JP2011000224A - Plasma irradiation device - Google Patents
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- JP2011000224A JP2011000224A JP2009144262A JP2009144262A JP2011000224A JP 2011000224 A JP2011000224 A JP 2011000224A JP 2009144262 A JP2009144262 A JP 2009144262A JP 2009144262 A JP2009144262 A JP 2009144262A JP 2011000224 A JP2011000224 A JP 2011000224A
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- Plasma Technology (AREA)
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Abstract
Description
本発明は、医療用のプラズマ装置に関し、特に、ハンド操作型止血装置(血管破断時の出血コントロールと止血、ならびに神経組織手術時の出血コントロールと止血用途)に関するものであり、内視鏡搭載型として内視鏡手術時における止血および剥離域のマーキング装置、生体の特定部位を対象とした減菌装置としても利用できる。 The present invention relates to a plasma device for medical use, and more particularly to a hand-operated hemostasis device (bleeding control and hemostasis at the time of blood vessel rupture, and bleeding control and hemostasis at the time of nerve tissue surgery). It can also be used as a hemostasis and peeling area marking device at the time of endoscopic surgery, and as a sterilization device for a specific part of a living body.
バイオ応用を目指した大気圧環境下でのプラズマ研究がなされるようになり、例えば、非特許文献1に、RF帯域の電源を利用したアーク放電型を利用した内視鏡搭載型アルゴンプラズマ止血装置が、非特許文献2に、誘電体バリア放電を直接利用した止血装置が知られている。また、医療用に適用が可能と考えられる材料生成用若しくは材料への照射用放電装置として、特許文献1に、誘電体バリア放電を利用したジェット型の装置が、特許文献2に、グロー状の放電を利用したプラズマジェット型の装置がそれぞれ知られている。 Plasma research under atmospheric pressure environment aiming at bio application has been made. For example, Non-Patent Document 1 discloses an endoscope-mounted argon plasma hemostasis device using an arc discharge type using a power source in the RF band. However, Non-Patent Document 2 discloses a hemostasis device that directly uses dielectric barrier discharge. In addition, as a discharge device for generating materials or irradiating materials considered to be applicable for medical use, Patent Document 1 discloses a jet-type device using dielectric barrier discharge. Plasma jet type devices using discharge are known.
従来のRF電源を用いたアーク放電型の内視鏡搭載プラズマ装置(非特許文献1)は、人体へ電流を流し抵抗加熱による熱凝固を誘発しているため、使用方法によっては組織障害をきたす場合がある。しかも、従来のものは電気抵抗の少ない箇所へプラズマが移動するため操作性と安全性に難点があり、そのため、マイルドなプラズマ装置であってより安全で操作性の良い装置が求められている。そこで、誘電体バリア放電等を利用したグロー放電型プラズマを活用したプラズマデバイスを適用することが考えられている。この場合、特徴としては、低温度(常温程度)のプラズマであるため熱負荷が極めて少なく、熱以外の新たな凝固作用原理による止血方法となる。従って、操作性、安全性、生体への負荷低減等の利点がある。 A conventional arc discharge type endoscope-equipped plasma device using a RF power source (Non-patent Document 1) induces thermal coagulation by applying a current to a human body and causing resistance to heat, and may cause tissue damage depending on the method of use. There is a case. In addition, the conventional device has a difficulty in operability and safety because the plasma moves to a portion having a low electric resistance. Therefore, there is a demand for a milder plasma device that is safer and has better operability. Therefore, it is considered to apply a plasma device using glow discharge plasma using dielectric barrier discharge or the like. In this case, as a feature, since it is a plasma at a low temperature (about room temperature), the heat load is extremely small, and the hemostasis method is based on a new coagulation action principle other than heat. Therefore, there are advantages such as operability, safety, and reduction of the load on the living body.
しかしながら、従来の誘電体バリア放電を用いたグロー型プラズマを用いた装置(非特許文献2参照)は、比較的大きく操作性に難があること、人体を接地電極として扱い大気中で放電を行い、人体に電流が流れ易い、ストリーマー放電を生じ易いという問題があった。また、誘電体バリア放電を用いたジェット吹き出し型のプラズマ装置(特許文献1参照)は、生成されたプラズマを直接大気中に放出させるタイプであり、主に材料生成や材料の表面処理に用いることを主眼としており、条件によってはストリーマー放電等が生じることがあり、照射条件が変化するなど問題点があった。さらに、特許文献2では、比較的均質なグロー放電を生成してストリーマー放電の生成を抑えることができて被処理物の損傷を少なくすることができるようにしたものであるが、ガスを軸に沿って流すため、放電空間で十分な反応を生じさせることが困難であること、ジェット長が比較的短く被照射物に対する操作性が悪い、という問題点があった。 However, the conventional apparatus using glow-type plasma using dielectric barrier discharge (see Non-Patent Document 2) is relatively large and difficult to operate, and discharges in the atmosphere using the human body as a ground electrode. There are problems that current tends to flow through the human body and streamer discharge is likely to occur. In addition, a jet blow-out type plasma apparatus using dielectric barrier discharge (see Patent Document 1) is a type that directly emits generated plasma into the atmosphere, and is mainly used for material generation and surface treatment of materials. However, streamer discharge may occur depending on the conditions, and there are problems such as changes in irradiation conditions. Further, in Patent Document 2, a relatively homogeneous glow discharge can be generated to suppress the generation of streamer discharge and damage to the object to be processed can be reduced. Therefore, it is difficult to cause a sufficient reaction in the discharge space, and the jet length is relatively short and the operability with respect to the irradiated object is poor.
本発明のプラズマ照射装置は、ガスを供給する誘電体などの1本以上の絶縁物管、誘電体などの絶縁物に被覆された電力を供給する電極、前記1本以上の管及び前記電極を取り付けるための誘電体で形成された放電室からなり、放電室のガス導入口にガスを拡散させるため機構を設け、前記放電室の外部に接地電極を取り付け、放電室内に滞留したガスを放電させプラズマを生成し、放電室に取り付けられたノズルからプラズマを噴出させるプラズマ照射装置において、放電室内にて一度ガス及びプラズマを滞留させてからプラズマを噴射することを特徴とする。
また、本発明は、上記プラズマ照射装置において、放電室の外部に接地電極を取り付けずに、放電室内に滞留したガスを放電させプラズマを生成することを特徴とする。
また、本発明は、さらに、上記放電室に取り付けられたノズルは、放電室に複数の平行に取り付けられたノズルであることを特徴とする。
また、本発明は、さらに、上記放電室に取り付けられたノズルは、放電室に複数取り付けられたノズルの先端が1点に集まるように配置され、1点にプラズマを集束させて噴出させることを特徴とする。
また、本発明のプラズマ照射装置は、ガスを供給する誘電体などの1本以上の絶縁物管、誘電体などの絶縁物に覆われた電力が供給される電極板、前記電極板と対をなすように配置された誘電体で覆われた接地電極から構成され、放電室内に滞留したガスを放電させプラズマを生成し、放電室に取り付けられたノズルからプラズマを噴出させるプラズマ照射装置において、放電室内にて一度ガス及びプラズマを滞留させてからプラズマを噴射することを特徴とする。
また、本発明は、さらに、上記接地電極は、傾斜を持たせて配置されたこと特徴とする。
また、本発明は、上記プラズマ照射装置において、ノズル先端部にプラズマの回りからガスを供給するガス導入口を有していることを特徴とする。
また、本発明は、上記プラズマ照射装置において、装置各部を奥行き方向に伸長させ、シート状のプラズマジェットを形成させることを特徴とする。
また、本発明は、上記プラズマ照射装置において、ノズル先端部に誘電体で覆われた電極を配置し、正もしくは負に印加することで、ラジカルを含む電子もしくはイオンを放電部から引き出すことを特徴とする。
また、本発明は、上記プラズマ照射装置において、誘電体に覆われた高圧側の電極を円弧状に形成し、誘電体に覆われた複数の接地電極が高圧側の電極と対をなすように円弧状に配置され、ノズルから噴出した各プラズマが1点に集束することを特徴とする。
また、本発明は、上記プラズマ照射装置において、誘電体に覆われた高圧側の電極と対をなすように配置された誘電体に覆われた複数の接地電極との間で放電を行いプラズマを生成し、プラズマを多孔の複数箇所からシャワー状に取り出することを特徴とする。
また、本発明は、上記プラズマ照射装置において、照射装置の外部を接地された金属で覆ったことを特徴とする。
また、本発明は、上記プラズマ照射装置において、装置各部を奥行き方向に伸長させ、シート状のプラズマジェットを形成させることを特徴とする。
また、本発明は、上記プラズマ照射装置において、照射装置の最外部を誘電体等の絶縁物で覆っていることを特徴とする。
また、本発明は、上記プラズマ照射装置において、セラミックメスを併設したことを特徴とする。
また、本発明は、上記プラズマ照射装置において、止血補助剤噴射器を併設したことを特徴とする。
また、本発明は、上記プラズマ照射装置において、圧電素子を用いた高周波電源から電力を供給することを特徴とする。
また、本発明は、上記プラズマ照射装置を用いて、プラズマジェットを被照射物に照射することを特徴とするプラズマ照射方法。
また、本発明は、上記プラズマ照射装置を用いて、止血補助剤が塗布された被照射物にプラズマ照射することを特徴とするプラズマ照射方法。
The plasma irradiation apparatus according to the present invention includes one or more insulator tubes such as a dielectric for supplying a gas, an electrode for supplying electric power covered with an insulator such as a dielectric, the one or more tubes and the electrode. It consists of a discharge chamber made of a dielectric for mounting, and a mechanism for diffusing gas is provided at the gas inlet of the discharge chamber. A ground electrode is attached outside the discharge chamber, and the gas staying in the discharge chamber is discharged. In a plasma irradiation apparatus that generates plasma and ejects plasma from a nozzle attached to a discharge chamber, gas and plasma are once retained in the discharge chamber, and then the plasma is ejected.
Further, the present invention is characterized in that in the plasma irradiation apparatus, plasma is generated by discharging the gas staying in the discharge chamber without attaching a ground electrode outside the discharge chamber.
Further, according to the present invention, the nozzle attached to the discharge chamber is a plurality of nozzles attached to the discharge chamber in parallel.
Further, according to the present invention, the nozzles attached to the discharge chamber are arranged so that the tips of the plurality of nozzles attached to the discharge chamber are gathered at one point, and plasma is focused at one point to be ejected. Features.
In addition, the plasma irradiation apparatus of the present invention includes a pair of one or more insulator tubes such as a dielectric for supplying a gas, an electrode plate supplied with power covered by an insulator such as a dielectric, In a plasma irradiation apparatus comprising a ground electrode covered with a dielectric material arranged to form a plasma by discharging a gas staying in the discharge chamber and generating plasma from a nozzle attached to the discharge chamber. The plasma is ejected after the gas and plasma are once retained in the room.
Further, the present invention is further characterized in that the ground electrode is disposed with an inclination.
Further, the present invention is characterized in that the plasma irradiation apparatus has a gas inlet for supplying gas from around the plasma to the nozzle tip.
Further, the present invention is characterized in that in the above plasma irradiation apparatus, each part of the apparatus is extended in the depth direction to form a sheet-like plasma jet.
Further, the present invention is characterized in that, in the plasma irradiation apparatus, an electrode covered with a dielectric is disposed at the tip of the nozzle, and electrons or ions including radicals are extracted from the discharge part by applying positive or negative. And
In the plasma irradiation apparatus, the high voltage side electrode covered with the dielectric is formed in an arc shape, and the plurality of ground electrodes covered with the dielectric form a pair with the high voltage side electrode. Arranged in an arc shape, each plasma ejected from the nozzle is focused at one point.
Further, the present invention provides the above plasma irradiation apparatus, wherein discharge is performed between a plurality of ground electrodes covered with a dielectric disposed so as to be paired with a high voltage side electrode covered with a dielectric. Generated plasma is taken out from a plurality of porous locations in a shower shape.
Further, the present invention is characterized in that in the plasma irradiation apparatus, the outside of the irradiation apparatus is covered with a grounded metal.
Further, the present invention is characterized in that in the above plasma irradiation apparatus, each part of the apparatus is extended in the depth direction to form a sheet-like plasma jet.
The present invention is also characterized in that in the plasma irradiation apparatus, the outermost part of the irradiation apparatus is covered with an insulator such as a dielectric.
Moreover, the present invention is characterized in that a ceramic knife is additionally provided in the plasma irradiation apparatus.
In addition, the present invention is characterized in that the plasma irradiation apparatus further includes a hemostatic auxiliary agent injector.
Further, the present invention is characterized in that in the plasma irradiation apparatus, power is supplied from a high frequency power source using a piezoelectric element.
Further, the present invention is a plasma irradiation method characterized by irradiating an irradiation object with a plasma jet using the plasma irradiation apparatus.
In addition, the present invention is a plasma irradiation method characterized by using the plasma irradiation apparatus described above to irradiate an object to be irradiated with a hemostatic aid applied with plasma.
本発明のプラズマ装置の効果を調べるために、イソフルランによる麻酔下でマウスの大腿大動脈を破断させて出血させ、同血管破断部にヘリウムプラズマジェットを照射した。照射直後から数秒以内で、血液凝固が生じて出血部を塞ぎ、これによって出血は停止した。病理組織学的には、熱による組織挫滅が観察されず、かわりにプラズマ照射によって生じた血餅が血管破断部を閉塞して、止血している事が確認された。更に、血管破断部を中心にプラズマジェットを集中できたので、指向性が良く操作性に優れていることが確認された。更に、間欠的にグロー状のプラズマが吹き出されるため、直流電流が原理的に流れにくい。病理検査により、プラズマの被照射部となった大腿動脈周囲の筋肉繊維組織は、表層より数十μmまで細胞凝固が観察された。この結果から、本発明の装置が出血を効率良くコントロールしつつ、極めて軽度な組織侵襲しか与えない新規デバイスであることを示すと判断される。本発明は、従来技術(非特許文献1)に比べてより安全で医用適合性が高い装置と捉えられる。
また、本発明によるプラズマの止血作用は、レーザーメスや電気メスを使用した際に通常観察されるような、熱焼による組織挫滅で血管の破断部が塞がれることで止血させる機器とは原理が異なると考えられる。本発明によるプラズマの止血は熱が発生しないため、レーザー照射や電気通電によって発生した熱による組織破損を伴うタンパク質凝固に起因した止血ではなく、照射されたプラズマによって惹起された非加熱性の細胞組織タンパク質凝固変性(組織損傷を伴わずに凝固を促進する生理的現象)によるもので、病理組織学的には凝固壊死に類似する変化と考えられる。
In order to examine the effect of the plasma device of the present invention, the femoral aorta of a mouse was ruptured and bleeded under anesthesia with isoflurane, and a helium plasma jet was irradiated on the ruptured portion of the blood vessel. Within a few seconds immediately after irradiation, blood coagulation occurred and blocked the bleeding site, which stopped the bleeding. Histopathologically, it was confirmed that tissue destruction due to heat was not observed, and that blood clots generated by plasma irradiation blocked the ruptured portion of the blood vessel and stopped the blood. Furthermore, since the plasma jet could be concentrated around the ruptured blood vessel, it was confirmed that the directivity was good and the operability was excellent. Further, since glow-like plasma is intermittently blown out, a direct current hardly flows in principle. As a result of pathological examination, cell coagulation was observed from the surface layer to the muscle fiber tissue around the femoral artery, which became the plasma irradiated part, to several tens of μm. From this result, it is determined that the apparatus of the present invention is a novel device that can control bleeding efficiently and give only extremely mild tissue invasion. The present invention is regarded as a device that is safer and higher in medical suitability than the prior art (Non-Patent Document 1).
In addition, the hemostatic action of the plasma according to the present invention is based on the principle that a device that stops hemostasis by clogging a ruptured portion of a blood vessel due to tissue destruction by heat firing, which is usually observed when a laser knife or an electric knife is used. Are considered different. Since the hemostasis of plasma according to the present invention does not generate heat, it is not hemostasis caused by protein coagulation accompanied by tissue damage due to heat generated by laser irradiation or electrical energization, but non-heatable cell tissue induced by irradiated plasma This is due to protein coagulation degeneration (a physiological phenomenon that promotes coagulation without tissue damage), and is considered to be a change similar to coagulation necrosis in histopathology.
止血を行うための装置としては、絶縁を兼ねた放電室に対して、誘電体等の絶縁物で覆われた電極が放電室の内部に設置され、もう一方の電極(通常は接地電極)が放電室の外側に筒状に設置される。放電室に不活性ガス、もしくは不活性ガスと反応ガスの混合気体を側面に設けられた一カ所の導入口から導入する、または、不活性ガスと反応ガスをそれぞれ別の導入口から同時に導入する。その際、ガス導入部にガス拡散板を設けてガスを乱流状態にして各種ガスの混合を促進する機構を設けているので、従来のガスを軸に沿って流すものに比べて放電室内で十分な反応を生じさせることができ、軸方向の長さも短くすることができる。そして、内部電極と外部電極の間に交流電界を印加することにより大気圧下で誘電体バリア放電を利用したグロー状の放電を発生させる。放電室からプラズマジェットを吹き出すようにノズルが取り付けられたプラズマ照射装置に関する。外側の電極がない場合で放電を行う形態もある。 As an apparatus for performing hemostasis, an electrode covered with an insulator such as a dielectric is installed inside the discharge chamber, and the other electrode (usually a ground electrode) is used for the discharge chamber that also serves as an insulation. It is installed in a cylindrical shape outside the discharge chamber. An inert gas or a mixed gas of an inert gas and a reactive gas is introduced into the discharge chamber from one inlet provided on the side surface, or an inert gas and a reactive gas are simultaneously introduced from separate inlets. . At that time, since a gas diffusion plate is provided in the gas introduction part to provide a mechanism for accelerating the mixing of various gases by making the gas turbulent, in the discharge chamber as compared with the conventional gas flowing along the axis. Sufficient reaction can be caused and the axial length can be shortened. Then, an alternating electric field is applied between the internal electrode and the external electrode to generate a glow-like discharge using a dielectric barrier discharge under atmospheric pressure. The present invention relates to a plasma irradiation apparatus in which a nozzle is attached so as to blow a plasma jet from a discharge chamber. There is also a form in which discharge is performed when there is no outer electrode.
使用する電圧の周波数としては、1kHzから10GHz程度であり、後述する実施例では、20kHzを用いた。ガスは、不活性ガスを主に用いるが、活性ガスとの混合ガス、もしくは、不活性ガスと活性ガス等を同時に別の導入口から用いても良い。絶縁物としての誘電体は、誘電率2000以下が好ましく、通常は、シリコン、石英、アルミナ等を用いる。ノズル先端部の口径は直径約1mm程度である。 The frequency of the voltage used is about 1 kHz to 10 GHz, and 20 kHz was used in the examples described later. As the gas, an inert gas is mainly used, but a mixed gas with an active gas or an inert gas and an active gas may be used simultaneously from different inlets. The dielectric as the insulator preferably has a dielectric constant of 2000 or less, and usually silicon, quartz, alumina or the like is used. The nozzle tip has a diameter of about 1 mm.
以下、本発明を実施例によって具体的に説明する。
図1は本発明の一実施例を示した図であり、図1に示すように、内部電極は銅線等で形成され、シリコン等の絶縁物で覆われている。放電室は、石英、アルミナ、塩化ビニール等の絶縁物で形成されており、外部電極は接地される。内部電極に印加される交流電圧の周波数は、20kHz、印加電圧は±10kVであり(昇圧トランスを利用)、ガス供給管から、希ガス、ここではヘリウムガスを流量を2L/minで、放電室の側面より放電室内へ導入し、放電を行い、ノズルからプラズマを噴出させて、プラズマジェットを発生させた。本実施例では、ガス供給管から放電室の側面より放電室内へガスを導入し、さらに、ガス導入部にガス拡散板を設けてガスを乱流状態にして放電室内で十分な反応を生じさせて放電を行うので、従来の軸に沿ってガスを導入する場合に比べてガス及びプラズマが放電室内に滞留して放電室内で十分な反応を生じさせることができる、また、放電室の軸方向の長さを短くすることもできる。
Hereinafter, the present invention will be specifically described by way of examples.
FIG. 1 is a view showing an embodiment of the present invention. As shown in FIG. 1, the internal electrode is formed of a copper wire or the like and covered with an insulator such as silicon. The discharge chamber is made of an insulator such as quartz, alumina, or vinyl chloride, and the external electrode is grounded. The frequency of the AC voltage applied to the internal electrode is 20 kHz, the applied voltage is ± 10 kV (using a step-up transformer), and a rare gas, here helium gas, is supplied from the gas supply pipe at a flow rate of 2 L / min. Was introduced into the discharge chamber from the side, and discharge was performed. Plasma was ejected from the nozzle to generate a plasma jet. In this embodiment, gas is introduced into the discharge chamber from the side of the discharge chamber from the gas supply tube, and further, a gas diffusion plate is provided in the gas introduction portion to make the gas turbulent and cause sufficient reaction in the discharge chamber. As compared with the case of introducing the gas along the conventional axis, the gas and plasma can stay in the discharge chamber and cause a sufficient reaction in the discharge chamber. Also, the axial direction of the discharge chamber The length of can also be shortened.
被照射物であるイソフルラン麻酔下のマウスを絶縁された台の上に置き、図1の装置で段落0012に記載の条件のプラズマを、大腿動脈破断させて出血させた領域に照射した。大腿動脈から流れ出る血液は、数秒〜10秒内で止血された。 A mouse under isoflurane anesthesia as an object to be irradiated was placed on an insulated table, and the plasma of the conditions described in paragraph 0012 was irradiated to the region where the femoral artery was broken and bleeded with the apparatus of FIG. Blood flowing out of the femoral artery was stopped within a few seconds to 10 seconds.
以下に、本発明の変形例を説明する。 Below, the modification of this invention is demonstrated.
(変形例1)
図2は、図1に記載の本発明のプラズマ照射装置において、プラズマを吹き出すノズル部分を2カ所以上に変形し、かつ、ノズルを平行に並べたプラズマ照射装置。
(Modification 1)
FIG. 2 is a plasma irradiation apparatus according to the plasma irradiation apparatus of the present invention described in FIG. 1, wherein the nozzle part for blowing out the plasma is deformed into two or more locations, and the nozzles are arranged in parallel.
(変形例2)
図3は、図1に記載の本発明のプラズマ照射装置において、プラズマを吹き出すノズル部分を2カ所以上に変形し、かつ、1点にプラズマを集束させるようにノズルを配置したプラズマ照射装置。
また、ノズルを2カ所以上に変形する代わりに、図1に記載の本発明のプラズマ照射装置を複数台利用し、プラズマジェットを1点に集束させてもよい。
また、ノズル部に、カテーテル等のチューブを取り付け、カテーテル等のチューブ先端からプラズマジェットを照射してもよい。
また、本発明のプラズマ照射装置に、セラミックメスを併設してもよい。
また、本発明のプラズマ照射装置に、止血補助剤噴射器を併設してもよい。そして、止血補助剤を塗布した被照射物にプラズマを照射すれば止血がより効果的に行える。
(Modification 2)
FIG. 3 shows a plasma irradiation apparatus according to the present invention shown in FIG. 1, wherein the nozzle part for blowing out the plasma is deformed into two or more places and the nozzles are arranged so as to focus the plasma at one point.
Further, instead of deforming the nozzle to two or more locations, a plurality of plasma irradiation apparatuses of the present invention shown in FIG. 1 may be used to focus the plasma jet at one point.
Alternatively, a tube such as a catheter may be attached to the nozzle portion, and the plasma jet may be irradiated from the tip of the tube such as a catheter.
In addition, a ceramic knife may be provided in the plasma irradiation apparatus of the present invention.
In addition, a hemostatic auxiliary agent injector may be provided in the plasma irradiation apparatus of the present invention. Further, hemostasis can be performed more effectively by irradiating the irradiated object to which the hemostatic aid is applied with plasma.
(変形例3)
図4は、ガスを側面から導入する導入口を有し、電圧印可側の電極を円形状等に大きくし、それと対をなす様に接地電極を配置し、それら電極の回りを絶縁物で覆うことで放電室を形成し、誘電体バリア放電を生じさせ、プラズマを穴(ノズル)から噴出させることを特徴とするプラズマ照射装置である。この変形例においても、ガス及びプラズマは放電室内に滞留し、放電室内で十分な反応を生じさせることができるし、また、放電室の軸方向の長さを短くすることもできる。
(Modification 3)
FIG. 4 has an inlet for introducing gas from the side, the electrodes on the voltage application side are enlarged in a circular shape, etc., and ground electrodes are arranged so as to make a pair with it, and the surroundings of these electrodes are covered with an insulator In this plasma irradiation apparatus, a discharge chamber is formed, dielectric barrier discharge is generated, and plasma is ejected from a hole (nozzle). Also in this modified example, the gas and the plasma stay in the discharge chamber, can cause a sufficient reaction in the discharge chamber, and the axial length of the discharge chamber can be shortened.
(変形例4)
図5は、図4に示したプラズマ照射装置をさらに改良したものであり、ガスを側面から導入する導入口を有し、電圧印可側の電極を円形状等に大きくし、それと対をなすと共に傾斜を持たせた接地電極を配置し、それら電極の回りを絶縁物で覆うことで放電室を形成し、誘電体バリア放電を生じさせ、プラズマを穴(ノズル)から噴出させることを特徴とするプラズマ照射装置である。さらに、不活性ガスをプラズマ流に対して外から平行に流すことで、酸素等との反応によるプラズマジェットの減衰を抑制する。または、反応ガスや粒子等を混入し、反応させることもできる。
(Modification 4)
FIG. 5 shows a further improvement of the plasma irradiation apparatus shown in FIG. 4, which has an introduction port for introducing gas from the side, enlarges the electrode on the voltage application side into a circular shape, and makes a pair with it. An inclined ground electrode is disposed, and a discharge chamber is formed by covering the periphery of the electrode with an insulating material to generate a dielectric barrier discharge, and plasma is ejected from a hole (nozzle). It is a plasma irradiation apparatus. Further, the inert gas is allowed to flow parallel to the plasma flow from the outside, thereby suppressing the attenuation of the plasma jet due to the reaction with oxygen or the like. Alternatively, a reaction gas or particles can be mixed and reacted.
(変形例5)
図6は、図5に示したプラズマ照射装置に対して、装置各部を奥行き方向に伸長させ、シート状のプラズマジェットを形成させることを特徴とするプラズマ照射装置である。
(Modification 5)
FIG. 6 is a plasma irradiation apparatus characterized in that, with respect to the plasma irradiation apparatus shown in FIG. 5, each part of the apparatus is extended in the depth direction to form a sheet-like plasma jet.
(変形例6)
図7は、図4に示したプラズマ照射装置に対して、ノズル部に電極を配置し(誘電体等の絶縁物に完全に覆われている場合を含む)、正もしくは負に印加することで、ラジカルを含む電子もしくはイオンを引き出すことが可能なプラズマ照射装置である。
(Modification 6)
FIG. 7 shows the plasma irradiation apparatus shown in FIG. 4 in which an electrode is disposed in the nozzle portion (including a case where the electrode is completely covered with an insulator such as a dielectric) and applied positively or negatively. A plasma irradiation apparatus capable of extracting electrons or ions containing radicals.
(変形例7)
図8は、図4に示したプラズマ照射装置に対して、高圧側の電極を円弧状にし、誘電体に覆われた複数の電極(接地)が対をなすように配置し、プラズマジェットが1点に集束することを特徴としたプラズマ照射装置である。
(Modification 7)
FIG. 8 shows the plasma irradiation apparatus shown in FIG. 4 in which the high-voltage side electrode is formed in an arc shape, and a plurality of electrodes (grounding) covered with a dielectric are arranged in pairs. A plasma irradiation apparatus characterized by focusing on a point.
(変形例8)
図9は、図4に示したプラズマ照射装置に対して、誘電体に覆われた複数の電極(接地)が対をなすように配置され、プラズマを複数箇所から取り出することを特徴としたプラズマ照射装置である。
(Modification 8)
FIG. 9 shows a plasma characterized in that a plurality of electrodes (ground) covered with a dielectric are arranged in pairs with respect to the plasma irradiation apparatus shown in FIG. Irradiation device.
(変形例9)
図10は、図5に示したプラズマ照射装置に対して、安全性を強化するために装置の外側を金属等(接地)で覆ったこと特徴としたプラズマ照射装置。
(Modification 9)
FIG. 10 shows a plasma irradiation apparatus characterized in that the outside of the apparatus is covered with metal or the like (ground) in order to enhance safety with respect to the plasma irradiation apparatus shown in FIG.
本装置は、医療用の止血装置や滅菌装置としての使用を念頭においているが、プラズマジェットを各種材料へ照射して機能修飾を行うことや、反応ガス等と組み合わせることでクリーニング・エッチング等の目的にも使用可能であることから、工業用の用途などにも適用できる。 Although this device is intended for use as a medical hemostasis device or sterilization device, it can be used for cleaning, etching, etc. by irradiating various materials with a plasma jet to modify the function or combining it with a reactive gas. Therefore, it can be applied to industrial applications.
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