supply device provides direct current or pulse voltage, and when voltage is pulse, its frequency can change to the radio frequency of 13.56MHz from power frequency; Power-supply device also comprises a current-limiting resistance being used for preventing glow discharge from changing to arc discharge.
During work, treated sample is placed on grounding electrode.Working gas flows into from the air inlet port of wireway, through the annular region wireway and high-field electrode, from air outlet ejection, flows into the discharge space that two electrodes are just right.When between two electrodes, institute's making alive is enough high, the working gas of discharge space is breakdown, and stable plasma gas discharge occurs.
Due to inertia and metallic substrates hollow structure, working gas continues the through hole flowing through metallic substrates along original flow direction, prevents the generation of gas backstreaming, forms narrow high velocity air passage around discharge space.Narrow gas channel constrains the volume of plasma generation, prevents the excessive disperse of plasma, is conducive to the generation of high-density plasma.The direction of working gas travels and the direction of DC electric field are consistent, and air-flow and electric field enhance speed and the energy of Ions Bombardment sample surfaces to the acting in conjunction of ion simultaneously.The plasma jet of high density, high ion bombardment speed and high ion energy is very suitable for metal material surface process, namely expanded by plasma surface and ooze, change mechanical property or the Corrosion Protection of metal device, and remove the surface and oil contaminant of metal device.
Be described in further detail structure and the course of work of apparatus of the present invention below.
In different drawings, similar or identical apparatus structure schematic diagram is given.Fig. 1 is hollow metal base unit structure 10 schematic diagram of the present invention.Hollow metal base unit 10 comprises a through hole 11.Fig. 2 is direct-current discharge cellular construction 20 schematic diagram of the present invention.Fig. 2 is vertical view; Fig. 3 is upward view.Direct-current discharge unit 20 comprises wireway 21, high-field electrode 22, and grounding electrode 23.Wireway 21 has two ports, an air inlet port 31, air outlet 32.High-field electrode 22 is placed in wireway 21 center; At air outlet 32 place of wireway 21, the spacing of high-field electrode 22 end face and wireway 21 end face is not more than 2mm.Grounding electrode 23 is L-shaped, and a right-angle side is cylinder, its end face and high-field electrode 22 end face facing each other, spacing is 5 ~ 30mm; Another right-angle side is cuboid.Fig. 4 is atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus main body vertical view of the present invention; Fig. 5 is atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus main body upward view of the present invention.Grounding electrode 23 connects with hollow metal substrate 10 end face, and is fixed on hollow metal substrate 10.High-field electrode 22, grounding electrode 23, and through hole 11 is coaxially placed.Fig. 6 is operating diagram of the present invention.Atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus overall structure 50, except comprising agent structure 40, also comprises power-supply device 41 and the current-limiting resistance 42 being used for preventing glow discharge from changing to arc discharge.The positive pole of power-supply device 41 is connected with high-field electrode 22 by current-limiting resistance 42, and negative pole connects with grounding electrode 23, and ground connection.
During work, treated sample 51 is placed on grounding electrode 23.Working gas flows into from the air inlet port 31 of wireway 21, flows through the annular region between high-field electrode 22 and wireway 21, flows out from air outlet 32, enters the discharge space that high-field electrode 22 is right with grounding electrode 23.Because of the effect of inertia, working gas continues to flow into the through hole 11 of hollow metal substrate 10.When being applied to the voltage between high-field electrode 22 and grounding electrode 23 and being enough high, gas discharge is there is between two electrodes 22 and 23, under narrow high velocity air passage and electric field acting in conjunction, produce the plasma jet 52 of high density, high ion bombardment speed and high ion energy, the treated sample 51 that this jet can be opposite on grounding electrode 23 carries out surface treatment.
The density of plasma jet, the bombardment speed of ion and energy are mainly subject to electrode spacing, working gas flow, and the impact of applied voltage.Electrode spacing should elect 5 ~ 15mm as; Working gas flow is generally at 0.01 ~ 10L/min; Applied voltage is usually at 100 ~ 10000V, and discharging current is several milliamperes to tens milliamperes magnitudes, produces the energy of maintenance stable plasma jet usually between several watts to tens watts.What deserves to be explained is, above-mentioned size or parameter are only samples of plasma producing apparatus of the present invention, and the size of this device is not restricted to above-mentioned scope.
Can be 1mm at apparatus of the present invention two electrode diameter, electrode spacing is 6mm, wireway internal diameter is under the condition of 1.7mm, when working gas (argon gas) flow is 2L/min, when applied voltage is 2434V, plasma jet sprays to negative electrode from anode, in disperse shape, be confined to the discharge space that two electrodes are just right, and radial radius increases gradually.Now, discharge loop current-limiting resistance 100K Ω, electric discharge ME for maintenance 234V, discharging current 22mA.Electrode material is iron, and cathode fall district electromotive force is 165V, by formula n
e=j/ (E μ
ee) (electron density n
e, unit charge e, electric field strength E, current density j, and electron mobility μ
e) calculate the electron number densitiy of plasma positive column up to 10
14magnitude, exceeds 1 ~ 2 order of magnitude than common direct current glow discharge electron number densitiy; Ions Bombardment speed reaches 2 × 10
3cm/s is 6 times during stationary gas electric discharge; Ion moves along direction of an electric field, and especially in cathode fall district, the existence of larger electrical potential difference effectively raises ion bombardment energy.
Claims (6)
1. an atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus, comprises direct-current discharge unit and for providing the power supply of direct-current discharge cell discharge voltage; Described direct-current discharge unit comprises wireway and electrode group; Described electrode group comprises one for columniform high-field electrode and a grounding electrode; Described wireway is hollow tube, and upper and lower two ends are respectively arranged with air inlet port and air outlet; Described high-field electrode is placed in wireway axial centre position, it is characterized in that: described grounding electrode place is also provided with the hollow metal base unit forming narrow gas channel; Described hollow metal base unit is cylinder, and is provided with a through hole vertically; The through hole of hollow metal base unit is coaxial with wireway; Described grounding electrode is L-shaped, and a right-angle side is cylinder and coaxial with high-field electrode, its end face wireway air outlet place and high-field electrode end face facing each other, another right-angle side is cuboid, connects with hollow metal base unit end face.
2. atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus according to claim 1, is characterized in that: be also in series with current-limiting resistance between described direct-current discharge unit and power supply.
3. atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus according to claim 1 and 2, is characterized in that: described power acquisition direct current or the pulse power, and the frequency of the pulse power is 50Hz to 13.56MHz.
4. atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus according to claim 3, is characterized in that: the material of described wireway is mica, glass, pottery or polytetrafluoroethylene.
5. atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus according to claim 4, is characterized in that: described high-field electrode and grounding electrode end face facing each other are plane; The material of described high-field electrode and grounding electrode is aluminium, iron, copper, tungsten, nickel, tantalum, platinum, aluminium alloy, ferroalloy, copper alloy, tungsten alloy, nickel alloy, tantalum alloy.
6. atmospheric pressure hollow substrate electrode plasma jet flow generating apparatus according to claim 5, is characterized in that: the material of described hollow metal base unit is aluminium or copper or aluminium alloy or copper alloy; The aperture of hollow metal base unit throughhole portions is 4 ~ 100mm.
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