CN2604847Y - Atmospheric radio-frequency cylinder injective cold plasma generator - Google Patents
Atmospheric radio-frequency cylinder injective cold plasma generator Download PDFInfo
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- CN2604847Y CN2604847Y CN 03204793 CN03204793U CN2604847Y CN 2604847 Y CN2604847 Y CN 2604847Y CN 03204793 CN03204793 CN 03204793 CN 03204793 U CN03204793 U CN 03204793U CN 2604847 Y CN2604847 Y CN 2604847Y
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Abstract
A new type of cylindrical inner-projection cold plasma generator; which comprises a cylindrical shell with an open end, and is characterized in that a concentric hollow cylindrical radio frequency electrode and a hollow cylindrical ground electrode are arranged in the shell. An intake cylindrical channel is formed between the shell and the radio frequency electrode, and which is connected with the gas supply through a intake duct. The cylindrical radio frequency electrode is connected with radio frequency power supply through cable; the cylindrical ground electrode is connected with ground. A plurality of small spout is respectively arranged on the ground electrode cylinder wall and the radio frequency electrode cylinder wall. The end part of the ground electrode and the radio frequency electrode is respectively equipped with insulator; and a cylindrical space is arranged between ground electrode and the radio frequency electrode, a discharge area is formed in the space and generates cold plasma. The cold plasma is sprayed into the cylinder through the small spouts on the ground electrode cylinder wall, and then flows out through the opening on the shell, and the discharge occurs under atmospheric pressure. The utility model can generate low voltage large area stable discharged cold plasma beam under atmospheric pressure which is broken down and ionized by radio frequency low voltage; a new path is opened for the plasma technique's application in object surface cleaning, sterilization, disinfection, and surface modification; in particular to sterilization and disinfection of medical duct exterior.
Description
[technical field]
The utility model relates to a kind of plasma generator, refers under the normal pressure radio frequency discharge at the cylinder endoporus especially, and this discharge plasma is concentrated through a plurality of apertures of cylinder barrel and sprayed to the tube inner axes.
[background technology]
Plasma technique is just developing rapidly in recent years, and is widely used, for example can be used for: (1) microelectronics industry silicon chip cleans, and substitutes present acid and washed with de-ionized water.(2) clean all biochemical contaminated surfaces, comprise by chemical and biological weapons surfaces contaminated and space.(3) substitute wet chemistry method, can be used for pharmacy and food service industry disinfect in situ.(4) be used for medical device sterilization and treating for skin disease.(5) be used to clean the radioactive material surface, the evidence plasma technique is present unique feasible means, and in the world discarded radioactive material can only landfill disposal at present.(6) food fresh keeping sterilization.(8) textile enterprise's dress material modification.(9) modification of material surface.(10) etching metal, semiconductor and dielectric substance etc.
In air, make gas breakdown ionization produce plasma needs several kilovolts high pressure.Generate plasma at present and mainly contain dual mode: a kind of is to utilize electric arc to produce plasma, and gas temperature will be up to more than 3000 ℃ during arc discharge, and the direct current heat balance plasma torch of generation can be used for cutting, welding and the surface spraying of metal.But the plasma torch of high temperature has also limited its purposes, because it can burn the article that all are faced.Another kind of mode is to utilize corona discharge to produce plasma, but corona discharge is difficult to produce the uniform large-area plasma, and under several kilovolts high pressure, current range only is the micromicroampere magnitude, generally just is used for producing ozone and makes sterilization usefulness.Existing plasma technique will make gas puncture under non-high pressure and produce plasma, and keeps and stablize the large tracts of land non-thermal discharge, can only carry out in vacuum chamber, thereby limit its application.
[utility model content]
The purpose of this utility model is to provide a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator, under atmospheric pressure steady operation also can spray the cold plasma line in cylinder, this cold plasma generator be plasma technique in cleaning, sterilization, sterilization, be in particular the quick dry method sterilization of catheter outer surface and the application of sterilization and opened up road.
In order to achieve the above object, the utility model provides a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator, the cylindrical housing that comprises a both ends open, it is characterized in that: in this shell, be provided with hollow circle tube radio frequency electrode and the ground electrode concentric with shell, between this shell and this radio frequency electrode, form an air inlet cylindrical channel, this inlet channel is connected with air supply source by air induction conduit, this cylindrical shape radio frequency electrode is connected with radio-frequency power supply by cable, this cylindrical shape ground electrode is connected with ground, in being respectively equipped with a plurality of aperture spouts on the barrel of this ground electrode cylinder and on the barrel of this radio frequency electrode cylinder, be respectively equipped with the insulator insulation between two ends of this ground electrode and this radio frequency electrode, between ground electrode and radio frequency electrode, be provided with the cylindrical shape slit, in this slit, form discharge range and produce cold plasma, this cold plasma is concentrated through a plurality of aperture spouts of ground electrode cylinder barrel and is sprayed in tube, after shell aperture flows out, discharge is carried out under normal pressure.
Described a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator, it is characterized in that: this radio-frequency power supply is the radio-frequency power supply of 13.56MHz or 27.12MHz.The discharge of this plasma is depressed at normal atmosphere and is carried out, and is by radio frequency low-voltage gas breakdown, and the rms voltage of gas during by rf arcing is 50 volts to 250 volts scopes.
Described a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator is characterized in that: be evenly equipped with a plurality of aperture spouts respectively on the cylindrical wall of this ground electrode cylinder and this radio frequency electrode cylinder, the diameter range of each little spout is the 0.5-1.5 millimeter.
Described a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator, it is characterized in that: this radio frequency discharge is to carry out in the space between ground electrode cylinder and radio frequency electrode cylinder, at the interval cold plasma that forms of this radio frequency discharge, this cold plasma sprays to cylinder bore through a plurality of aperture spouts of ground electrode cylinder.
Described a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator, it is characterized in that: this radio frequency discharge is carried out under normal pressure.
Described a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator, it is characterized in that: this air supply source institute supplied gas is argon gas or helium.
Described a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator, it is characterized in that: this air supply source institute supplied gas is the mist of argon gas or helium and a spot of reacting gas or liquid.
Described a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator, it is characterized in that: this shell is made by insulating material.
A kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator of the present utility model is steady operation under atmospheric pressure, and its advantage is: 1, and adopt radio-frequency power supply under normal pressure, to form uniform and stable cold plasma discharge.2, cold plasma ejects cold plasma by most apertures symmetry in tube of metallic cylinder barrel.3, when a conduit or an object yardstick less than the opening of injection cold plasma generator in the outer surface of warp when needing sterilization, sterilize or carrying out surface modification, can make its endoporus discharge space that passes normal-pressure radio-frequency cylindrical shape injection cold plasma generator that its outer surface is carried out necessary sterilization, sterilize or carry out surface modification treatment.4, the plasma line temperature of its ejection is usually less than 200 degrees centigrade, thereby generally can not cause ablation to the Sensitive Apparatus surface, and contains the ion composition hardly in the line of ejection.5, not only can be written into working gas, and can be written into working gas, and can add other any reacting gas and liquid composition with the argon gas conduct with the helium conduct.6, directly can adopt the radio-frequency power supply of 13.56MHz or 27.12MHz to excite discharge, the rms voltage during its disruptive discharge only is between 50 volts to 250 volts, so it is different from high-voltage corona discharge, the build-up of luminance frequency range is 1 to 100 KHz, and the build-up of luminance rms voltage is 1 to 5 kilovolt.
A kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator of the present utility model can spray the cold plasma line that contains a large amount of metastable state active ingredients, owing to be under atmospheric pressure, so this line contains the ion composition hardly.Main application of the present invention is: by the cold plasma line that contains a large amount of active ingredients that sprays in the axle center around the cylindrical wall, can be used for the pollution that the Rapid Cleaning conduit outer wall has organic substance to bring, the pollution that causes with biological virus or bacterium, for example, with oxygen during as reacting gas, its active oxygen can be very fast and organic and organism reaction form carbon dioxide packing and water, because the line temperature is lower, so contaminated catheter surface is cleaned and can not damage when sterilizing with it, also can not bring secondary pollution to substrate.By changing different reacting gass, can be used for modification is carried out on the wall surface.
By changing discharge power, gas flow, gas ingredients can be controlled the density of plasma line ejection and avoid arcing phenomenon between the electrode.
[description of drawings]
Fig. 1 is a side structure cross-sectional schematic of the present utility model;
Fig. 2 is a Facad structure cross-sectional schematic of the present utility model.
At first, see also Fig. 1 and Fig. 2, normal pressure cylindrical shape of the present invention is penetrated cold plasma generator outward, comprise radio-frequency power supply 101, air supply source 102, generator shell is made of insulating material 104 and insulating material 103, in this shell, be provided with cylindrical shape radio frequency electrode 112 and cylindrical shape ground electrode 111, form an air inlet cylindrical channel 105 between this radio frequency electrode 112 and the casing insulation material 103, this inlet channel 105 is communicated with air supply source 102 by air induction conduit 107 and by pressure reduction control valve door 106.This radio frequency electrode is connected with radio-frequency power supply 101 by radio frequency cable 109, these ground electrode cylinder 111 ground connection, this cylindrical shape ground electrode barrel is provided with a plurality of aperture spouts 113, the barrel of this radio frequency electrode cylinder 112 is provided with a plurality of aperture spouts 114, two ends of this ground electrode 111 and this radio frequency electrode 112 are insulated body 104 and insulator 103 insulation respectively, between ground electrode 111 and radio frequency electrode 112, be provided with cylindrical shape slit 108, in this slit 108, form discharge range and produce cold plasma, this cold plasma sprays to tube inner axes 110 through a plurality of aperture spouts 113 of ground electrode cylinder barrel, after shell aperture 115 flows out, discharge is carried out under normal pressure.
The a plurality of apertures 114 that are introduced in the gas process radio frequency electrode 112 in the inlet channel 105 flow into radio frequency discharge interval 108, after rf arcing, form plasma, this plasma inwardly sprays by a plurality of aperture spouts 113 of ground electrode 111 barrels, spray to 110 places, ground electrode cylinder interior axle center in a plurality of aperture plasma beam adfluxions, after shell aperture 115 flows out, the internal diameter of this ground electrode cylinder 111 can design according to user's needs.This ground electrode 111 and this radio frequency electrode cylinder 112 can be by metal materials, as stainless steel, and aluminium, copper etc. are processed into, and insulating material such as insulator 104 and 103 useful ceramics, polytetrafluoroethylene are made.
Radio-frequency power supply 101 can adopt 13.56MHz or 27.12MHz radio-frequency power supply to excite discharge, and discharge is carried out under normal pressure.
Can adopt argon gas or helium as being written into working gas, in addition, can mix and add a spot of reacting gas or liquid composition according to different needs, as oxygen, nitrogen, charcoal fluorine four, water etc., the ratio of shared total gas flow is in 5%.Gas is ionized the formation plasma at discharge range, has the cold plasma line of a large amount of active atomics and molecule to the ejection of inner axes place by a plurality of aperture spouts of ground electrode cylinder.Power when regulating discharge as required and air inflow are controlled the active material concentration in the cylinder bore.
Claims (8)
1, a kind of novel cylindrical shape injection cold plasma generator, the shell that comprises the drum of both ends open, the columnar radio frequency electrode of both ends open, the columnar ground electrode of both ends open, radio-frequency power supply, air supply source, it is characterized in that: this barrel shrond is made by insulating material, be coated with a concentric hollow circle tube radio frequency electrode and a ground electrode in it, between this shell and this radio frequency electrode, form an air inlet cylindrical channel, this inlet channel is connected with air supply source by air induction conduit, this cylindrical shape radio frequency electrode is connected with radio-frequency power supply by cable, this cylindrical shape ground electrode is connected with ground, in being respectively equipped with the porous spout on the barrel of this ground electrode cylinder and on the barrel of this radio frequency electrode cylinder, two ends of this ground electrode and this radio frequency electrode are respectively equipped with insulator, between ground electrode and radio frequency electrode, be provided with the cylindrical shape slit, in this slit, form discharge range and produce cold plasma, this cold plasma sprays in tube through a plurality of aperture spouts of ground electrode cylinder barrel, after the shell openings at two ends flows out, discharge is carried out under normal pressure.
2, a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator as claimed in claim 1, it is characterized in that: this radio-frequency power supply is the radio-frequency power supply of 13.56MHz or 27.12MHz, the breakdown rms voltage of gas is between 50 volts to 250 volts.
3, a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator as claimed in claim 1, it is characterized in that: be evenly equipped with most little spouts respectively on the cylindrical wall of this ground electrode cylinder and this radio frequency electrode cylinder, the diameter range of each little spout is the 0.5-1.5 millimeter.
4, a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator as claimed in claim 1, it is characterized in that: this radio frequency discharge is to carry out in the space between ground electrode cylinder and radio frequency electrode cylinder, and the breakdown back of gas forms cold plasma and concentrates through a plurality of apertures of ground electrode cylinder and sprays to the tube inner axes.
5, a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator as claimed in claim 1, it is characterized in that: this radio frequency discharge is carried out under normal pressure.
6, a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator as claimed in claim 1, it is characterized in that: this air supply source institute supplied gas is argon gas or helium.
7, a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator as claimed in claim 1, it is characterized in that: this air supply source institute supplied gas is the mist of argon gas or helium and a spot of reacting gas or liquid.
8, a kind of novel normal-pressure radio-frequency cylindrical shape injection cold plasma generator as claimed in claim 1, it is characterized in that: this shell is made by insulator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03204793 CN2604847Y (en) | 2003-02-26 | 2003-02-26 | Atmospheric radio-frequency cylinder injective cold plasma generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03204793 CN2604847Y (en) | 2003-02-26 | 2003-02-26 | Atmospheric radio-frequency cylinder injective cold plasma generator |
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| Publication Number | Publication Date |
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| CN2604847Y true CN2604847Y (en) | 2004-02-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 03204793 Expired - Fee Related CN2604847Y (en) | 2003-02-26 | 2003-02-26 | Atmospheric radio-frequency cylinder injective cold plasma generator |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100484361C (en) * | 2006-02-24 | 2009-04-29 | 清华大学 | Atmospheric discharging cold plasma generator and array based on contraction and enlargement channel structure |
| WO2013149482A1 (en) * | 2012-04-05 | 2013-10-10 | 中国科学院微电子研究所 | New normal-pressure dual radio frequency electrode plasma free radical cleaning spray gun |
| CN103747607A (en) * | 2013-12-24 | 2014-04-23 | 苏州市奥普斯等离子体科技有限公司 | Far zone plasma spray gun device |
| WO2016112473A1 (en) * | 2015-01-12 | 2016-07-21 | 王守国 | Pluggable plasma discharge tube device |
| CN107241849A (en) * | 2017-06-26 | 2017-10-10 | 云南航天工业有限公司 | A kind of low-temperature plasma device fresh-keeping for food sterilization |
| CN109951941A (en) * | 2019-03-22 | 2019-06-28 | 西安交通大学 | A kind of double plasma generator and its application |
| WO2021226751A1 (en) * | 2020-05-09 | 2021-11-18 | 蒂森灭菌科技(孝感)有限公司 | Adjustable continuous flow plasma disinfection and sterilization method, and disinfection and sterilization device corresponding to same |
-
2003
- 2003-02-26 CN CN 03204793 patent/CN2604847Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100484361C (en) * | 2006-02-24 | 2009-04-29 | 清华大学 | Atmospheric discharging cold plasma generator and array based on contraction and enlargement channel structure |
| WO2013149482A1 (en) * | 2012-04-05 | 2013-10-10 | 中国科学院微电子研究所 | New normal-pressure dual radio frequency electrode plasma free radical cleaning spray gun |
| CN103747607A (en) * | 2013-12-24 | 2014-04-23 | 苏州市奥普斯等离子体科技有限公司 | Far zone plasma spray gun device |
| WO2016112473A1 (en) * | 2015-01-12 | 2016-07-21 | 王守国 | Pluggable plasma discharge tube device |
| CN107241849A (en) * | 2017-06-26 | 2017-10-10 | 云南航天工业有限公司 | A kind of low-temperature plasma device fresh-keeping for food sterilization |
| CN109951941A (en) * | 2019-03-22 | 2019-06-28 | 西安交通大学 | A kind of double plasma generator and its application |
| CN109951941B (en) * | 2019-03-22 | 2020-05-22 | 西安交通大学 | Double-layer plasma generator and application thereof |
| WO2021226751A1 (en) * | 2020-05-09 | 2021-11-18 | 蒂森灭菌科技(孝感)有限公司 | Adjustable continuous flow plasma disinfection and sterilization method, and disinfection and sterilization device corresponding to same |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |