KR20200143108A - Remote plasma and rf stimulation complex treatment device - Google Patents

Abstract

The purpose of the present invention is to provide a combined treatment apparatus of remote plasma and radio frequency (RF) stimulation, which treats the skin surface and the skin core in a complex manner by using remote plasma and RF stimulation. According to one embodiment of the present invention, the combined treatment apparatus of remote plasma and RF stimulation comprises: a remote plasma processing unit which generates dielectric barrier discharge plasma by using an inlet passage through which a discharge gas is introduced, a high-voltage electrode provided at one side of the inlet passage, and a ground electrode provided at one side of the high-voltage electrode, and then discharges the plasma through a discharge port; and an RF stimulation unit which is provided at the side of the discharge port, passes the plasma through an RF electrode to supply the same to the skin surface, and generates an RF source by using an RF generator connected to the RF electrode so as to apply an RF stimulation to the skin core through the RF electrode.

Description

Remote plasma and radio frequency stimulation combined treatment device {REMOTE PLASMA AND RF STIMULATION COMPLEX TREATMENT DEVICE}

The present invention relates to a skin treatment device, and more particularly, to a combination treatment device of remote plasma and radio frequency stimulation that treats the skin surface and deep skin in combination using remote plasma and radio frequency stimulation. About.

It is known that plasma and radio frequency (RF) energy are used in the treatment of skin diseases. As an example, a plasma skin regeneration device of Korean Patent No. 1226332 is disclosed.

Plasma skin regeneration device consists of an electrode having a dome shape at the end and an electrode ring separated by a predetermined distance from the end of the electrode, generating a ring-shaped plasma stably and continuously, i.e., RF power as an energy source. By generating glow plasma, the skin surface is treated.

In addition, a radio frequency treatment apparatus for skin tissue having an impact-free handpiece of Korean Patent Application Publication No. 2019-0025499 is disclosed. The radio frequency treatment apparatus includes an electrode in contact with the skin to receive RF energy from an RF generator and supply the received RF energy to the skin, and apply RF energy to the skin tissue of a patient to improve the appearance of the skin tissue.

The plasma skin regeneration device treats the skin surface with plasma, and the radio frequency treatment device improves the appearance of skin tissue with RF energy. However, these devices only treat or improve the surface of the skin and have limitations in that they cannot treat the deep part of the skin.

It is an object of the present invention to provide a combined treatment apparatus of remote plasma and radio frequency stimulation for complexly treating the skin surface and deep skin by using remote plasma and radio frequency stimulation.

A combined treatment apparatus for remote plasma and radio frequency stimulation according to an embodiment of the present invention includes an inlet passage for introducing a discharge gas, a high voltage electrode provided on one side of the inlet passage, and a ground electrode provided on one side of the high voltage electrode. A remote plasma processing unit that generates plasma of the dielectric barrier discharge and discharges the plasma through the discharge port; And it is provided on the discharge port side, the plasma is supplied to the surface of the skin by passing through a radio frequency (RF) electrode, and a radio frequency source is generated by a radio frequency generator connected to the radio frequency electrode to generate a radio frequency through the radio frequency electrode. It includes a radio frequency stimulation unit for applying the frequency stimulation to the deep portion of the skin.

The remote plasma processing unit may treat the surface of the skin as a treatment target facing the discharge port with plasma.

The radio frequency stimulation unit may treat a deep portion of the skin to be treated in contact with the radio frequency electrode through radio frequency stimulation.

The combined treatment apparatus for remote plasma and radio frequency stimulation according to an embodiment of the present invention further includes a body to which the remote plasma processing unit and the radio frequency electrode are mounted, and the body may be formed of a dielectric material.

The inflow passage is formed in the center of the body in a longitudinal direction, the ground electrode is embedded in the body from the rear of the radio frequency electrode to the outside of the inflow passage, and the high voltage electrode is introduced from the rear of the ground electrode. It can be placed inside the passage.

The discharge port may pass through the radio frequency electrode and be connected to the inflow passage.

The combined treatment apparatus for remote plasma and radio frequency stimulation according to an embodiment of the present invention comprises a housing generated in the plasma by forming a discharge passage on the outside of the body to treat the surface of the skin and discharge residual ozone. It may contain more.

The discharge port is formed in the radial center of the radio frequency electrode and extends in the extension direction of the inflow passage, and the radio frequency electrode is generated from the plasma discharged through the discharge port to treat the surface of the skin and remove residual ozone. Induction grooves may be further provided to connect the discharge port to the discharge passage so as to guide the discharge passage.

The combined treatment apparatus for remote plasma and radio frequency stimulation according to an embodiment of the present invention includes a body mounted with the radio frequency electrode and having a discharge passage in a longitudinal direction at a center in a radial direction, and the outer side in a radial direction of the body It may further include a housing disposed with an inlet passage.

The remote plasma processing unit may be mounted on the body and the housing forming the inflow passage to treat the surface of the skin generated by the plasma and discharge remaining ozone through the discharge passage.

The ground electrode may be embedded in the housing from the rear of the radio frequency electrode and outside the inflow passage, and the high voltage electrode may be disposed in the body inside the inflow passage behind the ground electrode.

The discharge port may be connected to the inflow passage and formed between the body and the housing to discharge the plasma.

The radio frequency electrode is mounted on the discharge passage side of the body and may include a connector and guide grooves connecting the discharge port to the discharge passage so as to guide ozone generated from plasma discharged through the discharge port to the discharge passage.

The combined treatment apparatus for remote plasma and radio frequency stimulation according to an embodiment of the present invention may further include an ozone decomposition catalyst connected to the discharge passage to decompose the ozone.

The combined treatment apparatus for remote plasma and radio frequency stimulation according to an embodiment of the present invention may further include a heater disposed in front of the ozone decomposition catalyst to remove moisture contained in the discharged gas.

The discharge port is formed at an end of the inflow passage in the extending direction, and the radio frequency electrode is generated from the plasma discharged through the discharge port to treat the surface of the skin and guide the remaining ozone to the discharge passage. It is formed in the discharge port can be connected to the discharge passage.

The combined treatment apparatus for remote plasma and radio frequency stimulation according to an embodiment of the present invention comprises a first housing forming an inflow passage outside the body, and a discharge passage forming an outlet passage outside the second housing in the plasma. A second housing that is generated to treat the surface of the skin and discharge residual ozone may be further included, and the discharge port may be formed at an end of the inflow passage in the extending direction.

The radio frequency electrode is disposed at the center of the body in the radial direction, and the second housing is generated from the plasma discharged through the discharge port to treat the surface of the skin and guide the remaining ozone to the discharge passage. It can be connected to the discharge passage.

As described above, according to an exemplary embodiment of the present invention, since the remote plasma processing unit and the radio frequency stimulation unit are provided together, the skin surface and the deep area may be combinedly treated by using the remote plasma and radio frequency stimulation.

1 is a cross-sectional view of a combined treatment apparatus for remote plasma and radio frequency stimulation according to a first embodiment of the present invention.
2 is a cross-sectional view of an apparatus for treating a combination of remote plasma and radio frequency stimulation according to a second embodiment of the present invention.
3 is a cross-sectional view taken along line III-III of FIG. 2.
4 is a cross-sectional view of an apparatus for treating a combination of remote plasma and radio frequency stimulation according to a third embodiment of the present invention.
5 is a cross-sectional view of a combined treatment apparatus for remote plasma and radio frequency stimulation according to a fourth embodiment of the present invention.
6 is a cross-sectional view of a combined treatment apparatus for remote plasma and radio frequency stimulation according to a fifth embodiment of the present invention.
7 is a cross-sectional view of a combined treatment apparatus for remote plasma and radio frequency stimulation according to a sixth embodiment of the present invention.
8 is a cross-sectional view of an apparatus for treating a combination of remote plasma and radio frequency stimulation according to a seventh embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those of ordinary skill in the art may easily implement the present invention. However, the present invention may be implemented in various different forms and is not limited to the embodiments described herein. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and the same reference numerals are assigned to the same or similar components throughout the specification.

1 is a cross-sectional view of a combined treatment apparatus for remote plasma and radio frequency stimulation according to a first embodiment of the present invention. Referring to FIG. 1, the complex treatment apparatus 1 (hereinafter, referred to as “complex therapy apparatus”) of remote plasma and radio frequency stimulation according to the first embodiment has two functions, namely, a remote plasma processing unit 10 and a radio frequency stimulation unit. (20) is formed by compounding it into one hand piece.

The complex treatment apparatus 1 according to the first embodiment includes a remote plasma processing unit 10 to treat the surface of the skin S and the deep part of the skin S in a complex manner with a remote plasma P and radio frequency stimulation. ) And a radio frequency stimulation unit 20.

The remote plasma processing unit 10 is configured to supply the remote plasma P, which is discharged through the discharge port 23 by generating plasma by dielectric barrier discharge, to the surface of the skin S. For example, the remote plasma processing unit 10 includes an inlet passage 11 through which discharge gas is introduced, a high voltage electrode 12 provided on one side of the inlet passage 11, and a ground provided on one side of the high voltage electrode 12 It includes an electrode 13.

The high voltage electrode 12 and the ground electrode 13 generate a remote plasma P as a discharge gas by a driving voltage (eg, AC voltage or pulse voltage). When the remote plasma processing unit 10 generates the remote plasma P, ozone is generated. Ozone is an object to be removed due to inhalation toxicity after it acts on the skin and is used for treatment.

The other side of the inflow passage 11 (eg, the opposite side to which the discharge gas is introduced) is configured to supply the generated remote plasma P to the surface of the skin S. That is, the remote plasma processing unit 10 treats the surface of the skin S to be treated facing the outlet 23 connected to the inflow passage 11 with the remote plasma P.

The radio frequency stimulation unit 20 is configured to generate RF (radio frequency, electrical stimulation in the range of 1 to 200 MHz) to apply radio frequency stimulation (energy) to the deep part of the skin (S). For example, the radio frequency stimulation unit 20 includes a radio frequency (RF) electrode 21 and a radio frequency generator 22 connected to the radio frequency electrode 21.

The radio frequency generator 22 generates a radio frequency source and supplies it to the radio frequency electrode 21. The radio frequency (RF) electrode 21 is configured to pass through the remote plasma P generated by the remote plasma processing unit 10 inside (or outside (see FIG. 2 )).

The radio frequency stimulation unit 20 is treated by applying radio frequency stimulation to the deep portion of the skin S, which is a treatment target, in contact with the radio frequency electrode 21. The radio frequency stimulation unit 20 is formed in a convex curved surface toward the skin (S) to protect the skin (S) in contact.

In addition, the complex treatment apparatus 1 of the first embodiment further includes a body 30 to mutually couple the remote plasma processing unit 10 and the radio frequency stimulation unit 20. The body 30 is equipped with a remote plasma processing unit 10 and a radio frequency electrode 21 of the radio frequency stimulation unit 20.

As an example, the inflow passage 11 of the remote plasma processing unit 10 is formed to penetrate the body 30 in the longitudinal direction in the radial center, and the ground electrode 13 is an inflow passage from the rear of the radio frequency electrode 21 It is built into the body 30 for setting (11), and the high voltage electrode 12 is disposed inside the inflow passage 11 from the rear of the ground electrode 13.

That is, the ground electrode 13 is embedded in the body 30, and the high voltage electrode 12 is installed in the inflow passage 11 through the holder 14 to be spaced apart from the inner surface of the inflow passage 11. The body 30 is formed of a dielectric material and fills the ground electrode 13 to implement dielectric barrier discharge. In addition, although not shown, for dielectric barrier discharge, the high voltage electrode 12 may be filled with a dielectric.

The holder 14 has a connection passage 141 connected to the inflow passage 11 while fixing the high voltage electrode 12 in the inflow passage 11, so that the discharge gas can flow into the inflow passage 11 Let's do it.

Discharge gas is supplied to the inflow passage 11, and when the driving voltage is applied to the high voltage electrode 12 while the ground electrode 13 is electrically grounded, it is set between the high voltage electrode 12 and the ground electrode 13 As the discharge gas is discharged in the form of a dielectric barrier discharge in the discharge gap G, a remote plasma P is generated through the discharge of plasma.

The radio frequency electrode 21 of the radio frequency magnetic pole unit 20 is connected to the inflow passage 11 to form a discharge port 23 for discharging the remote plasma P. That is, the discharge port 23 passes through the radio frequency electrode 21 and is connected to the inflow passage 11 to discharge the remote plasma P.

The radio frequency electrode 21 is connected to the radio frequency generator 22 through the interior of the body 30 to receive a radio frequency source, and applies radio frequency energy to the deep part of the skin S to be treated. Radiofrequency energy acting on the deep part can directly activate the cells of the skin (S).

That is, the discharge gas flowing into the inflow passage 11 generates the remote plasma P in the remote plasma processing unit 10, and the generated remote plasma P is the inlet passage 11 and the discharge port by the discharge gas continuously flowing in. It is discharged and sprayed to the surface of the skin (S) while sequentially passing through (23).

The discharge port 23 may be set to be at least a size larger than the diameter of the inlet passage 11 so as not to interfere with the discharge of the remote plasma P discharged through the inlet passage 11. That is, the radio frequency electrode 21 having the discharge port 23 applies a radio frequency stimulus to the deep part of the skin S, and the remote plasma (P) on the surface of the skin S through the inlet passage 11 and the discharge port 23 ) To be able to supply.

The radio frequency generated by the operation of the radio frequency generator 22 regenerates and treats the deep part of the skin S through the radio frequency electrode 21 in contact with the skin S. In addition, the remote plasma P generated by driving of the remote plasma processing unit 10 is sprayed onto the surface of the skin S to treat the surface. That is, the remote plasma (P) directly acts on the surface of the skin (S) to effectively treat diseases of the skin (S).

As described above, in the first embodiment, the skin (S) surface is treated with the remote plasma (P) of the remote plasma processing unit 10, and the skin (S) in contact with the radio frequency electrode 21 of the radio frequency stimulation unit 20 The deep part of the body is treated complexly.

Hereinafter, various embodiments of the present invention will be described. By comparing various embodiments with the first embodiment or the previously described embodiments, descriptions of the same components will be omitted, and different components will be described.

2 is a cross-sectional view of an apparatus for treating a combination of remote plasma and radio frequency stimulation according to a second embodiment of the present invention, and FIG. 3 is a cross-sectional view taken along line III-III of FIG. 2. 2 and 3, the complex treatment apparatus 2 of the second embodiment further includes a housing 40.

The housing 40 is configured to discharge ozone generated from the remote plasma P by forming a discharge passage 41 outside the body 30. The radio frequency electrode 221 of the radio frequency magnetic pole unit 220 has a discharge port 223 in a direction extending from the center in the radial direction to the inflow passage 11 (up and down in FIG. 2 ).

In addition, the radio frequency electrode 221 is a guide groove connecting the discharge port 223 to the discharge passage 41 to guide ozone contained in the remote plasma jet (PJ) discharged through the discharge port 223 to the discharge passage 41 It has (24). The guide grooves 24 are formed in plural and are radially arranged in a radial direction around the discharge port 223.

When the radio frequency electrode 221 touches the skin, the induction grooves 24 radially induce ozone contained in the remote plasma jet PJ discharged to the discharge port 223, that is, to the discharge passage 41 It enables effective emission of ozone.

Discharge gas is supplied to the inflow passage 11, and when the driving voltage is applied to the high voltage electrode 12 while the ground electrode 13 is electrically grounded, it is set between the high voltage electrode 12 and the ground electrode 13 As the discharge gas discharges the dielectric barrier in the discharge gap G, a remote plasma P is generated.

The radio frequency electrode 221 of the radio frequency magnetic pole unit 220 discharges the remote plasma jet PJ to the discharge port 223 connected to the inflow passage 11. At this time, the guide grooves 24 connected to the discharge port 223 radially guide the ozone contained in the remote plasma P and the remote plasma jet PJ to be discharged through the discharge passage 41.

Ozone is discharged through the guide grooves 24 and the discharge passage 41 at the same time as the skin (S) treatment. That is, radio frequency energy acts on the deep part of the skin (S) by the radio frequency electrode 221 received from the radio frequency source to treat the deep part of the skin (S), and the remote plasma jet generated by the remote plasma processing unit 10 ( PJ) is ejected onto the skin (S) surface to treat the skin (S) surface.

At this time, the radio frequency electrode 221 protrudes more than the end of the housing 40 by the first step S1, and the induction grooves 24 are recessed by the second step S2 than the end of the housing 40. have.

Therefore, the remote plasma jet PJ discharged to the discharge port 223 treats the surface of the skin S, and by the flow of the discharge gas, the waste gas and ozone after the skin treatment are discharged through the guide grooves 24 ( 41), it can be discharged smoothly.

4 is a cross-sectional view of a combined treatment apparatus for remote plasma and radio frequency stimulation according to a third embodiment of the present invention. Referring to FIG. 4, in the complex treatment apparatus 3 of the third embodiment, the body 330 is equipped with a radio frequency electrode 221 and includes a discharge passage 341 in the longitudinal direction at the center in the radial direction.

The housing 340 is disposed with an inflow passage 311 outside the body 330 in the radial direction. That is, the inflow passage 311 is set at a distance between the inner surface of the housing 340 and the outer surface of the body 330. The remote plasma processing unit 310 is mounted on the body 330 and the housing 340 forming the inflow passage 311, is generated from the remote plasma P, treats the surface of the skin S, and discharges residual ozone. It makes it possible to discharge through the passage 341.

In the remote plasma processing unit 310, the ground electrode 313 is built in the housing 340 forming the outer periphery of the inflow passage 311 behind the radio frequency electrode 221, and the high voltage electrode 312 is a ground electrode ( It is disposed in the body 330 forming the interior of the inflow passage 311 from the rear of the 313. The high voltage electrode 312 and the ground electrode 313 form a discharge gap G3 in the inflow passage 311.

Although one side of the high voltage electrode 312 and the ground electrode 313 are exposed, they may be buried in the body 330 and the housing 340, respectively. For dielectric barrier discharge, the body 330 and the housing 340 may be formed of a dielectric material.

The body 330 and the housing 340 are connected to the inlet passage 311 to form a discharge port 323 between the end of the inlet passage 311 so as to discharge the remote plasma jet PJ. That is, the discharge port 323 is connected to the inflow passage 311 and formed between the body 330 and the housing 340 at the ends of the body 330 and the housing 340 so as to discharge the plasma jet PJ.

The radio frequency electrode 221 of the radio frequency magnetic pole unit 220 has a connector 324 in the center of the radial direction, and further includes induction grooves 325. The guide grooves 325 are formed in plural and are radially arranged in a radial direction around the connector 324.

The guide grooves 325 are generated from the remote plasma jet (PJ) discharged to the discharge port 323 to guide the remaining ozone after treatment of the skin (S) to the discharge passage 341 along with the waste gas. Connect to (341).

When the radio frequency electrode 221 contacts the skin, the guide grooves 325 and the connector 324 radially guide ozone contained in the remote plasma jet PJ discharged to the discharge port 323, that is, the discharge passage ( 341) to enable effective emission of ozone.

Discharge gas is supplied to the inflow passage 311, and when the driving voltage is applied to the high voltage electrode 312 while the ground electrode 313 is electrically grounded, it is set between the high voltage electrode 312 and the ground electrode 313 As the discharge gas discharges the dielectric barrier in the discharge gap G3, remote plasma P is generated.

The radio frequency electrode 221 of the radio frequency stimulation unit 220 discharges the remote plasma jet PJ to the discharge port 323 connected to the inflow passage 311. At this time, the guide grooves 325 and the connector 324 connected to the discharge port 323 treat the ozone contained in the remote plasma (P) and the remote plasma jet (PJ) after the skin (S) treatment, and then radially induce and discharge it. Discharge through the passage 341.

Ozone is discharged through the guide grooves 325, the connector 324, and the discharge passage 341 at the same time as the skin (S) treatment. That is, radio frequency energy is applied to the deep part of the skin (S) by the radio frequency electrode 221 receiving the radio frequency source to treat the deep part of the skin (S), and the remote plasma jet generated by the remote plasma processing unit 310 ( PJ) is ejected onto the skin (S) surface to treat the skin (S) surface.

At this time, the radio frequency electrode 221 protrudes more than the end portion of the housing 40 by the first step S31, and the induction grooves 325 are further depressed by the second step S32 than the end portion of the housing 40 Has been.

The remote plasma jet (PJ) discharged to the discharge port 323 treats the surface of the skin (S), and the waste gas and ozone after the skin treatment are treated by the discharge gas flow through the guide grooves 325 and the connector 324 It can be discharged smoothly by being connected to the discharge passage 341.

5 is a cross-sectional view of a combined treatment apparatus for remote plasma and radio frequency stimulation according to a fourth embodiment of the present invention. Referring to FIG. 5, the composite treatment device 4 of the fourth embodiment further includes an ozone decomposition catalyst 60 in the composite treatment device 3 of the third embodiment.

When the ozone decomposition catalyst 60 is connected to the discharge passage 341, a remote plasma (P) is generated to treat the skin (S) with a remote plasma jet (PJ), it is generated together with the remote plasma (P) to treat the skin (S). After that, ozone contained in the waste gas is supplied to the discharge passage 341 and decomposed. That is, ozone is reduced to harmless oxygen in the ozone decomposition catalyst 60 and discharged to the outside.

Although not shown, the ozone decomposition catalyst may be connected to the discharge passage 41 of the complex treatment apparatus 2 of the second embodiment to decompose ozone generated together with the remote plasma P.

6 is a cross-sectional view of a combined treatment apparatus for remote plasma and radio frequency stimulation according to a fifth embodiment of the present invention. Referring to FIG. 6, the composite treatment device 5 of the fifth embodiment further includes a heater 61 for removing moisture from the ozone decomposition catalyst 60 of the composite treatment device 4 of the fourth embodiment.

The heater 61 is disposed in front of the ozone decomposition catalyst 60 to remove moisture contained in the gas discharged through the discharge passage 341, thus preventing deterioration of the ozone decomposition performance in the ozone decomposition catalyst 60, and Enables effective decomposition of

Although not shown, the heater may be connected to the discharge passage 41 of the complex treatment apparatus 2 of the second embodiment and disposed in front of the ozone decomposition catalyst that decomposes ozone generated together with the remote plasma P.

7 is a cross-sectional view of a combined treatment apparatus for remote plasma and radio frequency stimulation according to a sixth embodiment of the present invention. Referring to FIG. 7, in the complex treatment apparatus 6 of the sixth embodiment, the discharge port 111 is formed at an end of the inlet passage 11 formed in the radial center of the body 630 in the extending direction.

The radio frequency electrode 621 is formed on the outside of the housing 640 and connects the discharge port 111 to the discharge passage 641. To this end, the radio frequency electrode 621 protrudes more than the end of the housing 640 by a third step S3.

That is, when the complex treatment device 6 is in contact with the skin (S), the radio frequency electrode 621 is in contact with the skin, and the discharge port 111 and the discharge passage 641 are not in contact with the skin (S) and the discharge port 111 It enables the flow of gas and ozone between the and the discharge passage 641.

Accordingly, ozone generated from the remote plasma P discharged through the discharge port 111 to treat the surface of the skin S and remaining ozone may be induced and discharged to the discharge passage 641 together with the waste material.

8 is a cross-sectional view of an apparatus for treating a combination of remote plasma and radio frequency stimulation according to a seventh embodiment of the present invention. Referring to Figure 8, the complex treatment device 7 of the seventh embodiment is a first housing 740 forming an inlet passage 311 on the outside of the body 630, and discharged to the outside of the first housing 740 It further includes a second housing 750 forming a passage 751.

The discharge passage 751 is generated in the remote plasma P to treat the surface of the skin S and discharge the remaining ozone together with the waste material. The discharge port 323 is formed at an end of the inflow passage 311 in the extending direction.

The radio frequency electrode 721 is disposed at the center of the body 630 in the radial direction. The second housing 750 is generated from the remote plasma P discharged to the discharge port 323 to treat the surface of the skin S and guide the remaining ozone to the discharge passage 751 through the discharge port 323 Connect to (751).

To this end, the radio frequency electrode 721 and the second housing 750 form the same height with respect to the skin S, protrude more by a fourth step S4 than the end of the body 630, and the first housing It protrudes more than the end of 740 by the fifth step S5.

That is, the radio frequency electrode 721 and the second housing 750 connect the discharge port 323 and the discharge passage 751 to each other. Accordingly, ozone generated from the remote plasma P discharged to the discharge port 323 to treat the surface of the skin S and remaining ozone is induced and discharged to the discharge passage 751 together with the waste material.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications can be made within the scope of the claims, the description of the invention, and the accompanying drawings. It is natural to fall within the scope of the invention.

1, 2, 3, 4, 5: complex therapy device 6, 7: complex therapy device
10, 310: remote plasma processing unit 11, 311: inlet passage
12, 312: high voltage electrode 13, 313: ground electrode
14: holder 20, 220: radio frequency magnetic pole part
21, 221: radio frequency (RF) electrode 621, 721: radio frequency (RF) electrode
22: radio frequency generator 23, 111, 223, 323: discharge port
24, 325: guide groove 30, 330, 630: body
40, 340, 640: housing 41, 341, 641, 751: discharge passage
60: ozone decomposition catalyst 61: heater
141: connection passage 324: connection
740: first housing 750: second housing
G, G3: Discharge gap P: Remote plasma
PJ: remote plasma jet S: skin
S1, S31: first step S2, S32: second step
S3: 3rd step S4: 4th step
S5: 5th step

Claims (18)

A remote plasma processing unit that generates plasma of dielectric barrier discharge with an inlet passage through which discharge gas flows in, a high voltage electrode provided on one side of the inlet passage, and a ground electrode provided on one side of the high voltage electrode and then discharges the plasma through a discharge port ; And
It is provided at the outlet side and supplies the plasma to the surface of the skin by passing the plasma through a radio frequency (RF) electrode, and generates a radio frequency source with a radio frequency generator connected to the radio frequency electrode, and generates a radio frequency through the radio frequency electrode. Radio frequency stimulation part that acts on the deep part of the skin
Complex treatment device of remote plasma and radio frequency stimulation comprising a. The method of claim 1,
The remote plasma processing unit
Treating the surface of the skin to be treated opposite to the discharge port with plasma
Combined treatment device with remote plasma and radio frequency stimulation. The method of claim 2,
The radio frequency stimulation unit
Treating the deep part of the skin to be treated in contact with the radio frequency electrode with radio frequency stimulation
Combined treatment device with remote plasma and radio frequency stimulation. The method of claim 1,
Body on which the remote plasma processing unit and the radio frequency electrode are mounted
It further includes,
The body is a complex treatment device of a remote plasma and radio frequency stimulation formed of a dielectric material. The method of claim 4,
The inflow passage is formed in the center of the body in a longitudinal direction,
The ground electrode is built into the body from the rear of the radio frequency electrode and outside the inflow passage,
The high voltage electrode is disposed inside the inflow passage behind the ground electrode.
Combined treatment device with remote plasma and radio frequency stimulation. The method of claim 5,
The outlet is
Passing through the radio frequency electrode and connected to the inflow passage to discharge the plasma
Combined treatment device with remote plasma and radio frequency stimulation. The method of claim 6,
A housing that forms a discharge passage outside the body to treat the surface of the skin and discharge residual ozone generated in the plasma
A combination treatment device of remote plasma and radio frequency stimulation further comprising a. The method of claim 7,
The outlet is
It is formed in the radial center of the radio frequency electrode and extends in the extension direction of the inflow passage,
The radio frequency electrode is
Further comprising guide grooves connecting the discharge port to the discharge passage so as to treat the surface of the skin generated from the plasma discharged to the discharge port and guide residual ozone to the discharge passage.
Combined treatment device with remote plasma and radio frequency stimulation. The method of claim 1,
A body mounted with the radio frequency electrode and having a discharge passage in a longitudinal direction at a center in a radial direction, and
A housing disposed with the inflow passage outside the body in the radial direction
A combination treatment device of remote plasma and radio frequency stimulation further comprising a. The method of claim 9,
The remote plasma processing unit
It is mounted on the body and the housing forming the inflow passage,
Generated in the plasma, treating the surface of the skin and discharging residual ozone through the discharge passage
Combined treatment device with remote plasma and radio frequency stimulation. The method of claim 10,
The ground electrode is built into the housing at the outer periphery of the inflow passage at the rear of the radio frequency electrode,
The high voltage electrode is disposed in the body inside the inflow passage behind the ground electrode.
Combined treatment device with remote plasma and radio frequency stimulation. The method of claim 11,
The outlet is
It is connected to the inflow passage and formed between the body and the housing to discharge the plasma
Combined treatment device with remote plasma and radio frequency stimulation. The method of claim 12,
The radio frequency electrode is
It is mounted on the side of the discharge passage of the body and includes a connector and guide grooves connecting the discharge port to the discharge passage so as to guide ozone generated from the plasma discharged to the discharge passage to the discharge passage.
Combined treatment device with remote plasma and radio frequency stimulation. The method according to claim 7 or 13,
Ozone decomposition catalyst connected to the discharge passage to decompose the ozone
A combination treatment device of remote plasma and radio frequency stimulation further comprising a. The method of claim 14,
A heater disposed in front of the ozone decomposition catalyst to remove moisture contained in the exhaust gas
A combination treatment device of remote plasma and radio frequency stimulation further comprising a. The method of claim 7,
The outlet is
It is formed at the end of the inflow passage in the extending direction,
The radio frequency electrode is
It is generated in the plasma discharged through the discharge port, is formed on the outer periphery of the housing to treat the surface of the skin and guide remaining ozone to the discharge passage, and connect the discharge port to the discharge passage.
Combined treatment device with remote plasma and radio frequency stimulation. The method of claim 6,
A first housing forming an inflow passage outside the body, and
A second housing that forms a discharge passage outside the first housing to treat the surface of the skin and discharge residual ozone generated in the plasma
It further includes,
The outlet is
Formed at the end of the inflow passage in the extension direction
Combined treatment device with remote plasma and radio frequency stimulation. The method of claim 17,
The radio frequency electrode is
Disposed at the center of the body in the radial direction
The second housing
Connecting the discharge port to the discharge passage to treat the surface of the skin generated from the plasma discharged to the discharge port and guide remaining ozone to the discharge passage
Combined treatment device with remote plasma and radio frequency stimulation.

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