CN103747607A - Far zone plasma spray gun device - Google Patents

Far zone plasma spray gun device Download PDF

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Publication number
CN103747607A
CN103747607A CN201310720521.XA CN201310720521A CN103747607A CN 103747607 A CN103747607 A CN 103747607A CN 201310720521 A CN201310720521 A CN 201310720521A CN 103747607 A CN103747607 A CN 103747607A
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CN
China
Prior art keywords
plasma torch
sleeve pipe
plasma
far field
hollow sleeve
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Pending
Application number
CN201310720521.XA
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Chinese (zh)
Inventor
王红卫
沈文凯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUZHOU OPS PLASMA TECHNOLOGY Co Ltd
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SUZHOU OPS PLASMA TECHNOLOGY Co Ltd
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Application filed by SUZHOU OPS PLASMA TECHNOLOGY Co Ltd filed Critical SUZHOU OPS PLASMA TECHNOLOGY Co Ltd
Priority to CN201310720521.XA priority Critical patent/CN103747607A/en
Publication of CN103747607A publication Critical patent/CN103747607A/en
Pending legal-status Critical Current

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Abstract

The invention relates to a far zone plasma spray gun device. The far zone plasma spray gun device comprises an insulating hollow casing and at least two evenly-arranged plasma spray guns. An insulator is arranged between the plasma spray guns. The length of the plasma spray guns and the insulator is less than that of the insulating hollow casing so as to form a plasma discharge region. A plurality of plasma spray guns are arranged in an insulating hollow casing so as to perform gas discharging in a larger area and produce plasma. The plurality of plasma spray guns are evenly arranged such that full-scale and uniform plasma can be produced in the discharge region. According to the invention, the far zone plasma spray gun device can work in a common atmospheric environment. By the adoption of the device, materials to be processed in the far zone can be better treated, and the material surface modification effect is good.

Description

A kind of far field plasma torch device
Technical field
The invention belongs to plasma processing apparatus, be specifically related to a kind of far field plasma torch device.
Background technology
Material surface modifying treatment technology is one of current material preparation technology of generally using, it is under certain external condition, material exterior materials and material surface generation physics or chemical reaction, thereby material surface state changed or produce new element and new group at material surface, finally meeting the needs of practical application.
But, the fast development of modern industry is had higher requirement to material wear-resistant wiping, wearing and tearing and the performance such as anticorrosive, meanwhile, also more and more higher to the requirement of environmental protection, thus effectively promote to be called as the development of the material plasma process for modifying surface of green production process.Under vacuum, apply high-frequency electric field to reacting gas environment, gas ionizes and produces plasma under the excitation of high-frequency electric field.And some material (as conductive material) can not be placed on and in a region, carry out plasma treatment.
Therefore need a kind of machining area badly large, uniform far field plasma generating device discharges.
Summary of the invention
In order to solve the above-mentioned problems in the prior art, provide a kind of far field plasma torch device.
The technical solution adopted in the present invention is: a kind of far field plasma torch device, comprise that insulated hollow sleeve pipe, above-mentioned insulated hollow inside pipe casing are provided with at least two hollow cell bodies that be arranged in parallel, in above-mentioned each hollow cell body, be provided with plasma torch, between above-mentioned each plasma torch, be provided with insulator, the length of above-mentioned hollow cell body is less than described insulated hollow sleeve pipe and makes to form plasma discharge region.
Preferably, the anode that the edge of above-mentioned hollow cell body is described plasma torch, the negative electrode in above-mentioned plasma torch is metal needle electrode.
Preferably, above-mentioned insulated hollow sleeve pipe is fluoropolymer sleeve pipe.
Preferably, above-mentioned insulated hollow sleeve pipe is cylinder type hollow sleeve pipe.
Preferably, above-mentioned insulated hollow sleeve pipe is rectangle hollow sleeve pipe.
Preferably, above-mentioned insulated hollow sleeve pipe is triangle hollow bushing.
Preferably, above-mentioned plasma torch is arranged in described insulated hollow sleeve pipe symmetrically and evenly.
Preferably, above-mentioned insulated hollow sleeve pipe is that column type hollow bushing upper end is also provided with the fixture for fixing described plasma torch and insulator.
Preferably, above-mentioned fixture is insulating fixing device.
Preferably, also comprise the upper end cover for fixing described plasma torch, on described upper end cover, corresponding each plasma torch offers air vent hole.
Adopt the beneficial effect of the technical program to be: a kind of far field plasma torch device, comprise insulated hollow sleeve pipe, at least two plasma torch that evenly arrange, between plasma torch, be provided with insulator, the length of plasma torch and insulator is less than insulated hollow sleeve pipe and makes to form plasma discharge region, in an insulated hollow sleeve pipe, be provided with a plurality of plasma torch, can larger area carry out gas discharge generation plasma, a plurality of plasma torch are uniformly distributed setting, can make region of discharge produce comprehensive and uniform plasma, under common atmospheric environment, also can work, this device makes treating material also can be processed better material in far field, make material surface modifying treatment effect better.
Accompanying drawing explanation
For content of the present invention is more easily expressly understood, according to specific embodiment also by reference to the accompanying drawings, the present invention is further detailed explanation below, wherein:
Fig. 1 is the cross-sectional view of the embodiment of the present invention 1;
Fig. 2 is the Structure of cross section schematic diagram of the embodiment of the present invention 2;
Fig. 3 is the Structure of cross section schematic diagram of the embodiment of the present invention 3;
Fig. 4 is the Structure of cross section schematic diagram of the embodiment of the present invention 4;
Fig. 5 is the Structure of cross section schematic diagram of the embodiment of the present invention 5;
In figure, 1. metal needle electrode 2. insulator 3. insulated hollow sleeve pipe 4. processed sheet material 6. hollow cell body 7. insulated end cover 8. upper end covers in plasma discharge region 5..
Embodiment
Below in conjunction with accompanying drawing, describe specific embodiments of the invention in detail.
Embodiment 1
As shown in Figure 1, comprise insulating sleeve, insulating sleeve inside is provided with two hollow cell bodies 6 that be arranged in parallel, also be provided with insulated end cover 7, two parallel hollow cell bodies 6 are evenly distributed on the inside of insulated hollow sleeve pipe 3, insulated hollow sleeve pipe 3 is fluoropolymer property management, fluoropolymer property management 3 is cylindrical, in each hollow cell body, be provided with plasma torch, the end of plasma is fixed in insulated end cover 7, wherein, the anode that the hollow cell body limit wall of hollow cell body 6 is plasma torch, negative electrode in plasma torch is metal needle electrode 1, between each plasma torch, be provided with insulator 2, the length of hollow cell body is less than fluoropolymer sleeve pipe 3 and makes to form plasma discharge region 4.
Insulated hollow sleeve pipe is column type hollow bushing, and upper end also comprises for the fixing upper end cover 8 of plasma torch, and upper end cover 8 adopts insulating material, and on upper end cover 8, corresponding each plasma torch offers an air vent hole.
During work, two plasma torch that be arranged in parallel are worked simultaneously, and gas enters respectively plasma gun from upper end, between each plasma torch, be provided with insulator, so plasma discharge district concentrates on the nozzle place of plasma torch, at region of discharge, concentrate discharge generation plasma.Treating material is arranged in the region of putting beyond a region and carries out plasma treatment.
Embodiment 2
As shown in Figure 2, all the other are identical with embodiment 1, and difference is, at edge inside pipe casing, is provided with five hollow cell bodies that be arranged in parallel, and hollow cell body surrounds at insulating sleeve is uniformly distributed in cylindrical.
Embodiment 3
As shown in Figure 3, all the other are identical with embodiment 1, and difference is, at edge inside pipe casing, is provided with seven hollow cell bodies that be arranged in parallel, and hollow cell body surrounds at insulating sleeve is uniformly distributed in cylindrical.
Embodiment 4
As shown in Figure 4, all the other are identical with embodiment 1, and difference is, insulated hollow sleeve pipe is rectangle hollow sleeve pipe.
Embodiment 5
As shown in Figure 5, all the other are identical with embodiment 1, and difference is, insulated hollow sleeve pipe is triangle hollow bushing.
The invention has the beneficial effects as follows: a kind of far field plasma torch device, comprise insulated hollow sleeve pipe, at least two plasma torch that evenly arrange, between plasma torch, be provided with insulator, the length of plasma torch and described insulator is less than fluoropolymer sleeve pipe and makes to form plasma discharge region, in an insulated hollow sleeve pipe, be provided with a plurality of plasma torch, can larger area carry out gas discharge generation plasma, a plurality of plasma torch are uniformly distributed setting, can make region of discharge produce comprehensive and uniform plasma, under common atmospheric environment, also can work, this device makes treating material also can be processed better material in far field, make material surface modifying treatment effect better.
Above-described is only the preferred embodiment of the present invention, it should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise of the invention, can also make some distortion and improvement, and these all belong to protection scope of the present invention.

Claims (10)

1. a far field plasma torch device, it is characterized in that, comprise that insulated hollow sleeve pipe, described insulated hollow inside pipe casing are provided with at least two hollow cell bodies that be arranged in parallel, in described each hollow cell body, be provided with plasma torch, between described each plasma torch, be provided with insulator, the length of described hollow cell body is less than described insulated hollow sleeve pipe and makes to form plasma discharge region.
2. far field according to claim 1 plasma torch device, is characterized in that, the anode that the edge of described hollow cell body is described plasma torch, and the negative electrode in described plasma torch is metal needle electrode.
3. far field according to claim 1 plasma torch device, is characterized in that, described insulated hollow sleeve pipe is fluoropolymer sleeve pipe.
4. far field according to claim 1 plasma torch device, is characterized in that, described insulated hollow sleeve pipe is cylinder type hollow sleeve pipe.
5. far field according to claim 1 plasma torch device, is characterized in that, described insulated hollow sleeve pipe is rectangle hollow sleeve pipe.
6. far field according to claim 1 plasma torch device, is characterized in that, described insulated hollow sleeve pipe is triangle hollow bushing.
7. far field according to claim 1 plasma torch device, is characterized in that, described plasma torch is arranged in described insulated hollow sleeve pipe symmetrically and evenly.
8. far field claimed in claim 1 plasma torch device, is characterized in that, described insulated hollow sleeve pipe is that column type hollow bushing upper end is also provided with the fixture for fixing described plasma torch and insulator.
9. far field claimed in claim 1 plasma torch device, is characterized in that, described fixture is insulating fixing device.
10. far field claimed in claim 1 plasma torch device, is characterized in that, also comprises the upper end cover for fixing described plasma torch, and on described upper end cover, corresponding each plasma torch offers air vent hole.
CN201310720521.XA 2013-12-24 2013-12-24 Far zone plasma spray gun device Pending CN103747607A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310720521.XA CN103747607A (en) 2013-12-24 2013-12-24 Far zone plasma spray gun device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310720521.XA CN103747607A (en) 2013-12-24 2013-12-24 Far zone plasma spray gun device

Publications (1)

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CN103747607A true CN103747607A (en) 2014-04-23

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106132055A (en) * 2016-08-10 2016-11-16 珠海格力电器股份有限公司 Air purifier and plasma producing apparatus thereof
CN112424389A (en) * 2018-12-03 2021-02-26 株式会社爱发科 Film forming apparatus and film forming method
CN113966064A (en) * 2021-09-18 2022-01-21 河北大学 Device and method for generating sheet plasma plume

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4626648A (en) * 1985-07-03 1986-12-02 Browning James A Hybrid non-transferred-arc plasma torch system and method of operating same
CN2604847Y (en) * 2003-02-26 2004-02-25 王守国 Atmospheric radio-frequency cylinder injective cold plasma generator
CN1844449A (en) * 2006-04-30 2006-10-11 哈尔滨工业大学 Device and method for surface treatment of hollow cathode plasma in inner surface of slimline
JP2007119840A (en) * 2005-10-27 2007-05-17 Canon Inc Method and device for forming deposited film and electrophotographic photoreceptor using the same
CN101227790A (en) * 2008-01-25 2008-07-23 华中科技大学 Plasma jet apparatus
CN101538792A (en) * 2009-04-20 2009-09-23 浙江理工大学 Room-temperature plasma torch array device simultaneously carrying out fiber yarn modification and sewage treatment
CN201674722U (en) * 2010-05-12 2010-12-15 中国科学院嘉兴微电子仪器与设备工程中心 Same plane plasma generator
CN102625557A (en) * 2012-03-30 2012-08-01 大连理工大学 Generating device for atmospheric bare electrode cold plasma jet
CN103298234A (en) * 2013-06-21 2013-09-11 东南大学 Low-temperature plasma jet generating device
CN203618207U (en) * 2013-12-24 2014-05-28 苏州市奥普斯等离子体科技有限公司 Far-zone plasma torch device

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4626648A (en) * 1985-07-03 1986-12-02 Browning James A Hybrid non-transferred-arc plasma torch system and method of operating same
EP0207731A2 (en) * 1985-07-03 1987-01-07 James A. Browning Hybrid non-transferred-arc plasma torch system and method of operating same
CN2604847Y (en) * 2003-02-26 2004-02-25 王守国 Atmospheric radio-frequency cylinder injective cold plasma generator
JP2007119840A (en) * 2005-10-27 2007-05-17 Canon Inc Method and device for forming deposited film and electrophotographic photoreceptor using the same
CN1844449A (en) * 2006-04-30 2006-10-11 哈尔滨工业大学 Device and method for surface treatment of hollow cathode plasma in inner surface of slimline
CN101227790A (en) * 2008-01-25 2008-07-23 华中科技大学 Plasma jet apparatus
CN101538792A (en) * 2009-04-20 2009-09-23 浙江理工大学 Room-temperature plasma torch array device simultaneously carrying out fiber yarn modification and sewage treatment
CN201674722U (en) * 2010-05-12 2010-12-15 中国科学院嘉兴微电子仪器与设备工程中心 Same plane plasma generator
CN102625557A (en) * 2012-03-30 2012-08-01 大连理工大学 Generating device for atmospheric bare electrode cold plasma jet
CN103298234A (en) * 2013-06-21 2013-09-11 东南大学 Low-temperature plasma jet generating device
CN203618207U (en) * 2013-12-24 2014-05-28 苏州市奥普斯等离子体科技有限公司 Far-zone plasma torch device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106132055A (en) * 2016-08-10 2016-11-16 珠海格力电器股份有限公司 Air purifier and plasma producing apparatus thereof
CN106132055B (en) * 2016-08-10 2018-09-28 珠海格力电器股份有限公司 Air purifier and its plasma producing apparatus
CN112424389A (en) * 2018-12-03 2021-02-26 株式会社爱发科 Film forming apparatus and film forming method
CN113966064A (en) * 2021-09-18 2022-01-21 河北大学 Device and method for generating sheet plasma plume

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Application publication date: 20140423