CN107750087A - The dual-purpose plasma jet generating means of a kind of bare electrode and dielectric impedance - Google Patents
The dual-purpose plasma jet generating means of a kind of bare electrode and dielectric impedance Download PDFInfo
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- CN107750087A CN107750087A CN201711018454.1A CN201711018454A CN107750087A CN 107750087 A CN107750087 A CN 107750087A CN 201711018454 A CN201711018454 A CN 201711018454A CN 107750087 A CN107750087 A CN 107750087A
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- high voltage
- plasma jet
- plasma
- discharge
- power supply
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
Abstract
The invention provides the dual-purpose plasma jet generating means of a kind of bare electrode and dielectric impedance, belong to plasma discharge reactor technical field.Using atmosphere cold plasma jet surface modification can be carried out to metal material or nonmetallic materials.The cold-plasma jet generating means can realize bare electrode electric discharge and two kinds of discharge types of dielectric barrier discharge.The active particle concentration of dielectric barrier discharge is higher but easily punctures simultaneously with conductors such as metals, suitable for the quick modification of nonmetallic materials, sterilizing；Cold-plasma jet temperature caused by bare electrode electric discharge is relatively low and disruptive discharge will not occur with metal surface.The present apparatus can be according to different application occasion demand, only by inserting and removing insulating sleeve, you can the cold-plasma jet of different discharge types is produced, without designing two sets of special purpose devices for the cold plasma jet of two kinds of discharge types.
Description
Technical field
The present invention relates to the dual-purpose plasma jet generating means of a kind of bare electrode and dielectric impedance, belong to plasma
Discharge reactor technical field.
Background technology
Because cold plasma is in non-equilibrium thermodynamics state, its internal neutral particle temperature is relatively low and electron temperature compared with
Height, cause it relatively low in macro-temperature while have greater activity.Cold plasma can be to the quick modification of material surface, inactivation simultaneously
The irreversible breakings such as burn will not be caused, therefore is widely used in surface modification, materials synthesis in recent years, wastewater treatment, goes out
The fields such as bacterium sterilization.
When being handled using plasma material, the shape and size of material can be by plasma discharge gaps
Limitation.To solve the above problems, Recent study personnel develop cold-plasma jet technology, can be by under minim gap
Electric discharge is led in open space.A diameter of several microns to several millimeters of cold-plasma jet, length can be by changing voltage
And gas flow is adjusted to several millimeters to hundreds of millimeters, it can conveniently be applied to local small range or large-area treatment to material.
Atmosphere cold plasma jet can be answered multiple batches of sample continuous processing without vacuum chamber more suitable for actual
With.Atmosphere pressure plasma jet flow is more to be produced and is drawn by dielectric barrier discharge.Publication No. CN101330794A,
CN101466194A, CN101426327A, CN101652016A patent, respectively using the electrode assembly of different structure, pass through
Dielectric barrier discharge produces cold-plasma jet.Said apparatus effectively can be modified to insulating materials such as polymer, there is one
Fixed researching value and application prospect, but because these devices are based on electrode suspension or dielectric breakdown generation jet, cause jet
Space potential it is higher, disruptive discharge, electric discharge production will be occurred between metal by handling the conductive material such as metal in actual applications
Raw high temperature will damage surface.Cold-plasma jet temperature caused by bare electrode electric discharge is relatively low, and with relatively low space electricity
Position, can be touched with hand.Such jet can be used for the modification of the conductive materials such as metal.If above two discharge type can lead to
Cross the simple conversion of electrode structure and realize, can effectively reduce equipment cost, improve the broad applicability of plasma generator.
The content of the invention
The invention provides the dual-purpose plasma jet generating means of a kind of bare electrode and dielectric impedance, has two kinds and puts
Electric form, it can be needed to produce dielectric impedance cold-plasma jet or bare electrode cold plasma jet according to practical application.Work
Make the gaseous mixture that gas can be nitrogen, oxygen, air, helium, argon gas or above-mentioned several gases.
Technical scheme：
The dual-purpose plasma jet generating means of a kind of bare electrode and dielectric impedance, including high voltage power supply 5, work source of the gas
6th, gas pressure reducer 7, gas mass flow controller 8, plasma generator 1 and insulating sleeve 4；
The High voltage output of high voltage power supply 5 connects the high voltage needle electrode 2 of plasma generator 1, and low pressure output connects plasma
The injector electrode of generator 1, high voltage power supply 5 are ground wire grounded；Source of the gas 6 work after gas pressure reducer 7 adjusts pressure, connects gas matter
Measure flow and control 8 entrances, by adjusting the parameter of gas mass flow controller 8, gas flow is adjusted；Gas mass flow
The outlet of amount controller 8 connects the housing afterbody of plasma generator 1；The housing center of plasma generator 1 is provided with centre bore, in
The aperture in heart hole is identical with the external diameter of high voltage needle electrode 2, and to fixed high voltage needle electrode 2, the front end of high voltage needle electrode 2 is cased with insulation sleeve
Pipe 4；Uniform small through hole around centre bore, working gas is transported to plasma generation area；Plasma generator 1
Housing forward end it is tapped, connect injector electrode；Injector electrode is frustum, and afterbody is connected with housing forward end, and top has one
Manhole, when discharge type is that bare electrode discharges, cold-plasma jet projects from there；When insulating sleeve 4 is enclosed on height
When in the sophisticated outer, injector electrode of pressing electrode 2, discharge type is dielectric barrier discharge, and cold-plasma jet is by insulating sleeve
Interior ejection.
After adjusting supply voltage, frequency and working gas flow, by inserting, removing insulating sleeve, can atmospheric pressure by
Dielectric barrier discharge or bare electrode two kinds of discharge types of electric discharge produce cold-plasma jet uniformly, stable, the length of jet
It can be adjusted by discharge voltage and gas flow.
Beneficial effects of the present invention：The device uses pin electrode, injector electrode and insulating sleeve, can produce two kinds of not similar shapes
The electric discharge of formula, there is different application value：The active particle concentration of dielectric barrier discharge is higher but is easy to lead with metal etc. simultaneously
Body punctures, suitable for the quick modified, sterilizing of nonmetallic materials；Cold-plasma jet temperature caused by bare electrode electric discharge
It is relatively low and will not with metal surface occur disruptive discharge.The present apparatus can be according to different application occasion demand, only by inserting, removing
Insulating sleeve is the cold-plasma jet for producing different discharge types, is set without being specifically designed other devices or providing other
It is standby.In addition, DC high-voltage power supply, low-frequency high-voltage power supply, radio-frequency power supply, microwave high pressure power supply or pulse can be used in the device
The high voltage power supply that any one such as high voltage power supply can produce plasma produces jet, and without vacuum equipment, can effectively reduce
Purchase the equipment costs such as power supply.In summary, the device can obtain that uniform and stable, temperature is relatively low under normal temperature and pressure environment
Cold-plasma jet, and discharge type can be changed by the position of part in adjusting apparatus, there is simple in construction, jet temperature
The features such as relatively low, easy to operate.
Brief description of the drawings
Fig. 1 is atmospheric dielectric barrier discharge cold-plasma jet generating means schematic diagram.
Fig. 2 is atmospheric bare electrode cold plasma jet generating means schematic diagram.
In figure：1 plasma generator；2 high voltage needle electrodes；3 plasma jets；4 insulating sleeves；
5 high voltage power supplies；6 work sources of the gas；7 gas pressure reducers；8 gas mass flow controllers.
Embodiment
Below in conjunction with the accompanying drawings and technical scheme, the embodiment of the present invention is further illustrated.
The present invention devises the dual-purpose plasma jet generating means of a kind of bare electrode and dielectric impedance, by installation and
Insulating sleeve 4 is dismantled, its discharge type can be divided into dielectric barrier discharge and bare electrode electric discharge.
With reference to the accompanying drawings, bare electrode and the dual-purpose plasma jet generating means each several part connected mode of dielectric impedance are：
High voltage needle electrode 2 on plasma generator 1 is connected with the High voltage output binding post of high voltage power supply 5, the low pressure of high voltage power supply 5
Output wiring terminal is connected with the injector electrode on plasma generator 1 to be connected to the ground；Working gas is passed through by working gas source 6
Gas pressure reducer 7 and gas mass flow controller 8 are passed through plasma generator 1；High voltage power supply 5 is opened, is gradually stepped up defeated
Go out voltage, adjust suitable discharge frequency, until the outlet of plasma generator 1 produces stable cold-plasma jet 3；
The conversion of dielectric barrier discharge and bare electrode two kinds of discharge types of electric discharge is completed by insertion and removal insulating sleeve 4.
Embodiment 1
As shown in figure 1, plasma producing apparatus is formed by 1~8.Now insulating sleeve inserts in housing and covers pin electricity
Pole, the plasma jet that discharge type is dielectric barrier discharge will be produced.Work source of the gas is first turned on, adjusts pressure-reducing valve pressure
To 0.5Mpa, gas mass flow controller registration is 5L/min.High voltage power supply is now opened, supply frequency is adjusted to 55kHZ,
Output voltage is slowly increased, when voltage reaches 1.5kV, uniform cold-plasma jet will be produced at nozzle.Now due to
Covered between pin electrode and injector electrode by dielectric, caused jet temperature is higher, and active particle concentration is high, modification efficiency
Height, and there is higher space potential, it will puncture during close to conductors such as metals.Such jet is applied to non-metallic material
Material is quickly modified, and should not be used in the modification of the conductor material such as metal.
Embodiment 2
As shown in Fig. 2 plasma producing apparatus is made up of 1~3 and 5~8.Now conduit 4 is not enclosed on high voltage needle electrode 2
On, the device can produce the cold-plasma jet that discharge type is bare electrode electric discharge.It is first turned on work source of the gas, adjustment decompression
For valve pressure to 0.5Mpa, gas mass flow controller registration is 5L/min.Now turn on the power, supply frequency is adjusted to
60kHZ, output voltage is slowly increased, when voltage reaches 2.8kV, uniform plasma jet is will appear from nozzle.Now
Due to not covered between pin electrode and nozzle by dielectric, caused cold-plasma jet temperature is relatively low, and with relatively low
Space potential, can be touched with hand.Such jet can be used for the modification of the conductive materials such as metal.
Claims (2)
1. a kind of bare electrode and the dual-purpose plasma jet generating means of dielectric impedance, it is characterised in that described plasma
Body jet flow generating apparatus includes high voltage power supply (5), work source of the gas (6), gas pressure reducer (7), gas mass flow controller
(8), plasma generator (1) and insulating sleeve (4)；
The High voltage output of high voltage power supply (5) connects the high voltage needle electrode (2) of plasma generator (1), and low pressure output connects plasma
The injector electrode of body generator (1), high voltage power supply (5) are ground wire grounded；The source of the gas (6) that works adjusts pressure through gas pressure reducer (7)
Afterwards, gas mass flow control (8) entrance is connect, by adjusting gas mass flow controller (8) parameter, gas flow is carried out
Regulation；Gas mass flow controller (8) outlet connects plasma generator (1) housing afterbody；Plasma generator (1)
Housing center is provided with centre bore, and the aperture of centre bore is identical with high voltage needle electrode (2) external diameter, to fix high voltage needle electrode (2),
High voltage needle electrode (2) front end is cased with insulating sleeve (4)；Uniform small through hole around centre bore, by working gas transport to etc.
Gas ions generation area；The housing forward end of plasma generator (1) is tapped, connects injector electrode；Injector electrode is cone
Mesa-shaped, afterbody are connected with housing forward end, and a manhole is arranged at top, when discharge type is that bare electrode discharges, cold plasma
Jet projects from there；When insulating sleeve (4) is enclosed in the sophisticated outer, injector electrode of high voltage needle electrode (2), discharge type is Jie
Matter barrier discharge, cold-plasma jet in insulating sleeve by spraying.
2. bare electrode according to claim 1 and the dual-purpose plasma jet generating means of dielectric impedance, its feature exist
In described high voltage power supply is DC high-voltage power supply, low-frequency high-voltage power supply, radio-frequency power supply, microwave high pressure power supply or pulse
High voltage power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711018454.1A CN107750087A (en) | 2017-10-27 | 2017-10-27 | The dual-purpose plasma jet generating means of a kind of bare electrode and dielectric impedance |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711018454.1A CN107750087A (en) | 2017-10-27 | 2017-10-27 | The dual-purpose plasma jet generating means of a kind of bare electrode and dielectric impedance |
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| CN107750087A true CN107750087A (en) | 2018-03-02 |
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| CN201711018454.1A Pending CN107750087A (en) | 2017-10-27 | 2017-10-27 | The dual-purpose plasma jet generating means of a kind of bare electrode and dielectric impedance |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108844927A (en) * | 2018-04-20 | 2018-11-20 | 中国地质大学（武汉） | A kind of sample introduction system and its Atomic Fluorescence Spectrometer |
| CN112804806A (en) * | 2020-11-23 | 2021-05-14 | 北京劳动保障职业学院 | Magnetic confinement three-dimensional plasma jet array method and system |
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| CN112804806A (en) * | 2020-11-23 | 2021-05-14 | 北京劳动保障职业学院 | Magnetic confinement three-dimensional plasma jet array method and system |
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Application publication date: 20180302 |