CN110213872A - A kind of plasma jet auxiliary device - Google Patents
A kind of plasma jet auxiliary device Download PDFInfo
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- CN110213872A CN110213872A CN201910510186.8A CN201910510186A CN110213872A CN 110213872 A CN110213872 A CN 110213872A CN 201910510186 A CN201910510186 A CN 201910510186A CN 110213872 A CN110213872 A CN 110213872A
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- Prior art keywords
- plasma jet
- plasma
- intervalometer
- drainage piece
- ground connection
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- 238000001514 detection method Methods 0.000 claims abstract description 13
- 238000012544 monitoring process Methods 0.000 claims abstract description 3
- 238000004458 analytical method Methods 0.000 claims description 7
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 210000002381 plasma Anatomy 0.000 description 79
- 239000007789 gas Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 206010014357 Electric shock Diseases 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000004659 sterilization and disinfection Methods 0.000 description 2
- 206010028980 Neoplasm Diseases 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 210000001519 tissue Anatomy 0.000 description 1
- 230000029663 wound healing Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a kind of plasma jet auxiliary devices, comprising: detection control module, intervalometer and ground connection drainage piece;Detection control module is connect with the high voltage power supply output end in plasma jet device;Intervalometer top surface opening is located at plasma jet nozzle, and through-hole and groove is distributed in bottom surface, and the plasma jet that plasma jet device generates is flowed out by bottom surface through-hole;Ground connection drainage piece is embedded in the bottom recesses of the intervalometer, and is connect with public earth polar;Control module is detected, for the voltage and current state of real-time monitoring plasma jet device, and disconnects the high voltage power supply of plasma jet device in the event of a failure;Intervalometer, for controlling the length and dead earth drainage piece of plasma jet;It is grounded drainage piece, for guiding discharge plasma electric current.The application that the present invention can be improved plasma jet device is safe, while making ion volume array Uniform Discharge, improves plasma properties.
Description
Technical field
The invention belongs to plasma application fields, more particularly, to a kind of plasma jet auxiliary device.
Background technique
Atmospheric non-equilibrium plasma is the plasma generated under atmospheric pressure, and electron temperature is up to tens of thousands of
Degree, and the temperature of ion and neutral particle is much smaller than electron temperature, is generally near room temperature, therefore gas temperature when its electric discharge
Close to room temperature.Atmos low-temperature plasma jet device can generate plasma jet under atmospheric pressure, will not make to be located
Reason object is limited by plasma discharge gap size, easy to operate, and the gas temperature generated is low, and activity is high.It is existing
Plasma jet device have been able to generate various types of nonthermal plasmas, such as patent document under atmospheric pressure
A kind of plasma jet device is disclosed in CN101426327A, this device by the way that working gas is blown into hollow tracheae,
High-field electrode is configured in hollow tracheae exit, to generate the jet stream of ejection;It is disclosed in patent document CN102523674A
A kind of Handheld plasma electric torch, this device puncture the work between needle point and target surface by applying high direct voltage to pin electrode
Make gas and generates jet stream;A kind of fluidic device of more air pipe passways is also disclosed in patent document CN106304591A.Currently, non-
Thermal equilibrium plasma is widely used in plasma biomedical research, such as promotes wound healing, percutaneous dosing, sterilization
Disinfection, beauty and skin care, treatment tumour etc..
But existing plasma jet device deposits security risk both ways in use, firstly, current etc.
At work, operating current is all to flow to processed from high voltage power supply by plasma jet device to gas ions fluidic device
The earth is flowed back to finally by another place's grounding point of treated object inside treated object in the surface of object, in this way,
When plasma current is because of cause specific increases severely, human body will be likely to receiving when receiving processing or accidentally object processed and be more than
The electric current of secure threshold, so that the body to user damages;Secondly as plasma jet device often works
Under the condition of high voltage of upper kilovolt, the probability of damage of device internal component is very big, and existing plasma jet device is not
Faulty diagnostic module does not respond to the safe action of failure yet, causes great security risk to user.In addition, existing
There is also uneven, all high-field electrodes that discharge to discharge simultaneously for plasma jet device, so that the active particle generated
The problem of being unevenly distributed.These are all current plasma jet device urgent problems to be solved in practical applications.
In general, that there are application securities is low for existing plasma jet device, and the active particle distribution generated is not
Uniform problem.
Summary of the invention
In view of the drawbacks of the prior art, the purpose of the present invention is to provide a kind of plasma jet auxiliary devices, it is intended to
It solves the problem of that existing plasma jet device is low there are application security and the active particle generated is unevenly distributed.
To achieve the above object, the present invention provides a kind of plasma jet auxiliary devices, comprising: detection control mould
Block, intervalometer and ground connection drainage piece;
The detection control module is connect with the high voltage power supply output end in plasma jet device;
The intervalometer top surface opening, the plasma jet spout in the plasma jet device
Through-hole and groove is distributed in place, bottom surface, and the plasma jet that plasma jet device generates is flowed out by bottom surface through-hole;
The ground connection drainage piece is embedded in the bottom recesses of the intervalometer, and is connect with public earth polar;
The detection control module, for the voltage and current state of plasma jet device described in real-time monitoring, and
The high voltage power supply of the plasma jet device is disconnected when breaking down;
The intervalometer, for controlling the length of plasma jet and fixing the ground connection drainage piece;
The ground connection drainage piece is used for directing plasma discharge current.
Further, the detection control module includes voltage sensor, current sensor and analysis controlling unit;
The voltage sensor, for measuring the voltage of plasma jet device input terminal;
The current sensor, for measuring the electric current of plasma jet device input terminal;
The analysis controlling unit, for comparing the voltage and current measured with accordingly given threshold respectively
Compared with disconnecting the high voltage power supply of plasma jet device when the obtained voltage of measurement or electric current are more than given threshold.
Further, the plasma jet spout in the intervalometer bottom surface and the plasma jet device
Distance is changeable.
Further, the plasma jet number that each through-hole of the intervalometer bottom surface distribution passes through is one
It is a or multiple.
Further, the intervalometer is made by dielectric.
Further, the dielectric is polytetrafluoroethylene (PTFE) alkyl resin.
Further, the shape of through holes, quantity of the intervalometer bottom surface distribution, arrangement mode and ground connection drainage piece
The plasma array arrangement mode that is generated according to plasma jet device of distribution mode determine.
Further, ground connection drainage piece material is stainless steel, copper or aluminium.
Contemplated above technical scheme through the invention, compared with prior art, can obtain it is following the utility model has the advantages that
(1) the ground connection drainage piece that the present invention is arranged, on the one hand, so that plasma discharge electric current flows through Object table processed
Face flows into the earth using ground connection drainage piece, prevents plasma discharge electric current directly through human body, reduces human electric shock's wind
Danger;On the other hand, making all high-field electrodes while discharging, ion volume array Uniform Discharge, the active particle of generation is uniformly distributed,
To improve plasma properties.
(2) the detection control module that the present invention is arranged is capable of the operating status of real-time detection plasma jet device, and
The operation troubles and potential problems of Shi Faxian plasma jet device are cut in time when plasma jet device occurs abnormal
Power-off source, avoids human contact from being higher than the electric current of secure threshold, and the application for improving plasma jet device is safe.
(3) intervalometer that the present invention is arranged can control the distance between plasma jet and object processed, have
Effect is avoided due to maloperation, and plasma jet is placed the position excessively close apart from object processed by user, thus reduce by
To the risk of burn, the application for further increasing plasma jet device is safe.
Detailed description of the invention
Fig. 1 is the plasma jet assistant apparatus structure schematic diagram that first embodiment of the invention provides;
Fig. 2 (a) is the schematic three dimensional views of intervalometer used in first embodiment of the invention;
Fig. 2 (b) is intervalometer bottom surface and corresponding ground connection drainage piece structural schematic diagram in first embodiment of the invention;
Fig. 3 (a) is the intervalometer that a kind of bottom surface provided by the invention uses arc-shaped open-celled structure;
Fig. 3 (b) is a kind of ground connection drainage piece structural schematic diagram corresponding with Fig. 3 (a) intervalometer structure;
Fig. 4 (a) is the intervalometer that a kind of bottom surface provided by the invention uses circular arrangement open-celled structure;
Fig. 4 (b) is a kind of ground connection drainage piece structural schematic diagram corresponding with Fig. 4 (a) intervalometer structure;
Fig. 5 is the plasma jet assistant apparatus structure schematic diagram that second embodiment of the invention provides;
1 is high voltage power supply, and 2 be analysis controlling unit, and 3 be current sensor, and 4 be first voltage sensor, and 5 be the second electricity
Pressure sensor, 6 be protective resistance, and the 7 air plasma volume array generating devices driven for high direct voltage, 8 be intervalometer,
9 be ground connection drainage piece, and 10 be working gas source, and 11 be gas flow control switch, and 12 be the inert gas of ac high-voltage driving
Plasma producing apparatus.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
As one embodiment of the invention, a kind of plasma jet auxiliary device provided by the invention, comprising: inspection
Survey control module, intervalometer 8 and ground connection drainage piece 9;
Detection control module is connect with the high voltage power supply output end in plasma jet device;
Specifically, as shown in Figure 1, auxiliary device of the invention applies the air plasma volume array in high direct voltage driving
In generating device 7, correspondingly, detection control module includes analysis controlling unit 2, current sense 3,4 and of first voltage sensor
Second voltage sensor 5;
First voltage sensor 4 and second voltage sensor 5 are respectively used to the voltage at measurement 6 both ends of protective resistance.
Current sensor 3, for measuring the electric current of air plasma volume array high voltage input terminal;
Analysis controlling unit 2, for the voltage and current measured to be compared with accordingly given threshold respectively, when
When measuring obtained voltage or electric current more than given threshold, high voltage power supply 1 is disconnected.
8 top surface of intervalometer opening, positioned at the plasma jet spout of air plasma volume array generating device 7
Through-hole and groove is distributed in place, bottom surface, and the plasma jet that air plasma volume array generating device 7 generates is logical by bottom surface
Hole outflow;
In use, the bottom surface of intervalometer 8 and object contact processed, high by adjusting bottom surface and plasma array
The distance of pressing electrode adjusts plasma jet length.
It is grounded drainage piece 9 to be embedded in the bottom recesses of intervalometer 8, and is connect with public earth polar;
In the present embodiment shown in the structure of intervalometer such as Fig. 2 (a), material therefor can be polytetrafluoroethylene (PTFE) alkyl tree
Rouge, due to the arrangement mode that plasma arrays used are 7 × 10, correspondingly, there is the through-hole of 7 rectangles in intervalometer bottom surface,
Each through-hole corresponds to linearly aligned 10 high voltage needle electrodes, however, the present invention is not limited thereto, intervalometer bottom surface in the present invention
The plasma jet number that each through-hole of distribution passes through is one or more;When practical application, the shape of through-hole, number
Amount, arrangement mode can make corresponding adjustment according to the arrangement mode of plasma array;One kind as shown in Fig. 3 (a)
Bottom surface uses the intervalometer of arc-shaped open-celled structure, and a kind of bottom surface such as Fig. 4 (a) shown in is using circular arrangement aperture
The intervalometer of structure;Intervalometer of the invention can also be made by other dielectrics.
In the present embodiment, intervalometer bottom surface and corresponding ground connection drainage piece structural schematic diagram such as Fig. 2 (b) are shown, ground connection
Drainage piece is concordant with intervalometer bottom surface in intervalometer bottom recesses, arranges around plasma, but the present invention
Without being limited thereto, the distribution mode for being grounded drainage piece can make corresponding adjustment according to the arrangement mode of plasma array,
The ground connection drainage piece structure corresponding with intervalometer structure shown in Fig. 3 (a) of one kind as shown in Fig. 3 (b), and such as Fig. 4 (b)
Shown in one kind ground connection drainage piece structure corresponding with Fig. 4 (a) intervalometer structure;The material of drainage piece is grounded in the present invention
It can be stainless steel, copper or aluminium.
The circular plasma array arrangement that air plasma volume array generating device 7 generates, discharge current is by being located
Object surface is managed, is flowed into the earth eventually by ground connection drainage piece, on the one hand be can solve plasma array in this way and often occur
Electric discharge is uneven, the problem of all pin electrodes cannot discharge simultaneously, plasma electric field can be made more uniform, enhancing etc. from
The performance of daughter;On the other hand, when object processed is human skin or tissue, since discharge current passes through skin processed
Surface flows into the earth eventually by ground connection drainage piece, this isolates human body from plasma loop, greatly
Reduce the electric sense of touch and potential electric shock risk of human body.
As second embodiment of the invention, auxiliary device of the invention applies the inert gas in ac high-voltage driving
In plasma producing apparatus, as shown in figure 5, the frequency range of AC power source used can arrive several hundred kHz at tens hertz
Between, working gas is helium, and the working gas that gas flow control switch 11 controls working gas source 10 enters plasma
Helium gas plasma is generated in generator, since power supply is AC power source, ground connection drainage piece 9 is fixed on 8 bottom surface of intervalometer
Inside grooves, remaining structure and first embodiment of the invention are without significant difference.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (7)
1. a kind of plasma jet auxiliary device characterized by comprising detection control module, intervalometer and ground connection
Drainage piece;
The detection control module is connect with the high voltage power supply output end in plasma jet device;
The intervalometer top surface opening, the plasma jet nozzle in the plasma jet device, bottom
EDS maps have through-hole and groove, and the plasma jet that the plasma jet device generates is flowed out by bottom surface through-hole;
The ground connection drainage piece is embedded in the bottom recesses of the intervalometer, and is connect with public earth polar;
The detection control module for the voltage and current state of plasma jet device described in real-time monitoring, and is occurring
The high voltage power supply of the plasma jet device is disconnected when failure;
The intervalometer, for controlling the length of plasma jet and fixing the ground connection drainage piece;
The ground connection drainage piece is used for directing plasma discharge current.
2. a kind of plasma jet auxiliary device according to claim 1, which is characterized in that the detection control module
Including voltage sensor, current sensor and analysis controlling unit;
The voltage sensor, for measuring the voltage of plasma jet device input terminal;
The current sensor, for measuring the electric current of plasma jet device input terminal;
The analysis controlling unit, for the voltage and current measured to be compared with accordingly given threshold respectively, when
When measuring obtained voltage or electric current more than given threshold, the high voltage power supply of plasma jet device is disconnected.
3. a kind of plasma jet auxiliary device according to claim 1 or 2, which is characterized in that the interval adjustment
Device bottom surface and the plasma jet jet opening distance in the plasma jet device are adjustable.
4. a kind of plasma jet auxiliary device according to claim 3, which is characterized in that the intervalometer bottom
The plasma jet number that each through-hole of EDS maps passes through is one or more.
5. a kind of plasma jet auxiliary device according to claim 1-4, which is characterized in that the interval
Adjuster is made by dielectric.
6. a kind of plasma jet auxiliary device according to claim 5, which is characterized in that the dielectric is poly-
Tetrafluoroethene alkyl resin.
7. a kind of plasma jet auxiliary device according to claim 1-6, which is characterized in that the interval
The distribution mode of shape of through holes, quantity, arrangement mode and ground connection drainage piece that adjuster bottom surface is distributed is penetrated according to plasma
The plasma array arrangement mode that device generates is flowed to determine.
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CN201910510186.8A CN110213872A (en) | 2019-06-13 | 2019-06-13 | A kind of plasma jet auxiliary device |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110958754A (en) * | 2019-11-12 | 2020-04-03 | 上海工程技术大学 | Intensity-adaptive plasma jet device and method |
CN111629508A (en) * | 2020-05-26 | 2020-09-04 | 华中科技大学 | Plasma generating device |
CN112804806A (en) * | 2020-11-23 | 2021-05-14 | 北京劳动保障职业学院 | Magnetic confinement three-dimensional plasma jet array method and system |
CN113490322A (en) * | 2021-06-23 | 2021-10-08 | 华中科技大学 | Portable large-area plasma jet device and system |
CN113993265A (en) * | 2021-10-21 | 2022-01-28 | 广州大学 | Atmospheric pressure plasma jet array device with coupling between jets |
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CN113993265A (en) * | 2021-10-21 | 2022-01-28 | 广州大学 | Atmospheric pressure plasma jet array device with coupling between jets |
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