CN111629508A

CN111629508A - Plasma generating device

Info

Publication number: CN111629508A
Application number: CN202010455931.6A
Authority: CN
Inventors: 鲜于斌; 李宜阳
Original assignee: Huazhong University of Science and Technology
Current assignee: Huazhong University of Science and Technology
Priority date: 2020-05-26
Filing date: 2020-05-26
Publication date: 2020-09-04

Abstract

The invention discloses a plasma generating device, belonging to the technical field of atmospheric pressure discharge plasma application, comprising: the device comprises a shell, a metal plate, a power supply module and a plurality of discharge modules; the shell is provided with a plurality of through holes, and the plurality of discharging modules are arranged in the through holes; one end of the discharging module is connected to the metal plate through a telescopic device; the plurality of discharging modules move in the through holes under the action of external force, and the telescopic device is shortened under the action of external force so as to enable the discharging modules to be tightly attached to the surface of an object to be processed; the metal plate connects the plurality of discharge modules in parallel; the power module supplies power to the metal plate so that the plurality of discharge modules acquire power to generate plasma. According to the plasma device, the plurality of discharge modules are independently telescopic, so that the discharge modules can change the positions of the discharge modules according to the shape of the surface to be processed, and the plasma device is completely attached to the surface to be processed. Therefore, a set of device can be used for carrying out large-area, uniform and direct plasma treatment on various curved surfaces with different shapes.

Description

Plasma generating device

Technical Field

The invention belongs to the technical field of application of atmospheric pressure discharge plasma, and particularly relates to a plasma generating device.

Background

The plasma surface treatment is widely applied to the aspects of sterilization, disinfection, material surface modification (such as changing the hydrophilicity, hydrophobicity and roughness of the surface) and the like. Compared with an indirect treatment method, the direct treatment is to directly generate plasma on the surface of an object to be treated, so that the plasma directly acts on the surface within the shortest distance, thereby achieving better treatment effect and higher energy utilization rate, and having remarkable advantages.

However, because the area of the plasma generated by a single plasma generating device is small, such direct plasma treatment methods tend to treat only small surfaces or small areas of large surfaces. In order to improve efficiency, a plurality of plasma generators are arranged in parallel to form an array, so that a large-area plane can be treated at the same time. Such plasma arrays are typically used only for processing flat surfaces. The curved surface cannot be completely attached. Once the plasma array shape and the surface being treated do not conform properly, process uniformity is compromised, causing a number of problems. If a large-area plasma is used for processing a curved surface, the plasma array can be specially designed according to the shape of the curved surface so that the plasma array can be attached to the curved surface. This results in a specific curved surface requiring a specially designed plasma device that is not versatile. Obviously, this imposes a great limitation on the application of the plasma. In order to perform direct plasma treatment on various curved surfaces by using the same large-area plasma apparatus, it is necessary to develop a large-area plasma apparatus whose surface shape can be changed.

Disclosure of Invention

In view of the above drawbacks or needs for improvement in the prior art, the present invention provides a plasma generator, which can completely attach a surface of a plasma generator to various curved surfaces, thereby solving the technical problem that a plasma generator needs to be individually designed for each curved surface when a large-area uniform plasma is directly processed on the curved surface.

To achieve the above object, according to one aspect of the present invention, there is provided a plasma generating apparatus comprising: the device comprises a shell, a metal plate, a power supply module and a plurality of discharge modules;

the shell is provided with a plurality of through holes, and the plurality of discharge modules are arranged in the through holes; one end of the discharge module is connected to the metal plate through a telescopic device; the metal plate is connected to the power supply module;

the plurality of discharging modules are used for moving in the through holes under the action of external force according to the concave-convex shape of the surface of the object to be processed, and the telescopic device is used for shortening under the action of external force so as to enable the discharging modules to be tightly attached to the surface of the object to be processed; the metal plate is used for connecting a plurality of the discharge modules in parallel; the power supply module is used for supplying power to the metal plate so that the plurality of discharge modules obtain power to generate plasma.

Preferably, the discharge module includes an electrode housing, a discharge electrode, an insulating strip, and a conductive device; the discharge electrode set up in the electrode shell, the one end of conductive device connect in the discharge electrode, the other end of conductive device connect in the telescoping device, the insulating strip set up in conductive device's outside.

Preferably, the discharge module further includes a current limiting resistor, the current limiting resistor is connected in series to the discharge electrode, and the current limiting resistor is used for limiting the magnitude of the current passing through the conductive device.

Preferably, the discharge module further comprises an inductor, the inductor is connected in series with the discharge electrode, and the inductor is used for limiting the magnitude of the current passing through the conductive device and inhibiting current fluctuation.

Preferably, the electrode housing includes, but is not limited to, one of: glass, plastic, ceramic.

Preferably, the material of the discharge electrode includes, but is not limited to, one of: tungsten, iron, copper.

Preferably, the structure of the discharge electrode includes, but is not limited to, one of: needle, rod, plate, plasma jet, plasma spray.

Preferably, the telescopic device is a conductive metal, and the telescopic device includes but is not limited to one of the following: flexible wire, spring.

Preferably, the power module includes, but is not limited to, one of: the power supply comprises a high-voltage alternating current power supply, a high-voltage direct current power supply, a high-voltage pulse power supply, a high-voltage radio frequency power supply and a microwave power supply.

Preferably, the plurality of discharge modules are arranged in an array.

Generally, compared with the prior art, the above technical solution conceived by the present invention has the following beneficial effects: a large-area plasma generating device with a variable surface shape is formed by independently stretching a plurality of discharging modules, so that one set of plasma generating device is suitable for large-area, uniform and direct plasma treatment of curved surfaces in different shapes.

Drawings

FIG. 1 is a schematic structural diagram of a discharge module of a plasma generation device according to an embodiment of the present invention;

FIG. 2 is a front view of a plasma generator according to an embodiment of the present invention;

FIG. 3 is a side view showing the structure of a plasma generating apparatus according to an embodiment of the present invention;

fig. 4 is a schematic diagram of an embodiment of the present invention.

The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: an electrode housing 1; a discharge electrode 2; an insulating strip 3; a current limiting resistor 4; a conductive means 5; a telescoping device 6; a power supply module 7; a housing 8; a metal plate 9.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

As shown in fig. 1 to 3, the present invention provides a plasma generating apparatus, including: a housing 8, a metal plate 9, a power module 7 and a plurality of discharge modules; the discharge module comprises an electrode shell 1, a discharge electrode 2, an insulating strip 3, a current-limiting resistor 4 and a conducting device 5. The housing 8 is an insulating housing with a plurality of through holes, the diameter of each through hole is slightly larger than the diameter of the cross section of each discharge module, each discharge module is placed in the through hole, the plurality of discharge modules can freely move in the direction perpendicular to the through hole under the action of external force, and it should be noted that the movement or stop of each discharge module does not affect the movement state of other discharge modules, and is not affected by the states of other discharge modules. When the plasma generating device is attached to the irregular surface, some discharging modules firstly contact the convex part of the irregular surface, the discharging modules stop moving under resistance after being attached to the surface of the convex part, and by analogy, the other discharging modules continue to move towards the irregular surface under the action of external force until the discharging modules are attached to the surface of the corresponding position and stop moving, when all the discharging modules are attached to the corresponding surface and stop moving, the surface of the plasma generating device is completely attached to the irregular surface, and at the moment, the power supply module 7 can be opened to carry out plasma treatment on the irregular surface.

To be further described, as shown in fig. 1 and fig. 3, the discharge electrode 2 of the discharge module is disposed in the electrode housing 1, one end of the conductive device 5 is connected to the discharge electrode 2, the other end of the conductive device 5 is connected to the expansion device 6, the insulating strip 3 is disposed outside the conductive device 5, and the current limiting resistor 4 is connected in series to the discharge electrode 2. The electrode shell 1 can be made of insulating materials with high hardness, such as glass, plastic, ceramic and the like; the material of the discharge electrode 2 can be tungsten, iron, copper and other conductive metals, and the structure can be needle-shaped, rod-shaped, planar, plasma jet, plasma spraying or any other discharge structure; the insulating strip 3 is made of an insulating material with high hardness and can move back and forth in a through hole of a shell of the plasma generating device; the current-limiting resistor 4 plays a role in current-limiting protection in the circuit; the conducting device 5 is a conducting metal wire which connects the discharge electrode 2 and the telescopic device 6.

To explain further, as shown in fig. 3 and 4, in an embodiment of the present invention, when the surface of the object to be processed is an irregular surface, the power module 7 is initially turned off, the plasma generator is attached to the surface of the object to be processed with the irregular surface from right to left from the metal plate 9, the protruding portion of the surface of the object to be processed first contacts the discharge modules at the corresponding position on the plasma generator, the discharge modules are attached to the protruding surface, because one end of the discharge module is connected to the telescopic device 6 and the telescopic device 6 is connected to the metal plate 9, the telescopic device 6 connected to one end of the discharge module is stressed and shortened, so that the metal plate 9 and other discharge modules are not influenced to move to the left continuously under the action of external force, and the remaining discharge modules are subjected to resistance until contacting the corresponding surface of the object to be processed to stop moving, and finally, all the discharge modules contact the surface of the object to be processed at the corresponding position and stop, the surface shape of the plasma generating device is changed into the same shape as the surface of the object to be processed, each discharge module can be optimally attached to the surface of the object to be processed at the corresponding position, at the moment, the power supply module is turned on, and the power supply module drives the discharge plasma generated by the discharge electrodes to fully process the irregular surface, so that the utilization rate of the device is improved, and a better processing effect is achieved.

It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims

1. A plasma generating apparatus, comprising: the device comprises a shell (8), a metal plate (9), a power supply module (7) and a plurality of discharging modules;

the shell (8) is provided with a plurality of through holes, and the plurality of discharging modules are arranged in the through holes; one end of the discharge module is connected to the metal plate (9) through a telescopic device (6); the metal plate (9) is connected to the power module (7);

the plurality of discharging modules are used for moving in the through holes under the action of external force according to the concave-convex shape of the surface of the object to be processed, and the telescopic device (6) is used for shortening under the action of external force so as to enable the discharging modules to be tightly attached to the surface of the object to be processed; the metal plate (9) is used for connecting a plurality of the discharge modules in parallel; the power supply module (7) is used for supplying power to the metal plate (9) so that the plurality of discharge modules obtain power to generate plasma.

2. A plasma generating apparatus according to claim 1, wherein: the discharge module comprises an electrode shell (1), a discharge electrode (2), an insulating strip (3) and a conducting device (5); the discharge electrode (2) is arranged in the electrode shell (1), one end of the conducting device (5) is connected to the discharge electrode (2), the other end of the conducting device (5) is connected to the telescopic device (6), and the insulating strip (3) is arranged outside the conducting device (5).

3. A plasma generating apparatus according to claim 2, wherein: the discharging module further comprises a current limiting resistor (4), the current limiting resistor (4) is connected in series with the discharging electrode (2), and the current limiting resistor (4) is used for limiting the magnitude of current passing through the conducting device (5).

4. A plasma-generating device according to claim 2, characterized in that the electrode housing (1) includes but is not limited to one of the following: glass, plastic, ceramic.

5. A plasma-generating device according to claim 2, characterized in that the material of the discharge electrode (2) includes but is not limited to one of the following: tungsten, iron, copper.

6. A plasma generating device according to claim 5, characterized in that: the structure of the discharge electrode (2) includes but is not limited to one of the following: needle, rod, plate, plasma jet, plasma spray.

7. A plasma generating apparatus according to claim 1, wherein: the telescopic device (6) is made of conductive metal, and the telescopic device (6) comprises but is not limited to one of the following: flexible wire, spring.

8. A plasma generating apparatus according to claim 1, wherein: the power supply module (7) includes, but is not limited to, one of: the power supply comprises a high-voltage alternating current power supply, a high-voltage direct current power supply, a high-voltage pulse power supply, a high-voltage radio frequency power supply and a microwave power supply.

9. A plasma generating apparatus according to claim 1, wherein: the plurality of discharging modules are arranged in an array.