CN100484361C - Atmospheric discharging cold plasma generator and array based on contraction and enlargement channel structure - Google Patents
Atmospheric discharging cold plasma generator and array based on contraction and enlargement channel structure Download PDFInfo
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- CN100484361C CN100484361C CNB2006100113630A CN200610011363A CN100484361C CN 100484361 C CN100484361 C CN 100484361C CN B2006100113630 A CNB2006100113630 A CN B2006100113630A CN 200610011363 A CN200610011363 A CN 200610011363A CN 100484361 C CN100484361 C CN 100484361C
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- 230000005495 cold plasma Effects 0.000 title claims abstract description 92
- 238000007599 discharging Methods 0.000 title claims description 34
- 230000008602 contraction Effects 0.000 title abstract 3
- 230000006835 compression Effects 0.000 claims abstract description 15
- 238000007906 compression Methods 0.000 claims abstract description 15
- 230000008676 import Effects 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 27
- 238000010586 diagram Methods 0.000 description 10
- 239000002245 particle Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000001954 sterilising effect Effects 0.000 description 3
- 238000004659 sterilization and disinfection Methods 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000006477 desulfuration reaction Methods 0.000 description 1
- 230000023556 desulfurization Effects 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 239000002901 radioactive waste Substances 0.000 description 1
- 208000017520 skin disease Diseases 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
A cold plasma generator of atmosphere discharge is featured as setting flat-plate type or rotation type of contraction and enlargement channel structure at air inlet or air outlet or discharge region of generator to form flat-plate type or coaxial type cold plasma generator of atmosphere discharge and furthermore to form generator array .The said contraction and enlargement channel structure is formed by compression unit, throat unit and expansion unit to raise efflux velocity of cold plasma at outlet of said generator .
Description
Technical field
The present invention relates to the atmosphere pressure discharging cold plasma generators technical field.
Background technology
At present, under low air pressure condition, can produce large-area non-equilibrium cold plasma, but the existence of vacuum chamber makes the manufacturing of equipment and maintenance cost increase greatly on the one hand, also limit the physical dimension of processed workpiece on the other hand, thereby greatly limited its range of application.The current plasma that can produce under atmospheric pressure has two kinds, a kind of is hot plasma, it is characterized in that gas temperature is often very high, approximately the 10000K magnitude is mainly used in plasma spray coating, cutting, welding, waste disposal, material surface processing and other fields.Because the hot plasma temperature is very high, therefore,, can not adopt it to handle for the fear hot material; Another kind is a cold plasma, it is characterized in that gas temperature very low (near room temperature), but electron temperature is very high, therefore has very high chemism, belongs to nonequilibrium plasma.But the method that produces cold plasma at present under atmospheric pressure mainly is corona discharge, dielectric barrier discharge etc.Often volume ratio is less for the cold plasma that the employing said method produces, and spatial distribution is very inhomogeneous.The atmospheric pressure radio frequency glow discharge plasma technique of Ti Chuing can produce the cold plasma than the even discharge of larger area under atmospheric pressure in recent years.Atmospheric pressure radio frequency glow discharge cold plasma technology is owing to broken away from costliness, the restriction of complicated vacuum system, in microelectronics industry, nuclear industry (nuclear waste disposal), biomedical sector, military field, even boundless application prospect all will be arranged at numerous areas such as safeguard national security, as plasma etching, plasma auxiliary chemical vapor deposition, material surface modifying, remove biochemical organic substance, the surface of radioactive contamination is handled or cleaned to radioactive waste, the desulfurization in cogeneration power plant and some chemical plant, denitration, vehicle exhaust is handled, the quick sterilization of medicine equipment, the sterilization of pharmacy and food service industry, food fresh keeping, treating skin disease etc.
But existing atmosphere cold plasma generator, no matter be plate cold plasma generator or the cold plasma generator of coaxial type, control for the cold-plasma jet flow velocity, all can only rely on increase working gas flow to realize, thereby greatly limited the EFFECTIVE RANGE of active particle in the cold plasma, and improved the use cost of this technology greatly.
Summary of the invention
The object of the present invention is to provide a kind of atmosphere pressure discharging cold plasma generators and array based on the convergent-divergent channel design.
One of feature of generator of the present invention is that described generator is based on the plate atmosphere pressure discharging cold plasma generators of plate convergent-divergent channel design, contains:
Be connected to the pair of electrodes of radio-frequency power supply, constitute, the insulator that supports usefulness is arranged in the middle of this electrode by upper and lower two flat boards;
Plate convergent-divergent channel design is formed between described upper and lower two flat boards, and described structure is connected successively and formed by the compression unit, throat, the extension that link to each other with air inlet.
Described plate convergent-divergent passage is positioned at the air inlet place or the place, gas outlet of described generator.
Two of the feature of generator of the present invention is that described generator is based on the coaxial type atmosphere pressure discharging cold plasma generators of rotary type convergent-divergent channel design, contains:
Interior electrode connects radio-frequency power supply;
Insulating support is coated at described interior electrode;
External electrode is coated at described insulating support and ground connection, this external electrode side direction or axially have air inlet;
Rotary type convergent-divergent passage is formed between the described inside and outside electrode compression unit, throat and the extension of passage and connects successively and form by being connected to.
Described rotary type convergent-divergent channel design is positioned at the exit of described generator, and described to be positioned at inside and outside interelectrode passage be region of discharge.
Described rotary type convergent-divergent passage is positioned at region of discharge, the end of electrode is inserted in the compression unit in described, between the inwall of interior electrode and compression unit, also form passage, and described inside and outside electric discharge between electrodes district forms the inlet channel of the air inlet that is connected in described compression unit place for discharge usefulness.
Three of the feature of generator of the present invention is that described generator is based on the plate atmosphere pressure discharging cold plasma generators of the rotary type convergent-divergent channel design at this generator air inlet place, contains:
Rotary type convergent-divergent passage is connected successively by the compression unit, throat and the extension that connect plasma working gas air inlet and to form;
Plate electrode is made of interior electrode and external electrode, has air inlet at the opposite position of inside and outside electrode; The inside and outside electrode of this plate electrode is fixed on the exit position of described extension successively.
Four of the feature of generator of the present invention is that described generator is based on the plate atmosphere pressure discharging cold plasma generators of the square convergent-divergent channel design of this generator import department, contains:
Square convergent-divergent passage is connected successively by the compression unit, throat and the extension that connect cold plasma working gas air inlet and to form;
Plate electrode is made of interior electrode and external electrode, and the inside and outside electrode in this plate electrode is fixed on exit, described extension successively, has air inlet in the relevant position of inside and outside electrode.
Being characterised in that of generator array of the present invention, the described generator array of forming based on the atmosphere pressure discharging cold plasma generators of convergent-divergent channel design is characterized in that, contains:
The cartridge type shell has the import and export (if desired) of radio-frequency power supply connector, cold plasma working gas air inlet and coolant (gas or liquid) on housing;
Generator array is made up of single described atmosphere pressure discharging cold plasma generators based on the convergent-divergent channel design, connects radio-frequency power supply after the end parallel connection of the electrode of each generator, and the other end is ground connection after parallel connection; On each generator, have the air inlet of described cold plasma working gas of side direction or axial corresponding air inlet; Be loaded in the cartridge type shell in the described generator array integral body.
The present invention is by adopting the scaling type channel design on atmosphere pressure discharging cold plasma generators, making increases under few situation in cold plasma working gas mass flow, the cold-plasma jet speed of generator exports is significantly improved, thereby improves the useful space move distance and the useful space sphere of action of active particle in the cold-plasma jet greatly.
Description of drawings
Fig. 1. gas is by the scaling type access diagram;
Fig. 2. be positioned at the rotary type convergent-divergent access diagram at cold plasma generator air inlet place;
21: longitudinal section; 22: the sectional elevation that is positioned at throat;
23; In or the external electrode front view;
Fig. 3. be positioned at the square convergent-divergent access diagram at cold plasma generator air inlet place;
31: longitudinal section; 32: sectional elevation;
33: interior or external electrode front view;
Fig. 4. there is the cutaway view of the cold plasma generator of plate convergent-divergent channel design at the air inlet place;
Fig. 5. there is the cutaway view of the cold plasma generator of plate convergent-divergent channel design at the place, gas outlet;
Fig. 6. be in the cutaway view of the rotary type channel design of discharge place;
Fig. 7,9. gas outlet place has one of the cutaway view, two of the cold plasma generator of rotary type convergent-divergent channel design;
Fig. 8. be positioned at the cutaway view of the rotary type convergent-divergent channel design at place, gas outlet;
Figure 10. have the front view of the cold plasma generator of rotary type convergent-divergent channel design;
Figure 11. have the cross-sectional view of the cold plasma generator of rotary type convergent-divergent passage;
Figure 12. the convergent-divergent access diagram;
Figure 13. adopt one of array type cold plasma generator schematic diagram that constitutes by a plurality of plate cold plasma generators of plate convergent-divergent channel design: adopt natural cooling;
Figure 14. adopt plate convergent-divergent channel design the array type cold plasma generator schematic diagram that constitutes by a plurality of plate cold plasma generators two: adopt the gas cooled mode;
Figure 15. adopt the array type cold plasma generator schematic diagram that constitutes by a plurality of cylindrical cold plasma generators of cylindrical convergent-divergent channel design: adopt natural cooling;
151: longitudinal section;
152: sectional elevation;
Figure 16. adopt the array type cold plasma generator schematic diagram that constitutes by a plurality of square cold plasma generators of square convergent-divergent channel design; Adopt the gas cooled mode;
161: longitudinal section;
162: sectional elevation.
Embodiment
The present invention has adopted scaling type passage as shown in Figure 1 in cold plasma generator.By adjusting inlet pressure, convergent-divergent passage throat section long-pending (passage smallest cross-sectional place), make air-flow reach local velocity of sound in throat, in the expansionary phase subsequently, flow velocity will increase along with the increase of the cross-section area of nozzle, increase under few situation thereby be implemented in mass flow, significantly improve the gas vent flow velocity.The pantograph structure of convergent-divergent passage can be applied in the air inlet place of cold plasma generator, discharge place and gas outlet, and also the convergent-divergent channel cross-section can be done shapes such as circular or square or ellipse, the equal purpose that can realize improving the gas vent flow velocity.
Fig. 2～11 have provided this scaling type channel design design typical case on some atmosphere pressure discharging cold plasma generators and have used.
Fig. 2 is the application of rotary type convergent-divergent channel design at plate atmospheric radio-frequency discharging cold plasma generator air inlet place, and wherein 201 is external electrode, and 202 is interior electrode, and 203 is rotary type convergent-divergent passage.
Fig. 3 is the application of square convergent-divergent channel design at plate atmospheric radio-frequency discharging cold plasma generator air inlet place, and wherein 301 is external electrode, and 302 is interior electrode, and 303 is square convergent-divergent passage.
Fig. 4 is the application of plate convergent-divergent channel design at plate atmospheric radio-frequency discharging cold plasma generator air inlet place, and wherein 401 is the convergent-divergent passage, and 402,404 is electrode, and 403 is region of discharge, and 405 is insulating material.
Fig. 5 is the application of plate convergent-divergent channel design at place, plate atmospheric radio-frequency discharging cold plasma generator gas outlet, and wherein 401 is the convergent-divergent passage, and 402,404 is electrode, and 403 is region of discharge, and 405 is insulating material.
Fig. 6 is the application of rotary type convergent-divergent channel design at coaxial type atmospheric radio-frequency discharging cold plasma generator region of discharge.Correspondingly, the coaxial type cold plasma generator side structure cutaway view that adopts the design of this convergent-divergent channel design as shown in Figure 7, wherein 601 is interior electrode, 602 is external electrode, 603 is cylindrical convergent-divergent passage, 604 is region of discharge, 605 is insulator.
Fig. 8 is the application of rotary type convergent-divergent channel design in coaxial type atmospheric radio-frequency discharging cold plasma generator exit.Correspondingly, shown in Fig. 9,10 and 11, wherein 701 is external electrode respectively for the coaxial type cold plasma generator side structure cutaway view, front view and the cross section view thereof that adopt the design of this convergent-divergent channel design, and 702 is interior electrode, 703 is cylindrical convergent-divergent passage, and 704 is region of discharge.
Fig. 9 is for adopting the atmosphere cold plasma generator side structure cutaway view of scaling type channel design, and Figure 10 and 11 is respectively the front view and the cross section view thereof of this generator, and profile position is between 702 and 704.
With reference to Fig. 9,705 is insulating material, and electrode 702 passes 705 in the radio frequency, with external electrode 701 combinations.Internal and external electrode gap 704 is a region of discharge.Convergent-divergent passage 703 links to each other with external electrode 701.Gas enters internal and external electrode gap 704 by air inlet and discharges, and cold plasma forms swiftly flowing cold-plasma jet by spraying from generator exports behind the scaling type passage.
Figure 13 is for adopting the array type cold plasma generator schematic diagram (adopting the natural cooling mode) that is made of a plurality of plate cold plasma generators of scaling type channel design.
Figure 14 is for adopting the array type cold plasma generator schematic diagram (adopting the gas cooled mode) that is made of a plurality of plate cold plasma generators of scaling type channel design.
The present invention is applied to the atmospheric radio-frequency discharging cold plasma generator with the scaling type channel design, steady operation under atmospheric pressure, and its advantage is:
(1) adopt radio-frequency power supply (K of 13.56MHz times, K=0.5～2.0) under atmospheric pressure to form even, stable, swiftly flowing cold-plasma jet;
(2) gas flow temperature that does not more adopt this scaling type channel design design to obtain from the cold-plasma jet temperature of generator exports ejection is low;
(3) because the flowing velocity of cold-plasma jet is higher, therefore, improve the spatial movement distance of active particle in the jet greatly, strengthened the useful space sphere of action of active particle.
(4) contain active particle or particle group in Pen Chu the jet;
(5) not only can also add other reacting gas or the liquid component of proper proportion with helium or argon gas as working gas.
(6) directly adopt radio-frequency power supply to encourage discharge, the root-mean-square value of puncture voltage is being generally 100～1000 volts, and the puncture voltage root-mean-square value of dielectric barrier discharge that is operated in KHz frequency magnitude is usually all kilovolt magnitude (or higher).
(7) flexible expansion as required realizes the large-area applications of cold plasma easily.
(8) structure of Cai Yonging is convenient to practical application.
The present invention is applied to the atmospheric radio-frequency discharging cold plasma generator with the scaling type channel design, can produce flowing velocity cold-plasma jet higher, that contain active particle.Compare with the cold plasma generator that does not adopt the design of this kind scaling type channel design, because after adopting scaling type channel design proposed by the invention, the useful space move distance of active particle and useful space sphere of action significantly increase in the formed cold-plasma jet, therefore, the proposition of this technology will promote the cold plasma technology widely at plasma etching, thin film deposition, the biochemical cleaning, sterilization, air cleaning, waste disposal, disease treatment, the practical application in fields such as material surface modifying shows that it is efficient, disposal ability fast.
Scaling type channel design design proposed by the invention can also be used to be in atmosphere pressure discharging cold plasma generators other frequency range, other form on principle, in order to improve the flowing velocity of the cold-plasma jet that is produced.
Table 1 rotary type convergent-divergent passage typical calculation result
| Operating mode | Go out port radius (mm) | Throat radius (mm) | Gas flow (g/s) | Exit flow speed (m/s) | Cylindrical channel exit flow speed (m/s) |
| 1 | 5 | 3 | 4 | 296 | 286 |
| 2 | 5 | 2 | 4 | 347 | 286 |
| 3 | 8 | 2 | 3 | 138 | 84 |
| 4 | 8 | 2 | 2 | 126 | 56 |
| 5 | 8 | 1 | 1 | 108 | 28 |
| 6 | 5 | 1 | 2 | 183 | 143 |
Claims (8)
1. based on the atmosphere pressure discharging cold plasma generators of convergent-divergent channel design, it is characterized in that described generator is based on the plate atmosphere pressure discharging cold plasma generators of plate convergent-divergent channel design, contains:
Be connected to the pair of electrodes of radio-frequency power supply, constitute, the insulator that supports usefulness is arranged in the middle of this electrode by upper and lower two flat boards;
Plate convergent-divergent channel design is formed between described upper and lower two flat boards, and described structure is connected successively and formed by the compression unit, throat, the extension that link to each other with air inlet.
2. the atmosphere pressure discharging cold plasma generators based on the convergent-divergent channel design according to claim 1 is characterized in that, described plate convergent-divergent passage is positioned at the air inlet place or the place, gas outlet of described generator.
3. based on the atmosphere pressure discharging cold plasma generators of convergent-divergent channel design, it is characterized in that described generator is based on the coaxial type atmosphere pressure discharging cold plasma generators of rotary type convergent-divergent channel design, contains:
Interior electrode connects radio-frequency power supply;
Insulating support is coated at described interior electrode;
External electrode is coated at described insulating support and ground connection, this external electrode side direction or axially have air inlet;
Rotary type convergent-divergent passage is formed between the described inside and outside electrode compression unit, throat and the extension of passage and connects successively and form by being connected to.
4. the atmosphere pressure discharging cold plasma generators based on the convergent-divergent channel design according to claim 3, it is characterized in that, described rotary type convergent-divergent channel design is positioned at the exit of described generator, and described to be positioned at inside and outside interelectrode passage be region of discharge.
5. the atmosphere pressure discharging cold plasma generators based on the convergent-divergent channel design according to claim 3, it is characterized in that, described rotary type convergent-divergent passage is positioned at region of discharge, the end of electrode is inserted in the compression unit in described, between the inwall of interior electrode and compression unit, also form passage, and described inside and outside electric discharge between electrodes district forms the inlet channel of the air inlet that is connected in described compression unit place for discharge usefulness.
6. based on the atmosphere pressure discharging cold plasma generators of convergent-divergent channel design, it is characterized in that described generator is based on the plate atmosphere pressure discharging cold plasma generators of the rotary type convergent-divergent channel design at this generator air inlet place, contains:
Rotary type convergent-divergent passage is connected successively by the compression unit, throat and the extension that connect plasma working gas air inlet and to form;
Plate electrode is made of interior electrode and external electrode, has air inlet at the opposite position of inside and outside electrode; The inside and outside electrode of this plate electrode is fixed on the position of described extension outlet successively.
7. based on the atmosphere pressure discharging cold plasma generators of convergent-divergent channel design, it is characterized in that described generator is based on the plate atmosphere pressure discharging cold plasma generators of the square convergent-divergent channel design of this generator import department, contains:
Square convergent-divergent passage is connected successively by the compression unit, throat and the extension that connect cold plasma working gas air inlet and to form;
Plate electrode is made of interior electrode and external electrode, and the inside and outside electrode in this plate electrode is fixed on the exit of described extension successively, has air inlet in the relevant position of inside and outside electrode.
8. according to the described generator array of forming based on the atmosphere pressure discharging cold plasma generators of convergent-divergent channel design in any one claim in claim 1 or 3 or 6 or 7, it is characterized in that containing:
The cartridge type shell has the import and export of radio-frequency power supply connector, cold plasma working gas air inlet and coolant on housing;
Generator array is made up of single described atmosphere pressure discharging cold plasma generators based on the convergent-divergent channel design, connects radio-frequency power supply after the end parallel connection of the electrode of each generator, and the other end is ground connection after parallel connection; On each generator, have the air inlet of described cold plasma working gas of side direction or axial corresponding air inlet; Be loaded in the cartridge type shell in the described generator array integral body.
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| CN101652016B (en) * | 2009-08-27 | 2011-12-28 | 中国科学技术大学 | Constant-pressure linear cold-plasma jet generating device |
| CN102382763A (en) * | 2011-12-20 | 2012-03-21 | 北京思清源生物科技有限公司 | Plasma microbial mutagenic breeding equipment |
| CN107509298B (en) * | 2017-09-28 | 2024-04-05 | 博奥生物集团有限公司 | Array type large-area cold plasma generator |
| CN113438791A (en) * | 2021-07-30 | 2021-09-24 | 西北工业大学 | Plasma oscillation jet generator for treating skin cancer cells |
| CN113597078B (en) * | 2021-08-24 | 2022-06-28 | 上海交通大学 | Multi-channel capacitive coupling type plasma jet device and working method |
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| CN200976707Y (en) * | 2006-02-24 | 2007-11-14 | 清华大学 | Scaling channel structure based atmosphere pressure discharging cold plasma generators and array |
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- 2006-02-24 CN CNB2006100113630A patent/CN100484361C/en active Active
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|---|---|---|---|---|
| CN2604847Y (en) * | 2003-02-26 | 2004-02-25 | 王守国 | Atmospheric radio-frequency cylinder injective cold plasma generator |
| CN1525803A (en) * | 2003-02-27 | 2004-09-01 | 王守国 | Normal pressure radio frequency and DC mixed type cold plasma system and spray gun thereof |
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Application publication date: 20060802 Assignee: WUXI TMAXTREE BIOTECHNOLOGY CO., LTD. Assignor: WUXI RESEARCH INSTITUTE OF APPLIED TECHNOLOGIES, TSINGHUA UNIVERSITY Contract record no.: 2016990000548 Denomination of invention: Atmospheric discharging cold plasma generator and array based on contraction and enlargement channel structure Granted publication date: 20090429 License type: Exclusive License Record date: 20161228 |
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