KR20150146253A - Plasma Jet Devices with Electric Safty and Heat-Dissipation - Google Patents

Abstract

The object of the present invention is to provide a plasma jet source for biology applied to medical, a cosmetic procedure, and the like and, specifically, to provide a plasma jet source which is safe and stable due to removing dangers of a electric shock or a heat shock. The present invention designs various voltage-applying electrodes and grounding electrode structures, and provides a heat-dissipating means. The grounding electrode structures have a plurality of holes for a heat-dissipating function, or an air-cooled heat dissipation which supplies cool air through the grounding electrode, a water-cooled heat dissipation which supplies cool water, and the like are provided to the present invention.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a plasma jet device having an electric safety function and a heat dissipation function,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an atmospheric pressure plasma jet apparatus for irradiating a plasma to a living tissue, and more particularly, to a plasma generator for medical use and living body used for treatment or management by irradiating plasma to a human body and living tissue, To a plasma generating apparatus having a heat dissipating function.

Generally, an atmospheric pressure plasma jet apparatus is a device for generating plasma by ionizing a gas when a high frequency or a high voltage is supplied to an electrode. The inert gas, various kinds of gases and general air are injected to generate plasma. Such a plasma jet is irradiated to a living body and is used for medical treatment, skin care, and management of an organism by utilizing the death and regeneration effect of a living tissue.

Particularly, a plasma jet apparatus used for medical use is mainly an atmospheric plasma generating apparatus that generates plasma in the atmosphere. These plasmas are developed for use in treating various skin diseases such as sterilization, sterilization, bacterial cell nucleus destruction, blood clotting and hemostasis, skin irritation and regeneration, removal of skin foreign substances, dental whitening treatment, athlete's foot, boil, skin cancer, . By increasing the amount of plasma emission and irradiating a plasma with a high energy, it can be used for surgical purposes to burn tissue of the human body.

As described above, the plasma jet apparatus used for medical use is required to have stability and safety because it directly irradiates plasma to the human body. Particularly, electric shock of the plasma due to the high voltage and heat generation of the electrode portion due to the plasma current have been a problem. The electric shock of the plasma jet device is solved by grounding the electrode of the jet device end. However, since the plasma current flows to the ground electrode at the end of the jet device electrode, high temperature is generated at the ground electrode. The high temperature at the end of the apparatus can not be used as a thermal shock due to the influence of high temperature in the process of irradiating the plasma jet to the human body and the living body. Therefore, such a thermal shock must be solved. Korean Patent No. 10-1001477 also discloses a constitution related to a bio-applied plasma source, but the design for heat dissipation is not particularly concerned.

The plasma jet apparatus for bio-application as described above uses various kinds of gas according to its use purpose.

That is, an inert gas, a molecular gas, a common atmosphere, and a mixed gas thereof are used. In the case of using a molecular gas, a general atmosphere, and a mixed gas, application of a higher high voltage is required for generating plasma as compared with a plasma jet apparatus using an inert gas. Such a high voltage becomes more serious about the problem of thermal shock caused by electric shock and heat.

 Accordingly, it is an object of the present invention to provide a bio-application plasma jet apparatus that solves electrical shock and thermal shock, thereby providing safety in use.

In order to achieve the above object, the present invention provides a medical plasma jet apparatus including a gas supply tube, a voltage application electrode, a glass tube, and a ground electrode. The details of the configuration related to this device are described in various forms in the prior patent application '10-2010-0119493', which can be referred to and incorporated herein.

The gas supply tube supplies gas necessary for plasma generation. In the case of a jet device using an inert gas, the plasma is easily generated since it is driven at a relatively low voltage (usually 1 to 2 kV). Plasma generation of molecular gases other than inert gas (N ₂ , O ₂ , etc.), general air and mixed gas (mixture of inert gas and molecular gas and general air) requires several times higher voltage than inert gas discharge Electrical shock and thermal shock problems of the plasma jet apparatus are serious. Wherein the voltage application electrode of the plasma jet source has a tubular shape and one side is connected to one end of the gas supply tube through which the gas is discharged and the other side connected to the one side is supplied from the gas supply tube to the one side, Gas is passed through and high voltage is applied. The glass tube surrounds the voltage application electrode exposed in the gas supply tube and extends downward from the lower end of the voltage application electrode. The ground electrode is formed at the end of the glass tube at the lower end of the voltage application electrode and generates plasma by discharging the gas passing through the voltage application electrode by interaction with the voltage application electrode.

In the plasma generator for medical use according to the present invention, plasma is generated between the high-voltage electrode and the ground electrode, and a problem of electrical shock and thermal shock is involved in the process of irradiating the living body with plasma.

The electric shock is generated by providing a high-voltage electrode inside and a ground electrode at the end of the device so that a ground electrode is provided at the contact portion with the living body. Ultimately, a plasma of a few mA or less, Investigate.

A thermal problem, however, is that a high temperature is generated inside the device and at the ground electrode part even if the operation time is prolonged even in a device operating at a low current. A separate heat dissipation function is installed as a solution to the thermal problem. There are three ways to consider heat dissipation. (i) providing a self-heat-dissipating function in the air by increasing the area of the ground electrode, (ii) separately injecting cold air, and (iii) providing a forced heat radiation function to circulate the cool liquid.

The medical plasma generator according to the present invention may further include a power supply unit for applying a low AC AC high voltage to the voltage application electrode.

In the medical plasma generator according to the present invention, the power supply unit includes a DC-AC inverter power supply unit which applies an AC voltage of several hundred V to several kV having a frequency of several kHz to several tens kHz.

In the medical-use plasma generating apparatus according to the present invention, a grounding electrode is installed at the lower or end of the lower end of the glass tube, including a portion of the gas supply tube to which the voltage applying electrode is bonded, And includes a glass tube and a wrapping cover.

In the medical-use plasma generating apparatus according to the present invention, a heat dissipating function is provided in the above-mentioned three ways in order to prevent a high temperature of a ground electrode or an internal electrode portion provided at an end portion of the lid.

According to the present invention, gases that can not be applied to a plasma jet apparatus of a conventional inert gas can be applied to a plasma jet apparatus. That is, a plasma jet using a mixed gas, a molecular gas, and an atmosphere can be implemented as a bio application.

In addition, according to the present invention, it is possible to provide an atmospheric pressure plasma jet apparatus free from electrical shock and thermal shock, thereby providing a highly safe plasma jet apparatus which is easy to apply to human bodies and living bodies.

That is, due to the specific configuration of the ground electrode, the driving voltage can be lowered, and there is no electric shock at all, and safety in use is very high.

In addition, since heat dissipation function is installed to prevent thermal shock that may occur during operation, stable operation is possible.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view of an atmospheric pressure plasma jet apparatus, and is a cross-sectional view taken along line (a) to (d) according to an electrode structure;
FIG. 2 is a cross-sectional view of a plasma jet apparatus having a self-extinguishing structure in the atmosphere of a ground electrode according to a first embodiment of the present invention, wherein (a) a jet device in which a high voltage electrode is provided inside a glass tube, and (b) Installed jet device, and (c) separation of parts.
FIG. 3 is a cross-sectional view of a plasma jet apparatus having an air-cooled heat dissipating structure by injecting low-temperature air into an electrode unit according to a second embodiment of the present invention, wherein (a) It is a jet device with a high voltage on the outside.
FIG. 4 is a cross-sectional view of a plasma jet apparatus having a water-cooled heat radiating structure of a cold water circulation type in an electrode unit according to a third embodiment of the present invention. FIG. 4 (a) It is a jet device with high voltage.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figures 1 (a) to 1 (d) illustrate electrode structures in particular, in cross-sectional views illustrating the structure of an atmospheric pressure plasma jet apparatus suitable for medical applications applicable to living organisms and skin. The electrode structure of the plasma jet apparatus can be considered in a wide variety of forms. Figures 1 (a) to 1 (d) show electrode structures that are biocompatible with low current and no electrical shock.

1 (a) and 1 (b), the structure of the voltage application electrode 100 for applying a voltage for generating plasma is a needle-like structure and is disposed inside the glass tube 200. The glass tube 200 shown in Fig. 1 (a) is manufactured so as to have its end rounded and its central portion to have an opening. That is, the plasma is released to the opening narrowed compared to the diameter of the glass tube body. The rear end of the voltage application electrode 100 is provided with an assembling step for assembling the Teflon tube 400, and the gas is injected through the Teflon tube 400. A ring-shaped ground electrode 300 is formed outside the glass tube 200 at the front end of the glass tube 200. By grounding the ground electrode 300, electric shock due to the plasma discharge voltage can be prevented. Such a plasma jet source is assembled in a housing 500 having a handleable design.

The difference between Fig. 1 (a) and Fig. 1 (b) lies in the position or structure of the ground electrode. 1 (a), the ground electrode 200 is formed along the outer periphery of the end of the glass tube 200. In FIG. 1 (b), the ground electrode 310 is separately formed and assembled to the end of the glass tube 200 . 1 (b), the diameter of the glass tube 200 does not need to be reduced, and the ground electrode 310 is formed in a cap shape having a narrow opening at the center and assembled to the end of the glass tube 200.

1 (c) and 1 (d) show that the voltage application electrodes 110 and 120 are not needle-shaped but ring-shaped or hollow cylinder-shaped, and their arrangement is also coupled to the outer circumferential surface of the glass tube 200. Voltage application electrodes 110 and 120 are surrounded by dielectrics 600 and 610. 1C, the ground electrode 300 is also formed on the outer side of the end of the glass tube 200 and surrounded by the dielectric 600. The dielectric is sandwiched between the voltage application electrode 110 and the ground electrode 300, Thereby preventing the discharge from occurring. In the case of Fig. 1 (d), only the voltage applying electrode 120 is surrounded by the dielectric 610, and the ground electrode 320 is separately formed and coupled to the end of the glass tube 200. Here, the holes at the centers of the ground electrodes 310 and 320 in FIGS. 1 (b) and 1 (d) are formed to be smaller than the diameter of the glass tube 200.

The operating characteristics of each of the plasma jet sources disclosed in Figs. 1 (a) to 1 (d) are as follows.

Fig. 1 (a) to Fig. 1 (d) can be regarded as a source electrode structure of a plasma jet mainly suitable for discharge of an inert gas (He, Ne, Ar, etc.). In FIG. 1 (a) and FIG. 1 (b), the voltage applying electrode 100 can be easily configured with a common syringe needle.

A predetermined discharge gas is injected through the Teflon tube 400 assembled at the rear end of the glass tube 200 and the discharge gas is injected into the voltage application electrode 100. The discharge gas is injected into the voltage application electrode 100 for the plasma discharge, Type high voltage is applied.

1 (a), a ring-shaped ground electrode 300 is provided outside the end portion of the glass tube 200, and the injected gas is discharged by the electric field formed between the voltage applying electrode 100 and the ground electrode 200 A plasma jet is generated at the end opening of the glass tube 200.

In this embodiment, the application of the high voltage is mainly performed by applying a DC-AC inverter that oscillates at a frequency of several tens kHz.

The experimental results of this embodiment are as follows.

The discharge voltage of the inert gas in the electrode structure ranges from 1 to 3 kV. The length of the plasma jet emitted from the end of the glass tube 200 has a length of several millimeters to several centimeters. The plasma jet emitted from the end of the glass tube using these inert gases has no electric shock or thermal shock. Thus exhibiting a fairly safe and stable operation.

1C is a plan view of a glass tube 200 in which a ground electrode 300 is provided at a predetermined interval from a voltage applying electrode 110 to which a high voltage is applied to the outside of the glass tube 200. In order to prevent discharge between the two electrodes, 600) is applied. However, despite the dielectric layer 600 being applied between the spaced apart electrodes, this electrode structure is limited to the discharge of the inert gas. The discharge of the ordinary atmosphere, the molecules and the mixed gas requires a high voltage of at least 5 kV or more, and a high temperature is generated so that the glass tube 200 easily melts. In this case, the plasma jet source of FIG. Do.

1 (d), a voltage applying electrode 120 for applying a high voltage is provided outside the glass tube 200, and the ground electrode 320 is installed at the end of the glass tube 200 in an insertion manner do. The plasma is emitted from the center hole of the ground electrode, and the applied voltage required for discharging the same gas (inert gas or air, molecules, and mixed gas) is at least several hundred V to several kV lower than the configuration of FIG. 1C . Although the generated heat of the electrode portion is relatively low in comparison with the configuration of FIG. 1 (c) even at a low current of 1 mA or less, it is difficult to avoid thermal shock at the time of applying the living body due to generation of heat of 40 ° C or more.

That is, as described above, the plasma jet apparatus of Figs. 1 (a) to 1 (d) has a structure in which there is no electric shock in the low current region, but all of them have a thermal shock even at a low current of several mA or less can not avoid. Therefore, it is impossible to apply to living body and human body.

In other words, when an atmospheric or molecular gas (oxygen, steam, nitrogen, etc.) and a mixed gas other than an inert gas are used in the structures of FIGS. 1A to 1D, the discharge voltage is a high voltage of 5 to 10 kV And the temperature of the end portion of the glass tube 200 becomes several hundreds of degrees Celsius, and the glass tube is melted due to the high temperature. When such a plasma is irradiated to a human body, an electric shock due to a high voltage is accompanied and a thermal shock is also involved. Therefore, it has been experimentally confirmed that the structure shown in Figs. 1 (a) to 1 (d) can not be used for a discharge gas other than an inert gas.

Accordingly, the present inventors constructed a more improved plasma jet source as follows. That is, the configuration of the ground electrode 330 in FIGS. 2 (a) and 2 (b) can operate with a lower applied voltage and is made to be heat-dissipating in itself.

2 (a) is similar to FIG. 1 (a) in that the structure of the voltage applying electrode 100 is needle-shaped and assembled in the glass tube 200. The ground electrode 330 is formed in a cone shape having a plasma emitting opening at its center and is coupled to the housing 500 and assembled to the end of the glass tube 200 with a plasma emitting opening. It is preferable that the plasma discharge opening of the cone-shaped ground electrode 330 is formed to be smaller than the diameter of the glass tube 200.

The cone-shaped ground electrode 330 is formed with a plurality of holes for heat radiation on the entire body, as shown in a plasma source exploded perspective view (an exploded perspective view of FIG. 2 (a)) of FIG. 2 (c). That is, the cone-shaped ground electrode 330 has a large surface area and a plurality of holes are formed on the cone-shaped surface, so that the ground electrode 330 as a whole has a heat radiation function by itself. As a result of the plasma treatment experiment through the plasma jet source having the ground electrode 330 of this type, the surface temperature of the ground electrode 330 was maintained at 40 ° C or lower. Therefore, the plasma jet source of Fig. 2 (a) can be applied to a living body.

2 (b), the configuration of the voltage applying electrode 120 is the same as that shown in FIG. 1 (d), but the ground electrode 330 is composed of the cone-shaped ground electrode of FIG. 2 (c).

When the plasma jet source of FIGS. 2 (a) and 2 (b) is operated, a plasma current flows directly to the ground electrode 330. 2 (a) and 2 (b) show a plasma jet for discharging atmospheric (general air), molecular gas (N ₂ , O ₂ , CO ₂ , etc.), and mixed gas (mixture of air and molecular gas) Electrode structures. The injection of general air uses a compressor. In the structure of the ground electrode 330, the discharge voltage is 2 to 3 kV based on the general air. However, the length of the plasma emitted from the end of the glass tube 200 is several millimeters or less, which is relatively shorter than that of the inert gas discharge plasma in the structure of FIG. 1 (a). However, this structure has no electric shock even when the plasma is irradiated to the human body in which the plasma current is emitted in the range of several mA. Further, there is no electric shock by the ground electrode 330. In addition, as described above, the ground electrode 330 of the heat dissipating structure prevents the thermal shock.

Thus, the plasma jet source of Fig. 2 (a) is suitable for discharge of a general atmosphere or for discharge of molecules and mixed gas. As a result of comparing the heat generation of the ground electrode 330 of FIG. 1 (b) with that of FIG. 2 (a), the plasma jet source of FIG. 2 (a) ≪ / RTI > The results of the heat dissipation test of Fig. 2 (b) were also the same as those of Fig. 2 (a).

2 (a) and 2 (b) are natural heat dissipation schemes according to the ground electrode structure, while FIGS. 3 (a) and 3 (b) Are embodiments having a water-cooling heat-dissipating function.

3 (a) and 3 (b) show a plasma jet source including an air-cooled heat dissipating device.

The voltage applying electrode 100 of FIG. 3A is assembled into a glass tube 200 as a needle-like electrode, and the ground electrode 350 is configured in a cone shape. The cone-shaped ground electrode 350 has a hole at its center to discharge plasma, and the hole diameter is formed to be smaller than the diameter of the glass tube 200. Further, a hole 370 through which cool air can be circulated is formed in addition to the center hole.

The tube 400 made of Teflon is installed as a gas discharge tube for plasma discharge, and a cold air injection tube 700 for further heat radiation is further installed. If cool air is injected through the cool air injection pipe 700, the temperature of the ground electrode 350 can be kept below the room temperature even if the plasma discharge continues. Cool air was maintained at 20 to 25 占 폚 during plasma jet source operation when injected with a temperature of 10 占 폚 or less, preferably 4 to 5 占 폚 or less. The cold air supply can be performed using air cooled to a low temperature, and more preferably, it can be supplied using dry ice. In the case of using dry ice, the temperature of the ground electrode is further lowered during the operation of the plasma jet source, so that the cold plasma state can be maintained.

3 (b), the structure of the voltage applying electrode 120 is substantially the same as that of FIG. 3 (a), but the structure of the voltage applying electrode 120 is formed outside the glass tube 200 and surrounded by the dielectric 610 . The operating temperature of the plasma jet source of FIG. 3 (b) could also be kept below room temperature by cold injection.

4 (a) and 4 (b) show a plasma jet source including a water-cooled heat dissipating device.

4A and 4B are substantially the same as those in FIGS. 3A and 3B, but the cold electrode circulation hole 370 is not provided in the ground electrode 380. FIG. This is because it is water-cooled and does not require a separate hole. In addition, since it is a water-cooled type, a cooling water inlet 810 and a circulation outlet 820 for cooling water are provided, and these are the ends of the hose or the tube. The hose can be wrapped around the glass tube 200 of FIG. 4 (a) and wound onto the dielectric 610 in FIG. 4 (b).

In this water-cooled heat dissipation structure, cooling water of about 4 캜 is injected and circulated, and the temperature of the ground electrode 380 can be maintained at 20 캜 or lower during operation. It is possible to provide a plasma at room temperature by circulating cooling water generally at 10 ° C or lower.

As described above, the plasma jet source according to the present embodiment has an electrode structure having an electrical safety and a heat dissipation function, so that various molecular gases can be introduced into the plasma discharge gas as needed, thereby enabling more efficient treatment. Plasma discharges of molecular gases generate more diverse active species, which can have a great effect on medical and cosmetic procedures.

The plasma jet generating apparatus of the present invention can be easily applied to a doping apparatus requiring a high current (several mA or several tens of mA) and a plasma jet apparatus for metal and non-metal surface treatment in addition to bio and medical applications. It is self-evident to belong.

It is apparent that the present invention is not limited to the above-described embodiment, and that various applications and modifications can be made by those skilled in the art to which the present invention belongs.

100, 110, 120: voltage applying electrode
200: Glass tube
300, 310, 320, 330, 350, 380: ground electrode
370: hole
400: (Teflon) tube
500: housing
600, 610: Dielectric
700: Cold injection pipe
810: Cooling water inlet
820: Cooling water outlet

Claims (9)

A gas supply tube for supplying a plasma discharge gas;
A needle-shaped voltage application electrode which is connected to one end of the gas supply tube and through which gas supplied from the gas supply tube is passed and a voltage for plasma discharge is applied;
A glass tube extending around the voltage applying electrode joined to the gas supply tube and having an opening narrower than a diameter of the glass tube body to form a plasma discharge port;
And a ground electrode formed in a ring shape at an outer end of the glass tube and grounded to generate an electric field with the voltage application electrode to generate plasma by discharging the plasma discharge gas,
Wherein the plasma discharge gas is at least one of an inert gas, a molecular gas, a general air, or a mixed gas. A gas supply tube for supplying a plasma discharge gas;
A needle-shaped voltage application electrode which is connected to one end of the gas supply tube and through which gas supplied from the gas supply tube is passed and a voltage for plasma discharge is applied;
A glass tube which surrounds the voltage application electrode joined to the gas supply tube;
And a ground electrode which is assembled at an outer end of the glass tube and is formed in a cap shape having an opening at the center thereof and grounded to generate an electric field with the voltage application electrode to generate plasma by discharging the plasma discharge gas and,
Wherein the plasma discharge gas is at least one of an inert gas, a molecular gas, a general air, or a mixed gas. A gas supply tube for supplying a plasma discharge gas;
A glass tube joined to and extending from the gas supply tube;
A voltage application electrode formed on the outer surface of the glass tube as a hollow cylinder;
A ground electrode formed on the outer surface of the glass tube in a ring shape at an interval from the voltage application electrode; And
And a dielectric surrounding the voltage application electrode and the ground electrode formed at the outer end of the glass tube and filling the gap between the two electrodes to insulate the electrodes from each other,
Wherein the plasma discharge gas is at least one of an inert gas, a molecular gas, a general air, or a mixed gas. A gas supply tube for supplying a plasma discharge gas;
A glass tube joined to and extending from the gas supply tube;
A voltage application electrode formed on the outer surface of the glass tube as a hollow cylinder;
A ground electrode formed on the outer surface of the glass tube in a ring shape at an interval from the voltage application electrode; And
And a ground electrode which is assembled at an outer end of the glass tube and is formed in a cap shape having an opening at the center thereof and grounded to generate an electric field with the voltage application electrode to generate plasma by discharging the plasma discharge gas and,
Wherein the plasma discharge gas is at least one of an inert gas, a molecular gas, a general air, or a mixed gas. housing;
A gas supply tube for supplying a plasma discharge gas extending from the rear end of the housing toward the front end and disposed in the housing;
A needle-shaped voltage application electrode which is connected to one end of the gas supply tube and through which gas supplied from the gas supply tube is passed and a voltage for plasma discharge is applied;
A glass tube which surrounds the voltage application electrode joined to the gas supply tube;
And a cone-shaped ground electrode which is formed at the outer end of the glass tube and which is assembled and grounded at an end of the housing and generates an electric field with the voltage application electrode to generate a plasma by discharging the plasma discharge gas,
The cone type ground electrode has a plasma discharge hole at the center and a plurality of heat dissipation holes in the entire cone type body,
Wherein the plasma discharge gas is at least one of an inert gas, a molecular gas, a general air, or a mixed gas. housing;
A gas supply tube for supplying a plasma discharge gas extending from the rear end of the housing toward the front end and disposed in the housing;
A glass tube which surrounds the voltage applying electrode joined to the gas supplying tube;
A voltage application electrode formed on the outer surface of the glass tube as a hollow cylinder;
And a cone-shaped ground electrode which is formed at the outer end of the glass tube and which is assembled and grounded at an end of the housing and generates an electric field with the voltage application electrode to generate a plasma by discharging the plasma discharge gas,
The cone type ground electrode has a plasma discharge hole at the center and a plurality of heat dissipation holes in the entire cone type body,
Wherein the plasma discharge gas is at least one of an inert gas, a molecular gas, a general air, or a mixed gas. The bio-based plasma jet source as set forth in claim 5 or 6, further comprising a cool air injection pipe for piping into the housing, wherein the heat radiation of the plasma jet source is air-cooled. housing;
A gas supply tube for supplying a plasma discharge gas extending from the rear end of the housing toward the front end and disposed in the housing;
A needle-shaped voltage application electrode which is connected to one end of the gas supply tube and through which gas supplied from the gas supply tube is passed and a voltage for plasma discharge is applied;
A glass tube which surrounds the voltage applying electrode joined to the gas supplying tube;
A cone-shaped ground electrode formed in a shape of a cone at an outer end of the glass tube and assembled and grounded at an end of the housing to generate an electric field with the voltage application electrode to generate plasma by discharging the plasma discharge gas; And
And a hose for injecting cooling water which extends into the housing and is piped out of the housing again around the ground electrode to supply cooling water,
Wherein the cone-shaped ground electrode has a hole for emitting plasma at its center,
Wherein the plasma discharge gas is at least one of an inert gas, a molecular gas, a general air, or a mixed gas. housing;
A gas supply tube for supplying a plasma discharge gas extending from the rear end of the housing toward the front end and disposed in the housing;
A glass tube which surrounds the voltage applying electrode joined to the gas supplying tube;
A voltage application electrode formed on the outer surface of the glass tube as a hollow cylinder;
A cone-shaped ground electrode which is formed at the outer end of the glass tube and which is assembled and grounded at the end of the housing and which forms an electric field with the voltage application electrode to generate a plasma by discharging the plasma discharge gas;
And a hose for injecting cooling water which extends into the housing and is piped out of the housing again around the ground electrode to supply cooling water,
Wherein the cone-shaped ground electrode has a hole for emitting plasma at its center,
Wherein the plasma discharge gas is at least one of an inert gas, a molecular gas, a general air, or a mixed gas.

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